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    • 4. 发明申请
    • Surface treatment apparatus
    • 表面处理装置
    • US20050115679A1
    • 2005-06-02
    • US10953871
    • 2004-09-29
    • Ryuichi KurosawaFumio TakagiHiroshi KoedaKazufumi OyaKatsuji Arakawa
    • Ryuichi KurosawaFumio TakagiHiroshi KoedaKazufumi OyaKatsuji Arakawa
    • H01L21/02C23F1/08H01L21/306H01L21/683C23F1/00
    • H01L21/6838C23F1/08
    • A surface treatment apparatus 1 is constructed to hold a substrate 10 when surface treatment is carried out to a back surface 101 of the substrate 10. The surface treatment apparatus 1 includes at least one enclosed space each defined by a concave portion 32 and a front surface 102 of the substrate 10; and an O-ring 2 (contact portion) adapted to hermetically contact with the front surface 102 of the substrate 10 to produce negative pressure in cooperation with the O-ring 2 and the front surface 102 of the substrate 10. The surface treatment apparatus 1 is constructed so that the substrate 10 is attracted onto the surface treatment apparatus 1 using a difference between the negative pressure and atmospheric pressure by decompressing the enclosed space in a decompression chamber and then bringing out the substrate 10 from the inside of the decompression chamber to environment under atmospheric pressure.
    • 当对基板10的背面101进行表面处理时,表面处理装置1被构造成保持基板10。 表面处理装置1包括由凹部32和基板10的前表面102限定的至少一个封闭空间; 以及适于与基板10的前表面102气密接触以产生与O形环2和基板10的前表面102协作的负压的O形环2(接触部分)。 表面处理装置1被构造成使得通过减压减压室中的封闭空间将衬底10从负压和大气压之间的差异吸引到表面处理装置1上,然后从衬底10的内部引出衬底10 减压室在大气压下环境。
    • 6. 发明授权
    • Mirror device, optical switch, electronic instrument and mirror device driving method
    • 镜面装置,光开关,电子仪器和镜面装置的驱动方法
    • US06914712B2
    • 2005-07-05
    • US10666334
    • 2003-09-22
    • Ryuichi Kurosawa
    • Ryuichi Kurosawa
    • G02B26/08G02B26/00
    • G02B26/0841G02B26/085Y10S359/90
    • To provide a mirror device, an optical switch, an electronic instrument, and a mirror device driving method in which a large driving displacement can be produced for a mirror with a smaller driving force, a silicon substrate includes: at least one first mirror-side operating region integrally formed with the mirror and provided at a different position from the mirror; and at least one second mirror-side operating region provided at an end portion of the mirror, and a glass substrate includes: an opposite-side operating section, a coulomb force acting between the first mirror-side operating region and the opposite-side operating section; and another opposite-side operating section, the coulomb force acting between the second mirror-side operating region and the other opposite-side operating section. The glass substrate is formed so that a gap between the first mirror-side operating region and the opposite-side operating section is narrower than a gap between the second mirror-side operating region and the opposite-side operating section.
    • 为了提供一种反射镜装置,光学开关,电子仪器和反射镜装置驱动方法,其中可以产生具有较小驱动力的反射镜的大的驱动位移,硅基板包括:至少一个第一反射镜侧 操作区域与反射镜整体形成并设置在与镜子不同的位置; 以及设置在反射镜的端部的至少一个第二反射镜侧操作区域,以及玻璃基板,包括:相对侧操作部,作用在第一反射镜侧操作区域和相对侧操作区域之间的库仑力 部分; 和另一个相反侧的操作部分,其作用在第二反射镜侧操作区域和另一个相对侧操作部分之间的库伦力。 玻璃基板形成为使得第一反射镜侧操作区域和相对侧操作部分之间的间隙比第二反射镜侧操作区域和相对侧操作部分之间的间隙窄。
    • 8. 发明申请
    • Vehicle Steering Apparatus
    • 车辆转向装置
    • US20080251312A1
    • 2008-10-16
    • US10585670
    • 2004-12-16
    • Takeshi GotoRyuichi KurosawaKenji TozuDaisuke Yamada
    • Takeshi GotoRyuichi KurosawaKenji TozuDaisuke Yamada
    • B62D5/04
    • B62D6/003
    • In a vehicle steering apparatus of a steer-by-wire system, front wheels are controlled to be turned by a computer program processing. A displacement/torque conversion section 51 converts a steering angle θ into a steering torque Td that is in relation of exponential function. A torque/lateral-acceleration conversion section 52 converts the steering torque Td into an anticipated lateral acceleration Gd (or anticipated yaw rate γd and anticipated turning curvature ρd) that is in relation of exponentiation function and that serves as a vehicle motion state quantity that can be perceived by a human. A turning angle conversion section 53 calculates a target turning angles δd necessary for the vehicle to move with the anticipated lateral acceleration Gd (or anticipated yaw rate γd and anticipated turning curvature ρd). A turning control section 60 controls the steered wheels to be turned into the target turning angle δd. A driver turns the handle, feeling the lateral acceleration, and hence, the driver can easily drive the vehicle.
    • 在线控转向系统的车辆转向装置中,通过计算机程序处理来控制前轮转动。 位移/转矩转换部51将转向角θ转换为与指数函数关系的转向转矩Td。 转矩/横向加速度转换部分52将转向转矩Td转换为与指数函数关系的预期横向加速度Gd(或预期的横摆速度gammad和预期的转弯曲率罗),并且其用作可以作为车辆运动状态量 被人所认识。 转向角转换部53计算车辆随着预期的横向加速度Gd(或预期的横摆角度偏差和预期的转弯曲率罗嗦)移动所需的目标转向角度。 转向控制部60控制转向轮转向目标转向角度。 驾驶员转动手柄,感觉横向加速度,因此驾驶者可以轻松驾驶车辆。
    • 9. 发明授权
    • Vehicle steering apparatus
    • 车辆转向装置
    • US07359778B2
    • 2008-04-15
    • US11132412
    • 2005-05-19
    • Takeshi GotoTatsuo SugitaniRyuichi KurosawaToshiyuki MikidaKenji Tozu
    • Takeshi GotoTatsuo SugitaniRyuichi KurosawaToshiyuki MikidaKenji Tozu
    • B62D5/04
    • B62D6/002
    • In a vehicle steering apparatus, front wheels are controlled to be turned by a computer program processing. A displacement/torque conversion section 51 converts a steering angle θ into a steering torque Td that is in relation of exponential function. A torque/lateral-acceleration conversion section 52, torque/yaw-rate conversion section 53 and torque/curvature conversion section 54 convert into an anticipated lateral acceleration Gd, anticipated yaw rate γd and anticipated turning curvature ρd based upon the steering torque Td. Turning angle conversion sections 55, 56 and 57 calculate target turning angles δg, δγ and δρ. A turning angle deciding section 58 decides a target turning angle δd among the target turning angles δg, δγ and δρ according to the detected vehicle speed V. A turning control section 60 controls the steered wheels to be turned into the target turning angle δd. Herewith, the vehicle steering apparatus of the present invention can turn the vehicle so as to be adapted to a man's perception characteristic in all speed areas with respect to an operation on a steering handle by a driver. Therefore, the driver can easily drive the vehicle in all speed areas.
    • 在车辆转向装置中,通过计算机程序处理来控制前轮转动。 位移/转矩转换部51将转向角θ转换为与指数函数关系的转向转矩Td。 基于转向转矩Td,转矩/横向加速度转换部分52,转矩/偏转速率转换部分53和转矩/曲率转换部分54转换成预期的横向加速度Gd,预期的横摆速度gammad和预期转弯曲率。 转角转换部分55,56和57计算目标转向角deltag,deltagamma和deltarho。 转向角决定部58根据检测到的车速V来判定目标转向角deltag,deltagamma和deltarho之间的目标转向角度。转向控制部60将转向轮转换为目标转向角deltad。 因此,本发明的车辆转向装置能够相对于驾驶员对转向手柄的操作而使车辆转向所有速度区域中的人的感知特性。 因此,司机可以在所有速度区域轻松驾驶车辆。
    • 10. 发明授权
    • Method of manufacturing a structure body bonding with a glass substrate and semiconductor substrate
    • 制造与玻璃基板和半导体基板结合的结构体的方法
    • US07337540B2
    • 2008-03-04
    • US10978928
    • 2004-11-01
    • Ryuichi Kurosawa
    • Ryuichi Kurosawa
    • B21D53/76G01D15/00
    • B41J2/16B32B15/04B32B17/06C03C15/00C03C23/0025H01L21/31111Y10T29/49083Y10T29/49126Y10T29/49128Y10T29/4913Y10T29/49401
    • Provided is technology capable of avoiding complex processes and high costs while securing the protection of the functional unit upon forming a device including a glass substrate. A manufacturing method of a structural body structured with a bonding body formed from a glass substrate and a semiconductor substrate, including a first step of forming a first functional unit as a structural element of the structural body on one face of the glass substrate; a second step of bonding the semiconductor substrate to one face of the glass substrate so as to cover the first functional unit; a third step of forming an affected zone extending in the thickness direction of the glass substrate by irradiating a laser beam from the other face side of the glass substrate and scanning the focal point of the laser beam in the thickness direction of the glass substrate; and a fourth step of forming a hole in the glass substrate by etching the glass substrate and removing the portion along the affected zone.
    • 提供了能够避免复杂工艺和高成本的技术,同时在形成包括玻璃基板的装置时确保功能单元的保护。 一种由玻璃基板和半导体基板形成的结合体构成的结构体的制造方法,包括:在玻璃基板的一个面上形成作为结构体的结构元件的第一功能单元的第一工序; 将所述半导体衬底接合到所述玻璃衬底的一个面以覆盖所述第一功能单元的第二步骤; 通过从玻璃基板的另一面侧照射激光束并沿玻璃基板的厚度方向扫描激光束的焦点,形成沿玻璃基板的厚度方向延伸的受影响区域的第三步骤; 以及通过蚀刻玻璃基板并沿着受影响区域移除部分在玻璃基板中形成孔的第四步骤。