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    • 2. 发明专利
    • Initial setting device for wavelength of spectrophotometer
    • 用于分光光度计波长的初始设置装置
    • JPS5770415A
    • 1982-04-30
    • JP14693880
    • 1980-10-22
    • Hitachi Ltd
    • KANEKO NORIOSUGIURA YOSHIOSHIMAZAKI TSUNEO
    • G01J3/06
    • G01J3/06
    • PURPOSE:To obtain a device adaptable for various kinds of spectrophotometers by obtaining the monochromatic light of the wavelength to be initially set when the zero-order light obtained by rotating the diffraction grating of a monochromator, from the monochromator. CONSTITUTION:The white light 1 incident through an incident slit 3 of a monochromator 2 is projected to a diffraction grating 4 and is made into monochromatic light 5, which emits from an exist slit 6, and goes to a photosensor. On the other hand, the zero-order light 7 always existing in the light diffracted by the diffraction grating 4 passes through a slit 8 and is detected with a detector 9. The wavelength of the monochromatic light 5 of that time is set at the wavelength longest of or longer than those in a measurement region. A control circuit 30 turns the grating 4 in the direction of an arrow 12 or 13 by way of a stepping motor 11 and a cam mechanism 10, and stops the same in the peak position of the quantity of light of the zero-order light. Thereby, the wavelength initial setting devices suitable for various kinds of spectrophotometers is constituted.
    • 目的:通过在从单色仪旋转单色仪的衍射光栅获得的零级光获得要初始设定的波长的单色光时,获得适用于各种分光光度计的装置。 构成:通过单色仪2的入射狭缝3入射的白光1投影到衍射光栅4,并被制成从存在的狭缝6发射的单色光5,并进入光传感器。 另一方面,由衍射光栅4衍射的光中总是存在的零级光7通过狭缝8,并用检测器9检测。此时的单色光5的波长被设定为波长 最长或长于测量区域。 控制电路30通过步进电动机11和凸轮机构10使光栅4沿箭头12或13的方向旋转,并将其停止在零级光的光量的峰值位置。 由此,构成适用于各种分光光度计的波长初始设定装置。
    • 6. 发明专利
    • DEVICE AND METHOD FOR ANALYZING PARTICLES
    • JPH0384437A
    • 1991-04-10
    • JP22195089
    • 1989-08-29
    • HITACHI LTD
    • HORIUCHI HIDEYUKIKANEKO NORIOOKI HIROSHI
    • G01N15/14
    • PURPOSE:To accurately and speedily analyze shape information on particles to be measured by irradiating the particles which are oriented and arrayed in a sheath flow with luminous flux in plural directions and receiving scattered light at plural positions. CONSTITUTION:The particles to be measured which are extruded from the tip of a nozzle 13 are oriented and arrayed so that flat surfaces are directed in the direction of the laser luminous flux 1 and when particles put in the sheath flow A pass through pieces of luminous flux 1 and 3 intersecting orthogonally with each other, the scattered light from the particle is converged by convex lenses 9 and 11 and received by photodetectors 10 and 12. The output signals of the photodetectors 10 and 12 are amplified by amplifies 31 and 32 and pulse signals D1 and D2 by the scattered light which are obtained from the outputs of variable resistors 33 and 34 are equal in level when the particle is completely spherical, so D2/D1 is 1, but when the particle is in a flat shape, D2/D1 deviates from 1. Therefore, whether the particle is flat or not and its extent can be estimated from the pulse signal D2/D1.
    • 7. 发明专利
    • FLUID QUANTITY MEASURING APPARATUS
    • JPH0368816A
    • 1991-03-25
    • JP20466489
    • 1989-08-09
    • HITACHI LTD
    • ENOKI HIDEOOKI HIROSHIMIYAKE AKIRAKANEKO NORIO
    • G01F1/00G01N1/10
    • PURPOSE:To obtain a fluid quantity measuring apparatus which can determine the volume of minute amount of liquid at high accuracy and high reliability by providing a moving means for relatively moving a sampling nozzle and a one-dimensional sensor, and providing a driving and controlling means for driving and controlling the moving means. CONSTITUTION:A moving means 20 is constituted so that a nozzle 1 is rotated around its axis and moved in the axial direction when a supporting shaft 22 is rotated around its axis and moved in the axial direction with a rotating mechanism in a driving part 30. When the nozzle 1 and a sensor array 43 are relatively moved or rotated with said moving means 20, the array 43 is scanned by a plurality of times with a sensor controller 52. When the axis of the inner diameter part of the nozzle 1 and the axis of the array 43 are inclined to each other, a part of the projected image of the liquid in the nozzle crosses the array 43, and its output is changed. The nozzle 1 and the array 43 are relatively moved or rotated sufficiently in response to the degree of the inclination. Thus, the projected images of both end parts of the liquid are captured with the array 43. A plurality of scanned data are compared in operating means (40 and 50), and the positions of both end parts are determined. Thus, the volume of the liquid is obtained based on the data of the cross section of the nozzle.
    • 8. 发明专利
    • SHEATH FLOW CELL
    • JPH02181632A
    • 1990-07-16
    • JP34989
    • 1989-01-06
    • HITACHI LTD
    • KANEKO NORIOHORIUCHI HIDEYUKISAKURABA SHINICHIYASUDA KAORIOKI HIROSHIMIYAKE AKIRAYAMAZAKI ISAO
    • G01N21/64G01N15/14G01N21/05G01N21/53
    • PURPOSE:To reduce the shortening and pressure loss of a capillary by forming a flow passage of three-dimensional structure with a sheath flow formation part and providing the capillary separated from the flow passage with rectangular section having transmissive surfaces in the traveling direction of a light beam for analysis and its orthogonal direction. CONSTITUTION:The sheath flow formation part 10 is provided with a sheath liquid port 12 by pinching a sample liquid port 11. Those three flow passages come together at the part of the nozzle 13 of the port 11 and connect with the capillary 30 with the transmissive rectangular section through a flow reduction part 14. A sheath flow 20 is guided to the capillary 30, and analyzed and then discharged through a drain tube 40. A light source 50 for analysis irradiates cells and particles flowing in the sheath flow 21 with light. Forward scattered or fluorescent light obtained by the irradiation is detected by a front detection optical system 60 and sideward scattered or fluorescent light is detected by a sideward detection optical system 70 to analyze the cells, etc. The surface of the flow cell of this constitution is flat, so the detection optical systems can be put close to the flow cell main body, so that the capillary can be shortened.
    • 9. 发明专利
    • ALIGNMENT EQUIPMENT
    • JPS63215039A
    • 1988-09-07
    • JP4756387
    • 1987-03-04
    • HITACHI LTD
    • KANEKO NORIO
    • G03F7/20G03F9/00H01L21/027H01L21/30H01L21/68
    • PURPOSE:To improve alignment accuracy and throughput, by performing alignment applying two arbitrary wavelengths in a state where the mutual position relation among an original drawing, a wafer and a demagnification lens is kept constant. CONSTITUTION:An original drawing 4 and a wafer 2 are kept in a position of best focus with respect to an exposure light wavelength lambda0. The real images of an alignment mark for alignment wave lengths lambda1 and lambda2 different from the wavelength lambda0 are formed at positions 5a and 5b which are different from the original drawing 4 due to the longitudinal chromatic aberration of a reduction lens. The real image of a practical alignment mark 1 is reflected by a turning mirror 6 arranged below the original drawing 4, and divided into two light fluxes by a beam splitter 7. The imagery is obtained at the conjugate positions 8a, 8b and 8a', 8b'. An objective 9 collimates a light from the position 8a, and forms the image of the position 8a on a fixed slit 11 as the result of combination with an imagery lens 10. The alignment accuracy and the throughput can be improved, thereby.