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    • 3. 发明申请
    • Sulphonium Salt Initiators
    • 锍盐引发剂
    • US20090208872A1
    • 2009-08-20
    • US11922444
    • 2006-06-21
    • Jean-Pierre WolfAttila LatikaJean-Luc BirbaumStephan IlgPascal Hayoz
    • Jean-Pierre WolfAttila LatikaJean-Luc BirbaumStephan IlgPascal Hayoz
    • G03F7/20G03F7/004C07D209/88C07C321/30
    • C07D209/88B33Y70/00C07C309/06C07C381/12G03F7/0045G03F7/038Y10S430/122
    • Compounds of the formula (I), (II), (III), (IV) and wherein, R is hydrogen, C1-C20alkyl; C2-C20alkyl interrupted by one or more O; is -L-X—R2 or -L-R2; R1 has for example one of the meanings as given for R; R2 is a monovalent sensitizer or photoinitiator moiety; Ar1 and Ar2 for example independently of one another are phenyl substituted by C1-C20alkyl, halogen or OR3; or are unsubstituted naphthyl, anthryl, phenanthryl or biphenylyl; or are naphthyl, anthryl, phenanthryl or biphenylyl substituted by C1-C20alkyl, OH or OR3; or are —Ar4-A-Ar3; Ar3 is unsubstituted phenyl naphthyl, anthryl, phenanthryl or biphenylyl; or is phenyl, naphthyl, anthryl, phenanthryl or biphenylyl substituted by C1-C20alkyl, OR3 or benzoyl; Ar4 is phenylene, naphthylene, anthrylene or phenanthrylene; A is a direct bond, S, O or C1-C20alkylene; X is CO, C(O)O, OC(O), O, S or NR3; L is C1-C20alkylene or C2-C20alkylene interrupted by one or more O; R3 is C1-C20alkyl or C1-C20hydroxyalkyl; and Y is an anion, are suitable as photolatent acid generators.
    • 式(I),(II),(III),(IV)的化合物,其中R是氢,C 1 -C 20烷基; 被一个或多个O中断的C 2 -C 20烷基; 是-L-X-R2或-L-R2; R1具有例如R给出的含义之一; R2是单价敏化剂或光引发剂部分; Ar 1和Ar 2例如彼此独立地是被C 1 -C 20烷基,卤素或OR 3取代的苯基; 或未取代的萘基,蒽基,菲基或联苯基; 或被C 1 -C 20烷基,OH或OR 3取代的萘基,蒽基,菲基或联苯基; 或为-Ar4-A-Ar3; Ar 3是未取代的苯基萘基,蒽基,菲基或联苯基; 或由C 1 -C 20烷基,OR 3或苯甲酰基取代的苯基,萘基,蒽基,菲基或联苯基; Ar4是亚苯基,亚萘基,亚蒽基或菲基; A是直接键合,S,O或C1-C20亚烷基; X是CO,C(O)O,OC(O),O,S或NR 3; L是被一个或多个O中断的C1-C20亚烷基或C2-C20亚烷基; R3是C1-C20烷基或C1-C20羟烷基; 并且Y是阴离子,适合作为光潜酸产生剂。
    • 4. 发明授权
    • High resolution i-line photoresist of high sensitivity
    • 高灵敏度的高分辨率i线光刻胶
    • US5759740A
    • 1998-06-02
    • US748298
    • 1996-11-13
    • Norbert MunzelReinhard SchulzHeinz HolzwarthStephan Ilg
    • Norbert MunzelReinhard SchulzHeinz HolzwarthStephan Ilg
    • C07D333/24C07C309/28G03F7/004G03F7/038G03F7/039H01L21/027
    • G03F7/0045Y10S430/11Y10S430/111Y10S430/12Y10S430/122Y10S430/123
    • The invention relates to the use of oxime sulfonates of formula 1 ##STR1## wherein R is naphthyl, ##STR2## Ar is an unsubstituted aryl group or an aryl group which carries one or more than one substituent selected from the group consisting of nitro, chloro, bromo, hydroxyl, C.sub.1 -C.sub.4 alkyl, C.sub.1 -C.sub.4 perfluoroalkyl, C.sub.1 -C.sub.4 alkoxy and acid degradable substituent; R.sub.0 is either a R.sub.1 -X group or R.sub.2 ; X is an oxygen or a sulfur atom; R.sub.1 is hydrogen, C.sub.1 -C.sub.4 alkyl or unsubstituted phenyl or phenyl which is substituted by a member selected from the group consisting of chloro, bromo, C.sub.1 -C.sub.4 alkyl and C.sub.1 -C.sub.4 alkoxy, and R.sub.2 is hydrogen, C.sub.1 -C.sub.4 alkyl or an acid-degradable substituent, as radiation-sensitive photoacid generator in a chemically amplified photoresist which is developable in alkaline medium and is sensitive to radiation of a wavelength in the range from 340-390 nm, and to corresponding positive-working and negative-working photoresists for the cited wavelength range.
    • 本发明涉及式1的肟磺酸盐,其中R是萘基,Ar是未取代的芳基或芳基,其携带一个或多于一个选自以下的取代基: 硝基,氯,溴,羟基,C 1 -C 4烷基,C 1 -C 4全氟烷基,C 1 -C 4烷氧基和酸可降解取代基; R0是R1-X基团或R2; X是氧或硫原子; R 1是氢,C 1 -C 4烷基或未取代的苯基或被选自氯,溴,C 1 -C 4烷基和C 1 -C 4烷氧基的成员所取代的苯基,R 2是氢,C 1 -C 4烷基或酸可降解取代基 作为在碱性介质中可显影并对波长在340-390nm范围内的辐射敏感的化学放大光致抗蚀剂中的辐射敏感光致酸产生剂,以及用于所述波长的相应的正性和负性光致抗蚀剂 范围。
    • 5. 发明授权
    • High resolution i-line photoresist of high sensitivity
    • 高灵敏度的高分辨率i线光刻胶
    • US5627011A
    • 1997-05-06
    • US440388
    • 1995-05-12
    • Norbert MunzelReinhard SchulzHeinz HolzwarthStephan Ilg
    • Norbert MunzelReinhard SchulzHeinz HolzwarthStephan Ilg
    • C07D333/24C07C309/28G03F7/004G03F7/038G03F7/039H01L21/027
    • G03F7/0045Y10S430/11Y10S430/111Y10S430/12Y10S430/122Y10S430/123
    • The invention relates to the use of oxime sulfonates of formula 1 ##STR1## wherein R is naphthyl, ##STR2## Ar is an unsubstituted aryl group or an aryl group which carries one or more than one substituent selected from the group consisting of nitro, chloro, bromo, hydroxyl, C.sub.1 -C.sub.4 alkyl, C.sub.1 -C.sub.4 perfluoroalkyl, C.sub.1 -C.sub.4 alkoxy and acid degradable substituents;R.sub.0 is either a R.sub.1 --X group or R.sub.2 ;X is an oxygen or a sulfur atom;R.sub.1 is hydrogen, C.sub.1 -C.sub.4 alkyl or unsubstituted phenyl or phenyl which is substituted by a member selected from the group consisting of chloro, bromo, C.sub.1 -C.sub.4 alkyl and C.sub.1 -C.sub.4 alkoxy, andR.sub.2 is hydrogen, C.sub.1 -C.sub.4 alkyl or an acid-degradable substituent, as radiation-sensitive photoacid generator in a chemically amplified photoresist which is developable in alkaline medium and is sensitive to radiation of a wavelength in the range from 340-390 nm, and to corresponding positive-working and negative-working photoresists for the cited wavelength range.
    • 本发明涉及式1的肟磺酸盐,其中R是萘基,Ar是未取代的芳基或芳基,其携带一个或多于一个选自以下的取代基: 硝基,氯,溴,羟基,C 1 -C 4烷基,C 1 -C 4全氟烷基,C 1 -C 4烷氧基和酸可降解取代基; R0是R1-X基团或R2; X是氧或硫原子; R 1是氢,C 1 -C 4烷基或未取代的苯基或被选自氯,溴,C 1 -C 4烷基和C 1 -C 4烷氧基的成员所取代的苯基,R 2是氢,C 1 -C 4烷基或酸可降解取代基 作为在碱性介质中可显影并对波长在340-390nm范围内的辐射敏感的化学放大光致抗蚀剂中的辐射敏感光致酸产生剂,以及用于所述波长的相应的正性和负性光致抗蚀剂 范围。
    • 6. 发明申请
    • Sulphonium Salt Initiators
    • 锍盐引发剂
    • US20090197987A1
    • 2009-08-06
    • US12226116
    • 2007-04-04
    • Pascal HayozStephan Ilg
    • Pascal HayozStephan Ilg
    • C07C319/02C08F2/50
    • C09D11/101B33Y70/00C07C319/20C07C381/12C09D5/033C09D5/08G03F7/0045C07C323/22
    • Compounds of the formula (I), L, L′, L″, L1, L′1, L″1, L2, L′2, L″2, L3, L′3, L″3, L4, L′4, L″4, L5, L′5, L″5, L6, L′6, L″6, L7, L′7, L″7, L8, L′8 and L″8 independently of one another are hydrogen or an organic substituent; and/or one or more of the pairs L3 and L5, L′3 and L′5 or L″3 and L″5 together denote a single bond, provided that the respective X, X′ or X″ is not a single bond; and/or L3 and L5, L′3 and L′5 or L″3 and L″5 together denote an organic linking group; and/or one or more of the pairs L1 and L3, L1 and L, L5 and L7, L′1 and L′3, L′1 and L′, L′5 and L′7, L″1 and L″3, L″1 and L″, or L″5 and L″7, together denote an organic linking group; provided that at least one of L, L′, L″, L1, L′1, L″1, L2, L′2, L″2, L3, L′3, L″3, L4, L′4, L″4, L5, L′5, L″5, L6, L′6, L″6, L7, L′7, L″7, L8, L′8 and L″8 is other than hydrogen; X, X′ and X″ independently of one another are a single bond, CRaRb O, S, NRc or NCORc; Ra, Rb and Rc independently of one another are hydrogen or an organic substituent; and Y is an inorganic or organic anion; are suitable as photolatent acid generators.
    • 式(I),L,L',L“,L1,L'1,L''1,L2,L'2,L''2,L3,L'3,L''3, L4,L'4,L''4,L5,L'5,L''5,L6,L'6,L''6,L7,L'7,L''7,L8,L'8和 彼此独立地是氢或有机取代基; 和/或成对L3和L5,L'3和L'5或L''3和L''5中的一个或多个一起表示单键,条件是各自的X,X'或X“不是 单一债券 和/或L3和L5,L'3和L'5或L''3和L''5一起表示有机连接基团; 和/或一对或多个L1和L3,L1和L,L5和L7,L'1和L'3,L'1和L',L'5和L'7,L'1和L “3”,“1”和“L”,或“5”和“7”表示有机连接基团; 条件是L,L',L“,L1,L'1,L''1,L2,L'2,L''2,L3,L'3,L'3, L'4,L''4,L 5,L'5,L''5,L 6,L'6,L''6,L 7,L'7,L''7,L8,L'8和L' '8不是氢; X,X'和X“彼此独立是单键,CRaRbO,S,NRc或NCORc; R a,R b和R c彼此独立地是氢或有机取代基; Y为无机或有机阴离子; 适合作为光潜酸产生剂。