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    • 9. 发明专利
    • METAL-COATED PLASTIC FILM
    • JPH01195269A
    • 1989-08-07
    • JP1725388
    • 1988-01-29
    • FURUKAWA ELECTRIC CO LTD
    • KOMATSU MASAYAKUMAZAWA KINYAYAMANAKA NOBUMITSUSEKI OSAMU
    • C23C14/06C23C14/14C23C14/16C23C14/20
    • PURPOSE:To form a metallic film excellent in adhesive strength and oxidation resistance with high productivity by forming a thin metallic-film layer of the desired film thickness provided between the thin metallic-film layers formed by a sputtering method on the surface of a plastic film by a vacuum vapor deposition method. CONSTITUTION:A primary thin metallic-film layer 1 of Cu, etc., is directly formed on a plastic film 5 at least to 5Angstrom : film thickness, by a sputtering method. Subsequently, a thin metallic-film layer 2 of the desired film thickness is efficiently formed on the above primary thin metallic-film layer 1 by a vacuum vapor deposition method. Successively, a secondary thin metallic-film layer 3 of Cu, etc., of at least 50Angstrom film thickness is formed on the outermost surface of the above thin metallic-film layer 2 by a sputtering method. By this method, a metallic coating composed of a thin metallic-film 4 in which the adhesive strength of the thin metallic-film layer 2 to the plastic film 5 is improved by means of the above primary thin metallic-film layer 1 and also resistance to moisture and heat is improved by means of the above secondary thin metallic- film layer 3 can be formed.
    • 10. 发明专利
    • MANUFACTURE OF FLEXIBLE PRINTED SUBSTRATE
    • JPS6412596A
    • 1989-01-17
    • JP16841687
    • 1987-07-06
    • FURUKAWA ELECTRIC CO LTD
    • KUMAZAWA KINYAKOMATSU MASAYAYAMANAKA NOBUMITSU
    • H05K3/16
    • PURPOSE:To obtain a flexible substrate by a method wherein one or both surfaces of a plastic film are subjected to a low temperature plasma treatment in O2 or gas containing O2 and then a conductor thin film is formed by a sputtering method with a composite copper target containing 1-15wt.% of one of Ni, Cr, Ti, Al, Ag, Fe, Zn and Sn or alloy composed of two or more of them. CONSTITUTION:A plastic film such as a polyethylene terephthalate film is subjected to a low temperature plasma treatment in O2, CO2 or Ar or N2 containing O2 and the surface is subjected to a fine etching to clean and to form functional groups such as -CO, -COOH and -OH and the adhesiveness of the film surface is improved. Then a conductor thin film is formed by a sputtering method with a composite copper target containing 1-15wt.% of one of Ni, Cr, Ti, Al, Ag, Fe, Zn and Sn which are highly corrosion-resistant and form mixed crystal or eutectic easily or alloy composed of two or more of them, especially with a target thin film containing 5-10wt.% of Ni and Cr. With this constitution, a flexible substrate with excellent corrosion-resistant properties can be obtained without degrading other properties.