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1. 发明授权

US07504647B2 Method and apparatus for inspecting a sample having a controller for determining an estimated height of the detector from the sample 有权
标题翻译：用于检查具有用于从样品确定检测器的估计高度的控制器的样品的方法和装置
公开(公告)号：US07504647B2
公开(公告)日：2009-03-17
申请号：US11466314
申请日：2006-08-22
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/86
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

2. 发明申请

US20070034773A1 Inspection System with Auto-Focus 有权
标题翻译：自动对焦检测系统
公开(公告)号：US20070034773A1
公开(公告)日：2007-02-15
申请号：US11466314
申请日：2006-08-22
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G02B27/40
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

3. 发明授权

US07115890B2 Method and apparatus for inspecting a sample having a height measurement ahead of a focal area 有权
标题翻译：用于检查在焦点区域之前具有高度测量的样品的方法和装置
公开(公告)号：US07115890B2
公开(公告)日：2006-10-03
申请号：US10877311
申请日：2004-06-25
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/86
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

4. 发明申请

US20050167568A1 Inspection system with auto-focus 有权
标题翻译：自动对焦检测系统
公开(公告)号：US20050167568A1
公开(公告)日：2005-08-04
申请号：US10877311
申请日：2004-06-25
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/95 , G02B27/40
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

5. 发明授权

US06831736B2 Method of and apparatus for line alignment to compensate for static and dynamic inaccuracies in scanning 有权
标题翻译：用于线对齐的方法和装置，以补偿扫描中的静态和动态不准确
公开(公告)号：US06831736B2
公开(公告)日：2004-12-14
申请号：US10266823
申请日：2002-10-07
申请人： Rami Elichai , Gilad Schwartz , Ron Naftali , Pavel Margulis , Igor Slobodnik
发明人： Rami Elichai , Gilad Schwartz , Ron Naftali , Pavel Margulis , Igor Slobodnik
IPC分类号： G01N2100
CPC分类号： G01N21/956
摘要： In a method and apparatus for compensating for static and dynamic inaccuracies in an optical scanner used in a typical surface inspection system, the scanner may have a scanning axis and a cross-scanning axis. A surface of an inspection article is scanned along a scanning axis and a scanning axis signal is output at predetermined distances along this axis. The scanning axis signal may be used to determine a speed of relative movement between the scanner and the inspection article. A jitter signal may be output whenever the scanner deviates from the scanning axis, and this signal may be used to calculate the amount of deviation. Information, such as the speed of relative movement, scan line resolution, and a scanning axis static position error may be used to generate a scan line. A generated scan line may be shifted to compensate for a cross-scanning axis error. Utilizing this method, a scan line is generated that compensates for various scanner positioning errors, including the cross-axis and scanning axis static position errors, the scanning axis dynamic position error, and the cross-scanning axis jitter error.
摘要翻译：在用于补偿在典型表面检查系统中使用的光学扫描仪中的静态和动态不准确度的方法和装置中，扫描器可以具有扫描轴和横扫描轴。沿着扫描轴扫描检查物品的表面，沿着该轴以预定的距离输出扫描轴信号。扫描轴信号可以用于确定扫描仪和检查制品之间的相对移动速度。每当扫描仪偏离扫描轴时，抖动信号可能会被输出，该信号可用于计算偏差量。可以使用诸如相对移动速度，扫描线分辨率和扫描轴静态位置误差的信息来生成扫描线。生成的扫描线可以移动以补偿横扫轴的误差。利用该方法，生成扫描线，补偿各种扫描器定位误差，包括横轴和扫描轴静态位置误差，扫描轴动态位置误差和横扫轴抖动误差。

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