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1. 发明申请

WO2009006118A2 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 审中-公开
标题翻译：从机电功能分离的光电功能微电子机械装置
公开(公告)号：WO2009006118A2
公开(公告)日：2009-01-08
申请号：PCT/US2008068061
申请日：2008-06-24
申请人： QUALCOMM MEMS TECHNOLOGIES INC , ENDISCH DENIS , MIGNARD MARC
发明人： ENDISCH DENIS , MIGNARD MARC
IPC分类号： G02B26/00 , B81B3/00
CPC分类号： G02B26/001 , B81B3/0083 , B81B2201/047
摘要： A microelectromechanical (MEMS) device (800) comprises a substrate (20) having a top surface (88), a movable element (810) over the substrate (20), and an actuation electrode (82). The movable element (810) comprises a deformable layer (34) and a reflective element (814) mechanically coupled to the deformable layer (34). The reflective element (814) includes a reflective surface (92). The actuation electrode (82) is disposed laterally from the reflective surface (92). The movable element (810) is responsive to a voltage difference applied between the actuation electrode (82) and the movable element (810) by moving in a direction generally perpendicular to the top surface (88) of the substrate (20).
摘要翻译：微机电（MEMS）装置（800）包括具有顶表面（88），衬底（20）上的可移动元件（810）和致动电极（82）的衬底（20）。可移动元件（810）包括可变形层（34）和机械耦合到可变形层（34）的反射元件（814）。反射元件（814）包括反射表面（92）。致动电极（82）从反射表面（92）侧向地设置。可移动元件（810）响应于通常在垂直于衬底（20）的顶表面（88）的方向上移动而施加在致动电极（82）与可移动元件（810）之间的电压差。

2. 发明申请

WO2009006118A3 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 审中-公开
公开(公告)号：WO2009006118A3
公开(公告)日：2009-01-08
申请号：PCT/US2008/068061
申请日：2008-06-24
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , ENDISCH, Denis , MIGNARD, Marc
发明人： ENDISCH, Denis , MIGNARD, Marc
IPC分类号： G02B26/00 , B81B3/00
摘要： A microelectromechanical (MEMS) device (800) comprises a substrate (20) having a top surface (88), a movable element (810) over the substrate (20), and an actuation electrode (82). The movable element (810) comprises a deformable layer (34) and a reflective element (814) mechanically coupled to the deformable layer (34). The reflective element (814) includes a reflective surface (92). The actuation electrode (82) is disposed laterally from the reflective surface (92). The movable element (810) is responsive to a voltage difference applied between the actuation electrode (82) and the movable element (810) by moving in a direction generally perpendicular to the top surface (88) of the substrate (20).

3. 发明申请

WO2004077529A3 EDGE BEAD REMOVAL FOR SPIN-ON MATERIALS CONTAINING LOW VOLATILITY SOLVENTS USING CARBON DIOXIDE CLEANING 审中-公开
公开(公告)号：WO2004077529A3
公开(公告)日：2004-09-10
申请号：PCT/US2004/006146
申请日：2004-02-26
申请人： HONEYWELL INTERNATIONAL INC. , ENDISCH, Denis
发明人： ENDISCH, Denis
IPC分类号： H01L21/8238
摘要： Methods are provided for removing edge beads from spin-on films. A spin-on film is removed from a region of a surface of a spin-coated substrate adjacent to an edge of the surface by spinning the spin-coated substrate, expanding a fluid through a nozzle to form a cryogenic aerosol stream against the spin-on film in the region as the substrate spins. In another aspect of the invention, a film is formed on a surface of a substrate by dispensing a liquid composition onto the surface, spinning the substrate to distribute the liquid composition to form a substantially uniform film on the surface, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and directing the cryogenic aerosol stream against the film in a region of the surface adjacent to an edge of the surface as the substrate spins. The film may include an alkoxysilane and a low volatility solvent. The fluid may consists essentially of liquid carbon dioxide. A spin-on film containing low volatility solvents does not grow back into the region from which the film was removed, the edge bead removal process time can be reduced to less than about 10 seconds, and the volume of waste solvent is reduced.

4. 发明申请

WO03021636B1 ELECTRONIC DEVICES AND METHODS OF MANUFACTURE 审中-公开
标题翻译：电子设备及其制造方法
公开(公告)号：WO03021636B1
公开(公告)日：2003-12-04
申请号：PCT/US0226780
申请日：2002-08-23
申请人： HONEYWELL INT INC , ENDISCH DENIS , LEVERT JOSEPH
发明人： ENDISCH DENIS , LEVERT JOSEPH
IPC分类号： H01L21/76 , H01L21/312 , H01L21/316 , H01L21/762 , H01L29/00
CPC分类号： H01L21/76224 , H01L21/02126 , H01L21/02282 , H01L21/3121 , H01L21/316 , H01L21/31612
摘要： An electronic device (110B) comprises a substrate (110B) with a trench (120B) having a lower (121B) portion and a top portion (122B). The lower portion (121B) of the trench (120B) is filled with a cured spin-on compound (130B), while the top portion (122B) is filled with a chemical vapor-deposited compound (140B). Preferably, the chemical vapor-deposited compound (140B) has a surface (141B) that is substantially coplanar with the surface (111B) of the substrate (110B).
摘要翻译：电子设备（110B）包括具有下部（121B）部分和顶部部分（122B）的沟槽（120B）的衬底（110B）。沟槽（120B）的下部（121B）填充有固化的旋涂化合物（130B），而顶部（122B）填充有化学气相沉积化合物（140B）。优选地，化学气相沉积化合物（140B）具有与基底（110B）的表面（111B）基本上共面的表面（141B）。

5. 发明申请

WO2003021636A2 ELECTRONIC DEVICES AND METHODS OF MANUFACTURE 审中-公开
标题翻译：电子设备及其制造方法
公开(公告)号：WO2003021636A2
公开(公告)日：2003-03-13
申请号：PCT/US2002/026780
申请日：2002-08-23
申请人： HONEYWELL INTERNATIONAL INC. , ENDISCH, Denis , LEVERT, Joseph
发明人： ENDISCH, Denis , LEVERT, Joseph
IPC分类号： H01L
CPC分类号： H01L21/76224 , H01L21/02126 , H01L21/02282 , H01L21/3121 , H01L21/316 , H01L21/31612
摘要： An electronic device comprises a substrate with a trench having a lower portion and a top portion. The lower portion of the trench is filled with a cured spin-on compound, while the top portion is filled with a chemical vapor-deposited compound. Preferably, the chemical vapor-deposited compound has a surface that is substantially coplanar with the surface of the substrate. Particularly preferred methods of fabricating such devices include a step in which a trench is formed in the substrate, and in which a first compound is deposited in the trench by spin-on deposition. The first compound is partially removed from the trench to a level below the surface of the substrate, and in a further step, a second compound is deposited onto the upper surface of the first compound by chemical vapor deposition.
摘要翻译：电子设备包括具有沟槽的基底，该沟槽具有下部和顶部。沟槽的下部填充有固化的旋涂化合物，而顶部填充有化学气相沉积化合物。优选地，化学气相沉积化合物具有与基底的表面基本上共面的表面。制造这种器件的特别优选的方法包括其中在衬底中形成沟槽的步骤，并且其中第一化合物通过旋涂沉积沉积在沟槽中。将第一化合物从沟槽部分地除去到基底表面以下的水平，并且在另一步骤中，通过化学气相沉积将第二化合物沉积在第一化合物的上表面上。

6. 发明申请

WO2012125415A1 SEAL ANCHOR STRUCTURES 审中-公开
标题翻译：密封锚结构
公开(公告)号：WO2012125415A1
公开(公告)日：2012-09-20
申请号：PCT/US2012/028319
申请日：2012-03-08
申请人： 1/2QUALCOMM MEMS TECHNOLOGIES, INC. , ENDISCH, Denis
发明人： ENDISCH, Denis
IPC分类号： G02B26/00 , G02B26/08 , B81C1/00 , B81B7/00 , G09G3/34
CPC分类号： G02B26/001 , B81B2201/042 , B81C1/00269 , B81C2203/0109 , B81C2203/019 , G02B26/0841 , G09G3/3466 , G09G2300/08 , H01L2924/0002 , H01L2924/00
摘要： This disclosure provides systems, methods and apparatus for forming raised anchor structures in a seal area. In one aspect, the anchor structures include a receiving space. Sealant can flow into the receiving spaces. In one aspect the receiving space is formed by an overhang section. In one aspect, the overhang can be formed in part by removing a sacrificial layer. The raised anchor structures in the seal area can improve adhesion between two plates by acting as mechanical hooks, further securing the plates together.
摘要翻译：本公开提供了用于在密封区域中形成凸起锚结构的系统，方法和装置。一方面，锚结构包括接收空间。密封胶可以流入接收空间。在一个方面，接收空间由突出部分形成。在一个方面，突出部分可以通过去除牺牲层而部分地形成。密封区域中的凸起的锚结构可以通过作为机械钩来改善两个板之间的粘合，进一步将板固定在一起。

7. 发明申请

WO2009006120A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 审中-公开
标题翻译：具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：WO2009006120A1
公开(公告)日：2009-01-08
申请号：PCT/US2008/068063
申请日：2008-06-24
申请人： IDC, LLC , CHUI, Clarence , CUMMINGS, William , GALLY, Brian, J. , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun , CHIANG, Chih-wei , ENDISCH, Denis
发明人： CHUI, Clarence , CUMMINGS, William , GALLY, Brian, J. , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun , CHIANG, Chih-wei , ENDISCH, Denis
IPC分类号： G02B26/00 , B81B3/00 , B81C1/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device (1300) includes a substrate (20), a movable element (1340) over the substrate (20), and an actuation electrode (142) above the movable element (1340). The movable element (1340) includes a deformable layer (1302) and a reflective element (1314), The deformable layer (1302) is spaced from the reflective element (1314).
摘要翻译：微机电（MEMS）装置（1300）包括衬底（20），在衬底（20）上方的可移动元件（1340）和可动元件（1340）上方的致动电极（142）。可移动元件（1340）包括可变形层（1302）和反射元件（1314）。可变形层（1302）与反射元件（1314）间隔开。

8. 发明申请

WO2006101578A8 VAPOR PHASE TREATMENT OF DIELECTRIC MATERIALS 审中-公开
标题翻译：电介质材料的蒸汽相处理
公开(公告)号：WO2006101578A8
公开(公告)日：2008-02-07
申请号：PCT/US2006001561
申请日：2006-01-17
申请人： HONEYWELL INT INC , BHANAP ANIL S , GOLECKI ILAN , ENDISCH DENIS H , DANIELS BRIAN J , BURNHAM KIKUE S , ROTH ROBERT R
发明人： BHANAP ANIL S , GOLECKI ILAN , ENDISCH DENIS H , DANIELS BRIAN J , BURNHAM KIKUE S , ROTH ROBERT R
IPC分类号： H01L21/316 , C23C16/40 , C23C16/56 , H01L21/3105
CPC分类号： H01L21/02126 , C23C16/56 , H01L21/02203 , H01L21/02216 , H01L21/02219 , H01L21/02222 , H01L21/02282 , H01L21/02337 , H01L21/02359 , H01L21/3105 , H01L21/76814
摘要： The invention concerns a method for applying a surface modification agent composition for organosilicat
摘要翻译：本发明涉及一种应用有机硅酸盐的表面改性剂组合物的方法

9. 发明申请

WO2005052989A3 DIELECTRIC FILMS FOR NARROW GAP-FILL APPLICATIONS 审中-公开
标题翻译：用于NARROW GAP-FILL应用的电介质膜
公开(公告)号：WO2005052989A3
公开(公告)日：2005-10-06
申请号：PCT/US2004033035
申请日：2004-10-06
申请人： HONEYWELL INT INC , ENDISCH DENIS , LEUNG ROGER , XIE SONGYUAN , HACKER NIGEL , DENG YANPEI
发明人： ENDISCH DENIS , LEUNG ROGER , XIE SONGYUAN , HACKER NIGEL , DENG YANPEI
IPC分类号： H01L21/316 , C08L27/14 , C23F4/04 , H01L21/31
CPC分类号： H01L21/76837 , H01L21/316
摘要： A colloidal suspension of nanoparticles composed of a dense material dispersed in a solvent is used in forming a gap-filling dielectric material with low thermal shrinkage. The dielectric material is particularly useful for pre-metal dielectric and shallow trench isolation applications. According to the methods of forming a dielectric material, the colloidal suspension is deposited on a substrate and dried to form a porous intermediate layer. The intermediate layer is modified by infiltration with a liquid phase matrix material, such as a spin-on polymer, followed by curing, by infiltration with a gas phase matrix material, followed by curing, or by curing alone, to provide a gap-filling, thermally stable, etch resistant dielectric material.
摘要翻译：使用由分散在溶剂中的致密材料构成的纳米颗粒的胶体悬浮液来形成具有低热收缩率的间隙填充介电材料。电介质材料特别适用于预金属电介质和浅沟槽隔离应用。根据形成电介质材料的方法，将胶体悬浮液沉积在基底上并干燥以形成多孔中间层。通过用液相基质材料（例如旋涂聚合物）渗透，然后通过用气相基质材料渗透，随后固化，或通过单独固化来改性中间层，从而提供间隙填充，耐热稳定的，耐蚀刻的介电材料。

10. 发明申请

WO2005052989A2 DIELECTRIC FILMS FOR NARROW GAP-FILL APPLICATIONS 审中-公开
标题翻译：用于窄间隙填充应用的介电膜
公开(公告)号：WO2005052989A2
公开(公告)日：2005-06-09
申请号：PCT/US2004/033035
申请日：2004-10-06
申请人： HONEYWELL INTERNATIONAL INC. , ENDISCH, Denis , LEUNG, Roger , XIE, Songyuan , HACKER, Nigel , DENG, Yanpei
发明人： ENDISCH, Denis , LEUNG, Roger , XIE, Songyuan , HACKER, Nigel , DENG, Yanpei
IPC分类号： H01L
CPC分类号： H01L21/02282 , H01L21/02203 , H01L21/316 , H01L21/76837
摘要： A colloidal suspension of nanoparticles composed of a dense material dispersed in a solvent is used in forming a gap-filling dielectric material with low thermal shrinkage. The dielectric material is particularly useful for pre-metal dielectric and shallow trench isolation applications. According to the methods of forming a dielectric material, the colloidal suspension is deposited on a substrate and dried to form a porous intermediate layer. The intermediate layer is modified by infiltration with a liquid phase matrix material, such as a spin-on polymer, followed by curing, by infiltration with a gas phase matrix material, followed by curing, or by curing alone, to provide a gap-filling, thermally stable, etch resistant dielectric material.
摘要翻译：使用由分散在溶剂中的致密材料组成的纳米颗粒的胶体悬浮液来形成具有低热收缩率的间隙填充介电材料。介电材料对于金属前介电和浅沟槽隔离应用特别有用。根据形成电介质材料的方法，将胶体悬浮液沉积在基底上并干燥以形成多孔中间层。中间层通过用液相基体材料例如旋涂聚合物渗透而改性，然后通过用气相基体材料渗透固化，然后固化或单独固化以提供间隙填充，热稳定的抗蚀刻介电材料。

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