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    • 1. 发明专利
    • ガス検知装置及びガス検知方法
    • 气体检测器和气体检测方法
    • JP2015045546A
    • 2015-03-12
    • JP2013176219
    • 2013-08-28
    • 富士電機株式会社Fuji Electric Co Ltd大阪瓦斯株式会社Osaka Gas Co Ltd
    • OKAMURA MAKOTOSUZUKI TAKUYAKOBAYASHI MAKOTONAKAJIMA TAKASHINONAKA ATSUSHIONISHI HISAO
    • G01N27/12
    • 【課題】温度や湿度による影響を排除し、より高精度な検知を実現するガス検知装置、および、ガス検知方法を提供する。【解決手段】ヒータ層駆動部22を駆動してヒータ層がガス感知層を加熱して検出可能状態とし、ガス検知部23からの出力に基づいてガス濃度を検知し、ヒータ層抵抗検知部24からのヒータ層抵抗値を読み込んでガス感知層周囲の温度を検知し、ヒータ層抵抗検知部24からのヒータ層抵抗値を読み込んでヒータオン後のヒータ層抵抗値の昇温特性の変化に基づいてガス感知層周囲の湿度を算出し、算出した温度および湿度に基づいて補正値を算出し、ガス濃度に対して補正値を用いて補正し、補正されたガス濃度によりガスの有無を判定するガス検知装置またはガス検知方法とした。【選択図】図1
    • 要解决的问题:提供一种用于消除由于温度和湿度引起的影响的气体检测器和气体检测方法,并且以更高的精度实现检测。解决方案:提供一种气体检测器或气体检测方法,包括以下步骤: 加热器层驱动单元22,使得加热器层加热气体感测层以将其置于可检测状态,并且基于来自气体检测单元23的输出检测气体浓度; 从加热器层电阻检测单元24读取加热器层电阻值,并检测气体感测层周围的温度; 从加热器层电阻检测单元24读取加热器层电阻值,并基于加热器加电后的加热器层电阻值的升温特性的变化计算气体感测层周围的湿度; 基于所计算的温度和湿度计算校正值; 使用校正值校正气体浓度; 以及从校正的气体浓度确定气体的存在。
    • 3. 发明专利
    • Gas alarm and gas detection method
    • 气体报警和气体检测方法
    • JP2011149754A
    • 2011-08-04
    • JP2010009843
    • 2010-01-20
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • YOSHIDA TOSHITAKASUZUKI TAKUYANARITA MASATAKAOKAMURA MAKOTOONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a gas alarm capable of selectively detecting methane, CO and hydrogen by low power consumption, and a gas detection method. SOLUTION: When the resistance value of a gas detection layer is measured by making current intermittently pass through the heater layer provided to a membrane gas sensor at a predetermined cycle to calculate the concentration of gas, during the heating by the passage of electric current due to a heater control means in clean air, the first reference resistance value of the gas detection layer when the gas detection layer reaches a first temperature, the second reference resistance value of the gas detection layer when the temperature of the gas detection layer further rises to reach second temperature and the third reference resistance value of the gas detection layer when the temperature of the gas detection layer further rises to arrive at an almost constant third temperature are respectively preliminarily held and first-third resistance values are compared with the first-third reference resistance values to judge the kind of the gas. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供能够通过低功耗选择性地检测甲烷,CO和氢气的气体报警器和气体检测方法。 解决方案:当通过使电流以预定的周期间歇地通过设置在膜式气体传感器上的加热器层来测量气体检测层的电阻值,以计算气体的浓度时,在加热期间通过电 气体检测层达到第一温度时气体检测层的第一参考电阻值,当气体检测层的温度进一步升高时气体检测层的第二参考电阻值 分别预先保持气体检测层的温度进一步上升到几乎恒定的第三温度时达到第二温度和气体检测层的第三参考电阻值,并且将第一 - 第三电阻值与第一温度进行比较, 第三个参考电阻值来判断气体的种类。 版权所有(C)2011,JPO&INPIT
    • 4. 发明专利
    • Power-saving carbon monoxide gas sensor
    • 省电一氧化碳气体传感器
    • JP2003279521A
    • 2003-10-02
    • JP2002085082
    • 2002-03-26
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • TABATA SOICHIHIGAKI KATSUMISASAKI HIROICHIONISHI HISAOOGINO SHINJISUZUKI TAKUYAMATSUBARA TAKESHIKUNIHARA KENJIKOBAYASHI MITSUONAGASE NORIYOSHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a power-saving carbon monoxide gas sensor having only a remote possibility of detecting hydrogen as a carbon monoxide gas and capable of detecting a carbon monoxide gas with superior quantitative property.
      SOLUTION: The semiconductor-type carbon monoxide gas sensor is constituted in such a way as to set temperature of a membranous oxide at least at three temperatures (1)-(3) by controlling electric power of a heater for heating the membranous oxide, and to periodically change the temperature of the membranous oxide at the three temperature. The temperature (1) is an intermediate temperature for detecting a gas from the resistance value of the membranous oxide and is between 100°C-150°C. The temperature (2) is higher than the temperature (1) and is a high temperature for cleaning the surface of the sensor. The temperature (3) is lower than the temperature (1), is a low temperature for detecting whether a detected gas is a carbon monoxide gas or another gas from the resistance value of the membranous oxide, and is lower than 90°C.
      COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种节能一氧化碳气体传感器,其仅具有检测氢气作为一氧化碳气体的远程可能性并且能够检测具有优异定量性能的一氧化碳气体。 解决方案:半导体型一氧化碳气体传感器以通过控制用于加热膜的加热器的电力来设置至少三个温度(1) - (3)的膜氧化物的温度的方式构成 并且在三个温度周期性地改变膜氧化物的温度。 温度(1)是从膜状氧化物的电阻值检测气体的中间温度,为100℃-150℃。 温度(2)高于温度(1),是清洁传感器表面的高温。 温度(3)低于温度(1),是根据膜氧化物的电阻值检测检测气体是一氧化碳气体还是其他气体的低温,低于90℃。 版权所有(C)2004,JPO
    • 5. 发明专利
    • Gas detector
    • 气体检测器
    • JP2013190232A
    • 2013-09-26
    • JP2012054983
    • 2012-03-12
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • OKAMURA MAKOTOSUZUKI TAKUYAKOBAYASHI MAKOTOONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To diagnose deterioration of a filter package before functions of a gas detector are lost and to perform preventive maintenance of the gas detector.SOLUTION: A gas detector 500 comprises a sensor element 50, energization drive means 60, gas detecting means 61, different-kind-of-gas determination means 62, and so on. The sensor element 50 is constituted of a silicon wafer 51 having a thermal oxidation film attached on both sides, on which a SiN(silicon nitride) film and a SiO(silica) film are successively formed as a support layer/heat insulation layer 52 of a diaphragm structure. After that, a heater layer 53 made of a Ni-Cr alloy and a SiOinsulation layer 54 are successively formed by a sputtering method. Then, a bonding layer 55, sensing layer electrodes 56, and a sensing layer 57 are formed thereon. Furthermore, a gas sensing layer 59 for sensing gas is formed as a film, and the gas sensing layer 59 is constituted of a sensing layer 57 of SnO(tin oxide) doped with Sb (antimony) and a selective combustion layer 58 constituted of a sintered material in which Pd (palladium) as a catalyst is carried by Al2O3 (alumina).
    • 要解决的问题:在气体检测器的功能丧失之前,对过滤器组件的劣化进行诊断,并进行气体检测器的预防性维护。解决方案:气体检测器500包括传感器元件50,通电驱动装置60,气体检测装置 61,不同种类的气体测定装置62等。 传感器元件50由两面附着有热氧化膜的硅晶片51构成,其上依次形成SiN(氮化硅)膜和SiO(二氧化硅)膜作为支撑层/隔热层52 隔膜结构。 之后,通过溅射法依次形成由Ni-Cr合金和SiO绝缘层54构成的加热层53。 然后,在其上形成接合层55,感测层电极56和感测层57。 此外,用于感测气体的气体感测层59形成为膜,并且气体感测层59由掺杂有Sb(锑)的SnO(氧化锡)的感测层57和由Sb(锑)构成的选择性燃烧层58构成。 作为催化剂的Pd(钯)由Al2O3(氧化铝)负载的烧结材料。
    • 7. 发明专利
    • Gas detection device and gas detection method
    • 气体检测装置和气体检测方法
    • JP2011227069A
    • 2011-11-10
    • JP2011073629
    • 2011-03-29
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • ONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHISUZUKI TAKUYAOKAMURA MAKOTONAKAJIMA TAKASHIKUNIHARA KENJIMAEDA TAKAHIKO
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a technology which, when the presence or absence of a gas to be detected and the concentration thereof are detected, can raise an alarm within a detection response specified time by reducing a time from the occurrence of a gas leakage to the alarm activation while eliminating the influence of gases not to be detected and reducing power consumption.SOLUTION: A gas detection device comprises current-carrying cycle change means. A detection response time is a lower time limit in which a gas to be detected in the outside of a housing reaches a sensor element provided in the housing to allow the gas detection layer to detect the concentration of the gas that exceeds an alarm level. A detection response specified time is an upper time limit in which the gas detection layer in the housing needs to detect the gas to be detected in the outside of the housing. The current-carrying cycle change means changes a regular cycle based on a determination result obtained by gas type determination means for determining a gas type, so that detection timing can be within a time longer than or equal to the detection response time and shorter than the detection response specified time.
    • 要解决的问题:提供一种技术,当检测到有无气体和其浓度时,可以通过减少从发生的时间开始在检测响应指定时间内引起警报 气体泄漏到报警激活,同时消除不被检测的气体的影响并降低功耗。 气体检测装置包括载流循环改变装置。 检测响应时间是在壳体外部检测到的气体到达设置在壳体中的传感器元件以允许气体检测层检测到超过报警水平的气体浓度的较低时间限制。 检测响应规定时间是上限时间,其中壳体中的气体检测层需要检测在外壳外部被检测的气体。 载流循环改变装置基于由用于确定气体类型的气体类型确定装置获得的确定结果改变规则循环,使得检测定时可以在大于或等于检测响应时间的时间内并且短于检测响应时间 检测响应指定时间。 版权所有(C)2012,JPO&INPIT
    • 8. 发明专利
    • Thin film type gas sensor
    • 薄膜式气体传感器
    • JP2014178196A
    • 2014-09-25
    • JP2013052217
    • 2013-03-14
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • FURUTA TOSHITAKASUZUKI TAKUYANARITA MASATAKAOKAMURA MAKOTOOKADA YUKARINAKAJIMA TAKASHINONAKA ATSUSHIONISHI HISAONAKAYAMA TOSHIROSUEMITSU MASAHIRO
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a thin film type gas sensor which has high selectivity, can reduce power consumption, and can maintain reliability over a long period of time.SOLUTION: A thin film type gas sensor comprises: a tabular silicon substrate having a circular cylinder-shaped through-hole; a thin film-like support layer overlapped and formed on the silicon substrate; a heater layer corresponding to the through-hole and formed on the support layer; an electric insulation layer formed on the support layer so as to cover the heater layer; two electrodes corresponding to the through-hole and formed on the electric insulation layer at a spacing between them; a gas sensing layer formed on the electric insulation layer so as to connect the two electrodes with each other; and a selective combustion layer configured by a porous body added with a catalyst, corresponding to the through-hole, and formed in a plane view circular shape so as to cover the two electrodes and the gas sensing layer on the electric insulation layer. The ratio D1/D2 of a diameter D1 of the through-hole at a portion coming into contact with the support layer of the silicon substrate to a diameter D2 at a portion coming into contact with the electric insulation layer in the selective combustion layer is in a range not smaller than 1.92 and not larger than 2.78.
    • 要解决的问题:提供一种具有高选择性的薄膜型气体传感器,可以降低功耗,并且可以长时间保持可靠性。解决方案:薄膜型气体传感器包括:具有 圆柱形通孔; 在硅衬底上重叠形成的薄膜状支撑层; 对应于所述通孔并形成在所述支撑层上的加热器层; 形成在所述支撑层上以覆盖所述加热层的电绝缘层; 两个电极对应于通孔并以它们之间的间隔形成在电绝缘层上; 形成在所述电绝缘层上以将所述两个电极彼此连接的气体感测层; 以及选择性燃烧层,其由添加有与所述通孔对应的催化剂的多孔体构成,并形成为平面图圆形,以覆盖所述电绝缘层上的所述两个电极和所述气体感测层。 在与硅衬底的支撑层接触的部分处的通孔的直径D1与在选择性燃烧层中与电绝缘层接触的部分处的直径D2的比D1 / D2为 范围不小于1.92且不大于2.78。
    • 9. 发明专利
    • Gas detection device
    • 气体检测装置
    • JP2013061227A
    • 2013-04-04
    • JP2011199535
    • 2011-09-13
    • Fuji Electric Co Ltd富士電機株式会社Osaka Gas Co Ltd大阪瓦斯株式会社
    • OKAMURA MAKOTOSUZUKI TAKUYAKOBAYASHI MAKOTOONISHI HISAONAKAYAMA TOSHIRONONAKA ATSUSHINAKAJIMA TAKASHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a gas detection technique that enables reliability to be maintained through preventive maintenance.SOLUTION: In a gas detection device 100, the density of a gas in an atmosphere is detected by means of heating due to the intermittent energization of a heater layer 3 in a sensor element 10 housed in a filter package 110 and detecting an electrical resistance value R due to the energization of a sensing layer 7. And, in the device, there is included gas type determining means 23 for determining whether or not an interference gas other than a gas of a detection object exists. If the interference gas is detected, when an electrical resistance value R falls below a threshold R1 greater than a threshold R2 for detecting the detection object gas, it is determined that the filter package 110 is deteriorated and an alarm is output, so that the preventive maintenance of the gas detection device 100 is realized.
    • 要解决的问题:提供通过预防性维护使得可靠性得以维持的气体检测技术。 解决方案:在气体检测装置100中,由于在容纳在过滤器组件110中的传感器元件10中的加热器层3间歇地通电,通过加热来检测气氛中的气体的密度, 由于感应层7通电而导致的电阻值R.在该装置中,存在用于判定是否存在检测对象气体以外的干扰气体的气体类型确定单元23。 如果检测到干扰气体,则当电阻值R低于用于检测检测对象气体的阈值R2以下的阈值R1以下时,确定过滤器组件110劣化并且输出报警, 实现了气体检测装置100的维护。 版权所有(C)2013,JPO&INPIT
    • 10. 发明专利
    • Carbon monoxide gas sensor
    • 一氧化碳气体传感器
    • JP2003279518A
    • 2003-10-02
    • JP2002085081
    • 2002-03-26
    • Fuji Electric Co LtdOsaka Gas Co Ltd大阪瓦斯株式会社富士電機株式会社
    • HIGAKI KATSUMITABATA SOICHISASAKI HIROICHIONISHI HISAOOGINO SHINJISUZUKI TAKUYAMATSUBARA TAKESHIKUNIHARA KENJIKOBAYASHI MITSUONAGASE NORIYOSHI
    • G01N27/12
    • PROBLEM TO BE SOLVED: To provide a CO sensor which saves electricity and which enhances a quantitative determination property with reference to CO. SOLUTION: The sensor detects carbon monoxide gas on the basis of a resistance value of a filmlike oxide in a detection voltage application mode. The sensor is constituted in such a way that a purge application mode is composed of a first purge mode and a second purge mode, that the first-purge-mode ON time is in a range of 50 to 200 msec, that the second-purge-mode ON time is set to be larger than 100 msec and longer than the first-purge-mode ON time, that an electrical resistance value used to change over the first purge mode to the second purge mode is recognized in advance as a set value, and that the second purge mode is set when the electrical resistance value measured in the detection voltage application mode exceeds the set value. The gas sensor is constituted in such a way that the electrical resistance value is measured again in the second purge mode so as to decide whether the electrical resistance value exceeds the set value. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供一种CO传感器,其可以节省电力,并且提高相对于CO的定量确定性。解决方案:传感器基于膜状氧化物的电阻值来检测一氧化碳气体 在检测电压应用模式下。 该传感器构成为使得清洗施加模式由第一吹扫模式和第二吹扫模式组成,第一吹扫模式接通时间在50至200毫秒的范围内,第二吹扫 模式ON时间被设置为大于100msec并且比第一次清除模式ON时间长,用于将第一吹扫模式切换到第二吹扫模式的电阻值被预先识别为设定值 并且当在检测电压施加模式中测量的电阻值超过设定值时,第二吹扫模式被设定。 气体传感器以这样的方式构成,即在第二吹扫模式中再次测量电阻值,以便确定电阻值是否超过设定值。 版权所有(C)2004,JPO