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1. 发明申请

US20060244467A1 In-line electron beam test system 有权
公开(公告)号：US20060244467A1
公开(公告)日：2006-11-02
申请号：US11375625
申请日：2006-03-14
申请人： Fayez Abboud , Sriram Krishnaswami , Benjamin Johnston , Hung Nguyen , Matthias Brunner , Ralf Schmid , John White , Shinichi Kurita , James Hunter
发明人： Fayez Abboud , Sriram Krishnaswami , Benjamin Johnston , Hung Nguyen , Matthias Brunner , Ralf Schmid , John White , Shinichi Kurita , James Hunter
IPC分类号： G01R31/302
CPC分类号： H01L21/67748 , H01J2237/2811 , H01J2237/2817 , H01L21/67201 , H01L21/67236
摘要： A method and apparatus for testing a plurality of electronic devices formed on a large area substrate is described. In one embodiment, the apparatus performs a test on the substrate in one linear axis in at least one chamber that is slightly wider than a dimension of the substrate to be tested. Clean room space and process time is minimized due to the smaller dimensions and volume of the system.

2. 发明申请

US20070042113A1 METHODS AND APPARATUS FOR INKJET PRINTING COLOR FILTERS FOR DISPLAYS USING PATTERN DATA 审中-公开
标题翻译：用于使用图案数据显示的喷墨打印彩色滤镜的方法和装置
公开(公告)号：US20070042113A1
公开(公告)日：2007-02-22
申请号：US11466507
申请日：2006-08-23
申请人： Hongbin Ji , Inchen Huang , Bassam Shamoun , Quanyuan Shang , Shinichi Kurita , John White
发明人： Hongbin Ji , Inchen Huang , Bassam Shamoun , Quanyuan Shang , Shinichi Kurita , John White
IPC分类号： B05D5/06
CPC分类号： B41J3/28 , B41J3/407 , G02B5/223
摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system and manufacturing display objects. The system may include a print controller including one or more drivers, at least one print head coupled to the drivers, a stage controller coupled to the print controller, one or more motors coupled to the stage controller, encoders coupled to the motors and the stage controller, and a host coupled to the stage controller and the print controller. The host is adapted to transfer pattern parameter data to the print controller, and the print controller is adapted to use the pattern parameter data to trigger the at least one print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction by the at least one motor under the direction of the stage controller in response to a command from the host.
摘要翻译：本发明提供了用于控制喷墨打印系统和制造显示对象的方法，系统和驱动程序。该系统可以包括包括一个或多个驱动器的打印控制器，耦合到驱动器的至少一个打印头，耦合到打印控制器的台控制器，耦合到平台控制器的一个或多个马达，耦合到马达的编码器控制器和耦合到级控制器和打印控制器的主机。主机适于将图案参数数据传送到打印控制器，并且打印控制器适于使用图案参数数据来触发至少一个打印头，以便在将基板移动到基板中时将墨水沉积在基板上的像素孔中响应于来自主机的命令，在舞台控制器的指导下由至少一个电动机打印方向。

3. 发明申请

US20060109290A1 Methods and apparatus for a high resolution inkjet fire pulse generator 失效
公开(公告)号：US20060109290A1
公开(公告)日：2006-05-25
申请号：US11238637
申请日：2005-09-29
申请人： Bassam Shamoun , Eugene Mirro , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John White
发明人： Bassam Shamoun , Eugene Mirro , Janusz Jozwiak , Quanyuan Shang , Shinichi Kurita , John White
IPC分类号： B41J29/38
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： The invention provides methods, systems, and drivers for controlling an inkjet printing system. The driver may include logic including a processor, memory coupled to the logic, and a fire pulse generator circuit coupled to the logic. The fire pulse generator may include a connector to facilitate coupling the driver to a print head. The fire pulse generator circuit may also include a fixed current source circuit adapted to generate a fire pulse with a constant slew rate that facilitates easy adjustment of ink drop size. The logic is adapted to receive an image and to convert the image to an image data file. The image data file is adapted to be used by the driver to trigger the print head to deposit ink into pixel wells on a substrate as the substrate is moved in a print direction. Numerous other aspects are disclosed.

4. 发明申请

US20060092218A1 Methods and apparatus for inkjet printing 审中-公开
标题翻译：喷墨打印的方法和装置
公开(公告)号：US20060092218A1
公开(公告)日：2006-05-04
申请号：US11019929
申请日：2004-12-22
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
IPC分类号： B41J2/15
CPC分类号： B41J25/003 , B41J3/407 , B41J3/543 , G02F1/1303 , G02F1/133516
摘要： In a first aspect, a system is provided for inkjet printing. The system includes (1) at least one apparatus for inkjet printing having (a) a first inkjet print head including a first plurality of nozzles adapted to selectively dispense a first ink; (b) a second inkjet print head including a second plurality of nozzles adapted to selectively dispense a second ink; and (c) a set including the first and second print heads arranged such that the set is adapted to dispense the first and second inks into respective adjacent color wells of a display pixel on a substrate during a printing pass; and (2) a stage adapted to support the substrate and transport the substrate below the at least one apparatus for inkjet printing during the printing pass. Numerous other aspects are provided.
摘要翻译：在第一方面，提供一种用于喷墨打印的系统。该系统包括（1）至少一种用于喷墨打印的设备，其具有（a）第一喷墨打印头，其包括适于选择性地分配第一墨的第一多个喷嘴; （b）第二喷墨打印头，包括适于选择性地分配第二墨的第二多个喷嘴; 以及（c）包括第一和第二打印头的组合，其被布置成使得该组适于在打印通过期间将第一和第二墨水分配到基板上的显示像素的相应相邻色阱中; 和（2）适于在印刷过程中支撑基材并将基底输送到用于喷墨印刷的至少一个装置下方的载物台。提供了许多其他方面。

5. 发明申请

US20060054090A1 PECVD susceptor support construction 审中-公开
标题翻译： PECVD基座支撑结构
公开(公告)号：US20060054090A1
公开(公告)日：2006-03-16
申请号：US11202654
申请日：2005-08-12
申请人： Shinichi Kurita , Ernst Keller , John White
发明人： Shinichi Kurita , Ernst Keller , John White
IPC分类号： C23C16/00
CPC分类号： H01L21/68778 , C23C16/4586 , H01L21/68742 , H01L21/68792
摘要： An apparatus and method for maintaining or adjusting the orientation of a large area substrate is disclosed by using multiple support plates disposed below a susceptor adapted to support the large area substrate. The multiple support plates are supported by a plurality of support shafts that are coupled to at least one actuator. The apparatus is designed to selectively adjust the horizontal cross-sectional profile of the susceptor to promote even and uniform processing. The horizontal profile may be one of planar, concave, or convex. The apparatus allows any adjustment to be made before, during, or after processing.
摘要翻译：通过使用设置在支撑大面积基板的基座下方的多个支撑板来公开用于维持或调整大面积基板的取向的装置和方法。多个支撑板由耦合到至少一个致动器的多个支撑轴支撑。该设备被设计成选择性地调节基座的水平横截面轮廓以促进均匀和均匀的处理。水平轮廓可以是平面，凹面或凸面之一。该装置允许在处理之前，期间或之后进行任何调整。

6. 发明申请

US20060092204A1 Apparatus and methods for an inkjet head support having an inkjet head capable of independent lateral movement 失效
公开(公告)号：US20060092204A1
公开(公告)日：2006-05-04
申请号：US11019967
申请日：2004-12-22
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
IPC分类号： B41J29/38
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： In a first aspect, a first apparatus is provided for inkjet printing. The first apparatus includes an inkjet head support that includes a plurality of inkjet heads. A first inkjet head of the plurality of inkjet heads is adapted to be independently moveable in both directions along a lateral axis relative to a second inkjet head of the plurality of inkjet heads. The first apparatus also includes a system controller adapted to control an independent lateral movement of the first inkjet head relative to the second inkjet head. Numerous other aspects are provided.

7. 发明申请

US20060092199A1 Methods and apparatus for aligning print heads 失效
公开(公告)号：US20060092199A1
公开(公告)日：2006-05-04
申请号：US11019930
申请日：2004-12-22
申请人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
发明人： John White , Fan Sze , Quanyuan Shang , Shinichi Kurita , Hongbin Ji , Janusz Jozwiak , Inchen Huang , Emanual Beer
IPC分类号： B41J29/38
CPC分类号： B41J3/407 , B41J2/04505 , B41J2/04541 , B41J2/04581 , B41J2/04588 , B41J2/0459 , B41J2/04593 , B41J2/125 , B41J3/28 , B41J3/543 , B41J25/001 , B41J25/003 , B41J25/005 , B41J29/15 , B41J29/393
摘要： In a first aspect, a system is provided. The system includes (1) a stage adapted to move a substrate relative to print heads during printing; (2) at least one print head suspended from a support above the stage and adapted to be moveable in a plane above the stage; (3) a controller operable to rotate the print head about a center of the print head; and (4) an imaging system adapted to capture an image of the print head and to determine a center point of the print head based upon images of the print head captured as the print head is rotated. Numerous other aspects are provided.

8. 发明申请

US20050251990A1 Plasma uniformity control by gas diffuser hole design 有权
标题翻译：通过气体扩散器孔设计的等离子体均匀性控制
公开(公告)号：US20050251990A1
公开(公告)日：2005-11-17
申请号：US10889683
申请日：2004-07-12
申请人： Soo Young Choi , John White , Qunhua Wang , Li Hou , Ki Kim , Shinichi Kurita , Tae Won , Suhail Anwar , Beom Park , Robin Tiner
发明人： Soo Young Choi , John White , Qunhua Wang , Li Hou , Ki Kim , Shinichi Kurita , Tae Won , Suhail Anwar , Beom Park , Robin Tiner
IPC分类号： H01L21/02 , C23C16/00 , C23C16/34 , C23C16/44 , C23C16/455 , C23C16/505 , C23C16/509 , C23F1/00 , H01J37/32 , H01L21/205
CPC分类号： H01J37/3244 , C23C16/345 , C23C16/455 , C23C16/45565 , C23C16/5096 , H01J37/32082 , H01J37/32091 , H01J37/32541 , H01J37/32596 , H01J2237/327 , H01J2237/3321 , H01J2237/3323 , H01J2237/3325 , Y10T29/49885 , Y10T29/49996
摘要： Embodiments of a gas diffuser plate for distributing gas in a processing chamber are provided. The gas distribution plate includes a diffuser plate having an upstream side and a downstream side, and a plurality of gas passages passing between the upstream and downstream sides of the diffuser plate. The gas passages include hollow cathode cavities at the downstream side to enhance plasma ionization. The depths, the diameters, the surface area and density of hollow cathode cavities of the gas passages that extend to the downstream end can be gradually increased from the center to the edge of the diffuser plate to improve the film thickness and property uniformity across the substrate. The increasing diameters, depths and surface areas from the center to the edge of the diffuser plate can be created by bending the diffuser plate toward downstream side, followed by machining out the convex downstream side. Bending the diffuser plate can be accomplished by a thermal process or a vacuum process. The increasing diameters, depths and surface areas from the center to the edge of the diffuser plate can also be created computer numerically controlled machining. Diffuser plates with gradually increasing diameters, depths and surface areas of the hollow cathode cavities from the center to the edge of the diffuser plate have been shown to produce improved uniformities of film thickness and film properties.
摘要翻译：提供了用于在处理室中分配气体的气体扩散板的实施例。气体分配板包括具有上游侧和下游侧的扩散板，以及在扩散板的上游侧和下游侧之间通过的多个气体通路。气体通道包括在下游侧的中空阴极腔，以增强等离子体电离。延伸到下游端的气体通道的空心阴极腔的深度，直径，表面积和密度可以从扩散板的中心到边缘逐渐增加，以改善衬底上的膜厚度和性能均匀性。从扩散板的中心到边缘的直径，深度和表面积的增加可以通过向下游侧弯曲扩散板，然后在凸出的下游侧加工出来。扩散板的弯曲可以通过热处理或真空工艺来实现。从扩散板的中心到边缘的直径，深度和表面积的增加也可以用计算机数字控制加工。具有从扩散板的中心到边缘的中空阴极腔的直径逐渐增加，深度和表面积逐渐增大的扩散板已被证明可以产生改善的膜厚度和膜性质的均匀性。

9. 发明申请

US20070070109A1 Methods and systems for calibration of inkjet drop positioning 审中-公开
标题翻译：用于校准喷墨滴定位的方法和系统
公开(公告)号：US20070070109A1
公开(公告)日：2007-03-29
申请号：US11238832
申请日：2005-09-29
申请人： John White , Emanuel Beer , Hongbin Ji , Chang Lin , Shinichi Kurita
发明人： John White , Emanuel Beer , Hongbin Ji , Chang Lin , Shinichi Kurita
IPC分类号： B41J29/393
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供喷墨喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

10. 发明申请

US20070070107A1 Methods and systems for inkjet drop positioning 失效
标题翻译：喷墨定位方法和系统
公开(公告)号：US20070070107A1
公开(公告)日：2007-03-29
申请号：US11238636
申请日：2005-09-29
申请人： Bassam Shamoun , Janusz Jozwiak , Eugene Mirro , Quanyuan Shang , Shinichi Kurita , John White
发明人： Bassam Shamoun , Janusz Jozwiak , Eugene Mirro , Quanyuan Shang , Shinichi Kurita , John White
IPC分类号： B41J29/38
CPC分类号： B41J29/393
摘要： Methods and apparatus for inkjet inkjet drop positioning are provided. A first method includes determining an intended deposition location of an ink drop on a substrate, depositing the ink drop on the substrate using an inkjet printing system, detecting a deposited location of the deposited ink drop on the substrate, comparing the deposited location to the intended location, determining a difference between the deposited location and the intended location, and compensating for the difference between the deposited location and the intended location by adjusting a parameter of an inkjet printing system. Numerous other aspects are provided.
摘要翻译：提供喷墨喷墨滴定位的方法和装置。第一种方法包括确定墨滴在基底上的预期沉积位置，使用喷墨印刷系统将墨滴沉积在基底上，检测沉积的墨滴在基底上的沉积位置，将沉积位置与预期的位置进行比较确定存放位置与预期位置之间的差异，以及通过调整喷墨打印系统的参数来补偿存放位置与预期位置之间的差异。提供了许多其他方面。

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