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1. 发明申请

US20100147684A1 ULTRA-SENSITIVE GAS SENSOR USING OXIDE SEMICONDUCTOR NANOFIBER AND METHOD OF FABRICATING THE SAME 审中-公开
标题翻译：使用氧化物半导体纳米纤维的超声波气体传感器及其制造方法
公开(公告)号：US20100147684A1
公开(公告)日：2010-06-17
申请号：US12503647
申请日：2009-07-15
申请人： Jin Ah PARK , Su Jae Lee , Jae Hyun Moon , Tae Hyoung Zhung
发明人： Jin Ah PARK , Su Jae Lee , Jae Hyun Moon , Tae Hyoung Zhung
IPC分类号： G01N27/26 , B05D5/12
CPC分类号： G01N27/127
摘要： An ultra-sensitive gas sensor using semiconductor oxide nanofibers and a method of fabricating the same are provided. The gas sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a semiconductor metal oxide nanofibers layer formed on the metal electrode and having nanoparticles of high sensitivity coated thereon. The method of fabricating a semiconductor oxide nanofibers gas sensor includes fabricating an oxide using a solution for electrospinning, electrospinning the solution, performing an annealing process to form an oxide semiconductor nanofiber, and partially coating a nano-sized metal oxide or metal catalyst particle having high sensitivity to a specific gas on a surface of the nanofiber having a large specific surface area. As a result, a semiconductor oxide nanofibers gas sensor having ultra sensitivity, high selectivity, fast response and long-term stability can be fabricated.
摘要翻译：提供了使用半导体氧化物纳米纤维的超灵敏气体传感器及其制造方法。气体传感器包括绝缘基板，形成在绝缘基板上的金属电极和形成在金属电极上并具有高敏感度的纳米颗粒的半导体金属氧化物纳米纤维层。制造半导体氧化物纳米纤维气体传感器的方法包括使用静电纺丝溶液，静电纺丝溶液制造氧化物，进行退火处理以形成氧化物半导体纳米纤维，并部分涂覆具有高的氧化物半导体纳米纤维的纳米尺寸的金属氧化物或金属催化剂颗粒对具有大比表面积的纳米纤维的表面上的特定气体的敏感性。结果，可以制造具有超灵敏度，高选择性，快速响应和长期稳定性的半导体氧化物纳米纤维气体传感器。

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