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    • 1. 发明专利
    • Lower stage member fixing apparatus, and fluid control device equipped with the same
    • 下段会员固定装置及其配套的流体控制装置
    • JP2012202518A
    • 2012-10-22
    • JP2011069620
    • 2011-03-28
    • Fujikin Inc株式会社フジキン
    • SHINOHARA TSUTOMUMATSUDA TAKAHIRONAKADA TOMOHIROYAMAJI MICHIO
    • F16B39/24F16K27/00F16L39/00
    • F16L19/00F16B5/0241F16B5/0258F16B43/001F16K27/003
    • PROBLEM TO BE SOLVED: To provide a lower stage member fixing apparatus and a fluid control device equipped with the lower stage member fixing apparatus that facilitates leveling work for making the upper faces of lower stage members flush with each other and further enhances the vibration absorbing effect of elastic members.SOLUTION: The lower stage members 2 are once fixed, and then the required lower stage member 2 is moved upward against the elastic force of the elastic member 21 to attain the fine adjustment of the upper face positions of a plurality of lower stage members 2. The elastic member 21 is an annular body made of rubber or synthetic resin, and the upper and lower part of the inner peripheral surface of the elastic member 21 are provided with notches 21a, 21b allowing the elastic bending deformation of the elastic member 21 against a vertical force.
    • 要解决的问题:为了提供一种下级构件定影装置和具有下级构件定影装置的流体控制装置,该下级构件定影装置便于使下级构件的上表面彼此齐平的调平工作,并且进一步增强了 弹性部件的振动吸收效果。 解决方案:下层构件2一旦固定,然后所需的下层构件2克服弹性构件21的弹力向上移动,以便对多个下层的上表面位置进行微调 弹性构件21是由橡胶或合成树脂构成的环状体,弹性构件21的内周面的上下部设有切口21a,21b,使得弹性构件的弹性弯曲变形 21反对垂直力。 版权所有(C)2013,JPO&INPIT
    • 2. 发明专利
    • Tightening jig of bolt with polygonal hole
    • 用多孔螺栓拧紧螺栓
    • JP2013066968A
    • 2013-04-18
    • JP2011206752
    • 2011-09-22
    • Tokyo Electron Ltd東京エレクトロン株式会社Fujikin Inc株式会社フジキン
    • OKABE YASUYUKIMORIYA SHUJISATO KENICHINAKADA TOMOHIROSHINOHARA TSUTOMUYAMAJI MICHIO
    • B25B23/15
    • PROBLEM TO BE SOLVED: To provide a tightening jig of a bolt with a polygonal hole, which enables work in a narrow space and has a tightening-forgetting prevention function of the bolt with the polygonal hole.SOLUTION: The tightening jig 11 of the bolt with the polygonal hole comprises: a shaft 12 whose tip 12a is fit into a polygonal hole 3 of the bolt 1 with the polygonal hole; a cover 14 rotatably fit into the shaft 12 so as to be movable in the axial direction; and a marking member 15 arranged at the cover 14. The cover 14 is axially moved to the shaft 12 and the marking member 15 is made to abut on a head 2 of the bolt 1 with the polygonal hole while the shaft 12 is fit into the polygonal hole 3 of the bolt 1 with the polygonal hole, the shaft 12 is rotated so that the cover 14 may not be rotated in this state, and thus a mark is applied to the head 2 of the bolt 1 with the polygonal hole by the marking member 15.
    • 要解决的问题:提供一种具有多边形孔的螺栓的紧固夹具,其能够在狭窄的空间中工作并且具有带多边形孔的螺栓的防紧缩功能。 解决方案:具有多边形孔的螺栓的紧固夹具11包括:轴12,其尖端12a配合在具有多边形孔的螺栓1的多边形孔3中; 可旋转地装配到轴12中以便可沿轴向移动的盖14; 以及布置在盖14处的标记构件15.盖14轴向移动到轴12,并且使标记构件15与多边形孔抵接在螺栓1的头部2上,同时将轴12装配到 螺栓1的多边形孔3具有多边形孔,轴12旋转,使得盖14在该状态下不能旋转,因此标记通过多边形孔施加到螺栓1的头部2 标签成员15.版权所有(C)2013,JPO&INPIT
    • 3. 发明专利
    • Fluid control device
    • 流体控制装置
    • JP2008298180A
    • 2008-12-11
    • JP2007144932
    • 2007-05-31
    • Fujikin Inc株式会社フジキン
    • NAKADA TOMOHIROSHINOHARA TSUTOMUYAMAJI MICHIO
    • F16K27/00C30B25/14
    • F16K27/003Y10T137/8593Y10T137/87885
    • PROBLEM TO BE SOLVED: To provide a fluid control device which further reduces an occupied space of a device by narrowing a width of a line. SOLUTION: In this fluid control device, supporting passage blocks 9, 10 have openings of fluid passages 9a, 10a abutted on openings of fluid passages 11c, 11d of overhang passage blocks 11a, 11b via a sealing part 20, and comprises: large block parts 25, 27 contacting bottom faces of the overhang passage blocks 11a, 11b; and small block parts 26, 28 whose bottom faces are flush with the large block parts 25, 27 and which have a height lower than that of the large block parts. Male screw member insertion holes 26a, 28a for mounting the supporting passage blocks 9, 10 to a base member 30 are formed on the small block parts 26, 28. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种流体控制装置,其通过缩小线的宽度来进一步减小装置的占用空间。 解决方案:在这种流体控制装置中,支撑通道块9,10具有通过密封部分20邻接突出通道块11a,11b的流体通道11c,11d的开口的流体通道9a,10a的开口,并且包括: 接触突出通道块11a,11b的底面的大块部25,27; 以及小块部件26,28,其底面与大块部件25,27齐平,并且其高度低于大块部件的高度。 用于将支撑通道块9,10安装到基部构件30的阳螺纹构件插入孔26a,28a形成在小块部件26,28上。(C)2009年,JPO和INPIT
    • 6. 发明专利
    • Diaphragm valve
    • 透膜阀
    • JP2003042314A
    • 2003-02-13
    • JP2001231031
    • 2001-07-31
    • Fujikin Inc株式会社フジキン
    • NAKADA TOMOHIROYAMAJI MICHIO
    • F16K7/16
    • F16K7/16
    • PROBLEM TO BE SOLVED: To reduce a cost, to eliminate a fear of deforming a seat, and to prevent a fluid from leaking from a clearance between a body and the seat, in a diaphragm valve used for a semiconductor manufacturing device.
      SOLUTION: This diaphragm valve is composed of a body 2, a seat 3, a seat holder 4, a diaphragm 5, a driving means 6, and a protruding portion 7. Especially, the protruding portion 7 holding the seat 3 between the protruding portion 7 and the seat holder 4 is provided on the body 2 positioned in an inner periphery of the seat 3.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:在半导体制造装置中使用的隔膜阀中,为了降低成本,消除座椅变形的担心,防止流体从主体和座椅之间的间隙泄漏。 解决方案:该隔膜阀由主体2,座椅3,座椅保持件4,隔膜5,驱动装置6和突出部分7组成。特别地,将座椅3保持在突出部分 座椅保持件4设置在位于座椅3内周的主体2上。
    • 7. 发明专利
    • Screw member tightening device and pipe joint tightening device
    • 螺丝紧固装置和管接头紧固装置
    • JP2013066967A
    • 2013-04-18
    • JP2011206751
    • 2011-09-22
    • Tokyo Electron Ltd東京エレクトロン株式会社Fujikin Inc株式会社フジキン
    • OKABE YASUYUKIMORIYA SHUJISATO KENICHINAKADA TOMOHIROSHINOHARA TSUTOMUYAMAJI MICHIO
    • B25B23/15
    • PROBLEM TO BE SOLVED: To provide a screw member tightening device capable of performing a fasting operation added with a tightening-forgetting prevention function by only performing work which is the same with that of a conventional device even if an object is a pipe joint or the like which is limited in a tightening place, and to provide a pipe joint tightening device adapted to the screw member tightening device.SOLUTION: The pipe joint tightening device 1 comprises: a first jig 21 which is fit to a male screw member 11 while being perpendicular to the axial direction of the male screw member and holds the male screw member 11 so as to be unrotative; a second jig 22 which is fit to a female screw member 12 while being perpendicular to the axial direction of the female screw member, and rotates the female screw member 12; and a marking member 23 arranged at the first jig 21 so as to contact with the female screw member 12. A mark is applied to the female second member 12 by a marking member 23 when the female screw member 12 is rotated.
    • 要解决的问题:为了提供一种能够通过仅执行与常规装置相同的工作来执行加紧防止忘记功能的空腹操作的螺钉构件紧固装置,即使物体是管道 接头等被限制在紧固位置,并且提供适合于螺钉构件紧固装置的管接头紧固装置。 管接头紧固装置1包括:第一夹具21,其与阳螺纹构件11配合,同时与外螺纹构件的轴向垂直,并且将外螺纹构件11保持为不旋转 ; 第二夹具22,其与内螺纹构件12配合,同时垂直于内螺纹构件的轴向,并使阴螺纹构件12旋转; 以及设置在第一夹具21处以与内螺纹构件12接触的标记构件23.当阴螺纹构件12旋转时,通过标记构件23将标记施加到阴第二构件12。 版权所有(C)2013,JPO&INPIT