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    • 4. 发明授权
    • Semiconductor component and method of manufacture
    • 半导体元件及制造方法
    • US08685822B2
    • 2014-04-01
    • US13022628
    • 2011-02-07
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • H01L21/336
    • H01L29/66727H01L29/407H01L29/41766H01L29/42376H01L29/456H01L29/4933H01L29/66734H01L29/7809H01L29/7811H01L29/7813
    • A semiconductor component that includes gate electrodes and shield electrodes and a method of manufacturing the semiconductor component. A semiconductor material has a device region, a gate contact region, a termination region, and a drain contact region. One or more device trenches is formed in the device region and one or more termination trenches is formed in the edge termination region. Shielding electrodes are formed in portions of the device trenches that are adjacent their floors. A gate dielectric material is formed on the sidewalls of the trenches in the device region and gate electrodes are formed over and electrically isolated from the shielding electrodes. The gate electrodes in the trenches in the device region are connected to the gate electrodes in the trenches in the gate contact region. The shielding electrodes in the trenches in the device region are connected to the shielding electrodes in the termination region.
    • 包括栅电极和屏蔽电极的半导体部件和制造半导体部件的方法。 半导体材料具有器件区域,栅极接触区域,端接区域和漏极接触区域。 在器件区域中形成一个或多个器件沟槽,并且在边缘端接区域中形成一个或多个端接沟槽。 屏蔽电极形成在与它们的地板相邻的器件沟槽的部分中。 在器件区域中的沟槽的侧壁上形成栅极电介质材料,并且在屏蔽电极之间形成栅电极并与屏蔽电极电绝缘。 器件区域中的沟槽中的栅电极连接到栅极接触区域中的沟槽中的栅电极。 器件区域的沟槽中的屏蔽电极与端接区域中的屏蔽电极相连。
    • 5. 发明授权
    • Method of manufacturing semiconductor component with gate and shield electrodes in trenches
    • 在沟槽中制造具有栅极和屏蔽电极的半导体部件的方法
    • US07897462B2
    • 2011-03-01
    • US12271083
    • 2008-11-14
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • H01L21/336
    • H01L29/66727H01L29/407H01L29/41766H01L29/42376H01L29/456H01L29/4933H01L29/66734H01L29/7809H01L29/7811H01L29/7813
    • A semiconductor component that includes gate electrodes and shield electrodes and a method of manufacturing the semiconductor component. A semiconductor material has a device region, a gate contact region, a termination region, and a drain contact region. One or more device trenches is formed in the device region and one or more termination trenches is formed in the edge termination region. Shielding electrodes are formed in portions of the device trenches that are adjacent their floors. A gate dielectric material is formed on the sidewalls of the trenches in the device region and gate electrodes are formed over and electrically isolated from the shielding electrodes. The gate electrodes in the trenches in the device region are connected to the gate electrodes in the trenches in the gate contact region. The shielding electrodes in the trenches in the device region are connected to the shielding electrodes in the termination region.
    • 包括栅电极和屏蔽电极的半导体部件和制造半导体部件的方法。 半导体材料具有器件区域,栅极接触区域,端接区域和漏极接触区域。 在器件区域中形成一个或多个器件沟槽,并且在边缘端接区域中形成一个或多个端接沟槽。 屏蔽电极形成在与它们的地板相邻的器件沟槽的部分中。 在器件区域中的沟槽的侧壁上形成栅极电介质材料,并且在屏蔽电极之间形成栅电极并与屏蔽电极电绝缘。 器件区域中的沟槽中的栅电极连接到栅极接触区域中的沟槽中的栅电极。 器件区域的沟槽中的屏蔽电极与端接区域中的屏蔽电极相连。
    • 7. 发明申请
    • SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURE
    • 半导体元件及其制造方法
    • US20100123193A1
    • 2010-05-20
    • US12271092
    • 2008-11-14
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • H01L27/088H01L21/28
    • H01L27/088H01L21/823487
    • A semiconductor component that includes gate electrodes and shield electrodes and a method of manufacturing the semiconductor component. A semiconductor material has a device region, a gate contact region, a termination region, and a drain contact region. One or more device trenches is formed in the device region and one or more termination trenches is formed in the edge termination region. Shielding electrodes are formed in portions of the device trenches that are adjacent their floors. A gate dielectric material is formed on the sidewalls of the trenches in the device region and gate electrodes are formed over and electrically isolated from the shielding electrodes. The gate electrodes in the trenches in the device region are connected to the gate electrodes in the trenches in the gate contact region. The shielding electrodes in the trenches in the device region are connected to the shielding electrodes in the termination region.
    • 包括栅电极和屏蔽电极的半导体部件和制造半导体部件的方法。 半导体材料具有器件区域,栅极接触区域,端接区域和漏极接触区域。 在器件区域中形成一个或多个器件沟槽,并且在边缘端接区域中形成一个或多个端接沟槽。 屏蔽电极形成在与它们的地板相邻的器件沟槽的部分中。 在器件区域的沟槽的侧壁上形成栅极电介质材料,并且在屏蔽电极之间形成栅电极并与屏蔽电极电绝缘。 器件区域中的沟槽中的栅电极连接到栅极接触区域中的沟槽中的栅电极。 器件区域的沟槽中的屏蔽电极与端接区域中的屏蔽电极相连。
    • 9. 发明申请
    • Method for Manufacturing a Superjunction Device With Wide Mesas
    • 制造具有宽台面的超级连接装置的方法
    • US20060205174A1
    • 2006-09-14
    • US11420490
    • 2006-05-26
    • Fwu-Iuan HshiehKoon SoBrian Pratt
    • Fwu-Iuan HshiehKoon SoBrian Pratt
    • H01L21/76
    • H01L29/7802H01L21/26586H01L29/0634H01L29/0653H01L29/66143H01L29/66712H01L29/66734H01L29/7811H01L29/7813H01L29/872H01L2924/0002H01L2924/00
    • A method of manufacturing a semiconductor device includes providing semiconductor substrate having trenches and mesas. At least one mesa has first and second sidewalls. The method includes angularly implanting a dopant of a second conductivity into the first sidewall, and angularly implanting a dopant of a second conductivity into the second sidewall. The at least one mesa is converted to a pillar by diffusing the dopants into the at least one mesa. The pillar is then converted to a column by angularly implanting a dopant of the first conductivity into a first sidewall of the pillar, and by angularly implanting the dopant of the first conductivity type into a second sidewall of the pillar. The dopants are then diffused into the pillar to provide a P-N junction of the first and second doped regions located along the depth direction of the adjoining trench. Finally, the trenches are filled with an insulating material.
    • 制造半导体器件的方法包括提供具有沟槽和台面的半导体衬底。 至少一个台面具有第一和第二侧壁。 该方法包括将第二导电性的掺杂剂角度地注入到第一侧壁中,并将第二导电性的掺杂剂角度地注入第二侧壁。 通过将掺杂剂扩散到至少一个台面中,将至少一个台面转变成柱。 然后通过将第一导电性的掺杂剂角度地注入到柱的第一侧壁中,并且将第一导电类型的掺杂剂角度地注入到柱的第二侧壁中,将柱转换成列。 然后将掺杂剂扩散到柱中以提供沿相邻沟槽的深度方向定位的第一和第二掺杂区的P-N结。 最后,沟槽填充绝缘材料。
    • 10. 发明申请
    • SEMICONDUCTOR COMPONENT AND METHOD OF MANUFACTURE
    • 半导体元件及其制造方法
    • US20110127603A1
    • 2011-06-02
    • US13022628
    • 2011-02-07
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • Peter A. BurkeDuane B. BarberBrian Pratt
    • H01L29/78H01L21/336
    • H01L29/66727H01L29/407H01L29/41766H01L29/42376H01L29/456H01L29/4933H01L29/66734H01L29/7809H01L29/7811H01L29/7813
    • A semiconductor component that includes gate electrodes and shield electrodes and a method of manufacturing the semiconductor component. A semiconductor material has a device region, a gate contact region, a termination region, and a drain contact region. One or more device trenches is formed in the device region and one or more termination trenches is formed in the edge termination region. Shielding electrodes are formed in portions of the device trenches that are adjacent their floors. A gate dielectric material is formed on the sidewalls of the trenches in the device region and gate electrodes are formed over and electrically isolated from the shielding electrodes. The gate electrodes in the trenches in the device region are connected to the gate electrodes in the trenches in the gate contact region. The shielding electrodes in the trenches in the device region are connected to the shielding electrodes in the termination region.
    • 包括栅电极和屏蔽电极的半导体部件和制造半导体部件的方法。 半导体材料具有器件区域,栅极接触区域,端接区域和漏极接触区域。 在器件区域中形成一个或多个器件沟槽,并且在边缘端接区域中形成一个或多个端接沟槽。 屏蔽电极形成在与它们的地板相邻的器件沟槽的部分中。 在器件区域中的沟槽的侧壁上形成栅极电介质材料,并且在屏蔽电极之间形成栅电极并与屏蔽电极电绝缘。 器件区域中的沟槽中的栅电极连接到栅极接触区域中的沟槽中的栅电极。 器件区域的沟槽中的屏蔽电极与端接区域中的屏蔽电极相连。