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1. 发明专利

JPH06102929A INFORMATION PROCESSOR FOR MOVING BODY 失效
公开(公告)号：JPH06102929A
公开(公告)日：1994-04-15
申请号：JP24950692
申请日：1992-09-18
申请人： HITACHI LTD , HITACHI INSTRUMENTS ENG
发明人： SAKAMOTO SHOZO , AKAE TSUTOMU , WAKIYAMA FUMITOSHI , NAGAI NOBUYUKI
IPC分类号： B23Q41/00 , G05B19/418 , G05D1/02
摘要： PURPOSE:To smoothly execute plural processings which cannot be automatized by providing an information processor which processes the plural processings in a prescribed area based on a small computer and executes control and communication control with a host computer. CONSTITUTION:The small computer is portable and it is made into a pair with the moving body. Then, it is carried by a man or a robot to respective processors 12 so as to be processed. A processing content is written into the small computer, and it can be recognized by viewing an incorporated display unit. When a data result processed in the respective processors 12 is written into the small computer and when a processing terminates, information of the small computer is once drawn up to the controller 4 of the information processor 1. When the content is right, a completion report is given to the host computer 11. At the same time, the controller 4 completes the delivery work of the moving body to a main route 24. Thus, only a simple data carrier is required for the regular flow of the main route 24, and the production of many kinds and alteration/addition with a complicated process can efficiently be processed.

2. 发明专利

JPS5926815A Aligning and supplying jig of article 失效
标题翻译：文章归档和提供
公开(公告)号：JPS5926815A
公开(公告)日：1984-02-13
申请号：JP13726782
申请日：1982-08-09
申请人： Hitachi Ltd , Hitachi Tobu Semiconductor Ltd , Hitachi Tokyo Electronics Co Ltd
发明人： KAWAGUCHI ISAO , OSAKABE SUSUMU , WAKIYAMA FUMITOSHI , MIYATA SHIYUNICHI , KANAMARU HITOSHI
IPC分类号： B65G47/14 , H01L21/68
CPC分类号： B65G47/14
摘要： PURPOSE:To improve yield rate and work efficiency in a glass tube supply jig for glass sealed diode assembly by disposing a storing hole group on the main surface of a loader corresponding to a supply portion in such a manner that the countersink of the storing hole is brought into contact with an adjacent counter sink with a small expansion angle. CONSTITUTION:The main surface of a glass loader 9 is provided with the first group A of storing holes 12 arranged in zigzags and the second group B of storing holes 12 arranged in such a manner as to supply a glass tube to a support hole which is not supplied by the first group A. The opening angle theta2 of the countersink 18 of the storing hole 12 is 40 degrees to be in contact with the edge of an adjacent countersink 12. In this arrangement, the diameter of the countersink 18 is larger than conventional one and the grade is severe, so that at the time of supplying a glass tube to a support hole from the group A and the group B, the glass tube is easy to go into the countersink 18. Accordingly, the charge time is shortened, and damages of parts can be reduced so as to improve work efficiency and yield rate.
摘要翻译：目的：为了提高用于玻璃密封二极管组件的玻璃管供给夹具的产率和工作效率，通过在与供给部相对应的装载机的主表面上设置储存孔组，使得储存孔的埋头孔与相邻的倒计数器接口以小的扩展角度接触。构成：玻璃装载器9的主表面设置有以Z字形排列的存储孔12的第一组A和以将玻璃管供给到支撑孔的方式布置的第二组B的存储孔12，不是由第一组A提供。储存孔12的埋头孔18的开口角度θ2为40度，以与相邻埋头孔12的边缘接触。在这种布置中，埋头孔18的直径大于常规的，等级严重，所以在将玻璃管从A组和B组供给到支撑孔时，玻璃管容易进入埋头孔18中。因此，充电时间缩短可以减少零件的损坏，提高工作效率和产量。

3. 发明专利

JPH05338729A 失效
公开(公告)号：JPH05338729A
公开(公告)日：1993-12-21
申请号：JP15037492
申请日：1992-06-10
申请人： HITACHI LTD , HITACHI NAKA ELECTRON KK
发明人： SAKAMOTO SHOZO , AKAE TSUTOMU , WAKIYAMA FUMITOSHI , TAKAHASHI NOBUYUKI
IPC分类号： B65G1/06 , H01L21/677 , H01L21/68
摘要： PURPOSE:To provide a device which eliminates erroneous transfer of a wafer by moving a pair of wafer holding mechanisms in a vertical direction to a wafer flat surface while interlocking with the respective mechanisms, and mounting a wafer groove positioning mechanism which is provided with a position engaging with the positional reference of a wafer inserting groove in a wafer cassette. CONSTITUTION:Each of a pair of wafer holding sliders 5 can be moved only in a vertical direction to a wafer flat surface on a slider shaft 13, and interlock wafer holding mechanisms 3 through a wafer holder rotating shaft 12 without gaps. Besides, at least one conical projection 9 is provided on the respective surfaces of the wafer holder sliders 5 which faces a guide hole 10 in a cassette. The cassette guide hole 10 is formed so that the conical projection can be guided smoothly without gaps at the time of engagement. Because the wafer inserting groove 4 and the wafer guide groove 11 are held at an optimum position, it is thus possible to replace wafers smoothly even if these grooves do not meet each other before replacing the wafer.

4. 发明专利

JPH02228021A METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND RETICLE USED THEREIN 失效
公开(公告)号：JPH02228021A
公开(公告)日：1990-09-11
申请号：JP4836789
申请日：1989-02-28
申请人： HITACHI LTD
发明人： KOMORIYA SUSUMU , TAKAGAKI TETSUYA , HANAJIMA SHUICHI , OOSAKAYA TAKAYOSHI , WAKIYAMA FUMITOSHI
IPC分类号： G03F1/38 , G03F1/44 , G03F1/68 , H01L21/027 , H01L21/30
摘要： PURPOSE:To make the processing of wafers efficient by recording information with respect to the wafer as a bit pattern which is constituted of the assembly of minute bits, and registering a large amount of informations on the wafer. CONSTITUTION:A plurality of circuit element regions 2 are arranged in a matrix pattern on the surface of a wafer 1. Control indexes 3 are formed in the remaining region other than the circuit element regions 2. The control index 3 is constituted of a target pattern 4 for positioning and a neighboring bit pattern 5. The information regarding the wafer 1 is recorded as the bit pattern 5 which is constituted of the assembly of the minute bits. Thus, the large amount of the information can be registered on the wafer 1, and the processing of the wafer 1 can be made efficient.

5. 发明专利

JPS6294809A DISTANCE DETECTING DEVICE 失效
公开(公告)号：JPS6294809A
公开(公告)日：1987-05-01
申请号：JP23323085
申请日：1985-10-21
申请人： HITACHI LTD
发明人： KASHIMURA NOBORU , MAEJIMA HIROSHI , WAKIYAMA FUMITOSHI , UCHIMURA AKIHITO , KOMORIYA SUSUMU
IPC分类号： G02B7/28 , G01B11/00 , G01B13/00 , G01B21/16 , G01C3/00 , G01C3/06 , G03F7/207 , H01L21/027 , H01L21/30
摘要： PURPOSE:To grasp abnormality due to a change in the lapse of time, etc., and to expose a sample accurately and improve the reliability of operation by providing a reference plane which calibrates a distance detecting mechanism at part of a sample mount table. CONSTITUTION:A distance detecting mechanism A which has a lens barrel 3 and light emitting and photodetecting parts 4 and 5 is elevated to and lowered from the sample 2 on an XY table 1. The lens barrel 3 is moved up and down to hold the position of a detection light beam 8 to the photodetection part 5 at the optimum focus position of an optical system 3a. Then, the reference plane 9 on the table is focused and the lens barrel position is detected by a sensor 10. Then, light from the light emitting part 4 is reflected by the sample 2 and the lens barrel is put in focus so that the arrival position at the photodetection part coincides with the position of said operation. This operation is repeated to expose respective parts of the sample. Thus, it is confirmed that the lens barrel is at a specific position relatively to the sensor 10, and abnormality due to a change in the lapse of time, etc., is grasped to expose the sample correctly, thereby improving the reliability of the operation.

6. 发明专利

JPS60135841A MEASURING APPARATUS 失效
公开(公告)号：JPS60135841A
公开(公告)日：1985-07-19
申请号：JP24389783
申请日：1983-12-26
申请人： HITACHI LTD
发明人： ISHIKAWA KATSUHIKO , WAKIYAMA FUMITOSHI , TAKAHASHI KAZUHIKO , KOJIMA AKIRA , TAKEHANA YOUICHI , TANABE YOSHIKAZU
IPC分类号： G01N15/14
摘要： PURPOSE:To enable accurate evaluation of purity continuously concerning a large-capacity object to be measured by comparing a class-wise frequency dis- tribution data previously prepared with a frequency distribution data from a statistics which is compiled covering counts of the number of particles per unit time in terms of unit capacity. CONSTITUTION:Air 4 sampled from a room to be measured is run through a passage 3 at a constant speed and particles in the air 4 is irradiated with a beam 8 to detect a scattered light 9 generated with a photo sensor 11, where the detection frequency is counted with a counter 13 and fed to a frequency distribution data processor 14. The processor 14 also measures the number of particles per unit time sequentially and then, compiles a statistic in terms of unit capacity to prepare a frequency distribution data of counts. The comparator 18 compares the current frequency distribution data with a class-wise frequency distribution model applied from a model memory 19 and a class identical to or similar thereto is shown on a display unit 20 thereby enabling an accurate evaluation.

7. 发明专利

JPS6085024A CARRIAGE 失效
公开(公告)号：JPS6085024A
公开(公告)日：1985-05-14
申请号：JP19237183
申请日：1983-10-17
申请人： HITACHI LTD
发明人： KOMIYAMA MOTOAKI , WATANABE TAKEHIKO , UENO TSUNEMI , WAKIYAMA FUMITOSHI
IPC分类号： B60K1/00 , B60K1/04 , H01L21/02 , H01L21/677
摘要： PURPOSE:To realize control over consumption of a battery and prolongation of traveling time of a carriage without augmenting a capacity of the battery or adopting the wire system by providing a battery-driven carriage with a receiving terminal to supply said carriage with power from outside. CONSTITUTION:A handling robot 5 as a work device is provided in the front part of the upper surface of a body 2 for an unmanned carriage, while a plug 6 is projected from the lower part of the frontal face. The first and the second receiving terminals 7, 8 are provided in the front face of the plug 6, and the terminals 7 and 8 are connected respectively to the robot 5 and a battery 4 so as to be charged. The carriage 1 travels among the plural number of stations 10 according to a command of the central control section and the like. The station 10 is provided with a connection part 11, which is equipped with a socket 12 shaped like a sunken hollow stand so as to be adjustable to the plug 6 of the carriage 1. Further, the first and the second feed terminals 13, 14 are provided on the bottom of the socket.

8. 发明专利

JPH11334810A CARRYING DEVICE AND MANUFACTURE OF THE SAME 失效
公开(公告)号：JPH11334810A
公开(公告)日：1999-12-07
申请号：JP7908899
申请日：1999-03-24
申请人： HITACHI LTD
发明人： KOBAYASHI YOSHIAKI , KOBAYASHI HIDE , HAMADA TOYOHIDE , WAKIYAMA FUMITOSHI , SHIMIZU MICHIYUKI , YAGYU MITSUYASU
IPC分类号： B65G1/00 , B65G1/137 , H01L21/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To reduce the cost, the occupied space and the carry waiting time by comprising a controller for managing the information on the existence position and the processing information of a matter to be handled in a carrier. SOLUTION: When an operator registers a lot ID and the process flow ID of a lot A to a progress management controller 900, the apparatus alocating instruction of the lot A is given to an equipment group management controller 800B for managing a manufacturing apparatus which processes the next process of the lot A, and one manufacturing apparatus 700B is selected from the operation plan of the manufacturing apparatus which can process the next process of the lot A. When the operator places the lot A on an inlet and outlet port of a carrying and storing device, a carrying and storing device controller 150A confirms the operating state of a crane, retrieves the vacant shelf in order of shelf boards from the shelves in the carrying and storing device when the crane is not occupied by the other work, and gives the instruction the crane for carrying the lot from the inlet and outlet port to the vacant shelf when the vacant shelf exists.

9. 发明专利

JPH05198645A WAFER ABNORMALITY SENSOR AND INSPECTING METHOD FOR WAFER 失效
公开(公告)号：JPH05198645A
公开(公告)日：1993-08-06
申请号：JP930392
申请日：1992-01-22
申请人： HITACHI LTD , HITACHI NAKA ELECTRON KK
发明人： SAKAMOTO SHOZO , NISHIZUKA HIROSHI , WAKIYAMA FUMITOSHI , TAKAHASHI NOBUYUKI
IPC分类号： H01L21/66 , H01L21/677 , H01L21/68
摘要： PURPOSE:To prevent the increase in an accident by sensing a crack of a wafer based on the state of an orientation flat end face. CONSTITUTION:A pair of reflection type optical sensors 9, 10 are so provided as to be opposed, for example, substantially perpendicularly to aligned orientation flat end faces 8 and that focal lengths are disposed on the faces 8. The sensors 9, 10 are scanned in a wafer 1 arranging direction (F direction) to detect presence or absence and abnormality of the wafer 1 by receiving reflected lights of the faces 8. Thus, an increase in an accident can be prevented.

10. 发明专利

JPS61290724A METHOD AND APPARATUS FOR TREATING WAFER 失效
公开(公告)号：JPS61290724A
公开(公告)日：1986-12-20
申请号：JP13188085
申请日：1985-06-19
申请人： HITACHI LTD
发明人： CHIKAOKA RYOSAKU , MAEJIMA HIROSHI , WAKIYAMA FUMITOSHI , HANAJIMA SHUICHI , OOSAKAYA TAKAYOSHI
IPC分类号： H01L21/302 , H01L21/3065 , H01L21/311
摘要： PURPOSE:To continuously anneal wafers without washing them, by irradiating the wafers with short-wavelength ultraviolet rays for producing ozone and removing the resist on the wafers. CONSTITUTION:A wafer 16 is moved from a cassette loader 15 located on the upstream side of an ultraviolet irradiation section to a belt conveyer 13 with the wafer surface on which a resist is to be adhered directed upwards and is further transferred onto a carrying table 6. The wafer 16 is heated to a predetermined temperature from its rear face by a plate heater 5, while it is irradiated with ultraviolet rays by a ultraviolet lamp 7 from the upside. Simultaneously, the ultraviolet treatment section 12 is continuously supplied with oxygen gas by a gas supply section. The wafers 16 are advanced by a conveyer means by one pitch and moved sequentially to the right-hand direction. The resist on the wafer 16 is completely removed during this movement. The wafers 16 are than introduced through a gate 11 into a buffer section, where they are purged of oxygen. The wafers 16 are transferred to an annealing section, where they are annealed by heating the same with the plate heater 5.

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