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1. 发明申请

WO2006094100A3 RETICLE POD WITH ISOLATION SYSTEM 审中-公开
标题翻译：具有隔离系统的物品
公开(公告)号：WO2006094100A3
公开(公告)日：2007-09-20
申请号：PCT/US2006007370
申请日：2006-02-27
申请人： ENTEGRIS INC , GREGERSON BARRY , HALBMAIER DAVID , SUMNER STEPHEN , WISEMAN BRIAN , TIEBEN ANTHONY MATHIUS , STRIKE JUSTIN
发明人： GREGERSON BARRY , HALBMAIER DAVID , SUMNER STEPHEN , WISEMAN BRIAN , TIEBEN ANTHONY MATHIUS , STRIKE JUSTIN
IPC分类号： B65D85/00
CPC分类号： H01L21/67353 , G03F1/66 , G03F7/70741 , H01L21/67359 , H01L21/67369 , H01L21/67376 , H01L21/67386
摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.
摘要翻译：本发明提供了一种掩模版容器，其配备有容纳该掩模版并容纳在主容器中的二次容器。次级容器保持在具有冲击和隔振构件的主容器内，使得副容器在主容器内具有多个运动自由度。掩模版被固定在次级容器内，使得从掩模版容器到掩模版的冲击和振动传播被大大衰减。

2. 发明申请

WO2006093939A2 SUBSTRATE CONTAINER WITH PRESSURE EQUALIZATION 审中-公开
标题翻译：具有压力均衡的基体容器
公开(公告)号：WO2006093939A2
公开(公告)日：2006-09-08
申请号：PCT/US2006007033
申请日：2006-02-27
申请人： ENTEGRIS INC , GREGERSON BARRY , HALBMAIER DAVID , SUMNER STEPHEN , WISEMAN BRIAN , TIEBEN ANTHONY MATHIUS , STRIKE JUSTIN
发明人： GREGERSON BARRY , HALBMAIER DAVID , SUMNER STEPHEN , WISEMAN BRIAN , TIEBEN ANTHONY MATHIUS , STRIKE JUSTIN
CPC分类号： G03B27/58 , H01L21/67353 , H01L21/67376 , H01L21/67386 , H01L21/67393
摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.
摘要翻译：本发明是用于容纳微粒敏感基材并用于在容器的外部和内部环境之间提供压力平衡并且用于最小化与颗粒敏感基材相邻的气态流体流动的容器的容器。所述荚包括主荚，位于盖中的隔膜，所述膈肌具有正常的未偏转位置，所述膈肌可偏离正常的未偏转位置。优选地，荚包括设置在主荚中的次荚，限定用于容纳微粒敏感基质的第二外壳。荚可以包括附接到荚果的过滤器，并且在荚的外部和荚的内部之间提供气态流体连通。隔膜响应于快速的压力变化，过滤器响应于较慢的压力变化，并允许隔膜返回其正常的未偏转位置。

3. 发明申请

WO2008106622B1 PURGE SYSTEM FOR A SUBSTRATE CONTAINER 审中-公开
公开(公告)号：WO2008106622B1
公开(公告)日：2008-12-24
申请号：PCT/US2008055388
申请日：2008-02-28
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , HALBMAIER DAVID L , KOLBOW STEVEN P
发明人： TIEBEN ANTHONY MATHIUS , HALBMAIER DAVID L , KOLBOW STEVEN P
IPC分类号： C25F1/00
CPC分类号： H01L21/67353 , H01L21/67017 , H01L21/67359 , H01L21/67386 , H01L21/67393 , Y10S414/14
摘要： A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.

4. 发明申请

WO2006094113A8 MASK CONTAINER 审中-公开
标题翻译：面具容器
公开(公告)号：WO2006094113A8
公开(公告)日：2006-12-28
申请号：PCT/US2006007400
申请日：2006-02-27
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , ANDERSEN CHRISTIAN , WISEMAN BRIAN
发明人： TIEBEN ANTHONY MATHIUS , ANDERSEN CHRISTIAN , WISEMAN BRIAN
IPC分类号： B65D43/14 , B65D6/28 , B65D45/16
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373
摘要： Drug delivery systems suitable for administration into the interior of an eye of a person or animal are described. The present systems include a drug delivery element that provides directional delivery of one or more drugs to a desired target site in the eye and remain invisible to the individual in which the element is placed. The present drug delivery systems may include an adhesive portion that adheres the drug delivery element to the retina of the eye, and/or a polymeric envelope substantially surrounding the drug delivery element to form an intravitreal implant. The envelope may enhance the stability and handling of the implant when the implant is being placed in the eye. Methods of producing and using the drug delivery systems are also described.
摘要翻译：描述了适合施用到人或动物眼睛内部的药物递送系统。本系统包括药物递送元件，其提供一种或多种药物定向递送至眼睛中期望的目标部位，并且保持元素置于其中的个体不可见。本发明的药物递送系统可以包括将药物递送元件粘附到眼睛视网膜的粘附部分和/或基本上围绕药物递送元件形成玻璃体内植入物的聚合物包膜。当植入物置于眼中时，外壳可以增强植入物的稳定性和操作性。还描述了生产和使用药物递送系统的方法。

5. 发明申请

WO2005102872A3 SUBSTRATE CONTAINER WITH FLUID-SEALING FLOW PASSAGEWAY 审中-公开
标题翻译：带流体密封流量的基座容器
公开(公告)号：WO2005102872A3
公开(公告)日：2006-12-21
申请号：PCT/US2005013261
申请日：2005-04-18
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , LYSTAD JOHN , HALBMAIER DAVID L
发明人： TIEBEN ANTHONY MATHIUS , LYSTAD JOHN , HALBMAIER DAVID L
IPC分类号： B65D85/30 , H01L21/00 , H01L21/673
CPC分类号： H01L21/67017 , H01L21/67126 , H01L21/67379 , H01L21/67389 , H01L21/67393 , H01L21/67769
摘要： A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.
摘要翻译：基底容器包括外壳和形成在外壳中的进入结构，并且通过外壳提供流体进入到基底容器的内部。进入结构包括开口和内表面。索环位于接近结构的内表面上。

6. 发明申请

WO2006094113A3 MASK CONTAINER 审中-公开
公开(公告)号：WO2006094113A3
公开(公告)日：2007-12-06
申请号：PCT/US2006007400
申请日：2006-02-27
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , ANDERSEN CHRISTIAN , WISEMAN BRIAN
发明人： TIEBEN ANTHONY MATHIUS , ANDERSEN CHRISTIAN , WISEMAN BRIAN
IPC分类号： B65D43/14 , B65D6/28 , B65D45/16
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373
摘要： Drug delivery systems suitable for administration into the interior of an eye of a person or animal are described. The present systems include a drug delivery element that provides directional delivery of one or more drugs to a desired target site in the eye and remain invisible to the individual in which the element is placed. The present drug delivery systems may include an adhesive portion that adheres the drug delivery element to the retina of the eye, and/or a polymeric envelope substantially surrounding the drug delivery element to form an intravitreal implant. The envelope may enhance the stability and handling of the implant when the implant is being placed in the eye. Methods of producing and using the drug delivery systems are also described.

7. 发明申请

WO2006094113A9 MASK CONTAINER 审中-公开
标题翻译：面膜容器
公开(公告)号：WO2006094113A9
公开(公告)日：2007-02-08
申请号：PCT/US2006007400
申请日：2006-02-27
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , ANDERSEN CHRISTIAN , WISEMAN BRIAN
发明人： TIEBEN ANTHONY MATHIUS , ANDERSEN CHRISTIAN , WISEMAN BRIAN
IPC分类号： B65D43/14 , B65D6/28 , B65D45/16
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67373
摘要： Drug delivery systems suitable for administration into the interior of an eye of a person or animal are described. The present systems include a drug delivery element that provides directional delivery of one or more drugs to a desired target site in the eye and remain invisible to the individual in which the element is placed. The present drug delivery systems may include an adhesive portion that adheres the drug delivery element to the retina of the eye, and/or a polymeric envelope substantially surrounding the drug delivery element to form an intravitreal implant. The envelope may enhance the stability and handling of the implant when the implant is being placed in the eye. Methods of producing and using the drug delivery systems are also described.
摘要翻译：描述了适合施用于人或动物的眼睛内部的药物递送系统。本系统包括药物递送元件，其提供一种或多种药物到眼睛中期望的靶位点的定向递送，并且对于其中放置元件的个体保持不可见。本药物递送系统可以包括将药物递送元件粘附到眼睛的视网膜上的粘合剂部分和/或基本上围绕药物递送元件的聚合物包膜以形成玻璃体内植入物。当植入物放置在眼睛中时，信封可以增强植入物的稳定性和处理。还描述了产生和使用药物递送系统的方法。

8. 发明申请

WO2008106622A3 PURGE SYSTEM FOR A SUBSTRATE CONTAINER 审中-公开
标题翻译：一种基板容器的清洗系统
公开(公告)号：WO2008106622A3
公开(公告)日：2008-10-23
申请号：PCT/US2008055388
申请日：2008-02-28
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , HALBMAIER DAVID L , KOLBOW STEVEN P
发明人： TIEBEN ANTHONY MATHIUS , HALBMAIER DAVID L , KOLBOW STEVEN P
IPC分类号： C25F1/00
CPC分类号： H01L21/67353 , H01L21/67017 , H01L21/67359 , H01L21/67386 , H01L21/67393 , Y10S414/14
摘要： A purging station with a substrate container receiving zone having at least one upwardly extending purging nozzle. The nozzle has a circular engaging lip. The substrate container has support means for at least one substrate and a purge port assembly that includes an externally facing sealing flange facing downward from the container. The sealing flange has a central aperture and a cantilevered flange portion that engages with the circular engaging lip of the nozzle. The weight of the substrate container on the nozzle carried by the canilevered portion of the flange causes bending of the flange for a resilient soft seal.
摘要翻译：具有基板容器接收区的吹扫台，其具有至少一个向上延伸的吹扫喷嘴。喷嘴具有圆形的接合唇缘。基板容器具有用于至少一个基板的支撑装置和吹扫端口组件，吹扫端口组件包括从容器朝下的面向外的密封凸缘。密封凸缘具有中心孔和悬臂凸缘部分，该凸缘部分与喷嘴的圆形接合唇缘接合。由凸缘的can状部分承载的喷嘴上的基底容器的重量引起凸缘的弯曲以用于弹性软密封。

9. 发明申请

WO2005102870A3 WAFER CONTAINER DOOR WITH PARTICULATE COLLECTING STRUCTURE 审中-公开
标题翻译：具有颗粒收集结构的水箱门
公开(公告)号：WO2005102870A3
公开(公告)日：2007-03-15
申请号：PCT/US2005013162
申请日：2005-04-18
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , LYSTAD JOHN , HALBMAIER DAVID L
发明人： TIEBEN ANTHONY MATHIUS , LYSTAD JOHN , HALBMAIER DAVID L
IPC分类号： B65D45/16 , B65D85/00 , B65D85/30 , B65D85/48 , H01L21/673
CPC分类号： H01L21/67373 , H01L21/67393 , Y10S206/832
摘要： A substrate container (20) having an enclosure (22) with an access opening (26) for inserting and removing substrates into an interior the enclosure and a door chassis (40A) that is configured to selectively enclose the opening. The door chassis comprising a first wall having a peripheral wall extending therefrom. The substrate container includes a latch mechanism (50) that is operably coupled with the chassis, the latch mechanism configured to operably secure the chassis to the opening. The door of the substrate container include a textured particle capture region (75) wherein particles generated by the latch mechanism and elsewhere are captured by the particle capture region.
摘要翻译：一种具有外壳（22）的基板容器（20），其具有用于将基板插入和移除到外壳内部的进入开口（26），以及构造成选择性地封闭开口的门框（40A）。门底盘包括具有从其延伸的周壁的第一壁。基板容器包括与底盘可操作地联接的闩锁机构（50），所述闩锁机构构造成将底盘可操作地固定到开口。基板容器的门包括纹理粒子捕获区域（75），其中由所述闩锁机构和其他地方产生的颗粒被所述颗粒捕获区域捕获。

10. 发明申请

WO2005102871A2 WAFER CONTAINER WITH SEALABLE DOOR 审中-公开
标题翻译：带密封门的水箱
公开(公告)号：WO2005102871A2
公开(公告)日：2005-11-03
申请号：PCT/US2005013166
申请日：2005-04-18
申请人： ENTEGRIS INC , TIEBEN ANTHONY MATHIUS , LYSTAD JOHN
发明人： TIEBEN ANTHONY MATHIUS , LYSTAD JOHN
IPC分类号： B65D85/00 , B65D85/30 , H01L21/00 , H01L21/673
CPC分类号： H01L21/67376 , H01L21/67126
摘要： A wafer container including an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. A continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross-section, the elastomeric seal has an inset portion and a sealing head coupled by a bridging portion. The sealing head has a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure displacing the bridging portion axially toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.
摘要翻译：一种晶片容器，其包括具有限定用于插入和移除晶片的开口的门框的封闭部分和可装配在门框中以密封外壳部分的门。连续的弹性密封件围绕着门的周边延伸。密封件位于靠近门的周边的密封表面上，并且可以部分地插入门的径向凹槽中。在横截面中，弹性体密封件具有插入部分和通过桥接部分联接的密封头。密封头具有从桥接部分朝向门的密封表面突出的脚部，以及相对于桥接部分大致相对于脚的方向延伸的头部。门框具有密封接合结构，使得当门被安置在门框中时，弹性体密封件的桥接部分接触密封接合结构，使桥接部分轴向朝向密封表面移动，并使密封头的头部径向旋转并接触密封接合结构。位移动作还肯定地将密封头的脚部与门的密封面接触。

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