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1. 发明授权

US06853475B2 Wafer defect detection system with traveling lens multi-beam scanner 有权
标题翻译：带移动透镜多光束扫描仪的晶圆缺陷检测系统
公开(公告)号：US06853475B2
公开(公告)日：2005-02-08
申请号：US10617449
申请日：2003-07-11
申请人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
发明人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
IPC分类号： G01B11/30 , G01N21/89 , G01N21/95 , G01N21/956 , H01L21/66 , G02F1/11
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8825 , G02B21/002 , G02B21/125
摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.
摘要翻译：用于检查样本的系统，例如使用激光源提供光束的半导体晶片。光束被施加到具有有源区域并且响应于RF输入信号的移动透镜声光器件，以在有源区域中选择性地生成多个行进透镜。移动透镜声光装置可操作以在每个所生成的行进透镜的各个焦点处接收光束并产生多个飞点光束。一种具有多个检测器部分的光检测器单元，每个检测器部分具有多个光检测器和用于并行接收来自多个光检测器的输入的至少一个多级存储装置，用于产生可用的扫描数据。存储在每个存储设备中的信息从多个阶段同时连续地读出。

2. 发明授权

US07053395B2 Wafer defect detection system with traveling lens multi-beam scanner 有权
公开(公告)号：US07053395B2
公开(公告)日：2006-05-30
申请号：US10617448
申请日：2003-07-11
申请人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
发明人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8825 , G02B21/002 , G02B21/125
摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

3. 发明授权

US06809808B2 Wafer defect detection system with traveling lens multi-beam scanner 有权
公开(公告)号：US06809808B2
公开(公告)日：2004-10-26
申请号：US10103560
申请日：2002-03-22
申请人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
发明人： Haim Feldman , Emanuel Elyasaf , Nissim Elmaliach , Ron Naftali , Boris Golberg , Silviu Reinhorn
IPC分类号： G01N2100
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2021/8825 , G02B21/002 , G02B21/125
摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

4. 发明授权

US06750436B2 Focus error detection apparatus and method having dual focus error detection path 有权
标题翻译：具有双重焦点误差检测路径的聚焦误差检测装置和方法
公开(公告)号：US06750436B2
公开(公告)日：2004-06-15
申请号：US10192220
申请日：2002-07-09
申请人： Haim Feldman , Boris Golberg , Alexander Libinson
发明人： Haim Feldman , Boris Golberg , Alexander Libinson
IPC分类号： G02B704
CPC分类号： G02B7/34
摘要： An apparatus and method for focus error detection operable to receive light reflected from an inspected object and to determine a focus error on a surface of the inspected object, the focus error detection apparatus including optics and at least one detection apparatus, whereas the optics and the at least one detection apparatus define at least a first focus error detection path and a second focus error detection path, the first focus error detection path detects focus errors with a greater sensitivity than the second focus error detection path, while the second focus error detection path detects focus errors over a greater focus error range than the first focus error detection path.
摘要翻译：一种用于聚焦误差检测的装置和方法，其可操作以接收从检查对象反射的光并确定被检查对象的表面上的聚焦误差，所述聚焦误差检测装置包括光学元件和至少一个检测装置，而光学元件和至少一个检测装置限定至少第一聚焦误差检测路径和第二聚焦误差检测路径，第一聚焦误差检测路径以比第二聚焦误差检测路径更大的灵敏度检测聚焦误差，而第二聚焦误差检测路径在比第一个聚焦误差检测路径更大的聚焦误差范围内检测到聚焦误差。

5. 发明授权

US06469784B2 Optical inspection method and apparatus utilizing a variable angle design 有权
公开(公告)号：US06469784B2
公开(公告)日：2002-10-22
申请号：US09941659
申请日：2001-08-30
申请人： Boris Golberg , Amir Komem , Ron Naftali , Gilad Almogy
发明人： Boris Golberg , Amir Komem , Ron Naftali , Gilad Almogy
IPC分类号： G01N2100
CPC分类号： G01N21/94
摘要： Method and apparatus for optical inspection of an article are presented. The apparatus comprises an illumination unit and at least one detection unit. The illumination unit generates an incident beam and directs it onto a predetermined region of the article. The detection unit includes a light collection system and a detector. The light collection system collects light scattered from the illuminated region with a predetermined constant maximum collection angle, and utilizes a variable angle design for selectively selecting from collected light at least one light component propagating with a solid angle segment of the maximum collection angle, and directing it to the detector.

6. 发明授权

US07315364B2 System for inspecting a surface employing configurable multi angle illumination modes 失效
标题翻译：用于使用可配置的多角度照明模式检查表面的系统
公开(公告)号：US07315364B2
公开(公告)日：2008-01-01
申请号：US11123454
申请日：2005-05-05
申请人： Adam Baer , Boris Golberg
发明人： Adam Baer , Boris Golberg
IPC分类号： G01N21/00
CPC分类号： G01N21/9501
摘要： Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.
摘要翻译：用于检查表面的装置，该装置包括具有中心和周边区域的物镜，其被定位成将输入光束通过中心区域沿法向方向聚焦到该表面上。该装置还包括第一潜望镜，其可定位以使输入光束转向以通过物镜的周边区域，由此物镜将倾斜方向上的输入光束聚焦在该表面上。还有一个第二潜望镜，其可定位成在经过反射的辐射通过物镜的周边区域之后沿倾斜方向捕获从表面反射的辐射。

7. 发明授权

US07403336B2 Broadband imaging system and method 有权
标题翻译：宽带成像系统及方法
公开(公告)号：US07403336B2
公开(公告)日：2008-07-22
申请号：US11554468
申请日：2006-10-30
申请人： Boris Golberg , Benjamin Cohen
发明人： Boris Golberg , Benjamin Cohen
IPC分类号： G02B27/10 , G03B27/42
CPC分类号： G02B27/14 , G02B27/1006 , G02B27/1013 , G02B27/141 , G02B27/145
摘要： A method and system are presented for use in imaging broadband light. A plurality of substantially narrowband light components of the broadband light are passed through an array of spectral imaging modules. Each of the spectral imaging modules is configured for imaging light of a respective substantially narrow spectral band with minimal aberrations. This technique provides for producing an image with minimal aberrations over the entire spectral range of the broadband light.
摘要翻译：提出了一种用于成像宽带光的方法和系统。宽带光的多个基本窄的光分量通过光谱成像模块的阵列。每个光谱成像模块被配置用于对具有最小像差的相应的基本窄的光谱带的光进行成像。该技术提供了在宽带光的整个光谱范围内产生具有最小像差的图像。

8. 发明申请

US20060087648A1 System for inspecting a surface employing configurable multi angle illumination modes 失效
标题翻译：用于使用可配置的多角度照明模式检查表面的系统
公开(公告)号：US20060087648A1
公开(公告)日：2006-04-27
申请号：US11123454
申请日：2005-05-05
申请人： Adam Baer , Boris Golberg
发明人： Adam Baer , Boris Golberg
IPC分类号： G01N21/88
CPC分类号： G01N21/9501
摘要： Apparatus for inspection of a surface, the apparatus including an objective having central and peripheral regions, which is positioned to focus an input beam through the central region in a normal direction onto the surface. The apparatus further includes a first periscope which is positionable to divert the input beam so as to pass through the peripheral region of the objective, whereby the objective focuses the input beam in an oblique direction onto the surface. There is also a second periscope which is positionable to capture radiation reflected from the surface in the oblique direction after passage of the reflected radiation through the peripheral region of the objective.
摘要翻译：用于检查表面的装置，该装置包括具有中心和周边区域的物镜，其被定位成将输入光束通过中心区域沿法向方向聚焦到该表面上。该装置还包括第一潜望镜，其可定位以使输入光束转向以通过物镜的周边区域，由此物镜将倾斜方向上的输入光束聚焦在该表面上。还有一个第二潜望镜，其可定位成在经过反射的辐射通过物镜的周边区域之后沿倾斜方向捕获从表面反射的辐射。

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