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1. 发明专利

DE3730614A1 未知
公开(公告)号：DE3730614A1
公开(公告)日：1988-03-24
申请号：DE3730614
申请日：1987-09-11
申请人： HITACHI LTD
发明人： YAMADA SEIICHI , NAITOH TAKASHI , NAMEKAWA TAKASHI , IKEGAMI AKIRA , GOTOO RYOO , NISHIYAMA TOSHIKAZU
IPC分类号： C03C3/074 , G11B5/127 , G11B5/147 , G11B5/23 , G11B5/235 , H01F3/00
摘要： The present invention relates to a magnetic head in which a magnetic metal film comprising a Co-containing amorphous alloy and a crystallizable glass of the PbO-B2O3-ZnO system as a solder glass are used. The magnetic head of the present invention has about 2 times higher recording density than the conventional one as a magnetic head for floppy disks and hard disks because an amorphous alloy is used. Since a crystallizable glass is used as the glass, there can be obtained a magnetic head having a high strength and superior humidity resistance and reliability.

2. 发明专利

DE3011977A1 未知
公开(公告)号：DE3011977A1
公开(公告)日：1980-10-09
申请号：DE3011977
申请日：1980-03-27
申请人： HITACHI LTD
发明人： TANEI HIRAYOSHI , IKEGAMI AKIRA , TAGUCHI NORIYUKI , ABE KATSUO , OHTSU HIROSHI , ISOGAI TOKIO
IPC分类号： C04B35/46 , C04B35/472 , C04B35/499 , H01B3/12 , H01G4/12
摘要： A low temperature-sinterable dielectric composition is provided, whose sintered composition when prepared by firing a uniform mixture consisting of lead ferrotungstate, lead titanate and manganese dioxide at a temperature of not higher than 1,000 DEG C. has the general formula A.Pb(Fe2/3W1/3)1-xTixO3+B.MnO2, wherein 0.005

3. 发明专利

DE3574057D1 AIR-FUEL RATIO DETECTOR 未知
公开(公告)号：DE3574057D1
公开(公告)日：1989-12-07
申请号：DE3574057
申请日：1985-08-12
申请人： HITACHI LTD
发明人： SUZUKI SEIKO , MIKI MASAYUKI , SASAYAMA TAKAO , SUZUKI TOSHITAKA , SATOU NOBUO , UENO SADAYASU , IKEGAMI AKIRA
IPC分类号： G01N27/419 , G01N27/406 , G01N27/409 , G01N27/56
摘要： An air-fuel ratio in the lean range is detected by measuring a limiting current when oxygen diffused to a first electrode (123; 2; 51) is pumped to a second electrode (124; 3; 52) via a solid electrolyte. A stoichiometric air-fuel ratio is detected from electromotive force between first (123; 2; 51) and third electrodes (126; 6; 53) when oxygen is pumped from the first electrode (123; 2; 51) to the third electrode (126; 6; 53). The invention is characterized by use of such three electrodes. Furthermore, an air-fuel ratio in a rich range is detected by either sending oxygen from the first electrode (123; 2; 51) to the third electrode (126; 6; 53) via the solid electrolyte (127; 1; 50) and measuring a current when the electromotive force between the first and third electrodes is controlled to be constant, or measuring a current when the air-fuel ratio range is judged as "rich" from this electromotive force and the polarity of the impressed voltage at the time of lean detection is reversed.

4. 发明专利

DE3227657A1 未知
公开(公告)号：DE3227657A1
公开(公告)日：1983-02-17
申请号：DE3227657
申请日：1982-07-23
申请人： HITACHI LTD
发明人： TOSAKI HIROMI , SUGISHITA NOBUYUKI , IKEGAMI AKIRA
IPC分类号： H01L27/01 , H05K1/03 , H05K1/09 , H05K1/16 , H05K3/46 , H01G4/40
摘要： The multilayer circuit board is constituted of an inorganic insulating material such as a crystallizable glass, crystalline oxide or noncrystallized glass; a conductive material such as a metal or a mixture of a metal with noncrystallized glass; a resistor material consisting of a mixture of a conductive material with the crystallizable glass or noncrystallized glass; and a dielectric material consisting of a mixture of a barium titanate-other oxide mixture with the noncrystallized glass or crystallizable glass, of a lead-containing perovskite type oxide or of a lead-containing laminar bismuth oxide, said board has a multilayer structure wherein a first insulating layer; a first resistor circuit or alternatively first capacitor circuit or alternatively first resistor-capacitor circuit; a second insulating layer; a second resistor circuit or alternatively second capacitor circuit or alternatively second resistor-capacitor circuit are superposed in this order, provided that the second insulating layer has a through-hole(s) filled with the conductive material, and a process for producing the same.

5. 发明专利

CA1223041A AIR-FUEL RATIO DETECTOR 未知
公开(公告)号：CA1223041A
公开(公告)日：1987-06-16
申请号：CA488487
申请日：1985-08-12
申请人： HITACHI LTD
发明人： SUZUKI SEIKO , MIKI MASAYUKI , SASAYAMA TAKAO , SUZUKI TOSHITAKA , SATOH NOBUO , UENO SADAYASU , IKEGAMI AKIRA
IPC分类号： G01N27/419 , G01N27/406 , G01N27/409 , G01N27/56
摘要： In an air-fuel ratio detector for use in the exhaust of an automobile, the air-fuel ratio in the lean range is detected by measuring a limiting current when oxygen diffused to a first electrode is pumped to a second elect trode via a solid electrolyte. A stoichiometric air-fuel ratio is detected from an electromotive force between first and third electrodes, when oxygen is pumped from the first electrode to a third electrode. The invention is characterized by use of these three electrodes. Furthermore, an air-fuel ratio in the rich range is detected by either sending oxygen from the first elect trode to the third electrode via the solid electrolyte and measuring a current when the electromotive force between the first and third electrodes is kept constant, or measuring a current when the air-fuel ratio range is judged as "rich" from this electromotive force, the polarity of the impressed voltage being reversed at the time of lean detection.

6. 发明专利

DE3102197A1 未知
公开(公告)号：DE3102197A1
公开(公告)日：1981-12-03
申请号：DE3102197
申请日：1981-01-23
申请人： HITACHI LTD
发明人： ARIMA HIDEO , ITO MITUKO , IKEGAMI AKIRA , UENO SADAYASU , SATO KANEMASA , NISHIMURA YUTAKA
IPC分类号： G01F1/68 , G01F1/692 , G01K7/22 , G01P5/12 , H01C7/02 , H01C17/065 , H01C17/242 , G01K7/16
摘要： A sensor for detecting a fluid flow velocity or flow amount with high precision and high reliability is made by applying a conductor paste comprising platinum powder and an organic vehicle to the outer surface of a fine inorganic insulating tube, followed by drying and firing, thereby forming a platinum film, processing the platinum film into a spiral band form by laser application, inserting a lead wire into the insulating tube, applying a platinum conductor paste to between the spiral platinum band and the lead wire, followed by drying and baking, thereby connecting the spiral platinum band film to the lead wire.

7. 发明专利

DE3272754D1 DEW SENSOR 未知
公开(公告)号：DE3272754D1
公开(公告)日：1986-09-25
申请号：DE3272754
申请日：1982-10-27
申请人： HITACHI LTD
发明人： TANEI HIRAYOSHI , IWANAGA SHOICHI , IKEGAMI AKIRA , OTSU HIROSHI , ISOMAE HIROMI
IPC分类号： H01C7/00 , G01N27/12 , G01N27/04
摘要： A dew sensor of direct current type and resistance- lowering type with increasing humidity for quick and sharp detection of dewing is provided, which comprises a pair of counterposed electrodes, humidity-sensitive layer of insulating porous metal oxide with a porosity of 20 to 60% provided on and between the counterposed electrodes, and an organic polymer coating layer having a thickness of 0.05 to 2 µm provided on the humidity-sensitive layer.

8. 发明专利

DE3213286A1 Gas-measurement apparatus and method of gas measurement 未知
公开(公告)号：DE3213286A1
公开(公告)日：1983-10-20
申请号：DE3213286
申请日：1982-04-08
申请人： HITACHI LTD
发明人： IWANAGA SHOICHI , SATO NOBUO , IKEGAMI AKIRA , ISOGAI TOKIO , NORO TAKANOBU , ARIMA HIDEO
IPC分类号： G01N27/12 , G01N33/00
摘要： Gas-measurement apparatus and method of gas measurement, in which gas data such as concentration of gas components in a gas mixture, concentration and presence of certain gas components and the like are measured by prior measurement of the sensitivities (gas selectivities) of individual gas sensors to individual gas components making use of differences in gas sensitivities (gas selectivities) of gas sensor materials to gas components and of the linearity of indicated concentration values of gas components with respect to mixing ratios of a gas mixture (conductivity of gas sensors during operation) and with the solution of a plurality of simultaneous linear equations which are arrived at on the basis of the initial voltages (assumed values) found for the individual sensors and the known sensitivities of the individual sensors to the individual gas components.

9. 发明专利

JP2013092530A Adjusting method for electron beam, charged particle optical system control device, and scanning electronic microscope 有权
标题翻译：电子束调整方法，充电粒子光学系统控制装置和扫描电子显微镜
公开(公告)号：JP2013092530A
公开(公告)日：2013-05-16
申请号：JP2012286603
申请日：2012-12-28
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： ESUMI MAKOTO , OSE YOICHI , IKEGAMI AKIRA , TODOKORO HIDEO , ISHIJIMA TATSUAKI , SATO TAKAHIRO , FUKAYA RITSUO , ASAO KAZUNARI
IPC分类号： G01B15/00 , G01B15/04 , G01N23/00 , G01Q30/06 , G01Q30/18 , G01Q30/20 , G21K7/00 , H01J37/21 , H01J37/28
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0041 , H01J2237/216 , H01J2237/244 , H01J2237/24564 , H01J2237/24592 , H01J2237/2594 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a method and device that enable high-precision inspection and measurement even if a different electrification phenomenon is included while taking into consideration the possibility that it is difficult to perform accurate inspection and measurement since different types of electrification are present together.SOLUTION: There is provided the method and device for correcting a pattern size obtained by charged particle beam irradiation based upon a fitting function showing change in electrification condition. In a configuration like this, accurate inspection and measurement can be performed by a scanning charged particle beam device even if different types of electrification with different characteristics are present together.
摘要翻译：要解决的问题：提供即使在包括不同的带电现象的同时考虑到难以进行精确的检查和测量的可能性的高精度检查和测量的方法和装置，因为不同类型的电气化一起存在。解决方案：提供了一种用于校正通过带电粒子束照射获得的图案尺寸的方法和装置，其基于表示电气化条件变化的拟合函数。在这样的结构中，即使具有不同特性的不同类型的带电一起存在，也可以通过扫描带电粒子束装置进行精确的检查和测量。版权所有（C）2013，JPO＆INPIT

10. 发明专利

JP2009200054A Electron beam adjusting method, charged particle optical system control device and scanning electron microscope 有权
标题翻译：电子束调整方法，充电粒子光学系统控制装置和扫描电子显微镜
公开(公告)号：JP2009200054A
公开(公告)日：2009-09-03
申请号：JP2009124837
申请日：2009-05-25
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： ESUMI MAKOTO , OSE YOICHI , IKEGAMI AKIRA , TODOKORO HIDEO , ISHIJIMA TATSUAKI , SATO TAKAHIRO , FUKAYA RITSUO , ASAO KAZUNARI
IPC分类号： H01J37/21 , G01N23/00 , G01Q30/06 , G01Q30/18 , G01Q30/20 , G01R29/24 , G21K7/00 , H01J37/28 , H01L21/66
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/0041 , H01J2237/216 , H01J2237/244 , H01J2237/24564 , H01J2237/24592 , H01J2237/2594 , H01J2237/2817
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam irradiation method and a charged particle beam device suitable for reducing focus offset, magnification fluctuation, measurement length error in the charged particle beam device caused by charging on a sample.
SOLUTION: In order to achieve the objective, this invention provides a method of measuring a potential distribution on the sample by an electrostatic potentiometer for measuring the potential on the sample while the sample carried in by a carry-in mechanism of a charged particle beam passes. And also, the invention provides a method of measuring local charging at a predetermined point on the sample and isolating and measuring the wide area electrostatic charge quantity from those local electrostatic charges. Moreover, the invention provides a method of correcting the measurement length value or magnification based on fluctuations found by measuring the amount of electrostatic charge at the predetermined points under at least two charged particle optical conditions, and further, measuring a change of dimension measurement value with the use of the charged particle beam accompanying the change of the amount of electrostatic charge at the predetermined points.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种适用于减少由样品充电引起的带电粒子束装置中的聚焦偏移，放大波动，测量长度误差的带电粒子束照射方法和带电粒子束装置。解决方案：为了实现该目的，本发明提供了一种通过静电电位计测量样品上的电势分布的方法，用于测量样品上的电位，而样品由携带的携带机构携带粒子束通过。此外，本发明还提供了一种在样品上的预定点测量局部充电的方法，并且从这些局部静电电荷中分离和测量广域静电电荷量。此外，本发明提供一种基于通过测量至少两个带电粒子光学条件下的预定点处的静电电荷量而发现的波动来校正测量长度值或倍率的方法，并且还测量尺寸测量值的变化，使用伴随着预定点的静电电荷量的变化的带电粒子束。版权所有（C）2009，JPO＆INPIT

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