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    • 3. 发明专利
    • Apparatus for preventing electrostatic breakdown of semiconductor device
    • 防止半导体器件静电破坏的装置
    • JPS6123356A
    • 1986-01-31
    • JP14239484
    • 1984-07-11
    • Akita Denshi KkHitachi LtdHitachi Micro Comput Eng Ltd
    • TAKIGAWA AKIRAHAIJIMA MIKIOIHARA HIROSHIWATABE TOMOYUKIWASHIO KATSUYOSHIIWASAKI ISAO
    • H01L27/04H01L21/822H01L27/02H01L27/06
    • H01L27/0255
    • PURPOSE:To absorb both positive and negative surge pulses by forming an n type buried layer as a protection resistance and using a junction diode composed of the n type region and the p type diffused region. CONSTITUTION:When a forward surge pulse enters the electrode in the input terminal side, a voltage drops due to a resistance while a surge current flows into the n type buried layer 5. Thereby, an input voltage is clamped to a value which is equal to a breakdown voltage of the p-n junction diode D1 between the n type region 6a and p type region 9. Namely, holes are implanted to a low potential p type layer 9 from the n type region 6a, causing a current I1 to flow and absorbing a surge pulse. A backward surge current operates the p-n junction diode between the n type region 6a and the p type diffused layer 9 and an input voltage is clamped to a voltage (GND-VF) which is equal to a difference between the ground voltage and forward voltage VF of diode, causing electrons to be implanted to the side of p type diffused layer 9 from the n type region 6a.
    • 目的:通过形成n +型埋层作为保护电阻并使用由n +型区域和p型扩散区域构成的结二极管来吸收正和负浪涌脉冲。 构成:当正向浪涌脉冲进入输入端侧的电极时,在浪涌电流流入n +型埋层5的同时由于电阻而下降,由此,将输入电压钳位到 等于n +型区域6a和p型区域9之间的pn结二极管D1的击穿电压。即,从n +型区域6a将空穴注入到低电位p型层9中, 导致电流I1流动并吸收浪涌脉冲。 反向浪涌电流在n +型区域6a和p型扩散层9之间操作pn结二极管,并且将输入电压钳位到等于接地电压和 二极管的正向电压VF,使电子从n +型区域6a注入到p型扩散层9侧。
    • 6. 发明专利
    • Manufacture of semiconductor device
    • 半导体器件的制造
    • JPS6174366A
    • 1986-04-16
    • JP19472784
    • 1984-09-19
    • Hitachi LtdHitachi Micro Comput Eng Ltd
    • HOYA KAZUOWATABE TOMOYUKIHAIJIMA MIKIOTAKIGAWA AKIRAHAYASHI MAKOTO
    • H01L21/8226H01L21/331H01L27/082H01L29/73H01L29/732
    • H01L29/7325
    • PURPOSE:To improve the withstand voltage of a p-n-p subtransistor without increasing the manhour by a method wherein an n-type impurity of the concentration higher than that of the n-type Si layer is diffused in the n-type Si layer including the junction parts, which are formed of the n-type Si layer and the p-type diffusion layers. CONSTITUTION:An n type Si layer 2 is isolated by groove parts 3, and a region I, a region II and a region III are respectively used as a p-n-p sub-transistor forming part, an n-p-n transistor forming part and an IIL forming part. Donors are ion-implanted in the surfaces of the regions I and III, and GN (high- concentration n-type) regions II are formed. As a result, elongation of a depletion layer, which spreads from the substrate p-type layer, is reduced. Accordingly, the withstand voltage of the p-n-p sub-transistor can be improved.
    • 目的:为了提高pnp副晶体管的耐受电压,而不增加工作空间,其中浓度比n型Si层高的n型杂质扩散到包含接合部分的n型Si层中 由n型Si层和p型扩散层形成。 构成:n型Si层2被沟槽部分3隔离,区域I,区域II和区域III分别用作pnp子晶体管形成部分,npn晶体管形成部分和IIL 形成部分。 在区域I和III的表面离子注入供体,形成GN(高浓度n型)区域II。 结果,从衬底p型层扩散的耗尽层的伸长率降低。 因此,可以提高p-n-p子晶体管的耐受电压。
    • 7. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS61220449A
    • 1986-09-30
    • JP6064285
    • 1985-03-27
    • HITACHI LTDHITACHI MICROCUMPUTER ENG
    • HAIJIMA MIKIOISHIKAWA MAKOTOTAKIGAWA AKIRAKONDO SHIZUOTANIZAKI YASUNOBU
    • H01L21/822H01L21/8226H01L27/02H01L27/04H01L27/082
    • PURPOSE:To obtain a highly integrated, highly reliable device, by forming a recess part in the surface of a chip, forming a thin digital circuit in the inner part, forming a thick analog circuit at the peripheral pat in a concentrated manner, implementing high speed and high performance of the digital circuit, and implementing high withstanding voltage of the analog circuit. CONSTITUTION:An n epitaxial layer 2 is provided on a p substrate 1, in which an n layer 3 is embedded. Selective etching is performed and a recess part 4 is formed at the central part. The central part 5 of the layer 2 is thin, and a peripheral part 6 is thick. A digital element such as I L is provided at the thin central part. The impurity distribution in the cross section of a transistor in the reverse direction is formed in a steep form. An operating margin is made high and the high speed I L is implemented. Meanwhile a bipolar n-p-n transistor at a linear part is formed in the thick peripheral part 50 that enough withstanding voltage is provided. In this configuration, stepped parts due to the irregularities of the surface are reduced, and wire breakdowns are decreased. This is especially useful when an organic insulating film is formed on the surface and multilayer wiring is provided.
    • 8. 发明专利
    • Apparatus for preventing electrostatic breakdown of semiconductor
    • 防止半导体静电破坏的装置
    • JPS6123355A
    • 1986-01-31
    • JP14238984
    • 1984-07-11
    • Akita Denshi KkHitachi LtdHitachi Micro Comput Eng Ltd
    • HAIJIMA MIKIOTAKIGAWA AKIRAIHARA HIROSHIIWASAKI ISAOWATABE TOMOYUKI
    • H01L27/04H01L21/822H01L27/02H01L27/06
    • H01L27/0248
    • PURPOSE:To absorb both forward and backward surge pulses by forming an n type buried layer as a protection resistance and allowing an input pulse to escape through utilization of the forward and backward npn transistor comprising an n type semiconductor region, p type diffused region and n type diffused region. CONSTITUTION:When a forward surge pulse enters the electrode in the side of input terminal B, a voltage drops due to a resistance R while a surge current I0 flows in the n type buried layer 5. Thereby, a forward npn transistor Q1 (composed of the n type semiconductor region 6a, p type semiconductor region 9 and n type semiconductor 10) operates and a current I1 flows into the ground electrode passing through the electrode on n type diffused region 10. When a backward surge pulse enters, a negative surge current flows to the side of circuit A through the n type buried layer 5, resulting in voltage drop. Therefore, a backward npn transistor Q2 where the p type region 9 is formed as the base, the n type diffused region 10 as the collector and n type semicondutor region as the emitter operates and a current I2 flows to the side of input terminal B.
    • 目的:通过形成n +型埋层作为保护电阻并允许输入脉冲通过利用包括n +型半导体区域的正向和反向npn晶体管来逸出来吸收正向和反向浪涌脉冲, p型扩散区和n +型扩散区。 构成:当正向浪涌脉冲进入输入端子B侧的电极时,由于电阻R的电压下降,而浪涌电流I0在n +型埋层5中流动。因此,正向npn晶体管Q1 (由n型半导体区域6a,p型半导体区域9和n +型半导体10构成)工作,电流I1流入通过n +型扩散区域10上的电极的接地电极 当反向浪涌脉冲进入时,负的浪涌电流通过n +型埋层5流向电路A侧,导致电压下降。 因此,作为基极形成p型区域9的后向npn晶体管Q2,作为集电极的n +型扩散区域10和作为发射极的n +型半导体区域工作,电流I2流向 输入端B.
    • 9. 发明专利
    • Apparatus for preventing electrostatic breakdown of semiconductor device
    • 防止半导体器件静电破坏的装置
    • JPS6123354A
    • 1986-01-31
    • JP14238884
    • 1984-07-11
    • Akita Denshi KkHitachi LtdHitachi Micro Comput Eng Ltd
    • IHARA HIROSHIHAIJIMA MIKIOTAKIGAWA AKIRAWATABE TOMOYUKIIWASAKI ISAO
    • H01L27/04H01L21/822H01L27/02H01L27/06
    • H01L27/0248
    • PURPOSE:To improve an electrostatic breakdown level up to about 100V by forming the n type diffused region by diffusion of emitter as a protection resistance and by absorbing the forward and backward surge pulse by allowing an input pulse to escape to Vcc through utilization of the npn transistor consisting of such n type region, p type diffused region and n type region. CONSTITUTION:In case the forward surge pulse enters the electrode in the side of input terminal, a voltage drops due to a resistance R while a surge current Io flows into the n diffused region 10. Thereby, the backward npn transistor, where the n type diffused region 10 used as the collector, the p type diffused region 9 as the base and the n type region 6a as the emitter, operatesk. Since the emitter side is connected to a high voltage side, electrons are implanted to the p type region 9 as the base from the n type region 6a which becomes the emitter, causing a current I1 to flow in order to absorb surge pulse. When the backward surge pulse enters the electrode in the input terminal side, a current I2 flows to the input terminal side from Vcc side, absorbing a surge pulse.
    • 目的:为了通过扩散发射极作为保护电阻形成n +型扩散区域,并通过允许输入脉冲通过利用来将输入脉冲逸出到Vcc来吸收正向和反向浪涌脉冲,来提高高达约100V的静电击穿电平 由n +型晶体管组成的n +型区域,p型扩散区域和n +型区域。 构成:在正向浪涌脉冲进入输入端侧的电极的情况下,由于电阻R的电压下降,而浪涌电流Io流入n +扩散区域10.因此,后向npn晶体管,其中 用作集电极的n +型扩散区域10,作为基极的p型扩散区域9和作为发射极的n +型区域6a。 由于发射极侧连接到高电压侧,因此电子从作为发射极的n +型区域6a注入作为基极的p型区域9,导致电流I1流过以吸收浪涌脉冲 。 当反向浪涌脉冲进入输入端侧的电极时,电流I2从Vcc侧流向输入端侧,吸收浪涌脉冲。