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1. 发明授权

US08146236B1 Method for providing a perpendicular magnetic recording (PMR) transducer 有权
标题翻译：提供垂直磁记录（PMR）传感器的方法
公开(公告)号：US08146236B1
公开(公告)日：2012-04-03
申请号：US12057692
申请日：2008-03-28
申请人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
发明人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method and system for providing a perpendicular magnetic recording (PMR) transducer from pole layer(s) are disclosed. First and second planarization stop layers are provided on the pole layer(s). A mask is provided on the second planarization stop layer. A first portion of the mask resides on a portion of the pole layer(s) used to form the PMR pole. The PMR pole is defined after the mask is provided. An intermediate layer surrounding at least the PMR pole is provided. A first planarization is performed on at least the intermediate layer. A portion of the second planarization stop layer is removed during the first planarization. A remaining portion of the second planarization stop layer is removed. A second planarization is performed. A portion of the first planarization stop layer remains after the second planarization. A write gap and shield are provided on the PMR pole and write gap, respectively.
摘要翻译：公开了一种用于从极层提供垂直磁记录（PMR）换能器的方法和系统。第一和第二平坦化停止层设置在极层上。在第二平坦化停止层上设置掩模。掩模的第一部分位于用于形成PMR极的极层的一部分上。在提供面罩之后定义PMR极。提供至少围绕PMR极的中间层。至少在中间层上执行第一平面化。在第一平坦化期间，去除第二平坦化停止层的一部分。去除第二平坦化停止层的剩余部分。执行第二平面化。在第二平面化之后，第一平坦化停止层的一部分保留。分别在PMR极和写间隙上提供写间隙和屏蔽。

2. 发明授权

US08797680B1 Perpendicular magnetic recording head having reduced shield notching 有权
标题翻译：垂直磁记录头具有减少的屏蔽开槽
公开(公告)号：US08797680B1
公开(公告)日：2014-08-05
申请号：US13417930
申请日：2012-03-12
申请人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
发明人： Guanghong Luo , Liubo Hong , Honglin Zhu , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A perpendicular magnetic recording (PMR) transducer is provided. The PRM transducer includes a PMR pole having a top, a bottom, and at least one sidewall, the bottom having a bottom width, the top having a top width bigger than the bottom width. The PRM transducer further includes an intermediate layer adjacent to the at least one sidewall, a write gap on the PMR pole, the write gap including a first layer on the PMR pole, the first layer including a planarization stop layer, and a shield on the write gap.
摘要翻译：提供垂直磁记录（PMR）传感器。 PRM传感器包括具有顶部，底部和至少一个侧壁的PMR极，底部具有底部宽度，顶部具有大于底部宽度的顶部宽度。 PRM换能器还包括与至少一个侧壁相邻的中间层，PMR极上的写入间隙，写入间隙包括PMR极上的第一层，第一层包括平坦化停止层，以及屏蔽写差距。

3. 发明授权

US08486285B2 Damascene write poles produced via full film plating 失效
标题翻译：大马士革通过全电镀制作电极
公开(公告)号：US08486285B2
公开(公告)日：2013-07-16
申请号：US12544998
申请日：2009-08-20
申请人： Ronghui Zhou , Ming Jiang , Xiaohai Xiang , Jinwen Wang , Guanghong Luo , Yun-Fei Li
发明人： Ronghui Zhou , Ming Jiang , Xiaohai Xiang , Jinwen Wang , Guanghong Luo , Yun-Fei Li
IPC分类号： B44C1/22
CPC分类号： G11B5/855 , Y10T29/49048
摘要： A method for forming a write pole comprises forming a stop layer over a substrate layer of a wafer, the stop layer having an opening above a damascene trench in the substrate layer, and forming a buffer layer over the stop layer, the buffer layer having an opening above the opening of the stop layer. The method further comprises plating a layer of magnetic material over the wafer, disposing a first sacrificial material over a region of the magnetic material above the damascene trench, performing a milling or etching operation over the wafer to remove the magnetic material not covered by the first sacrificial material and to remove the first sacrificial material, disposing a second sacrificial material over the wafer, and performing a polishing operation over the wafer to remove the region of the magnetic material above the damascene trench, the second sacrificial material, and the buffer layer.
摘要翻译：用于形成写极的方法包括在晶片的衬底层上形成阻挡层，所述阻挡层在衬底层中具有在镶嵌沟槽上方的开口，以及在停止层上形成缓冲层，所述缓冲层具有在停止层的开口上方开口。该方法还包括在晶片上镀覆一层磁性材料，在金刚石沟槽上方的磁性材料的区域上设置第一牺牲材料，在晶片上进行研磨或蚀刻操作，以去除第一牺牲材料并且去除第一牺牲材料，在晶片上设置第二牺牲材料，以及在晶片上执行抛光操作以去除镶嵌沟槽，第二牺牲材料和缓冲层之上的磁性材料的区域。

4. 发明授权

US09099118B1 Dual damascene process for producing a PMR write pole 有权
标题翻译：用于生产PMR写极的双镶嵌工艺
公开(公告)号：US09099118B1
公开(公告)日：2015-08-04
申请号：US12472341
申请日：2009-05-26
申请人： Ronghui Zhou , Ming Jiang , Guanghong Luo , Yun-Fei Li
发明人： Ronghui Zhou , Ming Jiang , Guanghong Luo , Yun-Fei Li
IPC分类号： G11B5/127 , H04R31/00 , G11B5/31
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3116 , G11B5/313 , G11B5/3163 , Y10T29/49046
摘要： Methods of forming a write pole are disclosed. A structure comprising a bottom insulating layer and a top insulating layer is provided. A top damascene trench is formed in the top insulating layer, and a bottom damascene trench is formed in the bottom insulating layer. The bottom damascene trench and a portion of the top damascene trench are filled with a pole material. The top insulating layer and a portion of the pole material located above the bottom damascene trench are removed.
摘要翻译：公开了形成写极的方法。提供了包括底部绝缘层和顶部绝缘层的结构。在顶部绝缘层中形成顶部镶嵌沟槽，并且在底部绝缘层中形成底部镶嵌沟槽。底部镶嵌沟槽和顶部镶嵌沟槽的一部分填充有极材料。去除顶部绝缘层和位于底部镶嵌沟槽上方的极材料的一部分。

5. 发明授权

US08262918B1 Methods of producing damascene main pole for perpendicular magnetic recording head 有权
标题翻译：生产用于垂直磁记录头的镶嵌主极的方法
公开(公告)号：US08262918B1
公开(公告)日：2012-09-11
申请号：US12411270
申请日：2009-03-25
申请人： Yun-Fei Li , Ronghui Zhou , Guanghong Luo , Ming Jiang
发明人： Yun-Fei Li , Ronghui Zhou , Guanghong Luo , Ming Jiang
IPC分类号： B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： Methods of producing magnetic recording heads are disclosed. The methods can include providing a wafer comprising a substrate layer in which are disposed a plurality of damascene trenches. The method can further include depositing a pole material across the whole wafer, wherein the plurality of trenches are filled with the pole material. The methods can further include depositing a mask material over the pole material across the whole wafer. The methods can further include performing a first material removal process across the whole wafer to remove the mask material and a first portion of the pole material at a same material removal rate. The methods can further include performing a second material removal process to remove a second portion of the pole material above the substrate layer.
摘要翻译：公开了制造磁记录头的方法。所述方法可以包括提供包括其中布置有多个镶嵌沟槽的基底层的晶片。该方法还可以包括在整个晶片上沉积极材料，其中多个沟槽用极材料填充。该方法还可以包括在整个晶片上沉积超过极材料的掩模材料。该方法还可以包括在整个晶片上执行第一材料去除工艺，以相同的材料去除速率移除掩模材料和极材料的第一部分。所述方法还可以包括执行第二材料去除工艺以去除衬底层上方的极材料的第二部分。

6. 发明授权

US09196270B1 Method for providing a magnetoresistive element having small critical dimensions 有权
标题翻译：提供具有小临界尺寸的磁阻元件的方法
公开(公告)号：US09196270B1
公开(公告)日：2015-11-24
申请号：US11635830
申请日：2006-12-07
申请人： Danning Yang , Guanghong Luo , Yun-Fei Li
发明人： Danning Yang , Guanghong Luo , Yun-Fei Li
IPC分类号： G11B5/31 , G11B5/39 , H01L21/311 , H01L21/314
CPC分类号： G11B5/398 , G11B5/3163 , G11B5/39 , G11B5/3903 , G11B5/3932 , H01L21/31138 , H01L21/3144 , H01L43/08 , Y10T29/49041 , Y10T29/49048 , Y10T29/49052
摘要： The method and system for providing a magnetoresistive device are described. The method and system include depositing a plurality of magnetoresistive element layers which cover at least one device area and at least one field area. The method and system also include providing a single layer mask. The single layer mask covers a first portion of the magnetoresistive element layers in the device area(s) and exposes the magnetoresistive element layers in the field area(s). The method and system include defining the magnetoresistive element(s) using the single layer mask and depositing a hard bias layer on the device area(s) and the field area(s) after the magnetic element(s) are defined. The method and system further include performing a planarization after the hard bias layer is deposited.
摘要翻译：描述了用于提供磁阻器件的方法和系统。该方法和系统包括沉积多个覆盖至少一个器件区域和至少一个场区域的磁阻元件层。该方法和系统还包括提供单层掩模。单层掩模覆盖器件区域中的磁阻元件层的第一部分并且暴露场区域中的磁阻元件层。该方法和系统包括使用单层掩模限定磁阻元件，并且在限定了磁性元件之后，在器件区域和场区域上沉积硬偏置层。所述方法和系统还包括在沉积硬偏压层之后执行平面化。

7. 发明授权

US08375564B1 Method for fabricating a pole of a magnetic transducer 有权
标题翻译：一种用于制造磁换能器极点的方法
公开(公告)号：US08375564B1
公开(公告)日：2013-02-19
申请号：US12633562
申请日：2009-12-08
申请人： Guanghong Luo , Danning Yang , Weimin Si , Dujiang Wan , Yun-Fei Li , Lijie Guan , Ming Jiang
发明人： Guanghong Luo , Danning Yang , Weimin Si , Dujiang Wan , Yun-Fei Li , Lijie Guan , Ming Jiang
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/1278 , G11B5/3116 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method provides a pole of magnetic recording transducer. A nonmagnetic stop layer having a thickness and a top surface is provided. A depression that forms a bevel is provided in the stop layer. The bevel has a depth less than the thickness and a bevel angle with respect to a remaining portion of the top surface. The bevel angle is greater than zero and less than ninety degrees. An intermediate layer having a substantially flat top surface is provided over the stop layer. A trench is formed in the intermediate layer via a removal process. The trench has a profile corresponding to the pole. The stop layer is a stop for the removal process. The method also includes providing the pole in the trench. The pole has a leading edge bevel corresponding to the bevel in the stop layer.
摘要翻译：一种方法提供磁记录传感器的极点。提供具有厚度和顶表面的非磁性停止层。形成斜面的凹陷设置在停止层中。该斜面具有小于该厚度的深度和相对于顶部表面的剩余部分的斜角。斜角大于零，小于九十度。具有基本上平坦的顶表面的中间层设置在停止层上。通过去除工艺在中间层中形成沟槽。沟槽具有对应于极点的轮廓。停止层是移除过程的停止点。该方法还包括在沟槽中设置极点。极具有对应于停止层中的斜面的前缘斜面。

8. 发明授权

US08320077B1 Method and system for providing a high moment film 有权
标题翻译：提供高力矩胶片的方法和系统
公开(公告)号：US08320077B1
公开(公告)日：2012-11-27
申请号：US12334753
申请日：2008-12-15
申请人： Yunjun Tang , Yun-Fei Li , Yingjian Chen
发明人： Yunjun Tang , Yun-Fei Li , Yingjian Chen
IPC分类号： G11B5/127 , G11B5/147 , G11B5/31
CPC分类号： G11B5/147 , G11B5/1278 , G11B5/3113 , G11B5/3116 , G11B5/3146
摘要： A method and system for providing a high moment film are disclosed. The high moment film might be used in structures, such as a pole, of a magnetic transducer. The method and system includes providing a plurality of high moment layers and at least one soft magnetic layer interleaved with and ferromagnetically coupled with the plurality of high moment layers. Each of the plurality of high moment layers has a magnetic moment of greater than 2.4 Tesla. The at least one soft magnetic layer has a hard axis coercivity of not more than twenty Oersted. The high moment film has a total thickness of at least one thousand Angstroms.
摘要翻译：公开了一种用于提供高力矩薄膜的方法和系统。高力矩胶片可用于磁性传感器的结构，如磁极。该方法和系统包括提供多个高力矩层和至少一个与多个高力矩层交织并且与磁化耦合的软磁层。多个高力矩层中的每一个具有大于2.4特斯拉的磁矩。所述至少一个软磁性层具有不超过二十奥斯特的硬轴矫顽力。高力矩薄膜的总厚度至少为一千埃。

9. 发明授权

US08231796B1 Method and system for providing a magnetic recording transducer having side shields 有权
标题翻译：用于提供具有侧屏蔽的磁记录换能器的方法和系统
公开(公告)号：US08231796B1
公开(公告)日：2012-07-31
申请号：US12331238
申请日：2008-12-09
申请人： Yun-Fei Li , Yingjian Chen
发明人： Yun-Fei Li , Yingjian Chen
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/315
摘要： A method and system provide a magnetic transducer that includes an underlayer and a nonmagnetic layer on the underlayer. The method and system include providing a trench in the nonmagnetic layer. The trench has a plurality of sides. The method and system also include providing a separation layer in the trench. A portion of the separation layer resides on the sides of the trench. The method and system include providing the main pole. At least part of the main pole resides in the trench on the portion of the separation layer and has a plurality of pole sides. The method and system further include removing at least a portion of the second nonmagnetic layer, thereby exposing the portion of the separation layer. The method and system also include providing a side shield. The separation layer magnetically separates the pole sides from the side shield.
摘要翻译：一种方法和系统提供一种在底层上包括底层和非磁性层的磁换能器。该方法和系统包括在非磁性层中提供沟槽。沟槽具有多个侧面。该方法和系统还包括在沟槽中提供分离层。分离层的一部分位于沟槽的侧面。该方法和系统包括提供主极。主极的至少一部分位于分离层部分上的沟槽中，并且具有多个极侧。所述方法和系统还包括去除第二非磁性层的至少一部分，从而暴露分离层的部分。该方法和系统还包括提供侧护罩。分离层将极侧与侧护罩磁性地分离。

10. 发明授权

US07819979B1 Method and system for cleaning magnetic artifacts using a carbonyl reactive ion etch 有权
标题翻译：使用羰基反应离子蚀刻清洁磁伪影的方法和系统
公开(公告)号：US07819979B1
公开(公告)日：2010-10-26
申请号：US11046972
申请日：2005-01-31
申请人： Benjamin Chen , Yun-Fei Li , Hugh C. Hiner , Wei Zhang , Yingjian Chen
发明人： Benjamin Chen , Yun-Fei Li , Hugh C. Hiner , Wei Zhang , Yingjian Chen
IPC分类号： B08B7/00 , B08B7/04
CPC分类号： G01R33/098 , B82Y25/00 , B82Y40/00 , G11B5/84 , G11C11/161 , H01F10/3254 , H01F10/3268 , H01F41/308 , H01F41/32
摘要： A method and system for providing a magnetic structure that includes at least one magnetic material is disclosed. The method and system include defining the magnetic structure. The magnetic structure also includes a top layer that is insensitive to an istroropic carbonyl reactive ion etch. The defining of the magnetic structure results in at least one artifact. The method and system further includes cleaning the at least one artifact using at least one isotropic carbonyl reactive ion etch.
摘要翻译：公开了一种用于提供包括至少一种磁性材料的磁性结构的方法和系统。该方法和系统包括限定磁结构。磁性结构还包括对异构羰基反应离子蚀刻不敏感的顶层。磁结构的定义导致至少一个假象。所述方法和系统还包括使用至少一种各向同性的羰基反应离子蚀刻来清洁所述至少一个假象。

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