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1. 发明申请

WO2009114798A3 WAFER CONTAINER WITH TUBULAR ENVIRONMENTAL CONTROL COMPONENTS 审中-公开
标题翻译：带有管状环境控制组件的集水器
公开(公告)号：WO2009114798A3
公开(公告)日：2009-12-23
申请号：PCT/US2009037143
申请日：2009-03-13
申请人： ENTEGRIS INC , WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
发明人： WATSON JAMES A , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , SMITH MARK V
IPC分类号： H01L21/673 , B65D81/18 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67393
摘要： A wafer container utilizes a rigid polymer tubular tower with slots and a "getter" therein for absorbing and filtering moisture and vapors within the wafer container. The tower preferably utilizes a purge grommet at the base of the container and may have a check valve therein to control the flow direction of gas (including air) into and out of the container and with respect to the tower. The tower is sealingly connected with the grommet. The tower may have a getter media piece rolled in an elongate circular fashion forming or shaped as a tube and disposed within the tower and may have axially extending. The media can provide active and/or passive filtration as well as having capabilities to be recharged. Front opening wafer containers for 300mm sized wafers generally have a pair of recesses on each of the left and right side in the inside rear of the container portions. These recesses are preferably utilized for elongate towers, such towers extending substantially from a bottom wafer position to a top wafer position. In alternative embodiment, a tubular shape of getter material is exposed within the front opening container without containment of the getter other than at the ends. The tubular getter form is preferably supported at discrete locations to maximize exposure to the internal container environment. A blocker member can selectively close the apertures. An elastomeric cap can facilitate securement of the tubular component in the container portion.
摘要翻译：晶片容器利用具有槽的刚性聚合物管状塔和其中的“吸气剂”，用于吸收和过滤晶片容器内的水分和蒸气。塔优选在容器的底部使用吹扫索环，并且可以在其中具有止回阀以控制进入和离开容器的气体（包括空气）的流动方向并相对于塔。塔与护环密封连接。塔可以具有以细长的圆形方式卷绕的吸气剂介质片，其形成或成形为管，并且设置在塔内并且可以具有轴向延伸。介质可以提供主动和/或无源过滤以及具有再充电能力。用于300mm尺寸的晶片的前开口晶片容器通常在容器部分的内侧后部中的左侧和右侧的每一侧上具有一对凹部。这些凹槽优选地用于细长塔，这种塔基本上从底部晶片位置延伸到顶部晶片位置。在替代实施例中，吸气剂材料的管状形状暴露在前开口容器内，而不会吸收除了末端之外的吸气剂。管状吸气剂形式优选地在离散位置处被支撑以最大程度地暴露于内部容器环境。阻挡件可以选择性地封闭孔。弹性帽可有助于管状部件固定在容器部分中。

2. 发明申请

WO2008008270A3 WAFER CASSETTE 审中-公开
公开(公告)号：WO2008008270A3
公开(公告)日：2008-05-08
申请号：PCT/US2007015523
申请日：2007-07-06
申请人： ENTEGRIS INC , FULLER MATTHEW A , BURNS JOHN
发明人： FULLER MATTHEW A , BURNS JOHN
IPC分类号： A47G19/08
CPC分类号： H01L21/67383
摘要： A front opening wafer container including an enclosure portion and a door. A wafer support system is provided including a pair of spaced apart cantilever wafer shelves, each wafer shelf including a pair of opposing inclined ramp portions. The ramp portions are cooperatively positioned and configured so that when the wafer is received on the shelves, the wafer is supported on the ramps at a lower peripheral corner of the wafer, all other portions of the wafer being free from contact with the wafer support system. Each wafer shelf may have a generally concave upper surface and the incline of the ramps is continuous with the concave upper surfaces of the wafer shelves.
摘要翻译：包括外壳部分和门的前开式晶圆容器。提供晶片支撑系统，其包括一对间隔开的悬臂式晶片架，每个晶片架包括一对相对的倾斜斜坡部分。斜坡部分被协同定位和配置，使得当晶片被接收在架子上时，晶片被支撑在晶片的下部外围角处的斜坡上，晶片的所有其他部分不与晶片支撑系统接触。每个晶片架可以具有大致上凹的上表面，斜坡的倾斜与晶片架的凹上表面连续。

3. 发明申请

WO2007087284A3 KINEMATIC COUPLING WITH TEXTURED CONTACT SURFACES 审中-公开
标题翻译：与纹理接触表面的运动耦合
公开(公告)号：WO2007087284A3
公开(公告)日：2007-11-22
申请号：PCT/US2007001729
申请日：2007-01-23
申请人： ENTEGRIS INC , BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , KING JEFFREY J , SMITH MARK V
发明人： BURNS JOHN , FORBES MARTIN L , FULLER MATTHEW A , KING JEFFREY J , SMITH MARK V
IPC分类号： B65D85/00
CPC分类号： H01L21/67379 , Y10S414/14
摘要： A substrate kinematic coupling or guide plate for a substrate carrier having textured or patterned surfaces at the points of contact to reduce frictional forces generated between automated processing equipment and the kinematic coupling. The textured surface reduces the contact area between the processing equipment and the contact portion of the kinematic coupling, thereby reducing the resultant frictional force. By reducing the frictional force, the substrate carrier more readily settles on the mounting pins of the processing equipment, thus avoiding intolerable height and angular deviations during automated access to the substrates. Textures include, but are not limited to, a knurl pattern, ridges running laterally along the contact portions, and ridges running longitudinally along the contact portions. The textures may be formed by a blow molding, injection molding or in an overmolding process, or by a machining or imprinting process.
摘要翻译：用于衬底载体的衬底运动耦合或导向板，其在接触点处具有纹理或图案化的表面，以减少自动处理设备和运动耦合器之间产生的摩擦力。纹理表面减少了处理设备和运动耦合器的接触部分之间的接触面积，由此减小了所产生的摩擦力。通过减小摩擦力，基板载体更容易安置在处理设备的安装销上，从而避免在自动进入基板期间难以忍受的高度和角度偏差。纹理包括但不限于滚花图案，沿接触部分横向延伸的脊和沿接触部分纵向延伸的脊。纹理可以通过吹塑，注塑或包覆成型工艺或通过机加工或压印工艺形成。

4. 发明申请

WO2005048305A3 SUBSTRATE CONTAINER 审中-公开
标题翻译：基板容器
公开(公告)号：WO2005048305A3
公开(公告)日：2005-11-17
申请号：PCT/US2004037006
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： A47G19/08 , B65D85/00 , H01L20060101 , H01L21/673
CPC分类号： H01L21/67396
摘要： A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparent side walls and electrically conductive shelves to retain stored substrates in a generally axial alignment.
摘要翻译：用于耗散静电电荷的衬底载体具有包覆模制在基本上整体的容器中的导电栅格或网络。电网电连接到底层并接地的鞍座。载体可以进一步包括基本上透明的侧壁和导电架以保持存储的基底大致轴向对齐。

5. 发明申请

WO2012088172A2 FRONT OPENING LARGE SUBSTRATE CONTAINER 审中-公开
标题翻译：前开大型基板容器
公开(公告)号：WO2012088172A2
公开(公告)日：2012-06-28
申请号：PCT/US2011/066282
申请日：2011-12-20
申请人： ENTEGRIS, INC. , FORBES, Martin, L. , FULLER, Matthew, A. , BURNS, John
发明人： FORBES, Martin, L. , FULLER, Matthew, A. , BURNS, John
IPC分类号： H01L21/673 , B65D85/38 , B65D85/48 , B65D85/86 , G02F1/13
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.
摘要翻译：平板基板容器提供了用于安全存储并允许通过前门水平移除的微环境。在本发明的一个实施例中，坚固的搁架系统具有多个堆叠的搁架，其具有门打开时的悬臂状态和关闭门的非悬臂状态。容器的形状通常可以是直线形的并且与基板面板的形状一致。该容器具有敞开的前部，其具有封闭的顶壁，封闭的底壁，封闭的左侧壁，封闭的右侧壁和封闭的后侧壁。多个搁板固定在后侧壁上并以悬臂方式向前延伸。在本发明的一个实施例中，搁架可以是大致细长的细长搁架构件，其由铝挤压件或以两列布置的组件形成，并且为每个基底设置一对这样的构件并且限定狭槽。同样向内延伸的边缘支撑件设置在左侧壁和右侧壁处以用于基板的边缘支撑。在本发明的一个实施例中，细长搁架构件每个都具有一对阳部和阴部中的一个，当门关闭时它们连接在一起以有效地“非悬浮” 当门关闭开放的前部时，细长的搁架构件。所有搁架构件及其上的基板可以在与容器部分的悬臂式连接相对的端部固定就位。该容器可能具有用于架空运输的功能，例如提升支架，静电耗散功能和锁定功能。

6. 发明申请

WO2006058089A2 WAFER CONTAINER WITH SECONDARY WAFER RESTRAINT SYSTEM 审中-公开
标题翻译：具有二次波浪限制系统的滤波器
公开(公告)号：WO2006058089A2
公开(公告)日：2006-06-01
申请号：PCT/US2005/042486
申请日：2005-11-23
申请人： ENTEGRIS, INC. , BURNS, John , FULLER, Matthew, A. , KING, Jeffery, J. , FORBES, Martin, L. , SMITH, Mark, V.
发明人： BURNS, John , FULLER, Matthew, A. , KING, Jeffery, J. , FORBES, Martin, L. , SMITH, Mark, V.
IPC分类号： B65D85/00
CPC分类号： H01L21/67369
摘要： A wafer container providing improved wafer restraint during physical shock events. In embodiments of the invention, a secondary wafer restraint structure defining a plurality of notches is interposed between opposing wafer restraint members on the door of the container. The notches may be defined by one or more converging edges or surfaces meeting at a junction. The junctions are positioned so as to align with the wafer receiving portions of each opposing pair of wafer restraint member so that when the door is fully sealingly engaged with the enclosure of the container, the edge of the wafer is contacting the junction. In this position, any vertical movement of the wafer due to shock imparted to the container causes the wafer to contact the converging surfaces or edges, thereby limiting such movement. The positioning of the secondary wafer restraint structure between and proximate opposing fingers of the primary wafer restraint limits deflection of the wafer between support points and thereby further inhibits the wafer from “jumping” out of the supports and cross-slotting.
摘要翻译：在物理冲击事件期间提供改进的晶片约束的晶片容器。在本发明的实施例中，限定多个凹口的次晶片约束结构插入在容器的门上的相对的晶片约束部件之间。切口可由一个或多个在会合处的会聚边缘或表面限定。接合部被定位成与每个相对的一对晶片约束构件的晶片接收部分对准，使得当门与容器的外壳完全密封地接合时，晶片的边缘接触接合部。在这个位置上，由于施加到容器上的冲击而导致的晶片的任何垂直移动导致晶片与会聚表面或边缘接触，从而限制了这种移动。第二晶片约束结构在主晶片限制器的相对指状物之间和之间的定位限制了晶片在支撑点之间的偏转，从而进一步阻止晶片从支撑件“跳跃”出来并进行交叉开槽。

7. 发明申请

WO2005055280A2 WAFER CONTAINER AND DOOR WITH CAM LATCHING MECHANISM 审中-公开
标题翻译：具有凸轮锁紧机构的冷凝器和门
公开(公告)号：WO2005055280A2
公开(公告)日：2005-06-16
申请号：PCT/US2004/038453
申请日：2004-11-16
申请人： ENTEGRIS, INC. , BURNS, John , FULLER, Matthew, A. , KING, Jeffery, J. , FORBES, Martin, L. , SMITH, Mark, V.
发明人： BURNS, John , FULLER, Matthew, A. , KING, Jeffery, J. , FORBES, Martin, L. , SMITH, Mark, V.
IPC分类号： H01L
CPC分类号： H01L21/67353 , H01L21/67373 , Y10T292/1049
摘要： A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.
摘要翻译：用于保持单个晶片的容器包括具有闩锁机构的门，所述闩锁机构具有凸轮，所述凸轮具有从其横向延伸的一对相对的翼。凸轮可选择性地可旋转地在第一有利位置之间移动，其中翼完全在门外壳内，以使门能够与门框接合和脱离，以及第二优选位置，其中翼从门外壳横向向外延伸，当门接合在门框中时，接合门框中的闩锁凹部。凸轮翼可以包括其上的斜坡部分，用于当凸轮从第一优选位置旋转到第二优选位置时，将门拉近门框中更紧密的接合。此外，闩锁机构还可以包括设置成提供用于将闩锁机构朝向第一和第二受惠位置中的每一个推动的偏置力的弹簧，以及用于在第一和第二位置以受控的方式减速凸轮的软停止润滑弹簧有利的位置和吸收由于凸轮与门机箱上的固定挡块碰撞而产生的振动。

8. 发明申请

WO2005047117A2 FRONT OPENING SUBSTRATE CONTAINER WITH BOTTOM PLATE 审中-公开
标题翻译：带底板的前开式底板容器
公开(公告)号：WO2005047117A2
公开(公告)日：2005-05-26
申请号：PCT/US2004037017
申请日：2004-11-08
申请人： ENTEGRIS INC , BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
发明人： BURNS JOHN , FULLER MATTHEW A , KING JEFFERY J , FORBES MARTIN L , SMITH MARK V
IPC分类号： B65D20060101 , B65D85/30 , H01L21/673 , B65D
CPC分类号： H01L21/67369 , H01L21/67379 , H01L21/67393 , Y10S206/832
摘要： A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
摘要翻译：衬底容器和底板通过例如连接器机构的两个构件之间的螺纹连接的方式与用于调节容器和底板之间的距离的机构连接。还提供了用于排放容器的鸭嘴阀和用于使由冲击引起的损坏最小化的阻尼器。

9. 发明申请

WO2012151431A3 WAFER CONTAINER WITH PARTICLE SHIELD 审中-公开
标题翻译：带有颗粒屏蔽的容器
公开(公告)号：WO2012151431A3
公开(公告)日：2013-03-14
申请号：PCT/US2012036373
申请日：2012-05-03
申请人： ENTERGRIS INC , FORBES MARTIN L , BURNS JOHN , FULLER MATTHEW A
发明人： FORBES MARTIN L , BURNS JOHN , FULLER MATTHEW A
IPC分类号： H01L21/673 , B65D85/38 , B65D85/86
CPC分类号： H01L21/67389 , H01L21/67386 , H01L21/67393 , H01L21/67396
摘要： One or more particulate shields above the top wafer in wafer containers such as FOUPS may be provided to prevent accumulation of particulates on wafers. The particulate shields or barriers may be formed of materials that are compatible to maintaining less than 5% RH, particularly materials that will not absorb meaningful amounts of water, and that will not bring absorbed moisture into the container. In embodiments, particular materials found to be suitable include cyclic olefin polymers, cyclic olefin copolymers, liquid crystal polymers. In particular embodiments, a FOUP may be provided with an additional slot above the industry standard 25 slots to receive a dedicated barrier. In embodiments, the barrier may be a solid thin shape that corresponds to the wafer shape. In embodiments, the barrier may have inherent charge properties opposite to the particulates found in the containers to thereby attract the particulates to the barrier. In embodiments the barrier may have apertures, such as slots, or other openings, to facilitate charge development for enhancing the attraction of particulates to the barrier. In embodiments the barrier may be retrofitted to existing wafer containers, such as FOUPS. In embodiments, the shield may be conforming to the interior structure of a specific FOUP configuration.
摘要翻译：可以提供晶片容器中的顶部晶片上方的一个或多个颗粒屏蔽物，例如FOUPS，以防止颗粒在晶片上的积聚。颗粒状屏蔽物或屏障可以由兼容保持小于5％RH的材料形成，特别是不吸收有意义量的水的材料，并且不会将吸收的水分带入容器。在实施方案中，发现合适的特定材料包括环烯烃聚合物，环烯烃共聚物，液晶聚合物。在特定实施例中，FOUP可以在工业标准25个时隙上方设置有一个附加槽，以接收专用屏障。在实施例中，屏障可以是对应于晶片形状的实心薄形状。在实施方案中，阻挡层可以具有与容器中发现的微粒相反的固有电荷特性，从而将颗粒吸引到屏障。在实施例中，阻挡层可以具有孔，例如狭槽或其它开口，以便于电荷开发以增强微粒对屏障的吸引。在实施例中，屏障可以被改装到现有的晶片容器，例如FOUPS。在实施例中，屏蔽可以符合特定FOUP配置的内部结构。

10. 发明申请

WO2012088172A3 FRONT OPENING LARGE SUBSTRATE CONTAINER 审中-公开
标题翻译：前开式大型底板容器
公开(公告)号：WO2012088172A3
公开(公告)日：2012-10-26
申请号：PCT/US2011066282
申请日：2011-12-20
申请人： ENTEGRIS INC , FORBES MARTIN L , FULLER MATTHEW A , BURNS JOHN
发明人： FORBES MARTIN L , FULLER MATTHEW A , BURNS JOHN
IPC分类号： H01L21/673 , B65D85/38 , B65D85/48 , B65D85/86 , G02F1/13
CPC分类号： H01L21/67373 , H01L21/67386
摘要： A flat panel substrate container provides a microenvironment for safely storing and allowing horizontal removal through a front door. In an embodiment of the invention, a robust shelf system has a plurality of stacked shelves that have a cantilevered state with the door open and a non-cantilevered state with the door closed. The container may be generally rectilinear in shape and conforming to the shape of the substrate panels. The container has an open front with a closed top wall, closed bottom wall, closed left side wall, closed right side wall, and closed back side wall. A plurality of shelves are secured to the back side wall and extend forwardly in a cantilevered fashion. In an embodiment of the invention, the shelves may be generally elongate slender shelf members formed of aluminum extrusions or assemblies that are arranged in two columns with a pair of such members provided for each substrate and defining a slot. Also inwardly extending edge supports are provided at the left side wall and right side wall for edge support of the substrates. In an embodiment of the invention, the elongate shelf members each have one of a pair of male and female portion that join as the door is closed to effectively "uncantilever" the elongate shelf members as the door closes the open front. All of the shelf members and the substrates thereon may be fixed into position at the end opposite the cantilevered connection to the container portion. The container may have a feature for overhead transport, such as lifting brackets, static dissipation features, and latching features.
摘要翻译：平板基板容器提供用于安全存储并允许通过前门的水平移除的微环境。在本发明的一个实施例中，坚固的搁架系统具有多个堆叠的架子，其具有门打开的悬臂状态和门关闭的非悬臂状态。容器的形状通常可以是直线形，并且与基板的形状一致。容器具有敞开的前部，其具有封闭的顶壁，封闭的底壁，封闭的左侧壁，封闭的右侧壁和封闭的后侧壁。多个搁架被固定到后侧壁并以悬臂方式向前延伸。在本发明的一个实施例中，搁架可以是大致细长的由铝挤压件或组件形成的细长的搁架部件，铝挤压件或组件布置成两列，其中一对这样的部件设置用于每个基板并且限定槽。在左侧壁和右侧壁上设置向内延伸的边缘支撑件，用于基板的边缘支撑。在本发明的一个实施例中，细长的搁架部件各自具有一对公部分和阴部分中的一个，当门关闭时，当门关闭开放的前部时，细长的搁架部件有效地“不吸引”箱体。所有搁板构件和其上的基板可以在与容器部分的悬臂连接相对的端部处固定到位。容器可以具有用于架空输送的特征，例如提升支架，静电耗散特征和锁定特征。

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