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    • 8. 发明授权
    • Lateral high-voltage transistor
    • 横向高压晶体管
    • US06326656B1
    • 2001-12-04
    • US09511813
    • 2000-02-24
    • Jenoe Tihanyi
    • Jenoe Tihanyi
    • H01L2972
    • H01L29/7816H01L29/0623H01L29/0634
    • A lateral high-voltage transistor has a semiconductor body made of a lightly doped semiconductor substrate of a first conductivity type and an epitaxial layer of a second conductivity type. The epitaxial layer is provided on the semiconductor substrate. The lateral high-voltage transistor has a drain electrode, a source electrode, a gate electrode and a semiconductor zone of the first conductivity type which is provided under the gate electrode and is embedded in the epitaxial layer. Between the source electrode and the drain electrode trenches are provided in lines and rows in the semiconductor layer. The walls of the trenches are highly doped with dopants of the first conductivity type.
    • 横向高压晶体管具有由第一导电类型的轻掺杂半导体衬底和第二导电类型的外延层制成的半导体本体。 外延层设置在半导体衬底上。 横向高压晶体管具有漏极电极,源极电极,栅极电极和第一导电类型的半导体区域,其设置在栅电极下方并嵌入在外延层中。 在源电极和漏电极沟槽之间设置有半导体层中的行和列。 沟槽的壁被高掺杂有第一导电类型的掺杂剂。