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1. 发明专利

JPH11121583A SEMICONDUCTOR WAFER TRANSFER SYSTEM 失效
公开(公告)号：JPH11121583A
公开(公告)日：1999-04-30
申请号：JP28339097
申请日：1997-10-16
申请人： HITACHI LTD
发明人： SAKURADA TADAHIRO , NUMATA SHIGEO , OKABE TSUTOMU , SHIMAMURA HIDEAKI , SHIMIZU MICHIYUKI , WAKIYAMA FUMITOSHI , TSUBOI RYUNOSUKE
IPC分类号： B65G49/00 , B65G49/07 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To prevent a semiconductor wafer from increasing in transfer time by a method, wherein high stokers where semiconductor wafers in production process are housed are arranged at each of semiconductor treating processes, semiconductor wafers required to be subjected to semiconductor treating processes are supplied to the high stokers, and the semiconductor wafers subjected to a semiconductor treatment are housed in the high stocker. SOLUTION: A semiconductor wafer transfer system is equipped with loop- type transfer lines 1a and 1b provided in a clean room 4a and loop-type transfer lines 1c and 1d provided on the ceiling 4b of the clean room 4a making right angles with the transfer lines 1a and 1b, whereby delays in the transfer of the semiconductor wafers can be lessened reducing a transfer lead time for any transfer carried out between loop lines to an irreducible minimum. Furthermore, even if three or more loop-type transfer lines are provided inside the clean room 4a on a request for a higher transfer capacity, one or more loop-type transfer lines are provided on the ceiling 4b of the clean room 4a, making right angles with the transfer lines which have been previously provided inside the clean room 4a, whereby delays in transfer of the semiconductor wafers between any loop-type transfer lines can be lessened.

2. 发明专利

JPH09193053A CARRYING DEVICE 失效
公开(公告)号：JPH09193053A
公开(公告)日：1997-07-29
申请号：JP2843296
申请日：1996-01-22
申请人： HITACHI LTD , HITACHI KIDEN KOGYO KK
发明人： ISHIDA YOSHIHIRO , KUGAYA TAKASHI , OTSUKI SHIGEO , TSUBOI RYUNOSUKE , SHIMIZU MICHIYUKI , SUZUKI YUKIO , WATANABE SEIJU , FUJII HIROSHI
IPC分类号： B25J5/02
摘要： PROBLEM TO BE SOLVED: To provide a carrying device which has high carrying processing capacity and intends a carry of adjacent manufacturing device rows for a main object but can deliver a cassette to opposed manufacturing device rows except adjacent ones and also to back-to-back manufacturing device rows and in which a floor surface obstacle does not exist when a large-scale device is carried in and out. SOLUTION: Travel passages in parallel along manufacturing device rows and a connecting travel passage to connect the travel passages to each other by crossing with the mutual travel passages in front of these parallel manufacturing device rows, are respectively arranged in front of respective rows of the manufacturing device rows where plural manufacturing devices 2 are adjacently arranged in a straight line shape along both sides of a passage in a production building. Tracked rectilinearly traveling automatic carrying cars 4 mounted with an elbow joint type handling arm 7 of a four-node link mechanism are respectively arranged on these parallel respective travel passages. A carrier 6 to deliver a cassette in a condition where the handling arm 7 is contracted is arranged on the connecting travel passage.

3. 发明专利

JP2002087514A CARRYING DEVICE 失效
公开(公告)号：JP2002087514A
公开(公告)日：2002-03-27
申请号：JP2000282000
申请日：2000-09-18
申请人： HITACHI LTD , HITACHI KIDEN KOGYO KK
发明人： SHIMIZU MICHIYUKI , HAMADA TOYOHIDE , WATANABE SHINICHI
IPC分类号： B61B13/00 , B65G1/00 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a carrying device capable of reducing stagnation of a carrying carriage and capable of improving carrying capacity in response to needs for shortening carrying time. SOLUTION: In this carrying device for carrying a carrier 3 by carrying carriage 4 by connecting mutual plural stockers 1 by a carrying track 2 in a clean room C, a loop-shaped outer peripheral carrying track 5 independent of this carrying track 2 is formed on the outer periphery of the carrying track 2, the stockers 1 are arranged between this outer peripheral carrying track 5 and the carrying track 2, and these stockers 1 are provided with a delivery mechanism 6 for transferring the carrier 3 between the outer peripheral carrying track 5 and the carrying carriage 4 of the carrying track 2.

4. 发明专利

JPH11330197A CARRYING CONTROL METHOD AND ITS EQUIPMENT THEREOF 失效
公开(公告)号：JPH11330197A
公开(公告)日：1999-11-30
申请号：JP13342198
申请日：1998-05-15
申请人： HITACHI LTD
发明人： SAKURADA TADAHIRO , NUMATA SHIGEO , TOKUNAGA YUICHI , SHIMAMURA HIDEAKI , SHIMIZU MICHIYUKI , HAMADA TOYOHIDE
IPC分类号： B65G43/00 , B65G63/00 , G06F17/00 , G06F19/00 , G06Q50/00 , G06Q50/04 , H01L21/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To effectively carry works in a semiconductor production line without generating stay and delay. SOLUTION: Simulating evaluation is performed to a plurality of carrying routes which connect treating equipment from which carrying is started and treating equipment to which carrying is performed, by using tables 2a, 2c, 2d showing constitution of a carrying line and a stocker, equipment state files 2e, 2f showing these driving states, evaluation element files 2g, 2h collecting the results of these necessary times of carriage, and mean cycle time files 2i-2p. A carrying route, where the time necessary for carrying is minimum, is selected. Only a first step carrying is executed, and simulations for the residual routes are repeated.

5. 发明专利

JPH10177415A METHOD FOR AVOIDING DEAD LOCK OF UNMANNED CARRYING SYSTEM 失效
公开(公告)号：JPH10177415A
公开(公告)日：1998-06-30
申请号：JP33782496
申请日：1996-12-18
申请人： HITACHI LTD
发明人： TAKEHARA NAOKI , HAMADA TOYOHIDE , ISHII TAKATOSHI , KOBAYASHI YOSHIAKI , SHIMIZU MICHIYUKI
IPC分类号： G05D1/02
摘要： PROBLEM TO BE SOLVED: To escape unmanned carrier dead lock generated at the time of setting one part of a traveling path as a traveling prohibiting block. SOLUTION: When a traveling prohibiting block is set, a station in the prohibiting block is masked on a shunting control table (S102), and this is changed to the shunting control table. Then, a station being the destination of shunting is retrieved for the combination of an unmanned carrier stop station to be shunted and an unmanned carrier stop station waiting for the permission of traveling from the shunting control table, and when the destination of shunting is present, the shunting is executed. Also, the unmanned carrier stop station to be shunted No is replaced with the unmanned carrier stop station waiting for the permission of traveling No (S105), the shunting control table is retrieved, and the destination of shunting is retrieved.

6. 发明专利

JPH11334810A CARRYING DEVICE AND MANUFACTURE OF THE SAME 失效
公开(公告)号：JPH11334810A
公开(公告)日：1999-12-07
申请号：JP7908899
申请日：1999-03-24
申请人： HITACHI LTD
发明人： KOBAYASHI YOSHIAKI , KOBAYASHI HIDE , HAMADA TOYOHIDE , WAKIYAMA FUMITOSHI , SHIMIZU MICHIYUKI , YAGYU MITSUYASU
IPC分类号： B65G1/00 , B65G1/137 , H01L21/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To reduce the cost, the occupied space and the carry waiting time by comprising a controller for managing the information on the existence position and the processing information of a matter to be handled in a carrier. SOLUTION: When an operator registers a lot ID and the process flow ID of a lot A to a progress management controller 900, the apparatus alocating instruction of the lot A is given to an equipment group management controller 800B for managing a manufacturing apparatus which processes the next process of the lot A, and one manufacturing apparatus 700B is selected from the operation plan of the manufacturing apparatus which can process the next process of the lot A. When the operator places the lot A on an inlet and outlet port of a carrying and storing device, a carrying and storing device controller 150A confirms the operating state of a crane, retrieves the vacant shelf in order of shelf boards from the shelves in the carrying and storing device when the crane is not occupied by the other work, and gives the instruction the crane for carrying the lot from the inlet and outlet port to the vacant shelf when the vacant shelf exists.

7. 发明专利

JPH08148538A METHOD AND SYSTEM FOR PRODUCING SEMICONDUCTOR DEVICE AND CARRIER CASE 失效
公开(公告)号：JPH08148538A
公开(公告)日：1996-06-07
申请号：JP28637794
申请日：1994-11-21
申请人： HITACHI LTD
发明人： NEMOTO KAZUNORI , SHIMIZU MICHIYUKI , HORIGUCHI KAZUO , NAKAJIMA SHIGEAKI , MORIKAWA KANJI , TAKEI SEIICHI , WATANABE SHINICHI , AKASHI JUN , HIRATA KAZUYUKI
IPC分类号： B23Q41/00 , B65D85/86 , H01L21/02 , H01L21/673 , H01L21/677 , H01L21/68
摘要： PURPOSE: To realize a flexible batch composition which can deal with both single wafer processing and batch processing. CONSTITUTION: The semiconductor production system comprises pins 11 for stacking a plurality of carrier cases 7 on a carrier case 7 for containing a single semiconductor wafer 8, a traveling guide 12 moving in accordance with a transfer mechanism 13 for an inter-shop transfer path 5 connecting a plurality of shops, an information processing section 9 for holding the process control information of the semiconductor wafer 8 being contained and controlling the progress of process thus determining a destination shop, and a noncontact communication interface 10 for communicating process control information with the outside. Transfer or optimal starting schedule is controlled spontaneously at the level of the carrier case 7 through communication with a computer for managing the facility group and the lot size is modified flexibly depending on the batch system or the single wafer system by varying the number of stacked carrier cases 7 to be delivered.

8. 发明专利

JP2002313880A METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE 失效
公开(公告)号：JP2002313880A
公开(公告)日：2002-10-25
申请号：JP2001121176
申请日：2001-04-19
申请人： HITACHI LTD
发明人： SHIMIZU MICHIYUKI
IPC分类号： H01L21/677 , G05B19/418 , H01L21/02 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To reduce manufacturing time in the production line of a semiconductor integrated circuit device. SOLUTION: Plural wafers in a lot L are divided into groups having the same number of wafers according to the number of pieces of manufacturing apparatus M1-M4. While each of the divided wafer groups is being accommodated in each of plural divided carriers SC, it is allocated to each of the plural pieces of manufacturing apparatus M1-M4, and single wafer treatment is made to wafers in parallel by the plural pieces of manufacturing apparatus M1-M4.

9. 发明专利

JPH1116984A SEMICONDUCTOR WAFER TRANSFER SYSTEM 失效
公开(公告)号：JPH1116984A
公开(公告)日：1999-01-22
申请号：JP17162497
申请日：1997-06-27
申请人： HITACHI LTD
发明人： KURAUCHI SHIGERU , NUMATA SHIGEO , SHIMIZU MICHIYUKI , OKABE TSUTOMU
IPC分类号： B65G1/00 , B65G43/00 , B65G49/07 , H01L21/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To prevent a following transfer vehicle from being retarded due to a transfer operation carried out for a preceding transfer vehicle by a method wherein a junction switching means which is capable of switching the course of a transfer vehicle alternatively. SOLUTION: A sidetrack 9 which branches off from a main route 5 through which wafers are transferee and joins the main route 5 again passing through near a corresponding stocker 1 is provided besides the main route 5. A pointer 10 functioning as a sidetrack switching means which is capable of alternatively moving a transfer truck straight on the main route 5 or to enter the lead-in route 9 from the main route 5 is provided at a position where the lead-in route 9 branches off from the main route 5. A pointer 11 functioning as a junction switching means which is capable of alternatively moving a transfer vehicle straight on the main route 5 or to enter the main route 5 from the lead-in route 9 is provided at a position where the lead-in route 9 joins the main route 5. Optical transmission devices 13 and 14 are provided as the passing detecting means of the pointers 10 and 11.

10. 发明专利

JPH09216180A SEMICONDUCTOR WAFER CASSETTE CONVEYANCE SYSTEM 失效
公开(公告)号：JPH09216180A
公开(公告)日：1997-08-19
申请号：JP2231296
申请日：1996-02-08
申请人： HITACHI LTD
发明人： HAMADA TOYOHIDE , TAKEHARA NAOKI , ISHII TAKATOSHI , KOBAYASHI YOSHIAKI , SHIMIZU MICHIYUKI
IPC分类号： B25J5/00 , B25J19/00 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To conduct high-speed transfer operation with a conveyance device of trackless traveling system by mounting a robot arm where degree of freedom in a mobile robot mechanism, the length of an arm and so on are selected to the minimum according to the mounting height of wafer cassettes at a loader/ unloader in a group of manufacturing equipment. SOLUTION: An arm mechanism of horizontal articulated type is used. A robot base 10 is fixed on a dolly 2, on which a vertical motion mechanism 11 is installed. The first arm 12 which has rotational axis parallel to a vertical motion axis, is connected with the vertical motion mechanism 11. The second arm 13 which has a rotational axis parallel to the first arm 12, is connected with the top part of the first arm 12. The top part of the second arm 13 is provided with the third rotational axis which is parallel to the rotational axis of the second arm 13 and a hand mechanism 15 which clamps and releases a cassette 4, is fixed at the third rotational axis. For the transfer mechanism of a conveyance device constituted like this, manufacturing equipment for each process is limited so that the mechanism configuration, degree of freedom, reach, working area and so on may be millimum.

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