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    • 1. 发明授权
    • System and method for reticle protection and transport
    • 用于掩模保护和运输的系统和方法
    • US06619903B2
    • 2003-09-16
    • US09925722
    • 2001-08-10
    • Glenn M. FriedmanMichael DeMarcoJorge S. IvaldiJames A. McClay
    • Glenn M. FriedmanMichael DeMarcoJorge S. IvaldiJames A. McClay
    • B65G4907
    • G03F7/70741B82Y10/00B82Y40/00G03F1/24G03F1/66G03F7/70808H01L21/67005H01L21/67751H01L21/67772H01L21/67778Y10S414/14
    • A reticle protection and transport system and method for a lithography tool. The system includes an indexer that stores a plurality of reticles and a removable reticle cassette. The removable reticle cassette is comprised of an inner chamber and an outer chamber. The system further includes an end effector coupled to a robotic arm. The end effector engages one of the plurality of reticles to enable the reticle to be positioned within the removable reticle cassette and thereafter transported. The system further includes a seal, coupled to the end effector and the robotic arm. To transport the reticle, the reticle is first loaded onto the end effector. Next, the end effector is used to create an arrangement wherein the reticle is loaded into the removable reticle cassette. Importantly, the reticle and removable reticle cassette do not come into contact with one another. The reticle and removable reticle cassette arrangement is then sealed and transported from the indexer to a mount for performing lithographic exposure. Once lithographic exposure is completed, the arrangement is returned to the indexer and the reticle is withdrawn from the removable reticle cassette.
    • 光刻工具的掩模版保护和输送系统及方法。 该系统包括存储多个掩模版和可拆卸标线片盒的分度器。 可移除的标线盒由内室和外室构成。 该系统还包括耦合到机器臂的端部执行器。 端部执行器与多个标线板中的一个接合,以使得标线片能够被定位在可移除的标线盒内并且之后传送。 该系统还包括联接到末端执行器和机器臂的密封件。 为了运输掩模版,首先将掩模版加载到末端执行器上。 接下来,使用端部执行器来产生其中将光罩装载到可移除的标线盒中的布置。 重要的是,标线和可拆卸的标线盒不会彼此接触。 然后将掩模版和可去除的光罩盒装置密封并从分度器传送到用于进行光刻曝光的安装台。 一旦光刻曝光完成,该布置返回到分度器,并将标线从可移除的标线片盒中取出。
    • 2. 发明授权
    • Underwater vehicle porting system
    • 水下车辆移植系统
    • US4360348A
    • 1982-11-23
    • US236476
    • 1981-02-20
    • Michael DeMarco
    • Michael DeMarco
    • B63H23/34F16H15/50F42B19/01
    • B63H23/34F16H15/50F42B19/01
    • Propulsion apparatus for an undersea vehicle comprises a pair of counter-ating low speed impellers driven from a spider shaft rotating at relatively high speed. The reduction is accomplished by a variable speed reducing and torque transmitting device which allows infinite resolution for speed control including a zero speed setting while maintaining a constant high speed at the input spider shaft. Attitude of the vehicle is controlled by a plurality of regulated inlet ports and roll control is regulated by increasing the speed of one impeller and decreasing the speed of the other. The sea water utilized for the attitude is also used for propulsion. Control systems within the vehicle utilize an electro-pneumatic-hydraulic system complex.
    • 用于海底车辆的推进装置包括一对反转低速叶轮,该叶轮由相对较高速度旋转的蜘蛛轴驱动。 该减速是通过可变减速和扭矩传递装置实现的,其允许无级分辨率用于速度控制,包括零速度设定,同时在输入齿轮轴处保持恒定的高速。 车辆的姿态由多个调节的入口控制,并且通过增加一个叶轮的速度并降低另一个叶轮的速度来调节辊控制。 用于姿态的海水也用于推进。 车内的控制系统采用电动气动液压系统。
    • 5. 发明申请
    • Brassiere cleaning and storage container
    • Brassiere清洁和储存容器
    • US20070056997A1
    • 2007-03-15
    • US11222716
    • 2005-09-09
    • Lauren RadtkeMichael DeMarcoRaymond Green
    • Lauren RadtkeMichael DeMarcoRaymond Green
    • D06C15/00
    • D06F95/006A47G25/20A47G2025/1492D06F95/008
    • A container for supporting a brassiere or a similar garment for cleaning and storage includes opposed flat plate members connected by a hinge, and opposed container cup members connected to the respective plate members at hinge connections for folding the container cup members over the plate members and for folding the plate members with respect to each other to form a closed container for supporting a brassiere. The plate members include hinged support members, each having an arcuate cross shape, for supporting brassiere cups between the plate members and the container cup members. Spaced apart clips secure the brassiere straps to the plate members. Spaced apart latches releasably secure the cup members to the plate members and the plate members to each other for placing the container in a compact folded position.
    • 用于支撑胸罩或用于清洁和储存的类似衣物的容器包括通过铰链连接的相对的平板构件和在铰链连接处连接到各个板构件的相对的容器杯构件,用于将容器杯构件折叠在板构件上,并且 将板构件相对于彼此折叠以形成用于支撑胸罩的封闭容器。 板构件包括铰链支撑构件,每个都具有弓形十字形状,用于在板构件和容器杯构件之间支撑胸罩杯。 隔开的夹子将胸罩带固定到板构件上。 间隔开的闩锁将杯状构件可释放地固定到板构件和板构件彼此以将容器放置在紧凑的折叠位置。
    • 6. 发明授权
    • Variable speed reducing and torque transmitting system
    • 变速减速和扭矩传动系统
    • US4411172A
    • 1983-10-25
    • US236478
    • 1981-02-20
    • Michael DeMarco
    • Michael DeMarco
    • F16H15/50F16H37/06
    • F16H15/50
    • Propulsion means of an undersea vehicle comprises a pair of counter-rotat low speed impellers driven from a spider shaft rotating at relatively high speed. The reduction is accomplished by a variable speed reducing and torque transmitting device which allows infinite resolution for speed control including a zero speed setting while maintaining a constant high speed at the input spider shaft. Attitude of the vehicle is controlled by a plurality of regulated inlet ports and roll control is regulated by increasing the speed of one impeller and decreasing the speed of the other. The sea water utilized for the attitude is also used for propulsion. Control systems within the vehicle utilize an electro-pneumatic-hydraulic system complex.
    • 海底车辆的推进装置包括一对由相对较高速度旋转的蜘蛛轴驱动的反转低速叶轮。 该减速是通过可变减速和扭矩传递装置实现的,其允许无级分辨率用于速度控制,包括零速度设定,同时在输入齿轮轴处保持恒定的高速。 车辆的姿态由多个调节的入口控制,并且通过增加一个叶轮的速度并降低另一个叶轮的速度来调节辊控制。 用于姿态的海水也用于推进。 车内的控制系统采用电动气动液压系统。
    • 7. 发明申请
    • System and method for reticle protection and transport
    • 用于掩模保护和运输的系统和方法
    • US20060078407A1
    • 2006-04-13
    • US11282474
    • 2005-11-21
    • Santiago del PuertoMichael DeMarcoGlenn FriedmanJorge IvaldiJames McClay
    • Santiago del PuertoMichael DeMarcoGlenn FriedmanJorge IvaldiJames McClay
    • H01L21/677
    • G03F7/70741B82Y10/00B82Y40/00G03F1/24G03F1/66G03F7/70808H01L21/67005H01L21/67751H01L21/67772H01L21/67778Y10S414/14
    • A substrate protection and transport system and method for transitioning a substrate from atmospheric pressure to vacuum in a lithography tool. The system includes one or more removable substrate transport cassettes that support a substrate. The cassette can include a base portion and top portion, and can include a seal. Each cassette has at least one vent and at least one filter. The system further includes a box having a base and lid. The box holds one or more cassette-substrate arrangements. A storage rack having shelves for holding the box-cassette-substrate arrangement is also provided. Further, an entry-exit module having a loadlock is provided for transitioning the cassette-substrate arrangement from atmospheric pressure to vacuum. The entry-exit module can include a shuttle and/or elevator for transporting the cassette-substrate arrangement. During transitioning, the filter(s) and vent(s) restrict particles within the loadlock from entering the cassette-substrate arrangement and reaching a surface of the substrate.
    • 一种用于在光刻工具中将基板从大气压转换成真空的衬底保护和输送系统和方法。 该系统包括支撑衬底的一个或多个可移除衬底输送盒。 盒可以包括基部和顶部,并且可以包括密封。 每个盒具有至少一个排气口和至少一个过滤器。 该系统还包括具有底座和盖子的盒子。 盒子保持一个或多个盒式衬底布置。 还提供了一种具有用于保持盒 - 盒 - 衬底布置的搁架的存放架。 此外,提供具有负载锁的入口模块,用于将盒式基板装置从大气压转换成真空。 出入口模块可以包括用于运送盒式基板装置的梭和/或电梯。 在过渡期间,过滤器和排气口限制负载锁中的颗粒进入盒 - 衬底布置并到达衬底的表面。
    • 10. 发明授权
    • Non-soniferous power drive for underwater vehicles
    • 用于水下航行器的无声功率驱动
    • US4609362A
    • 1986-09-02
    • US510539
    • 1983-07-05
    • Michael DeMarco
    • Michael DeMarco
    • F42B19/01F42B19/24
    • F42B19/01F42B19/24
    • The system provides propulsion of an underwater vehicle without the need noise producing gears or internal combustion engines. Variable speed of two impellers is automatically controlled from a single hydraulic piston regardless of depth, as is the horizontal and vertical attitude. Upright stability of the vehicle is held by controlling the speed of one impeller versus the other also using a single hydraulic piston. Since the speed controlling element allows output speed adjustments from zero to maximum, efficiency of the battery powered prime mover is high. The motor is allowed to come up to full high operational speed under no load conditions (zero output speed) developing vast amounts of kinetic energy through centrifugally forced contact rollers. This energy becomes available for the supply of peak power without taxing the prime mover, while continuing to reestablish the spent kinetic energy during periods of low power output. The system is suitable for utilizing digital control inputs that can feasibly be supplied by radio control through an antenna external to the system.
    • 该系统提供水下航行器的推进,而不需要产生噪音的齿轮或内燃机。 无论深度如何,两个叶轮的变速都可以从单个液压活塞自动控制,水平和垂直姿态也是如此。 通过使用单个液压活塞控制一个叶轮相对于另一个叶轮的速度来保持车辆的直立稳定性。 由于速度控制元件允许从零到最大的输出速度调节,因此电池供电原动机的效率很高。 允许电机在无负载条件(零输出速度)下达到全高的运行速度,通过离心式强制接触辊产生大量的动能。 这种能量可用于提供峰值功率,而不对原动机征税,同时在低功率输出期间继续重新建立用过的动能。 该系统适用于利用通过系统外部的天线通过无线电控制可行地提供的数字控制输入。