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1. 发明授权

US06708570B2 Flow rate measurement method, ultrasonic flow rate meter, flow velocity measurement method, temperature or pressure measurement method, ultrasonic thermometer and ultrasonic pressure gage 有权
标题翻译：流量测量方法，超声波流量计，流速测量方法，温度或压力测量方法，超声波温度计和超声波压力表
公开(公告)号：US06708570B2
公开(公告)日：2004-03-23
申请号：US10020132
申请日：2001-12-18
申请人： Keiichi Matsushima , Michio Ohkawa , Eisaku Komatsu
发明人： Keiichi Matsushima , Michio Ohkawa , Eisaku Komatsu
IPC分类号： G01F166
CPC分类号： G01F1/667
摘要： An flow rate measurement method and a ultrasonic flow meter is provided, which can measure a flow velocity accurately by utilizing a ultrasonic wave having a frequency by which a phase difference becomes zero. According to the flow rate measurement method, a reference ultrasonic velocity is prepared such that the fluid is in a standard condition, firstly. Then, an absolute ultrasonic velocity in the fluid and a temporary flow velocity V0 in the fluid are obtained. Then, the temporary flow velocity V0 is corrected by using the difference between the reference ultrasonic velocity and the absolute ultrasonic velocity thereby to determine an accurate flow velocity of the fluid, and to determine a flow rate of the fluid by using the accurate flow velocity and a cross section area of the conduit.
摘要翻译：提供一种流量测量方法和超声波流量计，其可以通过利用具有相位差为零的频率的超声波来精确地测量流速。根据流量测量方法，首先准备参考超声速度使得流体处于标准状态。然后，获得流体中的绝对超声波速度和流体中的临时流速V0。然后，通过使用参考超声波速度和绝对超声波速度之间的差来校正临时流速V0，从而确定流体的精确流速，并且通过使用精确的流速来确定流体的流量，以及导管的横截面积。

2. 发明授权

US06675111B2 Method and apparatus for measuring flow velocity and method and apparatus for measuring flow rate 有权
标题翻译：测量流速的方法和装置及测量流量的方法和装置
公开(公告)号：US06675111B2
公开(公告)日：2004-01-06
申请号：US10081240
申请日：2002-02-25
申请人： Eisaku Komatsu , Keiichi Matsushima
发明人： Eisaku Komatsu , Keiichi Matsushima
IPC分类号： G01F100
CPC分类号： G01F1/667
摘要： Disclosed is a method and apparatus for measuring flow velocity and flow rate of a fluid in a tube member or the like with high precision. A flow vel0ocity measuring method has: a step of allowing a signal sound of ultrasound to propagate through a fluid in a tube member or the like and detecting a phase difference between the signal sound and an original signal; a step of eliminating a phase difference detected in the step to obtain synchronism; a step of detecting time or oscillation frequency required to complete the phase synchronization in the step; and a step of, on the basis of the time or oscillation frequency required to complete phase synchronization in the step, calculating flow velocity by referring to flow velocity which is preset in a table in correspondence with the time or frequency. In the table, flow velocities corresponding to changes in temperature, pressure, and kind of a fluid may be preset together with the time or oscillation frequency. A flow velocity measuring apparatus is realized by hardware having the functions of the above steps. A flow rate is obtained by multiplying the measured flow velocity with the internal diameter of a tube member.
摘要翻译：公开了一种用于以高精度测量管构件等中的流体的流速和流量的方法和装置。流动测量方法具有：允许超声波的信号通过管构件等中的流体传播并检测信号声音与原始信号之间的相位差的步骤; 消除在步骤中检测到的相位差以获得同步的步骤; 检测在步骤中完成相位同步所需的时间或振荡频率的步骤; 以及基于在该步骤中完成相位同步所需的时间或振荡频率的步骤，通过参考与时间或频率对应的表中预设的流速来计算流速。在表中，与流体的温度，压力和种类的变化对应的流速可以与时间或振荡频率一起预先设定。流量测量装置由具有上述步骤功能的硬件实现。通过将测量的流速与管构件的内径相乘来获得流量。

3. 发明申请

US20090126503A1 Heat Signal Writing Device 有权
标题翻译：热信号写入装置
公开(公告)号：US20090126503A1
公开(公告)日：2009-05-21
申请号：US12224627
申请日：2007-03-05
申请人： Hiroshi Imai , Keiichi Matsushima , Yoshihiro Ushigusa
发明人： Hiroshi Imai , Keiichi Matsushima , Yoshihiro Ushigusa
IPC分类号： G01F1/708
CPC分类号： G01F1/7084 , G01P5/10 , G01P5/18
摘要： A heat signal writing device forming a clear writing pattern of a heat signal is provided. A heat signal writing device 10 for writing a heat signal in a medium traveling through a channel, which is secured to an appropriate position on the channel through which the medium flows, includes a Peltier element 11 for writing the heat signal having a temperature change according to a desired pattern by heating or cooling; a channel supporting member 12 shaped as a pyramid formed of a heat conductive material and having a bottom surface in close contact with a surface of the Peltier element 11, the tip of the pyramid being in direct contact with the channel 1; a heat sink 13 in close contact with another surface of the Peltier element 11; and a heat-resistant cover for covering the periphery of the Peltier element 11, excluding a channel contact surface 12a at the tip, and the channel supporting member 12.
摘要翻译：提供了形成热信号的清晰写入模式的热信号写入装置。一个热信号写入装置10，用于将热信号写入传播通道的介质中，该通道固定在介质流过的通道上的适当位置，该珀耳帖元件11用于写入具有温度变化的热信号通过加热或冷却到期望的图案; 形成为由导热材料形成的金字塔并且具有与珀耳帖元件11的表面紧密接触的底表面的通道支撑构件12，金字塔的尖端与通道1直接接触; 与珀耳帖元件11的另一个表面紧密接触的散热器13; 以及用于覆盖珀耳帖元件11的周边的耐热罩，除了尖端处的通道接触表面12a和通道支撑构件12之外。

4. 发明授权

US5947677A Cassette transfer mechanism 失效
标题翻译：纸盒传送机构
公开(公告)号：US5947677A
公开(公告)日：1999-09-07
申请号：US969846
申请日：1997-11-13
申请人： Keiichi Matsushima , Teruo Asakawa
发明人： Keiichi Matsushima , Teruo Asakawa
IPC分类号： B65G49/07 , H01L21/677 , B65G65/00
CPC分类号： H01L21/67781 , H01L21/67769 , H01L21/67775 , Y10S414/137 , Y10S414/14
摘要： The cassette transfer mechanism of the present invention comprises a cassette chamber for housing a cassette storing a plurality of substrates, a liftable stand capable of moving up and down in the cassette chamber, a cassette holder having a bottom-surface supporting portion for supporting a bottom-surface of the cassette and a back-surface supporting portion for supporting a back-surface of the cassette, and a moving mechanism provided outside the cassette chamber and rotatably supporting the cassette holder, for moving the cassette holder between a waiting position outside the cassette chamber and the liftable stand inside the cassette chamber, wherein the moving mechanism has rotation mechanism for rotating the cassette holder around an axis crossed virtually in perpendicular to an axis extending along the moving direction of the liftable stand.
摘要翻译：本发明的盒式传送机构包括用于容纳存储多个基板的盒的盒室，能够在盒室中上下移动的可升降支架，具有用于支撑底部的底面支撑部分的盒座盒的表面和用于支撑盒的后表面的后表面支撑部分，以及设置在盒室外部并可旋转地支撑盒保持器的移动机构，用于将盒保持器移动到盒外的等待位置室和可升降支架在盒室内，其中移动机构具有旋转机构，用于围绕实质上垂直于沿着可升降支架的移动方向延伸的轴线交叉的轴线旋转盒保持器。

5. 发明授权

US5907204A Power supply terminal structure for starter magnet switch 失效
标题翻译：起动磁铁开关电源端子结构
公开(公告)号：US5907204A
公开(公告)日：1999-05-25
申请号：US826510
申请日：1997-04-03
申请人： Keiichi Matsushima , Masami Niimi , Tsutomu Shiga
发明人： Keiichi Matsushima , Masami Niimi , Tsutomu Shiga
IPC分类号： H01H37/52 , H01H50/44 , H01H51/06 , H02K11/00
CPC分类号： H01H51/065 , H01H37/52 , H01H50/443
摘要： In a starter, a power supply terminal connected to a solenoid coil of a magnet switch and connectable to a starter external circuit is provided on an end cover. The power supply terminal includes a terminal metal member, a bimetal which interrupts electric conduction between the solenoid coil and the terminal metal member at the time of temperature rise above a predetermined temperature, and a casing contacting a foot part of the terminal metal member and encasing the bimetal therein. The bimetal responds to each of the excessive heating of the terminal metal member and excessive energization current to interrupt the conduction. In case of a single axis-type starter, the power supply terminal is provided on a recess so that the terminal metal member does not extend axially beyond the rear end face of the end cover.
摘要翻译：在起动器中，在端盖上设置连接到磁体开关的螺线管线圈并且可连接到起动器外部电路的电源端子。电源端子包括端子金属构件，在温度升高到高于预定温度时中断螺线管线圈和端子金属构件之间的导电的双金属，以及与端子金属构件的脚部接触的外壳，双金属。双金属片响应端子金属部件的过度加热和过大的通电电流以中断传导。在单轴式起动器的情况下，电源端子设置在凹部上，使得端子金属构件不轴向地延伸超过端盖的后端面。

6. 发明授权

US5691511A Cordless digitizer 失效
标题翻译：无绳数字化仪
公开(公告)号：US5691511A
公开(公告)日：1997-11-25
申请号：US328523
申请日：1994-10-25
申请人： Keiichi Matsushima , Shuuji Hirano
发明人： Keiichi Matsushima , Shuuji Hirano
IPC分类号： G06F3/046 , G06F3/033 , G08C21/60
CPC分类号： G06F3/046
摘要： A cordless digitizer includes a tablet including position detecting elements formed of loop coils, error compensating elements formed of loop coils, and an auxiliary element formed of a coil which is arranged around a reading range of the tablet; and a position indicator including a position indicating element; and an error compensating unit which, when the position indicator is set at a position on the tablet, obtains first outputs according to interactions between the position detecting elements and the auxiliary element of the tablet and the position indicating element of the position indicator, and second outputs according to interactions between the error compensating elements, the auxiliary element of the tablet and the position indicating element of the position indicator to produce third outputs according to the first and second outputs from which error output components due to direct actions between the elements of the tablet have been eliminated; a position detecting loop coil assembly provided on the tablet which comprises loop coils arranged thereon at predetermined intervals in such a manner that adjacent loop coils are set close to one another but not overlapped with one another; and a loop coil selecting unit for selecting, from among the loop coils, a predetermined loop coil as a position detecting element, and a loop coil adjacent to the predetermined loop coil as an error compensating element.
摘要翻译：一种无绳数字转换器，包括：平板电脑，包括由环形线圈形成的位置检测元件，由环形线圈形成的误差补偿元件，以及围绕平板电脑读取范围布置的线圈形成的辅助元件; 以及包括位置指示元件的位置指示器; 以及误差补偿单元，当位置指示器被设置在平板电脑上的位置时，根据位置检测元件和图形输入板的辅助元件与位置指示器的位置指示元件之间的相互作用获得第一输出，第二输出根据误差补偿元件，图形辅助元件和位置指示器的位置指示元件之间的相互作用输出，以根据第一和第二输出产生第三输出，由该第一和第二输出由于第平板电脑已经淘汰; 设置在图形输入板上的位置检测环线圈组件，其包括以预定间隔布置在其上的环形线圈，使得相邻环形线圈彼此靠近而不彼此重叠; 以及环路线圈选择单元，用于从环路线圈中选择作为位置检测元件的预定环形线圈和与预定环形线圈相邻的环形线圈作为误差补偿元件。

7. 发明授权

US5414226A Tablet position digitizer 失效
标题翻译：平板电脑位置数字化仪
公开(公告)号：US5414226A
公开(公告)日：1995-05-09
申请号：US20330
申请日：1993-02-19
申请人： Keiichi Matsushima
发明人： Keiichi Matsushima
IPC分类号： G06F3/041 , G06F3/033 , G06F3/046 , G08C21/00
CPC分类号： G06F3/046
摘要： In this digitizer, when the coil of the position indicator is placed near a plurality of conductors of the tablet, an oscillator arrangement is formed through the amplifier, and a position indicated by the position indicator is determined by detecting magnetic fields generated by the position indicator when the oscillator arrangement oscillates. In addition, when the position indicator is placed near the tablet, an oscillator arrangement is constituted by the position indicator and two conductors of the tablet at a timing at which the position of the position indicator is measured.
摘要翻译：在该数字化仪中，当位置指示器的线圈放置在平板电脑的多个导体附近时，通过放大器形成振荡器装置，并且通过检测由位置指示器产生的磁场来确定由位置指示器指示的位置当振荡器布置振荡时。此外，当位置指示器放置在平板电脑附近时，在测量位置指示器的位置的定时，振动器装置由位置指示器和图形输入板的两个导体构成。

8. 发明授权

US07726204B2 Heat signal writing device 有权
标题翻译：热信号写入装置
公开(公告)号：US07726204B2
公开(公告)日：2010-06-01
申请号：US12224627
申请日：2007-03-05
申请人： Hiroshi Imai , Keiichi Matsushima , Yoshihiro Ushigusa
发明人： Hiroshi Imai , Keiichi Matsushima , Yoshihiro Ushigusa
IPC分类号： G01F1/708
CPC分类号： G01F1/7084 , G01P5/10 , G01P5/18
摘要： A heat signal writing device forming a clear writing pattern of a heat signal is provided. A heat signal writing device 10 for writing a heat signal in a medium traveling through a channel, which is secured to an appropriate position on the channel through which the medium flows, includes a Peltier element 11 for writing the heat signal having a temperature change according to a desired pattern by heating or cooling; a channel supporting member 12 shaped as a pyramid formed of a heat conductive material and having a bottom surface in close contact with a surface of the Peltier element 11, the tip of the pyramid being in direct contact with the channel 1; a heat sink 13 in close contact with another surface of the Peltier element 11; and a heat-resistant cover for covering the periphery of the Peltier element 11, excluding a channel contact surface 12a at the tip, and the channel supporting member 12.
摘要翻译：提供了形成热信号的清晰写入模式的热信号写入装置。一个热信号写入装置10，用于将热信号写入传播通道的介质中，该通道固定在介质流过的通道上的适当位置，该珀耳帖元件11用于写入具有温度变化的热信号通过加热或冷却到期望的图案; 形成为由导热材料形成的金字塔并且具有与珀耳帖元件11的表面紧密接触的底面的通道支撑构件12，金字塔的尖端与通道1直接接触; 与珀耳帖元件11的另一个表面紧密接触的散热器13; 以及用于覆盖珀耳帖元件11的周边的耐热罩，除了尖端处的通道接触表面12a和通道支撑构件12之外。

9. 发明授权

US06802934B2 Processing apparatus 失效
标题翻译：处理装置
公开(公告)号：US06802934B2
公开(公告)日：2004-10-12
申请号：US10378890
申请日：2003-03-05
申请人： Hiroaki Saeki , Keiichi Matsushima , Teruo Asakawa , Masaki Narushima
发明人： Hiroaki Saeki , Keiichi Matsushima , Teruo Asakawa , Masaki Narushima
IPC分类号： H01L2100
CPC分类号： H01L21/67766 , H01L21/67167 , H01L21/67201 , H01L21/67742 , H01L21/67745 , Y10S414/135 , Y10S414/136
摘要： Two load lock chambers 130 and 132 are arranged between a first transfer chamber 122 and a second transfer chamber 133. Each of the load lock chambers is capable of accommodating a single wafer W. The first transfer chamber 122 is provided with a first transfer unit 124 having two substrate holders 124a, 124b each capable of holding a single object to be processed, in order to transport the wafer W among a load port site 120, the first load lock chamber 130, the second load lock chamber 132 and a positioning unit 150. The second transfer chamber 133 is provided with a second transfer unit 156 having two substrate holders 156a, 156b each capable of holding the single object to be processed, in order to transport the wafer between the first load lock chamber 130, the second load lock chamber 132 and respective vacuum processing chambers 158 to 164. Since the volume of each load lock chamber can be minimized, it is possible to perform the prompt control of atmospheres in the load lock chambers. Additionally, it is possible to perform the delivery of the wafers promptly.
摘要翻译：两个负载锁定室130和132设置在第一传送室122和第二传送室133之间。每个负载锁定室能够容纳单个晶片W.第一传送室122设置有第一传送单元124 具有能够保持单个待处理物体的两个基板保持件124a，124b，以便在载荷端口位置120，第一加载锁定室130，第二加载锁定室132和定位单元150之间输送晶片W 第二传送室133设置有第二传送单元156，第二传送单元156具有两个能够保持单个待处理物体的基板保持器156a，156b，以便在第一加载锁定室130，第二加载锁室132和相应的真空处理室158至164.由于每个负载锁定室的体积可以最小化，因此可以对负载锁中的气氛进行即时控制 mbers。此外，可以及时执行晶片的传送。

10. 发明授权

US5947675A Cassette transfer mechanism 失效
标题翻译：纸盒传送机构
公开(公告)号：US5947675A
公开(公告)日：1999-09-07
申请号：US967397
申请日：1997-11-11
申请人： Keiichi Matsushima
发明人： Keiichi Matsushima
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67775 , Y10S414/14
摘要： A cassette transfer mechanism according to the present invention comprises a cassette chamber for containing a cassette for holding a plurality of objects to be processed, a cassette transfer port formed in the cassette chamber, for allowing the cassette to be transferred into and from the cassette chamber, an object transfer port formed in the cassette chamber and opened at a predetermined angle to an opening direction of the cassette transfer port, for allowing the objects to be transferred into and from the cassette chamber, an elevation table provided in the cassette chamber such that the elevation table can be elevated, a shaft installed rotatably on the elevation table and extending in a direction substantially perpendicular to an opening direction of the object transfer port, a cassette support table fixed to the shaft and having a bottom support portion for receiving a bottom surface of the cassette and a back surface support portion for receiving a back surface of the cassette, for orienting the cassette supported by the bottom support portion and the back surface support portion, in the opening direction of the object transfer port, and a rotation mechanism for rotating the cassette support table between a first position inside the cassette chamber and a second position outside the cassette chamber, by rotating the shaft in in response to operation of the elevation table.
摘要翻译：根据本发明的盒式传送机构包括用于容纳用于保持待处理的多个物体的盒的盒室，形成在盒室中的盒传送端口，用于允许盒传送到盒室中，形成在盒室中并且以与盒传送口的打开方向成预定角度打开的物体传送口，用于允许物体被传送到盒室中和从盒室传送;设置在盒室中的升降台，使得升降台可以升高，轴可旋转地安装在升降台上并且沿着与物体传送口的打开方向大致垂直的方向延伸;盒支撑台，固定到轴上，并具有用于接收底部的底部支撑部分盒的表面和用于接收盒的后表面的后表面支撑部分用于使由所述底部支撑部和所述后表面支撑部支撑的所述盒沿所述物体传送口的打开方向定向;以及旋转机构，用于使所述盒支撑台在所述盒室内的第一位置和第二位置之间旋转通过响应于升降台的操作使轴转动，在盒室外部。

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