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1. 发明授权

US07687301B2 Integrated device manufacturing process 有权
标题翻译：集成器件制造工艺
公开(公告)号：US07687301B2
公开(公告)日：2010-03-30
申请号：US12015271
申请日：2008-01-16
申请人： Francesco Martini , Maurizio Lenzi , Ubaldo Mastromatteo
发明人： Francesco Martini , Maurizio Lenzi , Ubaldo Mastromatteo
IPC分类号： H01L21/00
CPC分类号： G02B6/4214 , G02B6/136 , G02B6/4202
摘要： A process for manufacturing an integrated device includes the steps of: providing a silicon substrate on which a silicon dioxide structure is arranged and forming a trench having first and second essentially vertical walls relative to the substrate in the structure by means of anisotropic-type etching. A concavity having a sloped wall relative to the substrate is formed by isotropic-type etching which removes the second wall so that the concavity is open to the trench and the sloped wall faces the first wall.
摘要翻译：一种用于制造集成器件的工艺包括以下步骤：提供硅衬底，在衬底上布置二氧化硅结构，并通过各向异性蚀刻形成具有相对于衬底的第一和第二基本上垂直的壁的沟槽。通过各向同性型蚀刻形成具有相对于基板的倾斜壁的凹面，其移除第二壁，使得凹部对沟槽开放，并且倾斜壁面向第一壁。

2. 发明申请

US20080213934A1 INTEGRATED DEVICE MANUFACTURING PROCESS 有权
标题翻译：集成设备制造流程
公开(公告)号：US20080213934A1
公开(公告)日：2008-09-04
申请号：US12015271
申请日：2008-01-16
申请人： Francesco Martini , Maurizio Lenzi , Ubaldo Mastromatteo
发明人： Francesco Martini , Maurizio Lenzi , Ubaldo Mastromatteo
IPC分类号： H01L21/311 , H01L21/00
CPC分类号： G02B6/4214 , G02B6/136 , G02B6/4202
摘要： A process for manufacturing an integrated device includes the steps of: providing a silicon substrate on which a silicon dioxide structure is arranged; and forming a trench having first and second essentially vertical walls relative to the substrate in the structure by means of anisotropic-type etching. A concavity having a sloped wall relative to the substrate is formed by isotropic-type etching which removes the second wall so that the concavity is open to the trench and the sloped wall faces the first wall.
摘要翻译：制造集成器件的方法包括以下步骤：提供其上布置有二氧化硅结构的硅衬底; 以及通过各向异性蚀刻在所述结构中形成具有相对于所述衬底的第一和第二基本上垂直的壁的沟槽。通过各向同性型蚀刻形成具有相对于基板的倾斜壁的凹面，其移除第二壁，使得凹部对沟槽开放，并且倾斜壁面向第一壁。

3. 发明申请

US20060188193A1 Optical interferometer device 审中-公开
标题翻译：光学干涉仪装置
公开(公告)号：US20060188193A1
公开(公告)日：2006-08-24
申请号：US11235650
申请日：2005-09-26
申请人： Maurizio Lenzi
发明人： Maurizio Lenzi
IPC分类号： G02B6/12
CPC分类号： G02B6/12028 , G02B6/12011
摘要： Describes is an optical interferometer device comprising an input coupler connected to at least one input waveguide, an output coupler connected to at least one output waveguide and a multiplicity of waveguide branches connected between the input coupler and the output coupler, at least two adjacent branches of this multiplicity having geometric and/or optical characteristics different from each other, so that a light signal will be transmitted through one of them with a predetermined phase shift with respect to a light signal transmitted through the other branch. At least one of the two adjacent branches comprises at least one first waveguide part having a first contrast index and at least one second waveguide part having a second contrast index greater than the first. The device has a structure that permits great versatility of design. In particular, it is possible to realize devices insensitive to temperature variations and devices of limited (reduced) encumbrance.
摘要翻译：描述的是一种光学干涉仪装置，包括连接到至少一个输入波导的输入耦合器，连接到至少一个输出波导的输出耦合器和连接在输入耦合器和输出耦合器之间的多个波导支路，至少两个相邻分支这种多重性具有彼此不同的几何和/或光学特性，使得光信号将相对于通过另一分支传输的光信号以预定的相移传输通过其中之一。两个相邻分支中的至少一个包括具有第一对比度指数的至少一个第一波导部分和具有大于第一对比度指数的第二对比度指数的至少一个第二波导部分。该设备具有允许设计的多功能性的结构。特别地，可以实现对温度变化不敏感的装置和有限（减少）产生负担的装置。

4. 发明申请

US20060045411A1 Integrated optical structure sensitive to the energy radiated into the cladding of a planar lightwave circuit 有权
标题翻译：集成的光学结构对辐射到平面光波电路的包层中的能量敏感
公开(公告)号：US20060045411A1
公开(公告)日：2006-03-02
申请号：US11195354
申请日：2005-08-02
申请人： Daniela Barge , Maurizio Lenzi
发明人： Daniela Barge , Maurizio Lenzi
IPC分类号： G02B6/12 , G02B6/26
CPC分类号： G02B6/2852 , G02B6/125 , G02B6/42 , G02B6/4287 , G02B2006/12126 , G02B2006/12142 , G02B2006/12164 , G02B2006/12195
摘要： The described integrated planar optical structure comprises a principal waveguide having a core and a cladding that define a first light path ad means sensitive to the light radiated into the cladding comprising at least one secondary waveguide having a core and a cladding that define a second light path. The secondary waveguide has an entry situated in the cladding of the principal waveguide at such a distance from the core of the latter as not to interfere with the propagation of the light along the first optical path and a core section that becomes greater in a first part from the entry onwards to collect the light energy radiated into the cladding. Also described are a system for monitoring the light energy emitted by a source and an optical attenuator that comprise the aforesaid optical structure.
摘要翻译：所描述的集成平面光学结构包括具有芯和包层的主波导，所述主波导限定了对辐射到包层中的光敏感的第一光路ad装置，所述第一光路ad装置包括至少一个具有芯和辅助波导的第二波导，所述芯和包层限定第二光路。次级波导具有位于主波导的包层中的入口，距离后者的芯离开一定距离，不会干扰沿着第一光路的光的传播，并且在第一部分中变得更大的芯部分从入口处收集辐射到包层中的光能。还描述了一种用于监测由源和包含上述光学结构的光衰减器发射的光能的系统。

5. 发明授权

US07327915B2 Integrated optical structure sensitive to the energy radiated into the cladding of a planar lightwave circuit 有权
标题翻译：集成的光学结构对辐射到平面光波电路的包层中的能量敏感
公开(公告)号：US07327915B2
公开(公告)日：2008-02-05
申请号：US11195354
申请日：2005-08-02
申请人： Daniela Barge , Maurizio Lenzi
发明人： Daniela Barge , Maurizio Lenzi
IPC分类号： G02B6/26
CPC分类号： G02B6/2852 , G02B6/125 , G02B6/42 , G02B6/4287 , G02B2006/12126 , G02B2006/12142 , G02B2006/12164 , G02B2006/12195
摘要： The described integrated planar optical structure comprises a principal waveguide having a core and a cladding that define a first light path ad means sensitive to the light radiated into the cladding comprising at least one secondary waveguide having a core and a cladding that define a second light path. The secondary waveguide has an entry situated in the cladding of the principal waveguide at such a distance from the core of the latter as not to interfere with the propagation of the light along the first optical path and a core section that becomes greater in a first part from the entry onwards to collect the light energy radiated into the cladding. Also described are a system for monitoring the light energy emitted by a source and an optical attenuator that comprise the aforesaid optical structure.
摘要翻译：所描述的集成平面光学结构包括具有芯和包层的主波导，所述主波导限定了对辐射到包层中的光敏感的第一光路ad装置，所述第一光路ad装置包括至少一个具有芯和辅助波导的第二波导，所述芯和包层限定第二光路。次级波导具有位于主波导的包层中的入口，距离后者的芯离开一定距离，不会干扰沿着第一光路的光的传播，并且在第一部分中变得更大的芯部分从入口处收集辐射到包层中的光能。还描述了一种用于监测由源和包含上述光学结构的光衰减器发射的光能的系统。

6. 发明授权

US06285810B1 Tunable add/drop optical device 失效
标题翻译：可调式分插光学装置
公开(公告)号：US06285810B1
公开(公告)日：2001-09-04
申请号：US09043697
申请日：1998-05-08
申请人： Antonio Fincato , Maurizio Lenzi , Domenico Di Mola
发明人： Antonio Fincato , Maurizio Lenzi , Domenico Di Mola
IPC分类号： G02B628
CPC分类号： G02F1/3136 , G02F1/0147
摘要： Tunable add/drop optical device for injecting or extracting (add/drop) at least a selected optical channel or carrier wavelength in or from a set of multiplexed channels or carriers of different wavelengths comprising a plurality of directional couplers (AD1 . . . AD6) and a plurality of phase-shift stages (SF1 . . . SF5) alternately connected in cascade, wherein each phase-shift stage defines a certain optical path length difference (&Dgr;L1 . . . &Dgr;L5) between two distinct optical paths of the stage. The tuning is performed modifying the refraction index of one path of said phase shift stages by means of Joule effect heating strips (L1 . . . L5) or by means of metallic field plates adapted to receive a signal suitable to modify the electric field intensity. The first two phase-shift stages of said plurality of phase-shift stages have differences of length of optical paths different from each other and in a preestablished ratio while the remaining phase-shift stages have differences of length of optical paths identical. It is thus possible to provide a device having an exceptionally flat cross response characteristic, substantially free of ripple due to an inevitable truncation of the Fourier expansion series.
摘要翻译：可调谐的分插光学装置，用于在包括多个定向耦合器（AD1，... AD6）的一组不同波长的多路复用信道或载波集合中进行至少一个选择的光信道或载波波长的加入/ 以及级联交替连接的多个相移级（SF1 ... SF5），其中每个相移级在该级的两个不同的光路之间定义一定的光程长度差（DELTAL1 ... DELTAL5）。通过焦耳效应加热条（L1 ... L5）或借助适于接收适合于修改电场强度的信号的金属场板来修改所述相移级的一个路径的折射率。所述多个相移级的前两个相移级具有彼此不同的并且处于预定比的光路的长度差，而剩余的相移级具有相同的光路长度差。因此，可以提供具有特别平坦的交叉响应特性的装置，由于傅立叶展开系列的不可避免的截断，基本上没有纹波。

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