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    • 5. 发明申请
    • ANTIREFLECTIVE COATINGS FOR VIA FILL AND PHOTOLITHOGRAPHY APPLICATIONS AND METHODS OF PREPARATION THEREOF
    • 用于通过薄膜和光刻机应用的抗反射涂层及其制备方法
    • WO2005049681A3
    • 2006-04-20
    • PCT/US2004038517
    • 2004-11-17
    • HONEYWELL INT INCLI BOKENNEDY JOSEPHIWAMOTO NANCYLU VICTORLEUNG ROGERFRADKIN MARK AHUSSEIN MAKAREM AGOODNER MICHAEL D
    • LI BOKENNEDY JOSEPHIWAMOTO NANCYLU VICTORLEUNG ROGERFRADKIN MARK AHUSSEIN MAKAREM AGOODNER MICHAEL D
    • G03C1/825C08G20060101C08L83/04C09D183/04C09D183/08G03C1/83G03F7/09
    • C09D183/04C09D183/08G03F7/0751G03F7/0752G03F7/091
    • An absorbing composition is described herein that includes at least one inorganic­based compound, at least one absorbing compound, and at least one material modification agent. In addition, methods of making an absorbing composition are also described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) allowing the reaction mixture to form the absorbing composition at room temperature. Another method of making an absorbing composition includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, an acid/water mixture, and one or more solvents to form a reaction mixture; and b) heating the reaction mixture to form the absorbing composition. Yet another method of making an absorbing composition is described that includes: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, and one or more solvents to form a reaction mixture, wherein the at least one material modification agent comprises at least one acid and water; and b) heating the reaction mixture to form an absorbing material, a coating or a film. In other methods of making an absorbing composition described herein, those methods include: a) combining at least one inorganic-based compound, at least one absorbing compound, at least one material modification agent, and one or more solvents to form a reaction mixture, wherein the at least one material modification agent comprises at least one acid and water; and b) allowing the reaction mixture to form an absorbing material, a coating or a film.
    • 本文描述的吸收组合物包括至少一种无机基化合物,至少一种吸收化合物和至少一种材料改性剂。 此外,还描述了制备吸收组合物的方法,其包括:a)将至少一种无机基化合物,至少一种吸收化合物,至少一种材料改性剂,酸/水混合物和一种或多种溶剂 形成反应混合物; 和b)使反应混合物在室温下形成吸收组合物。 制备吸收组合物的另一种方法包括:a)将至少一种无机基化合物,至少一种吸收化合物,至少一种材料改性剂,酸/水混合物和一种或多种溶剂组合以形成反应混合物; 和b)加热反应混合物以形成吸收组合物。 描述了制备吸收组合物的另一种方法,其包括:a)将至少一种无机基化合物,至少一种吸收化合物,至少一种材料改性剂和一种或多种溶剂组合以形成反应混合物,其中 至少一种材料改性剂包含至少一种酸和水; 和b)加热反应混合物以形成吸收材料,涂层或膜。 在制备本文所述的吸收组合物的其它方法中,这些方法包括:a)将至少一种无机基化合物,至少一种吸收化合物,至少一种材料改性剂和一种或多种溶剂组合以形成反应混合物, 其中所述至少一种材料改性剂包含至少一种酸和水; 和b)使反应混合物形成吸收材料,涂层或膜。