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1. 发明授权

US08134220B2 Two-terminal nanotube devices including a nanotube bridge and methods of making same 有权
标题翻译：包括纳米管桥的两端纳米管装置及其制造方法
公开(公告)号：US08134220B2
公开(公告)日：2012-03-13
申请号：US12139910
申请日：2008-06-16
申请人： H. Montgomery Manning , Thomas Rueckes , Jonathan W. Ward , Brent M. Segal
发明人： H. Montgomery Manning , Thomas Rueckes , Jonathan W. Ward , Brent M. Segal
IPC分类号： G11C11/00 , H01L23/52 , H01L21/02
CPC分类号： H01L51/0591 , B82Y10/00 , G11C13/025 , H01L51/0048 , Y10S977/943
摘要： Nanotube switching devices having nanotube bridges are disclosed. Two-terminal nanotube switches include conductive terminals extending up from a substrate and defining a void in the substrate. Nantoube articles are suspended over the void or form a bottom surface of a void. The nanotube articles are arranged to permanently contact at least a portion of the conductive terminals. An electrical stimulus circuit in communication with the conductive terminals is used to generate and apply selected waveforms to induce a change in resistance of the device between relatively high and low resistance values. Relatively high and relatively low resistance values correspond to states of the device. A single conductive terminal and a interconnect line may be used. The nanotube article may comprise a patterned region of nanotube fabric, having an active region with a relatively high or relatively low resistance value. Methods of making each device are disclosed.
摘要翻译：公开了具有纳米管桥的纳米管开关器件。两端纳米管开关包括从衬底向上延伸并且在衬底中限定空隙的导电端子。纳米管制品悬浮在空隙上或形成空隙的底部表面。纳米管制品布置成永久地接触导电端子的至少一部分。使用与导电端子连通的电刺激电路来产生并施加所选择的波形以引起器件在较高和较低电阻值之间的电阻变化。相对较高且相对较低的电阻值对应于器件的状态。可以使用单个导电端子和互连线。纳米管制品可以包括具有相对较高或相对低的电阻值的有源区的纳米管织物的图案化区域。公开了制造每个装置的方法。

2. 发明授权

US08587989B2 NRAM arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same 有权
标题翻译：具有纳米管块的NRAM阵列，纳米管迹线和纳米管平面及其制造方法
公开(公告)号：US08587989B2
公开(公告)日：2013-11-19
申请号：US12486602
申请日：2009-06-17
申请人： H. Montgomery Manning , Thomas Rueckes , Claude L. Bertin , Jonathan W. Ward , Garo Derderian
发明人： H. Montgomery Manning , Thomas Rueckes , Claude L. Bertin , Jonathan W. Ward , Garo Derderian
IPC分类号： G11C13/00
CPC分类号： G11C13/025 , B82Y10/00 , H01L27/2409 , H01L27/2436 , H01L27/2463 , H01L27/2472 , H01L45/04 , H01L45/1233 , H01L45/149 , H01L45/1675
摘要： NRAM arrays with nanotube blocks, traces and planes, and methods of making the same are disclosed. In some embodiments, a nanotube memory array includes a nanotube fabric layer disposed in electrical communication with first and second conductor layers. A memory operation circuit including a circuit for generating and applying a select signal on first and second conductor layers to induce a change in the resistance of the nanotube fabric layer between the first and second conductor layers is provided. At least two adjacent memory cells are formed in at least two selected cross sections of the nanotube fabric and conductor layers such that each memory cell is uniquely addressable and programmable. For each cell, a change in resistance corresponds to a change in an informational state of the memory cell. Some embodiments include bit lines, word lines, and reference lines. In some embodiments, 6F2 memory cell density is achieved.
摘要翻译：公开了具有纳米管块，轨迹和平面的NRAM阵列及其制造方法。在一些实施例中，纳米管存储器阵列包括布置成与第一和第二导体层电连通的纳米管织物层。一种存储器操作电路，包括用于在第一和第二导体层上产生和施加选择信号以引起第一和第二导体层之间的纳米管织物层的电阻变化的电路。至少两个相邻的存储单元形成在纳米管织物和导体层的至少两个选定的横截面中，使得每个存储单元是唯一可寻址和可编程的。对于每个单元，电阻变化对应于存储单元的信息状态的变化。一些实施例包括位线，字线和参考线。在一些实施例中，实现6F2存储单元密度。

3. 发明授权

US08631562B2 Methods of making nanotube switches 有权
标题翻译：制作纳米管开关的方法
公开(公告)号：US08631562B2
公开(公告)日：2014-01-21
申请号：US12953076
申请日：2010-11-23
申请人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
发明人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
IPC分类号： H01H11/00 , H01H65/00
CPC分类号： H01L23/62 , B82Y10/00 , G11C13/025 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/17 , H01H1/0094 , H01L23/60 , H01L27/0248 , H01L27/0251 , H01L51/0048 , H01L2224/16 , H01L2924/01019 , H01L2924/0102 , H01L2924/01025 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01079 , H01L2924/09701 , H01L2924/12044 , H01L2924/19103 , H01L2924/19104 , H01L2924/19105 , H01L2924/3011 , H05K1/0259 , Y10T29/49105 , Y10T29/49117 , Y10T29/49124 , Y10T29/49204
摘要： An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment.
摘要翻译：用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。开关耦合到保护电路和放电路径。纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。纳米管开关可以在芯片载体上。根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。

4. 发明申请

US20100051880A1 AQUEOUS CARBON NANOTUBE APPLICATOR LIQUIDS AND METHODS FOR PRODUCING APPLICATOR LIQUIDS THEREOF 有权
标题翻译：水性碳纳米管应用液体及其生产应用液体的方法
公开(公告)号：US20100051880A1
公开(公告)日：2010-03-04
申请号：US12612445
申请日：2009-11-04
申请人： Eliodor G. Ghenciu , Tzong-Ru T. Han , Ramesh SIVARAJAN , Thomas Rueckes , Rahul Sen , Brent M. Segal , Jonathan W. Ward
发明人： Eliodor G. Ghenciu , Tzong-Ru T. Han , Ramesh SIVARAJAN , Thomas Rueckes , Rahul Sen , Brent M. Segal , Jonathan W. Ward
IPC分类号： H01B1/04
CPC分类号： D06M11/64 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B32/17 , C01B2202/02 , C01B2202/28 , D06M10/02 , D06M11/50 , D06M11/55 , D06M2101/40 , H01L51/0003 , H01L51/0048 , Y10S977/746 , Y10S977/845
摘要： Certain applicator liquids and method of making the applicator liquids are described. The applicator liquids can be used to form nanotube films or fabrics of controlled properties. An applicator liquid for preparation of a nanotube film or fabric includes a controlled concentration of nanotubes dispersed in a liquid medium containing water. The controlled concentration is sufficient to form a nanotube fabric or film of preselected density and uniformity.
摘要翻译：描述了一些施用液体和制备涂抹液的方法。施用液体可用于形成具有受控特性的纳米管膜或织物。用于制备纳米管膜或织物的涂布液包括分散在含水液体介质中的受控浓度的纳米管。受控浓度足以形成预选密度和均匀性的纳米管织物或薄膜。

5. 发明授权

US07567414B2 Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches 有权
标题翻译：纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关
公开(公告)号：US07567414B2
公开(公告)日：2009-07-28
申请号：US11264935
申请日：2005-11-02
申请人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
发明人： Claude L. Bertin , Brent M. Segal , Thomas Rueckes , Jonathan W. Ward
IPC分类号： H02H9/00
CPC分类号： H01L23/62 , B82Y10/00 , G11C13/025 , G11C17/16 , G11C17/165 , G11C23/00 , G11C2213/17 , H01H1/0094 , H01L23/60 , H01L27/0248 , H01L27/0251 , H01L51/0048 , H01L2224/16 , H01L2924/01019 , H01L2924/0102 , H01L2924/01025 , H01L2924/01046 , H01L2924/01066 , H01L2924/01068 , H01L2924/01077 , H01L2924/01079 , H01L2924/09701 , H01L2924/12044 , H01L2924/19103 , H01L2924/19104 , H01L2924/19105 , H01L2924/3011 , H05K1/0259 , Y10T29/49105 , Y10T29/49117 , Y10T29/49124 , Y10T29/49204
摘要： Nanotube ESD protective devices and corresponding nonvolatile and volatile nanotube switches. An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment. The ESD circuit may be repeatedly programmed between the activated and deactivated states so as to repeatedly activate and deactivate ESD protection of the protected circuit. The nanotube switch provides protection based on the magnitude of the signal on the input pad.
摘要翻译：纳米管ESD保护装置和相应的非易失性和挥发性纳米管开关。用于保护受保护电路的静电放电（ESD）保护电路耦合到输入焊盘。 ESD电路包括电子控制的纳米管开关。开关耦合到保护电路和放电路径。纳米管开关可以响应于控制的电刺激而被控制在去激活状态和激活状态之间。激活状态产生电流路径，使得输入焊盘上的信号流到放电路径，使输入焊盘处的信号保持在受保护电路的预定可操作范围内。纳米管开关，输入焊盘和受保护电路可以在半导体芯片上。纳米管开关可以在芯片载体上。根据实施例，去激活状态和激活状态可以是易失性的或非易失性的。可以在激活和去激活状态之间重复地编程ESD电路，以便重复激活和去激活受保护电路的ESD保护。纳米管开关基于输入焊盘上的信号幅度提供保护。

6. 发明授权

US07566478B2 Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles 有权
标题翻译：制作碳纳米管薄膜，层，织物，丝带，元件和制品的方法
公开(公告)号：US07566478B2
公开(公告)日：2009-07-28
申请号：US10341005
申请日：2003-01-13
申请人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： C23C16/26 , B05D5/12 , B05D3/00
CPC分类号： B82Y40/00 , B82Y10/00 , B82Y30/00 , C01B32/162 , C01B2202/02 , C01B2202/22 , G11C13/025 , G11C23/00 , G11C2213/16 , G11C2213/81 , H01L21/76838 , H01L2221/1094 , Y10S977/843
摘要： Methods of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
摘要翻译：公开了制备碳纳米管薄膜，层，织物，丝带，元件和制品的方法。将碳纳米管生长催化剂施加到基材的表面上。对基板进行化学气相沉积的含碳气体以生长碳纳米管的无纺织物。根据限定的图案选择性地去除无纺织物的部分以产生制品。碳纳米管的无纺布可以通过将碳纳米管生长催化剂涂覆在晶片基板的表面上来制造催化剂的分散单层。对基板进行化学气相沉积的含碳气体，使碳纳米管的无纺织物接触并覆盖晶片的表面，其中织物的密度基本上均匀。

7. 发明授权

US07560136B2 Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles 有权
标题翻译：使用薄金属层制造碳纳米管薄膜，层，织物，丝带，元件和制品的方法
公开(公告)号：US07560136B2
公开(公告)日：2009-07-14
申请号：US10341055
申请日：2003-01-13
申请人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： C23C16/22 , C23C16/00
CPC分类号： H01L21/3146 , B82Y10/00 , H01L29/43 , Y10S977/742 , Y10S977/75 , Y10S977/751
摘要： Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.
摘要翻译：公开了使用薄金属层制造碳纳米管薄膜，层，织物，丝带，元件和制品的方法。将碳纳米管生长催化剂施加到基材的表面，包括一层或多层薄金属层。对基板进行化学气相沉积的含碳气体以生长碳纳米管的无纺织物。根据限定的图案选择性地去除无纺织物的部分以产生制品。碳纳米管的无纺布可以通过将碳纳米管生长催化剂涂覆在晶片基板的表面上来制造催化剂的分散单层。对基板进行化学气相沉积的含碳气体，使碳纳米管的无纺织物接触并覆盖晶片的表面，其中织物的密度基本上均匀。

8. 发明授权

US07335395B2 Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles 有权
标题翻译：使用预制纳米管制造碳纳米管薄膜，层，织物，丝带，元件和制品的方法
公开(公告)号：US07335395B2
公开(公告)日：2008-02-26
申请号：US10341054
申请日：2003-01-13
申请人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： B05D3/12
CPC分类号： B05D1/002 , B05D3/0254 , B82Y30/00 , C23C16/0281 , C23C16/26 , D04H1/4234 , D04H1/4242 , D04H1/4382 , D04H1/4391
摘要： Methods of Using Preformed Nanotubes to Make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. To make various articles, certain embodiments provide a substrate. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. To make a nanofabric, a substrate is provided. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes wherein the non-woven fabric is substantially uniform density.
摘要翻译：公开了使用预制纳米管制备碳纳米管膜，层，织物，丝带，元件和制品的方法。为了制造各种制品，某些实施方案提供了基材。将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物。根据限定的图案选择性地去除无纺织物的部分以产生制品。为了制造纳米纤维，提供了基材。将预制的纳米管施加到基底的表面以产生碳纳米管的无纺织物，其中无纺织物具有基本均匀的密度。

9. 发明授权

US07304357B2 Devices having horizontally-disposed nanofabric articles and methods of making the same 有权
标题翻译：具有水平布置的纳米制品的装置及其制造方法
公开(公告)号：US07304357B2
公开(公告)日：2007-12-04
申请号：US11193795
申请日：2005-07-29
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L29/84
CPC分类号： G11C13/025 , B81B2203/0338 , B81B2203/04 , B81C1/00142 , B81C2201/0109 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/22 , G11C11/56 , G11C23/00 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L51/0048 , H01L2221/1094 , Y10S977/724 , Y10S977/734 , Y10S977/742
摘要： New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electro-mechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.
摘要翻译：描述了具有水平布置的纳米制品的新器件及其制造方法。分立的机电装置包括具有导电迹线的结构。定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。在第一状态下，纳米管制品相对于迹线具有间隔的关系，并且在第二状态下，纳米管制品与痕迹接触。低电阻信号路径与所定义的纳米片段电连通。在某些实施例中，该结构包括限定的导电迹线设置的间隙。限定的间隙具有限定的宽度，并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。在某些实施例中，夹具设置在纳米管织物片段的两端中的每一个处，并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。在某些实施例中，夹具由导电材料制成。在某些实施方案中，纳米管贴片和迹线之间的接触是非挥发性状态。在某些实施方案中，纳米管贴片和迹线之间的接触是挥发性状态。在某些实施例中，至少一个导电迹线具有界面材料，以改变纳米管织物片段和导电迹线之间的吸引力。

10. 发明授权

US07259410B2 Devices having horizontally-disposed nanofabric articles and methods of making the same 有权
标题翻译：具有水平布置的纳米制品的装置及其制造方法
公开(公告)号：US07259410B2
公开(公告)日：2007-08-21
申请号：US10776059
申请日：2004-02-11
申请人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
发明人： Venkatachalam C. Jaiprakash , Jonathan W. Ward , Thomas Rueckes , Brent M. Segal
IPC分类号： H01L27/10
CPC分类号： G11C13/025 , B81B2203/0338 , B81B2203/04 , B81C1/00142 , B81C2201/0109 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/162 , C01B2202/02 , C01B2202/22 , G11C11/56 , G11C23/00 , G11C2213/16 , G11C2213/77 , G11C2213/81 , H01H1/0094 , H01L21/76838 , H01L51/0048 , H01L2221/1094 , Y10S977/724 , Y10S977/734 , Y10S977/742
摘要： New devices having horizontally-disposed nanofabric articles and methods of making same are described. A discrete electromechanical device includes a structure having an electrically-conductive trace. A defined patch of nanotube fabric is disposed in spaced relation to the trace; and the defined patch of nanotube fabric is electromechanically deflectable between a first and second state. In the first state, the nanotube article is in spaced relation relative to the trace, and in the second state the nanotube article is in contact with the trace. A low resistance signal path is in electrical communication with the defined patch of nanofabric. Under certain embodiments, the structure includes a defined gap into which the electrically conductive trace is disposed. The defined gap has a defined width, and the defined patch of nanotube fabric spans the gap and has a longitudinal extent that is slightly longer than the defined width of the gap. Under certain embodiments, a clamp is disposed at each of two ends of the nanotube fabric segment and disposed over at least a portion of the nanotube fabric segment substantially at the edges defining the gap. Under certain embodiments, the clamp is made of electrically-conductive material. Under certain embodiments, the contact between the nanotube patch and the trace is a non-volatile state. Under certain embodiments, the contact between the nanotube patch and the trace is a volatile state. Under certain embodiments, the at least one electrically conductive trace has an interface material to alter the attractive force between the nanotube fabric segment and the electrically conductive trace.
摘要翻译：描述了具有水平布置的纳米制品的新器件及其制造方法。分立的机电装置包括具有导电迹线的结构。定义的纳米管织物贴片与痕迹间隔开设置; 并且所述限定的纳米管织物片在第一和第二状态之间是机电偏转的。在第一状态下，纳米管制品相对于迹线具有间隔的关系，并且在第二状态下，纳米管制品与痕迹接触。低电阻信号路径与所定义的纳米片段电连通。在某些实施例中，该结构包括限定的导电迹线设置的间隙。限定的间隙具有限定的宽度，并且限定的纳米管织物片段跨过间隙并且具有比限定的间隙宽度稍长的纵向范围。在某些实施例中，夹具设置在纳米管织物片段的两端中的每一个处，并且在纳米管织物片段的至少一部分上大致位于限定间隙的边缘处。在某些实施例中，夹具由导电材料制成。在某些实施方案中，纳米管贴片和迹线之间的接触是非挥发性状态。在某些实施方案中，纳米管贴片和迹线之间的接触是挥发性状态。在某些实施例中，至少一个导电迹线具有界面材料，以改变纳米管织物片段和导电迹线之间的吸引力。

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