会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system
    • 平版印刷设备,镜子元件,设备制造方法和光束传送系统
    • US07130023B2
    • 2006-10-31
    • US10731429
    • 2003-12-10
    • Hako BotmaEwoud Vreugdenhil
    • Hako BotmaEwoud Vreugdenhil
    • G03B27/72G03B27/42G03B27/54G02B5/30
    • G03F7/70066G03F7/70566
    • A lithographic projection apparatus includes a radiation system for providing a projection beam of radiation, a support structure for supporting a patterning device, the patterning device serving to pattern the projection beam according to a desired pattern, a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, an illumination system for conditioning the beam of radiation beam so as to provide a conditioned radiation beam so as to be able to illuminate said patterning means, and a beam delivery system including redirecting elements for redirecting and delivering the projection beam from the radiation system to the illumination system. The radiation beam is arranged to have a predetermined polarization state and the redirecting elements are arranged to provide a minimum radiation loss in relation to the predetermined polarization state of the radiation beam.
    • 光刻投影设备包括用于提供投影辐射束的辐射系统,用于支撑图案形成装置的支撑结构,用于根据期望图案对投影光束进行图案化的图案形成装置,用于保持基板的基板台, 用于将图案化的光束投影到基板的目标部分上的系统,用于调节辐射束束的照明系统,以便提供调节的辐射束以便能够照亮所述图案形成装置;以及光束传送系统,包括重定向 将投射光束从辐射系统重定向并传送到照明系统的元件。 辐射束被布置成具有预定的偏振状态,并且重定向元件被布置成相对于辐射束的预定偏振状态提供最小的辐射损失。
    • 8. 发明授权
    • Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method
    • 照明组件,提供辐射束的方法,光刻投影装置和装置的制造方法
    • US07116400B2
    • 2006-10-03
    • US10858409
    • 2004-06-02
    • Hako Botma
    • Hako Botma
    • G03B27/42
    • G03F7/70158G03F7/70141
    • The invention relates to an illumination assembly, including a beam expander being arranged for receiving from a radiation source a radiation beam directed in a first direction (z) and for expanding the beam with a first magnification factor in a second direction (x) and with a second magnification factor in a third direction (y). The first, second and third directions being substantially mutually orthogonal. The illumination assembly further includes a beam splitter that is arranged for splitting the radiation beam in two split radiation beams split in at least one of the second and third direction, the propagation direction of the split radiation beams being substantially in the first direction. The beam splitter is further arranged for delivering the split radiation beams to the beam expander, of which at least one of the magnification factors is adjustable.
    • 本发明涉及一种照明组件,其包括光束扩展器,其布置成用于从辐射源接收沿第一方向(z)指向的辐射束,并且用于沿第二方向(x)以第一放大系数扩展光束,并且 第三方向(y)的第二放大系数。 第一,第二和第三方向基本上相互正交。 照明组件还包括分束器,其被布置成用于将辐射束分裂成分成第二和第三方向中的至少一个的两个分裂的辐射束,分束辐射束的传播方向基本上在第一方向上。 分束器还被布置成用于将分束辐射束传送到扩束器,其中至少一个放大因子是可调节的。