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1. 发明专利

JP2014178196A Thin film type gas sensor 有权
标题翻译：薄膜式气体传感器
公开(公告)号：JP2014178196A
公开(公告)日：2014-09-25
申请号：JP2013052217
申请日：2013-03-14
申请人： Fuji Electric Co Ltd , 富士電機株式会社 , Osaka Gas Co Ltd , 大阪瓦斯株式会社
发明人： FURUTA TOSHITAKA , SUZUKI TAKUYA , NARITA MASATAKA , OKAMURA MAKOTO , OKADA YUKARI , NAKAJIMA TAKASHI , NONAKA ATSUSHI , ONISHI HISAO , NAKAYAMA TOSHIRO , SUEMITSU MASAHIRO
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a thin film type gas sensor which has high selectivity, can reduce power consumption, and can maintain reliability over a long period of time.SOLUTION: A thin film type gas sensor comprises: a tabular silicon substrate having a circular cylinder-shaped through-hole; a thin film-like support layer overlapped and formed on the silicon substrate; a heater layer corresponding to the through-hole and formed on the support layer; an electric insulation layer formed on the support layer so as to cover the heater layer; two electrodes corresponding to the through-hole and formed on the electric insulation layer at a spacing between them; a gas sensing layer formed on the electric insulation layer so as to connect the two electrodes with each other; and a selective combustion layer configured by a porous body added with a catalyst, corresponding to the through-hole, and formed in a plane view circular shape so as to cover the two electrodes and the gas sensing layer on the electric insulation layer. The ratio D1/D2 of a diameter D1 of the through-hole at a portion coming into contact with the support layer of the silicon substrate to a diameter D2 at a portion coming into contact with the electric insulation layer in the selective combustion layer is in a range not smaller than 1.92 and not larger than 2.78.
摘要翻译：要解决的问题：提供一种具有高选择性的薄膜型气体传感器，可以降低功耗，并且可以长时间保持可靠性。解决方案：薄膜型气体传感器包括：具有圆柱形通孔; 在硅衬底上重叠形成的薄膜状支撑层; 对应于所述通孔并形成在所述支撑层上的加热器层; 形成在所述支撑层上以覆盖所述加热层的电绝缘层; 两个电极对应于通孔并以它们之间的间隔形成在电绝缘层上; 形成在所述电绝缘层上以将所述两个电极彼此连接的气体感测层; 以及选择性燃烧层，其由添加有与所述通孔对应的催化剂的多孔体构成，并形成为平面图圆形，以覆盖所述电绝缘层上的所述两个电极和所述气体感测层。在与硅衬底的支撑层接触的部分处的通孔的直径D1与在选择性燃烧层中与电绝缘层接触的部分处的直径D2的比D1 / D2为范围不小于1.92且不大于2.78。

2. 发明专利

JP2013061227A Gas detection device 有权
标题翻译：气体检测装置
公开(公告)号：JP2013061227A
公开(公告)日：2013-04-04
申请号：JP2011199535
申请日：2011-09-13
申请人： Fuji Electric Co Ltd , 富士電機株式会社 , Osaka Gas Co Ltd , 大阪瓦斯株式会社
发明人： OKAMURA MAKOTO , SUZUKI TAKUYA , KOBAYASHI MAKOTO , ONISHI HISAO , NAKAYAMA TOSHIRO , NONAKA ATSUSHI , NAKAJIMA TAKASHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a gas detection technique that enables reliability to be maintained through preventive maintenance.SOLUTION: In a gas detection device 100, the density of a gas in an atmosphere is detected by means of heating due to the intermittent energization of a heater layer 3 in a sensor element 10 housed in a filter package 110 and detecting an electrical resistance value R due to the energization of a sensing layer 7. And, in the device, there is included gas type determining means 23 for determining whether or not an interference gas other than a gas of a detection object exists. If the interference gas is detected, when an electrical resistance value R falls below a threshold R1 greater than a threshold R2 for detecting the detection object gas, it is determined that the filter package 110 is deteriorated and an alarm is output, so that the preventive maintenance of the gas detection device 100 is realized.
摘要翻译：要解决的问题：提供通过预防性维护使得可靠性得以维持的气体检测技术。解决方案：在气体检测装置100中，由于在容纳在过滤器组件110中的传感器元件10中的加热器层3间歇地通电，通过加热来检测气氛中的气体的密度，由于感应层7通电而导致的电阻值R.在该装置中，存在用于判定是否存在检测对象气体以外的干扰气体的气体类型确定单元23。如果检测到干扰气体，则当电阻值R低于用于检测检测对象气体的阈值R2以下的阈值R1以下时，确定过滤器组件110劣化并且输出报警，实现了气体检测装置100的维护。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2003279518A Carbon monoxide gas sensor 有权
标题翻译：一氧化碳气体传感器
公开(公告)号：JP2003279518A
公开(公告)日：2003-10-02
申请号：JP2002085081
申请日：2002-03-26
申请人： Fuji Electric Co Ltd , Osaka Gas Co Ltd , 大阪瓦斯株式会社 , 富士電機株式会社
发明人： HIGAKI KATSUMI , TABATA SOICHI , SASAKI HIROICHI , ONISHI HISAO , OGINO SHINJI , SUZUKI TAKUYA , MATSUBARA TAKESHI , KUNIHARA KENJI , KOBAYASHI MITSUO , NAGASE NORIYOSHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a CO sensor which saves electricity and which enhances a quantitative determination property with reference to CO. SOLUTION: The sensor detects carbon monoxide gas on the basis of a resistance value of a filmlike oxide in a detection voltage application mode. The sensor is constituted in such a way that a purge application mode is composed of a first purge mode and a second purge mode, that the first-purge-mode ON time is in a range of 50 to 200 msec, that the second-purge-mode ON time is set to be larger than 100 msec and longer than the first-purge-mode ON time, that an electrical resistance value used to change over the first purge mode to the second purge mode is recognized in advance as a set value, and that the second purge mode is set when the electrical resistance value measured in the detection voltage application mode exceeds the set value. The gas sensor is constituted in such a way that the electrical resistance value is measured again in the second purge mode so as to decide whether the electrical resistance value exceeds the set value. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种CO传感器，其可以节省电力，并且提高相对于CO的定量确定性。解决方案：传感器基于膜状氧化物的电阻值来检测一氧化碳气体在检测电压应用模式下。该传感器构成为使得清洗施加模式由第一吹扫模式和第二吹扫模式组成，第一吹扫模式接通时间在50至200毫秒的范围内，第二吹扫模式ON时间被设置为大于100msec并且比第一次清除模式ON时间长，用于将第一吹扫模式切换到第二吹扫模式的电阻值被预先识别为设定值并且当在检测电压施加模式中测量的电阻值超过设定值时，第二吹扫模式被设定。气体传感器以这样的方式构成，即在第二吹扫模式中再次测量电阻值，以便确定电阻值是否超过设定值。版权所有（C）2004，JPO

4. 发明专利

JP2013190232A Gas detector 有权
标题翻译：气体检测器
公开(公告)号：JP2013190232A
公开(公告)日：2013-09-26
申请号：JP2012054983
申请日：2012-03-12
申请人： Fuji Electric Co Ltd , 富士電機株式会社 , Osaka Gas Co Ltd , 大阪瓦斯株式会社
发明人： OKAMURA MAKOTO , SUZUKI TAKUYA , KOBAYASHI MAKOTO , ONISHI HISAO , NAKAYAMA TOSHIRO , NONAKA ATSUSHI , NAKAJIMA TAKASHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To diagnose deterioration of a filter package before functions of a gas detector are lost and to perform preventive maintenance of the gas detector.SOLUTION: A gas detector 500 comprises a sensor element 50, energization drive means 60, gas detecting means 61, different-kind-of-gas determination means 62, and so on. The sensor element 50 is constituted of a silicon wafer 51 having a thermal oxidation film attached on both sides, on which a SiN(silicon nitride) film and a SiO(silica) film are successively formed as a support layer/heat insulation layer 52 of a diaphragm structure. After that, a heater layer 53 made of a Ni-Cr alloy and a SiOinsulation layer 54 are successively formed by a sputtering method. Then, a bonding layer 55, sensing layer electrodes 56, and a sensing layer 57 are formed thereon. Furthermore, a gas sensing layer 59 for sensing gas is formed as a film, and the gas sensing layer 59 is constituted of a sensing layer 57 of SnO(tin oxide) doped with Sb (antimony) and a selective combustion layer 58 constituted of a sintered material in which Pd (palladium) as a catalyst is carried by Al2O3 (alumina).
摘要翻译：要解决的问题：在气体检测器的功能丧失之前，对过滤器组件的劣化进行诊断，并进行气体检测器的预防性维护。解决方案：气体检测器500包括传感器元件50，通电驱动装置60，气体检测装置 61，不同种类的气体测定装置62等。传感器元件50由两面附着有热氧化膜的硅晶片51构成，其上依次形成SiN（氮化硅）膜和SiO（二氧化硅）膜作为支撑层/隔热层52 隔膜结构。之后，通过溅射法依次形成由Ni-Cr合金和SiO绝缘层54构成的加热层53。然后，在其上形成接合层55，感测层电极56和感测层57。此外，用于感测气体的气体感测层59形成为膜，并且气体感测层59由掺杂有Sb（锑）的SnO（氧化锡）的感测层57和由Sb（锑）构成的选择性燃烧层58构成。作为催化剂的Pd（钯）由Al2O3（氧化铝）负载的烧结材料。

5. 发明专利

JP2011227069A Gas detection device and gas detection method 有权
标题翻译：气体检测装置和气体检测方法
公开(公告)号：JP2011227069A
公开(公告)日：2011-11-10
申请号：JP2011073629
申请日：2011-03-29
申请人： Fuji Electric Co Ltd , Osaka Gas Co Ltd , 大阪瓦斯株式会社 , 富士電機株式会社
发明人： ONISHI HISAO , NAKAYAMA TOSHIRO , NONAKA ATSUSHI , SUZUKI TAKUYA , OKAMURA MAKOTO , NAKAJIMA TAKASHI , KUNIHARA KENJI , MAEDA TAKAHIKO
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a technology which, when the presence or absence of a gas to be detected and the concentration thereof are detected, can raise an alarm within a detection response specified time by reducing a time from the occurrence of a gas leakage to the alarm activation while eliminating the influence of gases not to be detected and reducing power consumption.SOLUTION: A gas detection device comprises current-carrying cycle change means. A detection response time is a lower time limit in which a gas to be detected in the outside of a housing reaches a sensor element provided in the housing to allow the gas detection layer to detect the concentration of the gas that exceeds an alarm level. A detection response specified time is an upper time limit in which the gas detection layer in the housing needs to detect the gas to be detected in the outside of the housing. The current-carrying cycle change means changes a regular cycle based on a determination result obtained by gas type determination means for determining a gas type, so that detection timing can be within a time longer than or equal to the detection response time and shorter than the detection response specified time.
摘要翻译：要解决的问题：提供一种技术，当检测到有无气体和其浓度时，可以通过减少从发生的时间开始在检测响应指定时间内引起警报气体泄漏到报警激活，同时消除不被检测的气体的影响并降低功耗。气体检测装置包括载流循环改变装置。检测响应时间是在壳体外部检测到的气体到达设置在壳体中的传感器元件以允许气体检测层检测到超过报警水平的气体浓度的较低时间限制。检测响应规定时间是上限时间，其中壳体中的气体检测层需要检测在外壳外部被检测的气体。载流循环改变装置基于由用于确定气体类型的气体类型确定装置获得的确定结果改变规则循环，使得检测定时可以在大于或等于检测响应时间的时间内并且短于检测响应时间检测响应指定时间。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2014178199A Thin film type gas sensor, and checkup method for the same 审中-公开
标题翻译：薄膜式气体传感器及其检测方法
公开(公告)号：JP2014178199A
公开(公告)日：2014-09-25
申请号：JP2013052228
申请日：2013-03-14
申请人： Fuji Electric Co Ltd , 富士電機株式会社 , Osaka Gas Co Ltd , 大阪瓦斯株式会社
发明人： KOBAYASHI MAKOTO , SUZUKI TAKUYA , OKAMURA MAKOTO , NAKAJIMA TAKASHI , NONAKA ATSUSHI , ONISHI HISAO , NAKAYAMA TOSHIRO , SUEMITSU MASAHIRO
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a thin film type gas sensor that can maintain its detecting performance level for the gas to be checked over a long period and a checkup method enabling such a thin film type gas sensor to be selected in an early stage of the product.SOLUTION: A thin film type gas sensor that is equipped with a sensor element having a gas detecting layer whose electric characteristics change when coming into contact with gas to be detected and a heater layer that can heat the gas detecting layer, and makes the gas to be detected be detected on the basis of the resistance level of the gas detection layer heated by the heater layer and whose prescribed indicator value calculated by using the resistance level R of the gas detecting layer and the concentration X of the gas to be detected measured with the thin film type gas sensor in its initial state satisfies a preset standard; and a thin film type gas sensor checkup method by which whether or not the gas sensor is satisfactory on the basis of this standard.
摘要翻译：要解决的问题：提供能够长时间保持对待检查气体的检测性能水平的薄膜型气体传感器，以及能够在早期阶段选择这种薄膜型气体传感器的检查方法该产品。一种薄膜式气体传感器，其配备有具有气体检测层的传感器元件，该气体检测层的电特性在与要检测的气体接触时变化，加热层可加热气体检测层，并且基于由加热器层加热的气体检测层的电阻等级来检测要检测的气体，并且通过使用气体检测层的电阻水平R和气体浓度X计算出的规定指标值在初始状态下用薄膜型气体传感器测量的检测满足预设标准; 以及基于该标准的气体传感器是否令人满意的薄膜式气体传感器检查方法。

7. 发明专利

JP2012167954A Gas detection apparatus 有权
标题翻译：气体检测装置
公开(公告)号：JP2012167954A
公开(公告)日：2012-09-06
申请号：JP2011027489
申请日：2011-02-10
申请人： Fuji Electric Co Ltd , Osaka Gas Co Ltd , 大阪瓦斯株式会社 , 富士電機株式会社
发明人： OKAMURA MAKOTO , SUZUKI TAKUYA , NARITA MASATAKA , FURUTA TOSHITAKA , NONAKA ATSUSHI , ONISHI HISAO , NAKAYAMA TOSHIRO , NAKAJIMA TAKASHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a gas detection apparatus for achieving low power consumption while maintaining detection performance by improving gas type determination logic.SOLUTION: The gas detection apparatus usually heats a gas sensing layer to a temperature required for detecting existence of interference gas or detection target gas, determines whether the interference gas or the detection target gas is included or not based on the electric resistance characteristic of the gas sensing layer, and when the interference gas or the detection target gas is included, heats the gas sensing layer to a temperature required for burning the interference gas and a temperature required for the gas sensing layer to detect only the detection target gas, and determines the existence or concentration of the detection target gas based on the electric resistance characteristic of the gas sensing layer.
摘要翻译：要解决的问题：提供一种气体检测装置，用于通过改进气体类型确定逻辑来保持检测性能，从而实现低功耗。气体检测装置通常将气体感测层加热到检测干燥气体或检测目标气体的存在所需的温度，基于电阻特性确定是否包含干扰气体或检测目标气体的气体检测层，并且当包含干扰气体或检测目标气体时，将气体感测层加热到燃烧干扰气体所需的温度和气体感测层所需的温度仅仅检测检测目标气体，并且基于气体感测层的电阻特性来确定检测目标气体的存在或集中。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2012163437A Thin film gas sensor 审中-公开
标题翻译：薄膜气体传感器
公开(公告)号：JP2012163437A
公开(公告)日：2012-08-30
申请号：JP2011024068
申请日：2011-02-07
申请人： Fuji Electric Co Ltd , Osaka Gas Co Ltd , 大阪瓦斯株式会社 , 富士電機株式会社
发明人： SUZUKI TAKUYA , NARITA MASATAKA , KOBAYASHI MAKOTO , ISHIKAWA NORIAKI , ONISHI HISAO , NAKAYAMA TOSHIRO , NONAKA ATSUSHI , NAKAJIMA TAKASHI
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a thin film gas sensor which comprises a sufficient mechanical strength and is stable and highly reliable.SOLUTION: A thin film gas sensor is provided which includes a gas sensing layer formed on an electric insulating layer. The gas sensing layer includes a pair of sensing electrode layers formed on the electric insulating layer, a sensing layer which is formed to partially cover the pair of sensing electrode layers while being spread over both the pair of sensing electrode layers, and a selective combustion layer which is formed to cover the sensing electrode layers and the sensing layer. A particle size of binders contained in the selective combustion layer is smaller than that of SnOconstituting the sensing layer and that of a metal oxide constituting the selective combustion layer.
摘要翻译：要解决的问题：提供一种薄膜气体传感器，其包括足够的机械强度并且是稳定和高度可靠的。解决方案：提供一种薄膜气体传感器，其包括形成在电绝缘层上的气体感测层。气体感测层包括形成在电绝缘层上的一对感测电极层，感测层，其形成为部分地覆盖一对感测电极层，同时分布在一对感测电极层上，以及选择性燃烧层其形成为覆盖感测电极层和感测层。包含在选择性燃烧层中的粘合剂的粒度小于构成感测层的SnO 2 和构成选择性燃烧层的金属氧化物的粒度。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2003279517A Apparatus and method for detection of gas 审中-公开
标题翻译：用于检测气体的装置和方法
公开(公告)号：JP2003279517A
公开(公告)日：2003-10-02
申请号：JP2002083075
申请日：2002-03-25
申请人： Fuji Electric Co Ltd , Osaka Gas Co Ltd , 大阪瓦斯株式会社 , 富士電機株式会社
发明人： TABATA SOICHI , HIGAKI KATSUMI , SASAKI HIROICHI , ONISHI HISAO , OCHIWA SHINICHI , SUZUKI TAKUYA
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a gas detection apparatus by which existence of a volatile organic compound gas such as ethyl alcohol, formaldehyde or the like in the air at a low concentration of several ppm to several ppb is detected with high sensitivity, and to provide a gas detection method.
SOLUTION: A dehumidifying part 20 used to dehumidify a gas to be detected containing a detection object gas (the volatile organic compound gas), a sensor S which is provided with a semiconductor-type gas sensor 5 changing its electrical resistance due to contact with the detection object gas and which is constituted so as to be capable of introducing the gas to be detected, and a detection part 8 used to detect the detection object gas contained in the gas to be detected on the basis of a change in the electrical resistance of the gas sensor 5, are installed. A temperature maintenance means by which an operating temperature of the gas sensor 5 is maintained in a temperature range lower than a high- temperature-side critical temperature at which a detection sensitivity with reference to the detection object gas is obtained significantly with reference to the air is installed.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种气体检测装置，其以高灵敏度检测在几ppm至几ppb的低浓度下在空气中存在诸如乙醇，甲醛等的挥发性有机化合物气体，并提供气体检测方法。解决方案：用于对含有检测对象气体（挥发性有机化合物气体）的被检测气体进行除湿的除湿部20，设置有半导体型气体传感器5的传感器S，该传感器S改变由于与检测对象气体接触，并且被构造成能够引入要检测的气体;以及检测部8，用于基于检测对象气体的变化来检测被检测气体中包含的检测对象气体安装气体传感器5的电阻。一种温度维持装置，其中气体传感器5的工作温度保持在低于参考检测对象气体的检测灵敏度的高温侧临界温度的温度范围内已安装。版权所有（C）2004，JPO

10. 发明专利

JP2014178198A Gas detection device 审中-公开
标题翻译：气体检测装置
公开(公告)号：JP2014178198A
公开(公告)日：2014-09-25
申请号：JP2013052227
申请日：2013-03-14
申请人： Fuji Electric Co Ltd , 富士電機株式会社 , Osaka Gas Co Ltd , 大阪瓦斯株式会社
发明人： KOBAYASHI MAKOTO , SUZUKI TAKUYA , OKAMURA MAKOTO , NAKAJIMA TAKASHI , NONAKA ATSUSHI , ONISHI HISAO , NAKAYAMA TOSHIRO , SUEMITSU MASAHIRO
IPC分类号： G01N27/12
摘要： PROBLEM TO BE SOLVED: To provide a gas detection device capable of maintaining reliability over a long period of time.SOLUTION: A gas detection device comprises: a sensor element having a gas detection layer of which electric characteristics are changed by coming into contact with a detection object gas and a heater layer capable of heating the gas detection layer; a heater control part for controlling electric conduction to the heater layer in a predetermined period so as to change the temperature of the gas detection layer; and a gas detection part for detecting the detection object gas on the basis of the electric characteristics of the gas detection layer. The gas detection device is configured in such a manner that: the gas detection part detects the detection object gas in a gas detection electric conduction state in which the electric conduction is carried out to the heater layer in a predetermined period through control by the heater control part; and preliminary electric conduction is carried out to the heater layer through control by the heater control part so that, before detecting the detection object gas in the gas detection part, the temperature of the gas detection layer is 100°C or higher and is lower than that of the gas detection layer in the gas detection electric conduction state.
摘要翻译：要解决的问题：提供一种能够长时间保持可靠性的气体检测装置。解决方案：一种气体检测装置，包括：具有气体检测层的传感器元件，其电特性通过与检测对象气体和能够加热气体检测层的加热器层; 加热器控制部件，用于在预定时间段内控制对加热器层的电导率，以改变气体检测层的温度; 以及气体检测部，其基于气体检测层的电特性检测检测对象气体。气体检测装置构成为：气体检测部通过加热器控制的控制，在预定期间内对通过加热器层进行导通的气体检测导通状态的检测对象气体进行检测部分; 并且通过加热器控制部的控制对加热器层进行预导电，使得在检测气体检测部中的检测对象气体之前，气体检测层的温度为100℃以上且低于气体检测层的气体检测导电状态。

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