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    • 2. 发明申请
    • Surface treatment apparatus
    • 表面处理装置
    • US20050115679A1
    • 2005-06-02
    • US10953871
    • 2004-09-29
    • Ryuichi KurosawaFumio TakagiHiroshi KoedaKazufumi OyaKatsuji Arakawa
    • Ryuichi KurosawaFumio TakagiHiroshi KoedaKazufumi OyaKatsuji Arakawa
    • H01L21/02C23F1/08H01L21/306H01L21/683C23F1/00
    • H01L21/6838C23F1/08
    • A surface treatment apparatus 1 is constructed to hold a substrate 10 when surface treatment is carried out to a back surface 101 of the substrate 10. The surface treatment apparatus 1 includes at least one enclosed space each defined by a concave portion 32 and a front surface 102 of the substrate 10; and an O-ring 2 (contact portion) adapted to hermetically contact with the front surface 102 of the substrate 10 to produce negative pressure in cooperation with the O-ring 2 and the front surface 102 of the substrate 10. The surface treatment apparatus 1 is constructed so that the substrate 10 is attracted onto the surface treatment apparatus 1 using a difference between the negative pressure and atmospheric pressure by decompressing the enclosed space in a decompression chamber and then bringing out the substrate 10 from the inside of the decompression chamber to environment under atmospheric pressure.
    • 当对基板10的背面101进行表面处理时,表面处理装置1被构造成保持基板10。 表面处理装置1包括由凹部32和基板10的前表面102限定的至少一个封闭空间; 以及适于与基板10的前表面102气密接触以产生与O形环2和基板10的前表面102协作的负压的O形环2(接触部分)。 表面处理装置1被构造成使得通过减压减压室中的封闭空间将衬底10从负压和大气压之间的差异吸引到表面处理装置1上,然后从衬底10的内部引出衬底10 减压室在大气压下环境。
    • 5. 发明授权
    • Method of filling liquid sample
    • 液体样品的填充方法
    • US08535620B2
    • 2013-09-17
    • US12963684
    • 2010-12-09
    • Fumio Takagi
    • Fumio Takagi
    • B01L3/00G01N35/00G01N1/10C12M1/36C12M1/22
    • B65B3/04B01L3/0293B01L3/502707B01L3/50273B01L3/505B01L3/527B01L2200/12B01L2300/123B01L2400/0481Y10T436/11Y10T436/2575
    • A method of filling a liquid sample includes: supplying the liquid sample to a first well of a biochip; adhering a cover and the substrate of the biochip in a loop-shaped area surrounding the first well and plural second wells on the substrate; moving the liquid sample from the first well to the second wells through a space between the cover and the substrate by rotating the biochip around a rotation axis in a state in which the biochip is arranged such that a distance from any one of the second wells to the rotation axis in a vertical direction with respect to the rotation axis is longer than a distance from the first well to the rotation axis in the vertical direction with respect to the rotation axis; and sealing the first well and the second wells by adhering the cover to the substrate to thereby seal.
    • 一种填充液体样品的方法包括:将液体样品供应到生物芯片的第一孔; 将覆盖物和生物芯片的基板粘附在围绕第一阱的环形区域和基板上的多个第二阱; 通过在生物芯片布置的状态下围绕旋转轴转动生物芯片,使液体样品从第一孔到第二孔通过盖和衬底之间的空间移动,使得从第二阱中的任何一个到第 相对于旋转轴在垂直方向上的旋转轴比相对于旋转轴在垂直方向上从第一孔到旋转轴的距离长; 并且通过将盖子粘附到基底上来密封第一孔和第二孔,从而密封。