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    • 1. 发明专利
    • Thin film type gas sensor, and checkup method for the same
    • 薄膜式气体传感器及其检测方法
    • JP2014178199A
    • 2014-09-25
    • JP2013052228
    • 2013-03-14
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • KOBAYASHI MAKOTOSUZUKI TAKUYAOKAMURA MAKOTONAKAJIMA TAKASHINONAKA ATSUSHIONISHI HISAONAKAYAMA TOSHIROSUEMITSU MASAHIRO
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a thin film type gas sensor that can maintain its detecting performance level for the gas to be checked over a long period and a checkup method enabling such a thin film type gas sensor to be selected in an early stage of the product.SOLUTION: A thin film type gas sensor that is equipped with a sensor element having a gas detecting layer whose electric characteristics change when coming into contact with gas to be detected and a heater layer that can heat the gas detecting layer, and makes the gas to be detected be detected on the basis of the resistance level of the gas detection layer heated by the heater layer and whose prescribed indicator value calculated by using the resistance level R of the gas detecting layer and the concentration X of the gas to be detected measured with the thin film type gas sensor in its initial state satisfies a preset standard; and a thin film type gas sensor checkup method by which whether or not the gas sensor is satisfactory on the basis of this standard.
    • 要解决的问题:提供能够长时间保持对待检查气体的检测性能水平的薄膜型气体传感器,以及能够在早期阶段选择这种薄膜型气体传感器的检查方法 该产品。一种薄膜式气体传感器,其配备有具有气体检测层的传感器元件,该气体检测层的电特性在与要检测的气体接触时变化,加热层可加热气体检测层,并且 基于由加热器层加热的气体检测层的电阻等级来检测要检测的气体,并且通过使用气体检测层的电阻水平R和气体浓度X计算出的规定指标值 在初始状态下用薄膜型气体传感器测量的检测满足预设标准; 以及基于该标准的气体传感器是否令人满意的薄膜式气体传感器检查方法。
    • 2. 发明专利
    • Gas detection apparatus
    • 气体检测装置
    • JP2012167954A
    • 2012-09-06
    • JP2011027489
    • 2011-02-10
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • OKAMURA MAKOTOSUZUKI TAKUYANARITA MASATAKAFURUTA TOSHITAKANONAKA ATSUSHIONISHI HISAONAKAYAMA TOSHIRONAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a gas detection apparatus for achieving low power consumption while maintaining detection performance by improving gas type determination logic.SOLUTION: The gas detection apparatus usually heats a gas sensing layer to a temperature required for detecting existence of interference gas or detection target gas, determines whether the interference gas or the detection target gas is included or not based on the electric resistance characteristic of the gas sensing layer, and when the interference gas or the detection target gas is included, heats the gas sensing layer to a temperature required for burning the interference gas and a temperature required for the gas sensing layer to detect only the detection target gas, and determines the existence or concentration of the detection target gas based on the electric resistance characteristic of the gas sensing layer.
    • 要解决的问题:提供一种气体检测装置,用于通过改进气体类型确定逻辑来保持检测性能,从而实现低功耗。 气体检测装置通常将气体感测层加热到检测干燥气体或检测目标气体的存在所需的温度,基于电阻特性确定是否包含干扰气体或检测目标气体 的气体检测层,并且当包含干扰气体或检测目标气体时,将气体感测层加热到燃烧干扰气体所需的温度和气体感测层所需的温度仅仅检测检测目标气体, 并且基于气体感测层的电阻特性来确定检测目标气体的存在或集中。 版权所有(C)2012,JPO&INPIT
    • 3. 发明专利
    • Gas alarm, and heater temperature control method of gas sensor in gas alarm
    • 燃气报警气体报警和加热器温度控制方法
    • JP2012164095A
    • 2012-08-30
    • JP2011023323
    • 2011-02-04
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • KAMIOKA TAKESHISASAKI SHOJIWATANABE TADASHIONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G08B21/16G01N27/12
    • PROBLEM TO BE SOLVED: To achieve control of keeping a heater temperature constant regarding a heater temperature control technique in a gas alarm, thereby improving detection accuracy of gas leakage.SOLUTION: At each time of sensor drive, the following processing is performed. From a control circuit section 104 to a heater resistance 103 in a gas sensor 101, heater voltage is applied for heating. Then, based on data value of ambient temperature from an ambient temperature detection section 117, a heater electric power quantity given to the heater resistance 103 is corrected, while a voltage value and a current value at both ends of the heater resistance 103 are calculated to obtain a heater resistance value. Then, based on the heater resistance value and the corrected heater electric power quantity, a heater voltage to be applied to the heater resistance 103 at next time of sensor drive is calculated.
    • 要解决的问题:为了实现对气体报警器中的加热器温度控制技术保持加热器温度恒定的控制,从而提高气体泄漏的检测精度。

      解决方案:在每次传感器驱动时,执行以下处理。 从气体传感器101的控制电路部104到加热电阻103,加热加热。 然后,根据来自环境温度检测部117的环境温度的数据值,校正给予加热电阻103的加热器电力量,同时将加热器电阻103的两端的电压值和电流值计算为 获得加热器电阻值。 然后,基于加热器电阻值和校正加热器电力量,计算在下一次传感器驱动时施加到加热器电阻103的加热器电压。 版权所有(C)2012,JPO&INPIT

    • 4. 发明专利
    • Thin film gas sensor
    • 薄膜气体传感器
    • JP2012163437A
    • 2012-08-30
    • JP2011024068
    • 2011-02-07
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • SUZUKI TAKUYANARITA MASATAKAKOBAYASHI MAKOTOISHIKAWA NORIAKIONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a thin film gas sensor which comprises a sufficient mechanical strength and is stable and highly reliable.SOLUTION: A thin film gas sensor is provided which includes a gas sensing layer formed on an electric insulating layer. The gas sensing layer includes a pair of sensing electrode layers formed on the electric insulating layer, a sensing layer which is formed to partially cover the pair of sensing electrode layers while being spread over both the pair of sensing electrode layers, and a selective combustion layer which is formed to cover the sensing electrode layers and the sensing layer. A particle size of binders contained in the selective combustion layer is smaller than that of SnOconstituting the sensing layer and that of a metal oxide constituting the selective combustion layer.
    • 要解决的问题:提供一种薄膜气体传感器,其包括足够的机械强度并且是稳定和高度可靠的。 解决方案:提供一种薄膜气体传感器,其包括形成在电绝缘层上的气体感测层。 气体感测层包括形成在电绝缘层上的一对感测电极层,感测层,其形成为部分地覆盖一对感测电极层,同时分布在一对感测电极层上,以及选择性燃烧层 其形成为覆盖感测电极层和感测层。 包含在选择性燃烧层中的粘合剂的粒度小于构成感测层的SnO 2 和构成选择性燃烧层的金属氧化物的粒度。 版权所有(C)2012,JPO&INPIT
    • 5. 发明专利
    • ガス検知装置及びガス検知方法
    • 气体检测器和气体检测方法
    • JP2015045546A
    • 2015-03-12
    • JP2013176219
    • 2013-08-28
    • 富士電機株式会社Fuji Electric Co Ltd大阪瓦斯株式会社Osaka Gas Co Ltd
    • OKAMURA MAKOTOSUZUKI TAKUYAKOBAYASHI MAKOTONAKAJIMA TAKASHINONAKA ATSUSHIONISHI HISAO
    • G01N27/12
    • 【課題】温度や湿度による影響を排除し、より高精度な検知を実現するガス検知装置、および、ガス検知方法を提供する。【解決手段】ヒータ層駆動部22を駆動してヒータ層がガス感知層を加熱して検出可能状態とし、ガス検知部23からの出力に基づいてガス濃度を検知し、ヒータ層抵抗検知部24からのヒータ層抵抗値を読み込んでガス感知層周囲の温度を検知し、ヒータ層抵抗検知部24からのヒータ層抵抗値を読み込んでヒータオン後のヒータ層抵抗値の昇温特性の変化に基づいてガス感知層周囲の湿度を算出し、算出した温度および湿度に基づいて補正値を算出し、ガス濃度に対して補正値を用いて補正し、補正されたガス濃度によりガスの有無を判定するガス検知装置またはガス検知方法とした。【選択図】図1
    • 要解决的问题:提供一种用于消除由于温度和湿度引起的影响的气体检测器和气体检测方法,并且以更高的精度实现检测。解决方案:提供一种气体检测器或气体检测方法,包括以下步骤: 加热器层驱动单元22,使得加热器层加热气体感测层以将其置于可检测状态,并且基于来自气体检测单元23的输出检测气体浓度; 从加热器层电阻检测单元24读取加热器层电阻值,并检测气体感测层周围的温度; 从加热器层电阻检测单元24读取加热器层电阻值,并基于加热器加电后的加热器层电阻值的升温特性的变化计算气体感测层周围的湿度; 基于所计算的温度和湿度计算校正值; 使用校正值校正气体浓度; 以及从校正的气体浓度确定气体的存在。
    • 7. 发明专利
    • Gas alarm and gas detection method
    • 气体报警和气体检测方法
    • JP2011149754A
    • 2011-08-04
    • JP2010009843
    • 2010-01-20
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • YOSHIDA TOSHITAKASUZUKI TAKUYANARITA MASATAKAOKAMURA MAKOTOONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a gas alarm capable of selectively detecting methane, CO and hydrogen by low power consumption, and a gas detection method. SOLUTION: When the resistance value of a gas detection layer is measured by making current intermittently pass through the heater layer provided to a membrane gas sensor at a predetermined cycle to calculate the concentration of gas, during the heating by the passage of electric current due to a heater control means in clean air, the first reference resistance value of the gas detection layer when the gas detection layer reaches a first temperature, the second reference resistance value of the gas detection layer when the temperature of the gas detection layer further rises to reach second temperature and the third reference resistance value of the gas detection layer when the temperature of the gas detection layer further rises to arrive at an almost constant third temperature are respectively preliminarily held and first-third resistance values are compared with the first-third reference resistance values to judge the kind of the gas. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供能够通过低功耗选择性地检测甲烷,CO和氢气的气体报警器和气体检测方法。 解决方案:当通过使电流以预定的周期间歇地通过设置在膜式气体传感器上的加热器层来测量气体检测层的电阻值,以计算气体的浓度时,在加热期间通过电 气体检测层达到第一温度时气体检测层的第一参考电阻值,当气体检测层的温度进一步升高时气体检测层的第二参考电阻值 分别预先保持气体检测层的温度进一步上升到几乎恒定的第三温度时达到第二温度和气体检测层的第三参考电阻值,并且将第一 - 第三电阻值与第一温度进行比较, 第三个参考电阻值来判断气体的种类。 版权所有(C)2011,JPO&INPIT
    • 8. 发明专利
    • Thin film type gas sensor
    • 薄膜式气体传感器
    • JP2014178196A
    • 2014-09-25
    • JP2013052217
    • 2013-03-14
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • FURUTA TOSHITAKASUZUKI TAKUYANARITA MASATAKAOKAMURA MAKOTOOKADA YUKARINAKAJIMA TAKASHINONAKA ATSUSHIONISHI HISAONAKAYAMA TOSHIROSUEMITSU MASAHIRO
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a thin film type gas sensor which has high selectivity, can reduce power consumption, and can maintain reliability over a long period of time.SOLUTION: A thin film type gas sensor comprises: a tabular silicon substrate having a circular cylinder-shaped through-hole; a thin film-like support layer overlapped and formed on the silicon substrate; a heater layer corresponding to the through-hole and formed on the support layer; an electric insulation layer formed on the support layer so as to cover the heater layer; two electrodes corresponding to the through-hole and formed on the electric insulation layer at a spacing between them; a gas sensing layer formed on the electric insulation layer so as to connect the two electrodes with each other; and a selective combustion layer configured by a porous body added with a catalyst, corresponding to the through-hole, and formed in a plane view circular shape so as to cover the two electrodes and the gas sensing layer on the electric insulation layer. The ratio D1/D2 of a diameter D1 of the through-hole at a portion coming into contact with the support layer of the silicon substrate to a diameter D2 at a portion coming into contact with the electric insulation layer in the selective combustion layer is in a range not smaller than 1.92 and not larger than 2.78.
    • 要解决的问题:提供一种具有高选择性的薄膜型气体传感器,可以降低功耗,并且可以长时间保持可靠性。解决方案:薄膜型气体传感器包括:具有 圆柱形通孔; 在硅衬底上重叠形成的薄膜状支撑层; 对应于所述通孔并形成在所述支撑层上的加热器层; 形成在所述支撑层上以覆盖所述加热层的电绝缘层; 两个电极对应于通孔并以它们之间的间隔形成在电绝缘层上; 形成在所述电绝缘层上以将所述两个电极彼此连接的气体感测层; 以及选择性燃烧层,其由添加有与所述通孔对应的催化剂的多孔体构成,并形成为平面图圆形,以覆盖所述电绝缘层上的所述两个电极和所述气体感测层。 在与硅衬底的支撑层接触的部分处的通孔的直径D1与在选择性燃烧层中与电绝缘层接触的部分处的直径D2的比D1 / D2为 范围不小于1.92且不大于2.78。
    • 9. 发明专利
    • Gas detection device
    • 气体检测装置
    • JP2013061227A
    • 2013-04-04
    • JP2011199535
    • 2011-09-13
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • OKAMURA MAKOTOSUZUKI TAKUYAKOBAYASHI MAKOTOONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a gas detection technique that enables reliability to be maintained through preventive maintenance.SOLUTION: In a gas detection device 100, the density of a gas in an atmosphere is detected by means of heating due to the intermittent energization of a heater layer 3 in a sensor element 10 housed in a filter package 110 and detecting an electrical resistance value R due to the energization of a sensing layer 7. And, in the device, there is included gas type determining means 23 for determining whether or not an interference gas other than a gas of a detection object exists. If the interference gas is detected, when an electrical resistance value R falls below a threshold R1 greater than a threshold R2 for detecting the detection object gas, it is determined that the filter package 110 is deteriorated and an alarm is output, so that the preventive maintenance of the gas detection device 100 is realized.
    • 要解决的问题:提供通过预防性维护使得可靠性得以维持的气体检测技术。 解决方案:在气体检测装置100中,由于在容纳在过滤器组件110中的传感器元件10中的加热器层3间歇地通电,通过加热来检测气氛中的气体的密度, 由于感应层7通电而导致的电阻值R.在该装置中,存在用于判定是否存在检测对象气体以外的干扰气体的气体类型确定单元23。 如果检测到干扰气体,则当电阻值R低于用于检测检测对象气体的阈值R2以下的阈值R1以下时,确定过滤器组件110劣化并且输出报警, 实现了气体检测装置100的维护。 版权所有(C)2013,JPO&INPIT
    • 10. 发明专利
    • Gas detector
    • 气体检测器
    • JP2013190232A
    • 2013-09-26
    • JP2012054983
    • 2012-03-12
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • OKAMURA MAKOTOSUZUKI TAKUYAKOBAYASHI MAKOTOONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To diagnose deterioration of a filter package before functions of a gas detector are lost and to perform preventive maintenance of the gas detector.SOLUTION: A gas detector 500 comprises a sensor element 50, energization drive means 60, gas detecting means 61, different-kind-of-gas determination means 62, and so on. The sensor element 50 is constituted of a silicon wafer 51 having a thermal oxidation film attached on both sides, on which a SiN(silicon nitride) film and a SiO(silica) film are successively formed as a support layer/heat insulation layer 52 of a diaphragm structure. After that, a heater layer 53 made of a Ni-Cr alloy and a SiOinsulation layer 54 are successively formed by a sputtering method. Then, a bonding layer 55, sensing layer electrodes 56, and a sensing layer 57 are formed thereon. Furthermore, a gas sensing layer 59 for sensing gas is formed as a film, and the gas sensing layer 59 is constituted of a sensing layer 57 of SnO(tin oxide) doped with Sb (antimony) and a selective combustion layer 58 constituted of a sintered material in which Pd (palladium) as a catalyst is carried by Al2O3 (alumina).
    • 要解决的问题:在气体检测器的功能丧失之前,对过滤器组件的劣化进行诊断,并进行气体检测器的预防性维护。解决方案:气体检测器500包括传感器元件50,通电驱动装置60,气体检测装置 61,不同种类的气体测定装置62等。 传感器元件50由两面附着有热氧化膜的硅晶片51构成,其上依次形成SiN(氮化硅)膜和SiO(二氧化硅)膜作为支撑层/隔热层52 隔膜结构。 之后,通过溅射法依次形成由Ni-Cr合金和SiO绝缘层54构成的加热层53。 然后,在其上形成接合层55,感测层电极56和感测层57。 此外,用于感测气体的气体感测层59形成为膜,并且气体感测层59由掺杂有Sb(锑)的SnO(氧化锡)的感测层57和由Sb(锑)构成的选择性燃烧层58构成。 作为催化剂的Pd(钯)由Al2O3(氧化铝)负载的烧结材料。