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1. 发明专利

JP2013229052A Method for discontinuous type fluid flow rate switch control using pressure type flow rate control device 有权
标题翻译：使用压力类型流量控制装置的不连续流体流量开关控制方法
公开(公告)号：JP2013229052A
公开(公告)日：2013-11-07
申请号：JP2013144428
申请日：2013-07-10
申请人： Tohoku Univ , 国立大学法人東北大学 , Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , DOI RYOSUKE , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , YOSHIDA TOSHIHIDE , TANAKA HISASHI
IPC分类号： G05D7/00
CPC分类号： G05D7/0635 , G01F1/42 , G01F7/005 , Y10T137/0379
摘要： PROBLEM TO BE SOLVED: To maintain accuracy in flow rate control without increasing the number of switching steps in a pressure type flow rate control device such that switching flow rate ranges controls fluid flow rates.SOLUTION: The pressure type flow rate control device has fluid passages as two or more parallel fluid passages, which have orifices different in fluid flow rate property interposed therein, respectively. To control fluid flow rates in a first flow rate range, fluid in the first flow rate range is passed to an orifice in a fluid passage. To control fluid flow rates in the other plural flow rate ranges, fluid in the other respective flow rate ranges is passed to the orifice in the fluid passage to pass fluid in the first flow rate range through and orifices in fluid passages to pass fluid in the other respective flow rate ranges through. The flow rate ranges are set so that: the maximum flow rate of the first flow rate range is lower than the minimum flow rate of any other flow rate range; and the other respective flow rate ranges have different minimum flow rates and different maximum flow rates, respectively. Flow rate ranges included in neither the first flow rate range nor the other flow rate ranges are excluded from objects of flow rate control.
摘要翻译：要解决的问题：为了保持流量控制的精度，而不增加压力式流量控制装置中的切换步骤数，使得切换流量范围控制流体流量。解决方案：压力型流量控制装置具有流体通道作为两个或更多个平行的流体通道，其分别具有插入其中的流体流速特性的孔。为了在第一流量范围内控制流体流速，第一流量范围内的流体被传递到流体通道中的孔口。为了控制另外多个流量范围内的流体流量，在另一个流量范围内的流体被传递到流体通道中的孔口，以使第一流量范围内的流体通过流体通道中的孔并使流体在其他各个流量范围通过。流量范围设定为：第一流量范围的最大流量比任何其它流量范围的最小流量低; 其他各自的流量范围分别具有不同的最小流量和不同的最大流量。不包括第一流量范围和其他流量范围内的流量范围都不包括流量控制对象。

2. 发明专利

JP2007004644A Flow rate range variable flow control device 有权
标题翻译：流量范围可变流量控制装置
公开(公告)号：JP2007004644A
公开(公告)日：2007-01-11
申请号：JP2005185845
申请日：2005-06-27
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SAITO MASAHITO , HINO SHOICHI , SHIMAZU TSUTOMU , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G05D7/00 , G01F1/00 , G01F1/42 , G01F1/48 , G01F1/684 , G01F7/00
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and to reduce the facility cost by enabling accurate flow control of a fluid in a further wide flow area by use of one flow control device. SOLUTION: The pressure type flow control device is adapted to calculate the flow rate of a fluid passing through an orifice 8 using an orifice upstream pressure P 1 and/or an orifice downstream pressure P 2 as Qc=KP 1 (K is a proportionality factor) or Qc=KP 2 m (P 1 -P 2 ) n (K is a proportionality factor, and m and n are constant numbers). In this pressure type flow control device, a fluid passage between the downstream side of a control valve and a fluid supplying conduit is formed of at least two or more parallel fluid passages, and orifices differed in fluid flow characteristic are interposed in the parallel fluid passages, respectively. The fluid in a small flow area is distributed to one orifice in flow control of the fluid in the small flow area, and the fluid in a large flow area is switchingly distributed to the other orifice in flow control of the fluid in the large flow area. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过使用一个流量控制装置，能够在更宽的流动区域中对流体进行精确的流量控制，从而使流量控制装置小型化并降低设备成本。解决方案：压力型流量控制装置适于计算通过孔口上游压力P 1 和/或孔口下游压力P 2 作为Qc = KP 1 （K是比例因子）或Qc = KP 2 m（SP （K是比例因子，m和n是常数）。在该压力式流量控制装置中，控制阀的下游侧与流体供给管道之间的流体通路由至少两个以上的平行流体通路形成，并且流体流动特性不同的孔插入到并联流体通路，分别。小流量区域中的流体在小流量区域中的流体的流动控制中分配到一个孔口，并且在大流量区域中的流体的流量控制中，大流量区域中的流体被切换地分配到另一个孔口。版权所有（C）2007，JPO＆INPIT

3. 发明专利

JP2012033188A Variable flow rate range type flow control device 有权
标题翻译：可变流量范围流量控制装置
公开(公告)号：JP2012033188A
公开(公告)日：2012-02-16
申请号：JP2011219478
申请日：2011-10-03
申请人： Fujikin Inc , Tohoku Univ , Tokyo Electron Ltd , 国立大学法人東北大学 , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： OMI TADAHIRO , SIATO MASAHITO , HINO SHOICHI , SHIMAZU TSUYOSHI , MIURA KAZUYUKI , NISHINO KOJI , NAGASE MASAAKI , SUGITA KATSUYUKI , HIRATA KAORU , DOI RYOSUKE , HIROSE TAKASHI , SHINOHARA TSUTOMU , IKEDA SHINICHI , IMAI TOMOKAZU , YOSHIDA TOSHIHIDE , TANAKA HISASHI
IPC分类号： G05D7/06
摘要： PROBLEM TO BE SOLVED: To miniaturize a flow control device and reduce equipment cost by enabling a single flow control device to highly accurately control a wider flow rate range of fluids.SOLUTION: In a pressure type flow rate control device which calculates a flow rate of a fluid flowing through an orifice using either pressures at an upstream side of the orifice Pand at a downstream side of the orifice or at least the pressure at the upstream side of the orifice P, a fluid passage between the downstream side of a first valve 2 of the pressure type flow rate control device and a fluid supply pipe conduit 5 is bifurcated into two parallel fluid passages, one fluid passage 5c provided with a second valve 34 and a first orifice 8c and the other fluid passage 5g provided with no valve and a second orifice 8a. The one fluid passage 5c is controlled by an opening and closing of the second valve 34 and allows the fluid in a large flow rate range to flow to the first orifice 8c. The other fluid passage 5g is continuous all the time and allows the fluid in a small flow rate range to flow to the second orifice 8a.
摘要翻译：要解决的问题：通过使单个流量控制装置能够高精度地控制流体的更宽的流量范围，来使流量控制装置小型化并降低设备成本。解决方案：在压力式流量控制装置中，使用压力在孔口P 1 的上游侧计算流过孔口的流体的流量，以及在孔口的下游侧或孔口的上游侧的压力至少为压力类型的第一阀2的下游侧之间的流体通路流量控制装置和流体供给管道5分成两个平行的流体通道，一个流体通道5c设置有第二阀34和第一孔口8c，另一个流体通道5g没有设置阀和第二孔口8a。通过第二阀34的打开和关闭来控制一个流体通道5c，并允许大流量范围内的流体流向第一孔口8c。另一个流体通道5g始终是连续的，并允许流体在小流量范围内流到第二孔口8a。版权所有（C）2012，JPO＆INPIT

4. 发明专利

JP2007057474A Gasket type orifice and pressure type flow control device using the same 有权
标题翻译：垫圈型式和压力型流量控制装置使用它
公开(公告)号：JP2007057474A
公开(公告)日：2007-03-08
申请号：JP2005245804
申请日：2005-08-26
申请人： Fujikin Inc , Tohoku Univ , 国立大学法人東北大学 , 株式会社フジキン
发明人： OMI TADAHIRO , NISHINO KOJI , DOI RYOSUKE , IKEDA SHINICHI , NAGASE MASAAKI , HIRATA KAORU , SUGITA KATSUYUKI , SHINOHARA TSUTOMU , HIROSE TAKASHI , IMAI TOMOKAZU , YOSHIDA SHUNEI , TANAKA HISASHI
IPC分类号： G01F1/42 , G05D7/06
CPC分类号： F16K27/003 , F16L55/02718 , G01F1/36 , G01F15/001 , G01F15/005 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To easily switch, without decomposition and fabrication of a pressure type flow control device, orifices in the device and to easily switch controlled flow rates. SOLUTION: The flow inlet of a valve body 23 of a control valve 2 and a mounting block 39 on the flow inlet, and the flow outlet of the valve body 23 and a mounting block 43 on the outlet are respectively connected dissociatably and airtightly. Thus, a flow passage is formed so that gas flows through the control valve 2. A gasket type orifice 38 of the device A is inserted to fit attachably and detachably between a gasket type orifice insertion hole 42c on the outlet of the valve body 23 and a gasket type orifice insertion hole 43b of the mounting block 43 on the outlet. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了容易地在不分解和制造压力式流量控制装置的情况下切换装置中的孔口并且容易地切换受控的流量。解决方案：控制阀2的阀体23和流入口上的安装块39的流入口以及阀体23的流出口和出口上的安装块43分别分别连接和气密性。因此，形成流路，使得气体流过控制阀2.装置A的垫圈型孔38被插入以可装卸地安装在阀体23的出口上的垫圈型孔插入孔42c和出口上的安装块43的垫圈型孔插入孔43b。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2013066968A Tightening jig of bolt with polygonal hole 审中-公开
标题翻译：用多孔螺栓拧紧螺栓
公开(公告)号：JP2013066968A
公开(公告)日：2013-04-18
申请号：JP2011206752
申请日：2011-09-22
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： B25B23/15
摘要： PROBLEM TO BE SOLVED: To provide a tightening jig of a bolt with a polygonal hole, which enables work in a narrow space and has a tightening-forgetting prevention function of the bolt with the polygonal hole.SOLUTION: The tightening jig 11 of the bolt with the polygonal hole comprises: a shaft 12 whose tip 12a is fit into a polygonal hole 3 of the bolt 1 with the polygonal hole; a cover 14 rotatably fit into the shaft 12 so as to be movable in the axial direction; and a marking member 15 arranged at the cover 14. The cover 14 is axially moved to the shaft 12 and the marking member 15 is made to abut on a head 2 of the bolt 1 with the polygonal hole while the shaft 12 is fit into the polygonal hole 3 of the bolt 1 with the polygonal hole, the shaft 12 is rotated so that the cover 14 may not be rotated in this state, and thus a mark is applied to the head 2 of the bolt 1 with the polygonal hole by the marking member 15.
摘要翻译：要解决的问题：提供一种具有多边形孔的螺栓的紧固夹具，其能够在狭窄的空间中工作并且具有带多边形孔的螺栓的防紧缩功能。解决方案：具有多边形孔的螺栓的紧固夹具11包括：轴12，其尖端12a配合在具有多边形孔的螺栓1的多边形孔3中; 可旋转地装配到轴12中以便可沿轴向移动的盖14; 以及布置在盖14处的标记构件15.盖14轴向移动到轴12，并且使标记构件15与多边形孔抵接在螺栓1的头部2上，同时将轴12装配到螺栓1的多边形孔3具有多边形孔，轴12旋转，使得盖14在该状态下不能旋转，因此标记通过多边形孔施加到螺栓1的头部2 标签成员15.版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2013066967A Screw member tightening device and pipe joint tightening device 有权
标题翻译：螺丝紧固装置和管接头紧固装置
公开(公告)号：JP2013066967A
公开(公告)日：2013-04-18
申请号：JP2011206751
申请日：2011-09-22
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： B25B23/15
摘要： PROBLEM TO BE SOLVED: To provide a screw member tightening device capable of performing a fasting operation added with a tightening-forgetting prevention function by only performing work which is the same with that of a conventional device even if an object is a pipe joint or the like which is limited in a tightening place, and to provide a pipe joint tightening device adapted to the screw member tightening device.SOLUTION: The pipe joint tightening device 1 comprises: a first jig 21 which is fit to a male screw member 11 while being perpendicular to the axial direction of the male screw member and holds the male screw member 11 so as to be unrotative; a second jig 22 which is fit to a female screw member 12 while being perpendicular to the axial direction of the female screw member, and rotates the female screw member 12; and a marking member 23 arranged at the first jig 21 so as to contact with the female screw member 12. A mark is applied to the female second member 12 by a marking member 23 when the female screw member 12 is rotated.
摘要翻译：要解决的问题：为了提供一种能够通过仅执行与常规装置相同的工作来执行加紧防止忘记功能的空腹操作的螺钉构件紧固装置，即使物体是管道接头等被限制在紧固位置，并且提供适合于螺钉构件紧固装置的管接头紧固装置。管接头紧固装置1包括：第一夹具21，其与阳螺纹构件11配合，同时与外螺纹构件的轴向垂直，并且将外螺纹构件11保持为不旋转 ; 第二夹具22，其与内螺纹构件12配合，同时垂直于内螺纹构件的轴向，并使阴螺纹构件12旋转; 以及设置在第一夹具21处以与内螺纹构件12接触的标记构件23.当阴螺纹构件12旋转时，通过标记构件23将标记施加到阴第二构件12。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2012189160A Bolt loosening prevention device, its attachment method and attachment jig 有权
标题翻译：螺栓松弛预防装置，其附件方法和附件
公开(公告)号：JP2012189160A
公开(公告)日：2012-10-04
申请号：JP2011053966
申请日：2011-03-11
申请人： Tokyo Electron Ltd , Fujikin Inc , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： AMIKURA NORIHIKO , KAGATSUME SATORU , SATO MASAHIKO , NAITO YUKIO , MUTO SATOSHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16B39/10 , F16K27/00
CPC分类号： F16B39/101 , F16B39/103 , Y10T29/49826 , Y10T29/53 , Y10T403/50
摘要： PROBLEM TO BE SOLVED: To provide a bolt loosening prevention device which has a simplified member structure and enables easy attachment.SOLUTION: The bolt loosening prevention device includes a plurality of attachment members 2 and 3 to be attached in each head of a plurality of bolts 5 so that each of them cannot rotate relatively and an engagement member 4 engaged with and across the attachment members 2 and 3. The attachment members 2 and 3 have non-annular outer peripheries 2b and 3b. The engagement member 4 includes a plurality of engagement holes (non-annular engagement parts) 8a and 8b corresponding to the non-annular outer peripheries 2b and 3b of the attachment members 2 and 3.
摘要翻译：要解决的问题：提供具有简化的构件结构并且能够容易地附接的螺栓松动防止装置。解决方案：螺栓松动防止装置包括多个附接构件2和3，其被附接在多个螺栓5的每个头部中，使得它们中的每一个不能相对旋转，并且接合构件4与附件接合并穿过附件构件2和3.附接构件2和3具有非环形的外周2b和3b。接合构件4包括与安装构件2和3的非环形外周2b和3b相对应的多个接合孔（非环形接合部）8a和8b。（C）2013，JPO＆INPIT

8. 发明专利

JP2012146321A Corrosion-resistant pressure type flow rate controller for reference pressure type flow rate controller constituting pressure control type flow rate reference unit 有权
标题翻译：用于参考压力类型流量控制器的耐腐蚀压力类型流量控制器构成压力控制类型流量参考单元
公开(公告)号：JP2012146321A
公开(公告)日：2012-08-02
申请号：JP2012055216
申请日：2012-03-13
申请人： Fujikin Inc , Tokyo Electron Ltd , 東京エレクトロン株式会社 , 株式会社フジキン
发明人： MORIYA SHUJI , OKASE WATARU , SHINOHARA TSUTOMU , IKEDA SHINICHI , YAMAJI MICHIO , HAYASHI KYOTAKA , YOSHIDA TOSHIHIDE , OMATA YASUYUKI
IPC分类号： G05D7/00
CPC分类号： G01F25/0007 , G01F25/003 , G01F25/0053 , G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a reference pressure type flow rate controller that easily performs flow rate calibration of a flow rate controller targeting corrosive gas, is inexpensive and high in flow rate control precision, and has corrosion resistance.SOLUTION: A reference pressure type flow rate controller, used for a pressure control type flow rate reference unit, comprises a control valve provided on the upstream side of an orifice, a pressure detector provided between the control valve and orifice, and an operation control device computing a flow rate from detected pressure of the pressure detector and outputting a difference between a flow rate command signal and the computed flow rate signal as a control signal to a driving part of the control valve, and then controls a fluid flow rate on the orifice downstream side by adjusting orifice upstream-side pressure by opening and closing the control valve in a state in which the ratio of the upstream-side pressure and downstream-side pressure of the orifice is held at the critical pressure ratio of a fluid to be controlled or below. The reference pressure type flow rate controller has a gold plating coating formed over the entire surface of a part that the fluid in the reference pressure type flow rate controller comes into contact with to obtain a corrosion-resistant pressure type flow rate controller 9.
摘要翻译：要解决的问题：为了提供一种便于执行针对腐蚀性气体的流量控制器的流量校准的基准压力型流量控制器，流量控制精度低廉且具有耐腐蚀性。解决方案：用于压力控制型流量参考单元的参考压力型流量控制器包括设置在孔上游侧的控制阀，设置在控制阀和孔之间的压力检测器，以及操作控制装置从压力检测器的检测压力计算流量，并将流量指令信号和计算出的流量信号之间的差作为控制信号输出到控制阀的驱动部分，然后控制流体流量在孔口下游侧通过在孔口的上游侧压力和下游侧压力的比率保持在流体的临界压力比的状态下打开和关闭控制阀来调节孔口上游侧压力被控制或低于。参考压力型流量控制器具有形成在基准压力型流量控制器中的流体接触到的部分的整个表面上的镀金涂层，以获得耐腐蚀压力型流量控制器9.
版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2014084886A Pipe joint 有权
标题翻译：管接头
公开(公告)号：JP2014084886A
公开(公告)日：2014-05-12
申请号：JP2012231615
申请日：2012-10-19
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16L19/03
CPC分类号： F16L19/0218 , F16L19/025 , F16L23/20
摘要： PROBLEM TO BE SOLVED: To provide a pipe joint in which fine particles do not occur even in a case of repeating of attaching and detaching.SOLUTION: A pipe joint 1 includes: first and second joint member 2, 3 having fluid passages 2a, 3a communicating with each other; an annular gasket 4 interposed between abutment end surfaces of the joint members 2, 3; and a nut 6 connecting the joint member 2, 3 to each other. An inner surface treatment layer 30 is provided in the nut 6. The inner surface treatment layer 30 comprises an alloy film of Co (cobalt) and P (phosphorus) provided in the inner surface of the nut 6, and a fluorine coating provided on the surface of the alloy film.
摘要翻译：要解决的问题：提供即使在重复安装和拆卸的情况下也不会发生微粒的管接头。解决方案：管接头1包括：具有流体通道2a，3a的第一和第二接头构件2,3 相互沟通; 插入在接头构件2,3的邻接端面之间的环形垫圈4; 以及将接头构件2,3彼此连接的螺母6。内表面处理层30设置在螺母6中。内表面处理层30包括设置在螺母6的内表面中的Co（钴）和P（磷）的合金膜，合金膜表面。

10. 发明专利

JP2013137054A Fluid coupling 有权
标题翻译：流体联轴器
公开(公告)号：JP2013137054A
公开(公告)日：2013-07-11
申请号：JP2011288149
申请日：2011-12-28
申请人： Tokyo Electron Ltd , 東京エレクトロン株式会社 , Fujikin Inc , 株式会社フジキン
发明人： OKABE YASUYUKI , MORIYA SHUJI , SATO KENICHI , NAKADA TOMOHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO
IPC分类号： F16L19/03
摘要： PROBLEM TO BE SOLVED: To provide a fluid coupling that can maintain a corotation prevention effect when a male member and a female member are engaged with each other in spite of repetitive attachment and detachment.SOLUTION: A corotation prevention means is formed by overlapping two pieces of thrust washers 9, 10. Respective thrust washers 9, 10 are made by forming a Ni-P+PTFE composite film on the surface of a stainless steel sheet, and then, by applying heat treatment to the stainless steel plate. A circular recess 21 for storing two pieces of thrust washers 9, 10 and a pawl 22 arranged on an opening of the recess 21 and hardly dropping out the thrust washers 9, 10 are arranged on a cap nut 7.
摘要翻译：要解决的问题：提供一种当阳构件和阴构件彼此接合而能够保持预防共翘作用的流体联接器，尽管重复地附接和拆卸。解决方案：通过重叠两个部件形成共烧防止装置止推垫圈9,10通过在不锈钢板的表面上形成Ni-P + PTFE复合膜，然后通过对不锈钢板进行热处理来制造各个止推垫圈9,10。用于储存两个止推垫圈9,10的圆形凹槽21和布置在凹槽21的开口上并几乎不脱落止推垫圈9,10的棘爪22布置在盖帽螺母7上。

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