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1. 发明申请

WO2006094100A2 RETICLE POD WITH ISOLATION SYSTEM 审中-公开
标题翻译：具有隔离系统的试剂盒
公开(公告)号：WO2006094100A2
公开(公告)日：2006-09-08
申请号：PCT/US2006/007370
申请日：2006-02-27
申请人： ENTEGRIS, INC. , GREGERSON, Barry , HALBMAIER, David , SUMNER, Stephen , WISEMAN, Brian , TIEBEN, Anthony, Mathius , STRIKE, Justin
发明人： GREGERSON, Barry , HALBMAIER, David , SUMNER, Stephen , WISEMAN, Brian , TIEBEN, Anthony, Mathius , STRIKE, Justin
IPC分类号： B65D85/00
CPC分类号： H01L21/67353 , G03F1/66 , G03F7/70741 , H01L21/67359 , H01L21/67369 , H01L21/67376 , H01L21/67386
摘要： The present invention provides a reticle container that is equipped with a secondary container which houses the reticle and is housed in the primary container. The secondary container is held within the primary container with shock and vibration isolation members so that the secondary container has multiple degrees of freedom of motion within the primary container. The reticle is secured inside the secondary container such that shock and vibration transmission from the reticle container to the reticle is substantially attenuated.
摘要翻译：本发明提供了一种掩模版容器，其配备有容纳该掩模版并容纳在一次容器中的二次容器。次级容器被保持在具有冲击和隔振构件的主容器内，使得副容器在主容器内具有多个运动自由度。掩模版固定在次级容器内，使得从掩模版容器到掩模版的冲击和振动传播被大大衰减。

2. 发明申请

WO2006093939A3 SUBSTRATE CONTAINER WITH PRESSURE EQUALIZATION 审中-公开
公开(公告)号：WO2006093939A3
公开(公告)日：2006-09-08
申请号：PCT/US2006/007033
申请日：2006-02-27
申请人： ENTEGRIS, INC. , GREGERSON, Barry , HALBMAIER, David , SUMNER, Stephen , WISEMAN, Brian , TIEBEN, Anthony, Mathius , STRIKE, Justin
发明人： GREGERSON, Barry , HALBMAIER, David , SUMNER, Stephen , WISEMAN, Brian , TIEBEN, Anthony, Mathius , STRIKE, Justin
IPC分类号： B65G1/133
摘要： The present invention is a pod for containing a particulate sensitive substrate and for providing pressure equalization between the exterior and an interior environment of the pod and for minimizing gaseous fluid flow inside adjacent to the particulate sensitive substrate. The pod comprises a primary pod, a diaphragm positioned in a cover, the diaphragm having a normal undeflected position, the diaphragm deflectable from the normal undeflected position. Preferably, the pod comprises a secondary pod disposed in the primary pod defining a second enclosure for containing the particulate sensitive substrate. The pod may comprise a filter attached to the pod and providing gaseous fluid communication between the exterior of the pod and the interior of the pod. The diaphragm is responsive to rapid pressure changes and the filter is responsive to slower pressure changes and allows the diaphragm to return to its normal undeflected position.

3. 发明申请

WO2013025629A3 WAFER CARRIER 审中-公开
公开(公告)号：WO2013025629A3
公开(公告)日：2013-02-21
申请号：PCT/US2012/050624
申请日：2012-08-13
申请人： ENTEGRIS, INC. , ADAMS, Michael, S. , GREGERSON, Barry , FULLER, Matthew, A.
发明人： ADAMS, Michael, S. , GREGERSON, Barry , FULLER, Matthew, A.
IPC分类号： H01L21/673 , B65D85/38 , B65D85/86
摘要： A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

4. 发明申请

WO2012054644A2 WAFER CONTAINER WITH DOOR GUIDE AND SEAL 审中-公开
标题翻译：带门指导和密封的散热容器
公开(公告)号：WO2012054644A2
公开(公告)日：2012-04-26
申请号：PCT/US2011/056944
申请日：2011-10-19
申请人： ENTEGRIS, INC. , GREGERSON, Barry , FULLER, Matthew, A. , ADAMS, Michael, S.
发明人： GREGERSON, Barry , FULLER, Matthew, A. , ADAMS, Michael, S.
IPC分类号： H01L21/673
CPC分类号： H01L21/67376 , H01L21/67369 , H01L21/67373
摘要： A wafer container that reduces or alleviates one or more of the problems associated with excessive container wall deflection due to loading and excessive particulate generation, particularly as those problems are experienced with containers for 450 mm diameter and larger wafers. The container has an enclosure and door with interlocking features to enable transfer of tension load to the door to minimize deflection of container surfaces. The container may include a gasketing arrangement compatible with the interlock feature. The container may include a removable door guide that improves centering of the door during door installation, and that is made of low particle generating material to reduce particulates.
摘要翻译：一种晶片容器，其减少或减轻由于负载和过量的颗粒物产生引起的过大的容器壁挠曲所引起的一个或多个问题，特别是当450mm直径和较大晶片的容器遇到这些问题时。容器具有一个具有互锁特征的外壳和门，以便将张力负载转移到门上，以最小化容器表面的偏差。容器可以包括与互锁特征相兼容的衬垫布置。容器可以包括可移除的门导板，其可以在门安装期间改善门的对中，并且由低颗粒发生材料制成以减少微粒。

5. 发明申请

WO2008005325A2 WAFER CARRIER DOCKING STATION 审中-公开
公开(公告)号：WO2008005325A2
公开(公告)日：2008-01-10
申请号：PCT/US2007/015111
申请日：2007-06-28
申请人： ENTEGRIS, INC. , GREGERSON, Barry , ANDERSON, James, M.
发明人： GREGERSON, Barry , ANDERSON, James, M.
IPC分类号： H01M16/00
CPC分类号： H01L21/67253 , H01L21/67379 , H01L21/67775 , H02J5/00 , H02J7/0045 , H02J7/02 , H02J7/025 , H02J50/10
摘要： An docking station for charging a rechargeable battery on a container such as a front opening unitary pod (FOUP) and/or coupling instrumentation on the container with a remote monitor. The docking station is configured to support and align a container having an instrumentation module that monitors the wafer carrier. The instrumentation module may be powered by a rechargeable battery through an interface with couplings such as inductive couplings or electrical contacts for engaging with the charging contacts on the docking station. A contact switch may enable power to be provided to the charging circuit only when the container is present on the docking station. The battery may be aligned with the contacts on the docking station using kinematic couplings on the container. Light sources such as light emitting diodes (LEDs) may indicate the status of the charging unit.
摘要翻译：一个对接站，用于在诸如前开口整体式盒（FOUP）的容器上充电可充电电池和/或用远程监视器在容器上连接仪器。对接站被配置为支撑和对准具有监视晶片载体的仪表模块的容器。仪表模块可以由可再充电电池通过与诸如电感耦合或电触头的耦合的接口供电，用于与对接站上的充电触点接合。接触开关可以仅在容器存在于坞站上时才能向充电电路提供电力。电池可以使用容器上的运动耦合与坞站上的触点对齐。诸如发光二极管（LED）的光源可以指示充电单元的状态。

6. 发明申请

WO2012054625A3 FRONT OPENING WAFER CONTAINER WITH ROBOTIC FLANGE 审中-公开
公开(公告)号：WO2012054625A3
公开(公告)日：2012-04-26
申请号：PCT/US2011/056915
申请日：2011-10-19
申请人： ENTEGRIS, INC. , GREGERSON, Barry
发明人： GREGERSON, Barry
IPC分类号： H01L21/673
摘要： A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents having resilient bending members that extend vertically to attach to an upwardly extending flange on the top wall of the container portion. A multiplicity of upwardly and outwardly extending strengthening ribs extend upwardly from the top wall of the container portion and extend along the top wall toward the left and right sides and the back side of the container portion, ad each of all four sides of the attachment flange. A further locking piece or core may be inserted and retained at the neck of the robotic flange to lock the resilient deflectable portions in their retention position. The locking piece further may be secured in place with a detent mechanism formed by part of the core and flanges.

7. 发明申请

WO2011113033A2 THIN WAFER SHIPPER 审中-公开
标题翻译：超薄拖鞋
公开(公告)号：WO2011113033A2
公开(公告)日：2011-09-15
申请号：PCT/US2011/028243
申请日：2011-03-11
申请人： ENTEGRIS, INC. , GREGERSON, Barry , STEFFENS, Jason , RASCHKE, Russ
发明人： GREGERSON, Barry , STEFFENS, Jason , RASCHKE, Russ
IPC分类号： B65D85/38 , B65D85/86 , H01L21/673
CPC分类号： H01L21/67369 , H01L21/67383 , H01L21/67386
摘要： An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V -shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers respectively, and extend the wafer support to approximately the entire circumference of each wafer.
摘要翻译：晶片容器中的改进的晶片支撑机构，其用于承载多个轴向排列的薄的大多圆形晶片基板。容器包括具有多个相邻设置的用于接收基板的齿的盒，其中每个肋构件从盒开口顶部连续到盒开口底部，可移除顶盖部分，可移除底盖部分，衬垫组件可移除地附接到容器顶盖和可移除地位于容器底盖中的另一个缓冲组件，并通过晶片盒的重量保持在适当位置。顶部衬垫由在每个段的末端处具有延伸引入特征的单个段形成，每个段中的弹簧部分和每个段具有V形横截面以接收晶片边缘。顶部和底部衬垫分别安装在顶部和底部容器盖中，并且将晶片支撑件延伸到每个晶片的大致整个圆周。

8. 发明申请

WO2003072460A1 WAFER CONTAINER CUSHION SYSTEM 审中-公开
标题翻译： WAFER CONTAINER CUSHION系统
公开(公告)号：WO2003072460A1
公开(公告)日：2003-09-04
申请号：PCT/US2003/005282
申请日：2003-02-21
申请人： ENTEGRIS, INC. , BORES, Gregory , ZABKA, Michael , GREGERSON, Barry
发明人： BORES, Gregory , ZABKA, Michael , GREGERSON, Barry
IPC分类号： B65D85/00
CPC分类号： H01L21/67369
摘要： A wafer container having a container portion (20) with an open front (24) for receiving and removal of wafers includes a door (100) with a cushion system (140, 142) that utilizes a unique wafer restraint system (114) and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door (100) is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door (100). The latch cavities for receiving two latch mechanisms (122, 124) with latch members (130) that extend out the upper and lower peripheral edge of the door (100). The latch mechanisms (122, 124) are covered by a pair of door panels (118, 120) that utilize hooks (186) that attach to the peripheral edge of the door (100) and further attach with posts near the vertical midsection.
摘要翻译：具有容纳部分（20）的晶片容器具有用于接收和去除晶片的开口前部（24），包括具有利用独特的晶片约束系统（114）和结构的结构的衬垫系统（140,142）的门（100）特征是为晶片提供最大保护并防止所述晶片的旋转。门（100）的特征在于门盖的前部在门（100）的向外侧上具有一对闩锁腔。用于接收具有延伸出门（100）的上周边和下周边的闩锁构件（130）的两个闩锁机构（122,124）的闩锁腔。闩锁机构（122,124）由一对门板（118,120）覆盖，所述门板利用连接到门（100）的周边边缘的钩（186）并进一步附接在靠近垂直中央部的柱上。

9. 发明申请

WO2017139494A1 FLEXIBLE SUBSTRATE SHIPPER 审中-公开
标题翻译：灵活的基材托运人
公开(公告)号：WO2017139494A1
公开(公告)日：2017-08-17
申请号：PCT/US2017/017234
申请日：2017-02-09
申请人： ENTEGRIS, INC. , JOHNSON, Michael, L. , GALLAGHER, Gary, M. , GREGERSON, Barry
发明人： JOHNSON, Michael, L. , GALLAGHER, Gary, M. , GREGERSON, Barry
IPC分类号： H01L21/673
CPC分类号： H01L21/67386 , H01L21/67346 , H01L21/67369 , H01L21/67373
摘要： A substrate container (100) includes a receptacle (105) and a cover (110). The receptacle (105) includes a base portion (115) for supporting a substrate and a side wall portion (120) extending upward from the base portion (115). The cover (110) defines a closure over the receptacle (105). In one embodiment, the receptacle (105) includes a first alignment feature (300, 305) located on an exterior surface of the receptacle (105). The first alignment feature (300, 305) interfaces with automation for aligning the receptacle (105). In another embodiment, the cover (110) includes a contoured surface (135) for applying a compressive load to the contents of the substrate container (100).
摘要翻译：衬底容器（100）包括容器（105）和盖子（110）。容器（105）包括用于支撑基板的基部（115）和从基部（115）向上延伸的侧壁部（120）。盖（110）在容器（105）上限定封盖。在一个实施例中，容器（105）包括位于容器（105）的外表面上的第一对准特征（300,305）。第一对准特征（300,305）与自动化接口以对准插座（105）。在另一个实施例中，盖（110）包括用于向基底容器（100）的内容物施加压缩载荷的波状表面（135）。

10. 发明申请

WO2009089552A2 METHODS AND APPARATUSES FOR LARGE DIAMETER WAFER HANDLING 审中-公开
标题翻译：用于大直径波浪处理的方法和装置
公开(公告)号：WO2009089552A2
公开(公告)日：2009-07-16
申请号：PCT/US2009/030870
申请日：2009-01-13
申请人： ENTEGRIS, INC. , GREGERSON, Barry , ADAMS, Michael, Shawn , STEFFENS, Jason, Todd
发明人： GREGERSON, Barry , ADAMS, Michael, Shawn , STEFFENS, Jason, Todd
IPC分类号： H01L21/673 , H01L21/67
CPC分类号： B65D25/103 , B65D25/28 , B65D43/02 , B65D85/70 , H01L21/6732 , H01L21/67369 , H01L21/67383 , H01L21/67386 , H01L21/67763
摘要： A front opening semiconductor wafer container for large diameter wafers includes a container portion and a door. The container portion includes a left closed side, a right closed side, a closed back, an open front, and an open interior including a plurality of slots for receiving and containing the wafers. The door is attachable to the container portion to close the open front and selectively latchable to the container portion. The container portion includes a means for accommodating large diameter wafers, particularly 450 mm wafers. Optimized sag control is provided as well as enhanced structural rigidity, and wafer seating features.
摘要翻译：用于大直径晶片的前开口半导体晶片容器包括容器部分和门。容器部分包括左封闭侧，右封闭侧，闭合背部，开放前部和包括用于接收和容纳晶片的多个狭槽的开放内部。门可附接到容器部分以封闭敞开的前部，并可选择性地闩锁到容器部分。容器部分包括用于容纳大直径晶片的装置，特别是450mm的晶片。提供优化的下垂控制以及增强的结构刚度和晶片座位功能。

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