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    • 8. 发明专利
    • DRY ETCHING SYSTEM
    • JP2000306889A
    • 2000-11-02
    • JP11318599
    • 1999-04-21
    • HITACHI LTD
    • KANEKIYO HIROSHISUEHIRO MITSURUFUJIMOTO TETSUOMATANO KATSUJI
    • H01L21/302C23F4/00H01L21/3065H05H1/46
    • PROBLEM TO BE SOLVED: To improve temperature adjustment for a shower plate and implement uniform diffusion of a process gas by performing dry etching, while arranging upper and lower electrodes within an etching chamber, with the upper electrode having a cooling chamber and a gas diffusion chamber formed therein and the lower electrode serving to fixedly support a wafer. SOLUTION: A high-frequency voltage is applied to an upper electrode 2 arranged within an etching chamber, and a high-frequency bias is applied to a lower electrode on which a wafer is mounted. Upon application of the high-frequency voltage to the electrode 2, electromagnetic waves are radiated within the etching chamber to generate a plasma. At this time, the electrode 2 is heated, resulting in raised temperature. Within the electrode 2, a cooling chamber 7 and a gas diffusion chamber 8 are formed and a shower plate 12 is fixed in contact with the chamber 7. Therefore, a coolant cools the chamber 7 and exchanges heat with the plate 12, whereby temperature adjustment can be made. Furthermore, a process gas is diffused uniformly within the etching chamber from nozzles 11 via entrances 10 and the chamber 8.
    • 9. 发明专利
    • DRIVING SYSTEM FOR LIQUID CRYSTAL
    • JPH06161376A
    • 1994-06-07
    • JP31162392
    • 1992-11-20
    • HITACHI LTD
    • TAKAI MASAOKANEKIYO HIROSHI
    • G02F1/133G09G3/18
    • PURPOSE:To raise the driving voltage of liquid crystal, enable the AC driving of the liquid crystal even when an NTSC signal is not inputted, and prevent the liquid crystal from being broken by detecting the input of no VD signal from a time, and internally generating a signal substituting for the VD signal and performing the AC driving of the liquid crystal. CONSTITUTION:A driver 16 which drives the liquid crystal 3 is composed of a driving IC for a fluorescent display tube or plasma display with high dielectric strength and a common driver 22 applies an AC electric field to a common transparent electrode 4 by plus/minus switching based upon the signal from a delay circuit 21. Then a VD signal detecting circuit 19 detects whether or not the VD signal is present and the driving of the driver 16 and common driver 22 is controlled with the VD signal from a dummy VD signal generating circuit 20 in the absence of the VD signal. In this constitution, the liquid crystal 3 is driven with an image signal from a camera to generate a picture. Therefore, even when there is no image signal (NTSC signal) owing to the forgetful disconnection of the camera, etc., or during the rewinding of a VTR, the AC driving of the liquid crystal 3 becomes possible by generating the dummy VD signal.