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1. 发明授权

US6373054B2 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same 有权
标题翻译：电子束检查方法及装置及半导体制造方法及其制造线
公开(公告)号：US6373054B2
公开(公告)日：2002-04-16
申请号：US75246801
申请日：2001-01-03
申请人： HITACHI LTD
发明人： HIROI TAKASHI , TANAKA MAKI , WATANABE MASAHIRO , KUNI ASAHIRO , MATSUYAMA YUKIO , TAKAGI YUJI , SHINADA HIROYUKI , NOZOE MARI , SUGIMOTO ARITOSHI
IPC分类号： G01Q20/00 , G01Q30/04 , G01Q30/02 , G01Q60/00 , H01J37/20 , H01J37/22 , H01J37/256 , H01J37/28 , H01L21/66 , H01J37/304
CPC分类号： H01J37/28 , H01J2237/2817
摘要： An inspection method and apparatus which controls an acceleration voltage of an electron beam, irradiates the electron beam to an object to be inspected mounted on a stage which is continuously moving at least in one direction, detects at least one of a secondary electron and a reflected electron emanated from the object by the irradiating, obtains an image of the object from the detected electron by using positional information of the stage, conducts inspection or measurement of the object using the image obtained, and outputs a result of the inspection or the measurement through a network system which is connected to a computer.
摘要翻译：一种控制电子束的加速电压的检查方法和装置，将电子束照射到安装在至少沿一个方向连续移动的台上的待检查物体上，检测二次电子和反射的至少一个通过照射从物体发射的电子，通过使用载物台的位置信息从检测到的电子获得物体的图像，使用获得的图像进行物体的检查或测量，并且通过以下方式输出检查结果或测量结果连接到计算机的网络系统。

2. 发明专利

DE69107882T2 未知
公开(公告)号：DE69107882T2
公开(公告)日：1995-11-02
申请号：DE69107882
申请日：1991-04-17
申请人： HITACHI LTD
发明人： TAKAGI YUJI , HATA SEIJI
IPC分类号： G01B11/24 , G01N21/88 , G01N21/956
摘要： A method and an apparatus for inspecting a three-dimensional surface shape and pattern of an object (1) under inspection by images of the surface of the object, said images being formed by reflected light rays from the object illuminated by lights. The surface of the object is illuminated by first (3) and second lights (4) provided on the inspected surface side of the object and at different heights from the object, images of the reflected light rays from the surface of the object illuminated by the first and second lights (3,4) are acquired by an imaging unit (5), a first image of the surface of the object illuminated by the first light and a second image of the surface of the object illuminated by the second light, both acquired by the imaging unit, are input separately, brightness values at the same pixel points of the first and the second images are subjected to a division process to obtain a value, and by using this value as the brightness value of the pixel, a third image is formed which is used for quality evaluation.

3. 发明专利

DE3764766D1 未知
公开(公告)号：DE3764766D1
公开(公告)日：1990-10-11
申请号：DE3764766
申请日：1987-10-13
申请人： HITACHI LTD
发明人： TAKAGI YUJI , HATA SEIJI
IPC分类号： G01B11/24 , G01B11/25 , H04N5/235
摘要： A method and an apparatus suitably used with a visual recognition system or the like for measuring the shape of an object (6) by the optical cutting process is disclosed in which irregularities of the reflection characteristics on the object or under an environment subjected to variations in external light are removed for measurement. R light flux parallel to a slit beam providing an optical cutting beam is irradiated on the object by an optical system (3, 4). An original image not irradiated with any parallel illumination light is compared with an image obtained with a parallel beam irradiated to obtain reflection characteristics data on the object. This reflection characteristic data is used to correct an image formed at the time of irradiation of the optical cutting beam. When the optical cutting beam is irradiated, the existing image representing reflection characteristics is standardized with reference to the brightness of the optical cutting beam. The resulting data is used to correct the differential image obtained by subtraction between the image irradiated with the optical cutting beam and the original image. The reflection irregularties are thus removed for an improved measurement accuracy.

4. 发明专利

HK1130459A1 PASSENGER CONVEYING APPARATUS AND ROLLER USED FOR TREAD PLATE OF THE SAME 未知
公开(公告)号：HK1130459A1
公开(公告)日：2009-12-31
申请号：HK09109085
申请日：2009-09-30
申请人： HITACHI LTD , HITACHI MITO ENG KK
发明人： TAKAGI YUJI , ABE YOSHIO , MATSUNO HISAO
IPC分类号： B66B20060101

5. 发明专利

HK1139911A1 GUARDRAIL DEVICE OF PASSENGER CONVEYING APPARATUS 未知
公开(公告)号：HK1139911A1
公开(公告)日：2010-09-30
申请号：HK10105920
申请日：2010-06-14
申请人： HITACHI LTD
发明人： OKAMURA NAOKO , ICHIGE TOSHIHIKO , OBARA KOHSEI , TAKAGI YUJI , KASHIKURA SHINYA , NAKAMURA HIDEHIRO
IPC分类号： B66B20060101

6. 发明专利

DE69107882D1 未知
公开(公告)号：DE69107882D1
公开(公告)日：1995-04-13
申请号：DE69107882
申请日：1991-04-17
申请人： HITACHI LTD
发明人： TAKAGI YUJI , HATA SEIJI
IPC分类号： G01B11/24 , G01N21/88 , G01N21/956
摘要： A method and an apparatus for inspecting a three-dimensional surface shape and pattern of an object (1) under inspection by images of the surface of the object, said images being formed by reflected light rays from the object illuminated by lights. The surface of the object is illuminated by first (3) and second lights (4) provided on the inspected surface side of the object and at different heights from the object, images of the reflected light rays from the surface of the object illuminated by the first and second lights (3,4) are acquired by an imaging unit (5), a first image of the surface of the object illuminated by the first light and a second image of the surface of the object illuminated by the second light, both acquired by the imaging unit, are input separately, brightness values at the same pixel points of the first and the second images are subjected to a division process to obtain a value, and by using this value as the brightness value of the pixel, a third image is formed which is used for quality evaluation.

7. 发明专利

JP2011063327A Passenger conveyor 有权
标题翻译：乘客输送机
公开(公告)号：JP2011063327A
公开(公告)日：2011-03-31
申请号：JP2009212626
申请日：2009-09-15
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： KAMATA HIROTAKA , KASHIWAKURA SHINYA , OKAMURA NAOKO , TAKAGI YUJI
IPC分类号： B66B23/24
摘要： PROBLEM TO BE SOLVED: To provide a passenger conveyor easy in maintenance work, and having no risk of damaging handrail inner surface canvas even if a sliding member is abraded by friction with a handrail. SOLUTION: This passenger conveyor for solving the problem includes a step 1 traveling by being connected in an endless shape, a handrail 2 erected along the advancing direction at the side of the step 1, a guide body 6 and the sliding members 8a and 8b provided at the outer edge of the handrail 2, and a handrail 3 for guiding the handrail 2 outer edge by the guide body 6 and the sliding members 8a and 8b. In the passenger conveyor, the sliding members 8a and 8b are elastically deformed and installed in the guide body 6, and fixed to the guide body 6 by elastic forces of the sliding members 8a and 8b themselves. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了使乘客输送机容易进行维护工作，并且即使滑动构件与扶手的摩擦磨损，也不会损坏扶手内表面帆布。解决方案：用于解决问题的该乘客输送机包括通过连接成环状行进的踏板1，沿台阶1侧的前进方向竖立的扶手2，引导体6和滑动部件8a 设置在扶栏2的外缘的扶手栏杆3，以及用于通过引导体6和滑动构件8a，8b引导扶手2的外缘的扶栏3。在乘客输送机中，滑动部件8a，8b弹性变形并安装在引导体6内，并通过滑动部件8a，8b本身的弹力而固定在引导体6上。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2010076860A Handrail device of passenger conveyer 有权
标题翻译：客船输送机的船舶装置
公开(公告)号：JP2010076860A
公开(公告)日：2010-04-08
申请号：JP2008244603
申请日：2008-09-24
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： OKAMURA NAOKO , ICHIGE TOSHIHIKO , OBARA TAKAO , TAKAGI YUJI , KASHIWAKURA SHINYA , NAKAMURA HIDEHIRO
IPC分类号： B66B23/22
摘要： PROBLEM TO BE SOLVED: To provide a handrail device of a passenger conveyor capable of easily fine-adjusting skirt guards horizontally.
SOLUTION: This handrail of a passenger conveyor includes the plurality of skirt guards which are opposed on both sides of the steps endlessly connected to each other and circulating in a frame and which are continuously arranged in the moving direction of the steps and a lower skirt base 39 for fixing the lower parts of the skirt guards to the frame side. A skirt base clip 38 is provided to the frame side, the horizontal side 39b of the lower skirt base 39 is held by the skirt base clip 38, and the lower part of the skirt guard is fixed to the frame side. Since the skirt guards can be fine-adjusted horizontally by such a simple method as to hit the lower parts of the skirt guards, the labor and time required for the operation can be reduced.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供能够水平地容易地微调护罩的乘客输送机的扶手装置。
解决方案：乘客输送机的该扶手包括多个裙部保护件，它们在彼此不连续地连接并在框架中循环并且在台阶的移动方向上连续布置的台阶的两侧相对，并且下裙部基座39，用于将裙部护罩的下部固定到框架侧。裙部底座38设置在框架侧，下裙部基部39的水平侧面39b由裙部基部夹子38保持，裙部护罩的下部固定在框架侧。由于可以通过简单的方法水平地对裙边保护装置进行微调，从而可以降低裙部护罩的下部，从而可以减少操作所需的劳动和时间。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2006074065A Inspection device of sample 审中-公开
标题翻译：样品检验装置
公开(公告)号：JP2006074065A
公开(公告)日：2006-03-16
申请号：JP2005305912
申请日：2005-10-20
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： OBARA KENJI , TAKAGI YUJI , HONDA TOSHIFUMI , NAKAGAKI AKIRA , KUROSAKI TOSHISHIGE , OZAWA YASUHIKO
IPC分类号： H01L21/66 , G01N23/223 , G01N23/225 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To increase inspection efficiency in detailed inspection of defect which is performed on the basis of inspection information of defect inspection.
SOLUTION: For example, contaminations and defects which are detected with a defect inspection device 1 are inspected in detail with a detailed inspection device 3 using SEM and the like, and the cause of the occurrence and the like are clarified. Before performing the detailed inspection, contaminations and defects which are detected with the defect inspection device 1 are inspected with an attribute inspection device using optical microscope and the like, and each attribute is searched for. The defects and contaminations are classified into a type which needs the detailed inspection and a type which does not need the detailed inspection or a type which can not be performed the detailed inspection, based on the attributes. Only contaminations and defects which need the detailed inspection are inspected with the detailed inspection device 3.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：根据缺陷检查的检查信息进行的缺陷的详细检查，提高检查效率。解决方案：例如，使用SEM等详细检查装置3来详细检查用缺陷检查装置1检测的污染物和缺陷，并且说明发生的原因等。在进行详细检查之前，使用光学显微镜等用属性检查装置检查用缺陷检查装置1检测到的污染物和缺陷，并搜索每个属性。根据属性，将缺陷和污染分为需要详细检查的类型和不需要详细检查的类型或不能进行详细检查的类型。只需要详细检查的污染物和缺陷，请仔细检查。3.版权所有（C）2006，JPO＆NCIPI

10. 发明专利

JP2004077165A Defect classification method and its device 有权
公开(公告)号：JP2004077165A
公开(公告)日：2004-03-11
申请号：JP2002234302
申请日：2002-08-12
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： OKUDA HIROTO , HONDA TOSHIFUMI , TAKAGI YUJI , MIYAMOTO ATSUSHI
IPC分类号： G01N21/88 , G01N21/956 , G06T1/00 , G06T7/00
CPC分类号： G06T7/001
摘要： PROBLEM TO BE SOLVED: To provide a method that automatically classifies images of defects occurring in surfaces of a semiconductor electronic circuit substrate or the like, does not need to collect much teaching data, can flexibly respond to different defect classifying requests depending on users, and has high reliability, and to provide its device.
SOLUTION: A user defines classification class constitution by arbitrarily combining a class provided by a system or a class defined by the user. Additionally, the user provides prior knowledge about a defect class as a constraint, and learning with the constraint is performed.
COPYRIGHT: (C)2004,JPO

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