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    • 3. 发明专利
    • SEMICONDUCTOR DEVICE AND TEST METHOD THEREFOR
    • JPH07220497A
    • 1995-08-18
    • JP1198194
    • 1994-02-03
    • HITACHI LTD
    • SAWADA JIRO
    • G06F12/16G11C11/401G11C29/00G11C29/34
    • PURPOSE:To distinguish the information of a required cell in a short time by delivering information of one bit unit to a parallel test function at high rate. CONSTITUTION:A selection is made among a parallel test mode a binary logic format and a three-valued logic format according to a signal TE and a data register 3 is set by a signal DRS. Information read out from a memory array is amplified and output signals MO0...m-1, -MO0...m-1 are inputted to a binary/ three-valued logic circuit 1 while at the same time they are stored in the register 3. When the data is read out from the register 3, the register 3 is enabled by a signal DR being inputted to a counter circuit 2 and an output switching circuit 4. The circuit 2 outputs signals DR1... according to a signal C1 and the data stored in the register 3 is outputted sequentially. The switching circuit 4 delivers the output information from the logic circuit and the output information from the register 3 of 1...m bits while combining. A decision is made at which address a failure has occurred through comparsion of the information.
    • 4. 发明专利
    • TEST METHOD FOR SEMICONDUCTOR MEMORY AND ITS TEST SYSTEM
    • JPH0785697A
    • 1995-03-31
    • JP23181993
    • 1993-09-17
    • HITACHI LTD
    • SAKAI YUJIOSHIMA KAZUYOSHISAWADA JIRO
    • G01R31/26G01R31/28G11C29/00G11C29/56
    • PURPOSE:To easily recognize a defect occurring condition and to shorten a time for analyzing a defect by sampling a defective bit relating to a specific defective mode. CONSTITUTION:Only a defective bit relating to a specific defective mode specified by a defect setting means 4 is sampled out of defective bits of a LS11 detected by a tester 10 with a measuring condition set by a condition setting means 2 in a defective address analyzing means 3, sent to a display means 5 and a distribution condition of defective bits is displayed, and the occurring condition of a defective mode is recognized. And when the specific defective mode is discriminated and measuring range and measuring condition required for analyzing is informed to the condition setting means 2, a controller 11 sends a signal required for a test from a power supply section 17 and a pattern generator 12 to the LS 11, read-out data is compared with write-in data in a comparator means 14, and normal/defective condition is discriminated. Thus, analyzing a cause of it occurrence of a defect can be performed quickly and easily by sampling a specific defective mode out of mixed defective modes and clarifying a defective object to be analyzed.
    • 7. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS63126246A
    • 1988-05-30
    • JP27183686
    • 1986-11-17
    • HITACHI LTD
    • SAWADA JIRO
    • H01L21/82H01L21/268H01L21/3205H01L27/10
    • PURPOSE:To calculate positions of a positioning target and a fuse piece correctly, by forming the upper layer of the target of a metal having a high reflectivity with respect to laser light while forming the lower layer of the same material as the fuse. CONSTITUTION:In order to position a fuse piece 7 for cutting it with laser light, a wafer 3 is irradiated with laser light and the laser light is scanned in the X- and Y-directions so that variance in reflectivity thereof is detected. The upper layer 1b of a target 1 is composed of a metal having a high reflectivity with respect to the laser light. Therefore, the position of the target 1 can be detected easily. The position of a fuse piece 7 connected to a defective circuit is calculated from a distance between a fuse pattern formed in a part of a gate electrode forming mask and the target pattern. The predetermined fuse piece is cut by applying laser light and the circuits are switched over.