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1. 发明申请

WO2012082930A2 REDUCING BACK-REFLECTION IN LASER MICROMACHINING SYSTEMS 审中-公开
标题翻译：减少激光微型系统中的反射
公开(公告)号：WO2012082930A2
公开(公告)日：2012-06-21
申请号：PCT/US2011/064959
申请日：2011-12-14
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , LI, Guangyu , ALPAY, Mehmet E.
发明人： LI, Guangyu , ALPAY, Mehmet E.
IPC分类号： B23K26/00 , B23K26/42 , H01S3/02
CPC分类号： B23K26/066 , H01S3/0064
摘要： Systems and methods reduce or prevent back-reflections in a laser processing system. A system includes a laser source to generate an incident laser beam, a laser beam output to direct the incident laser beam toward a work surface along a beam path, and a spatial filter. The system further includes a beam expander to expand a diameter of the incident laser beam received through the spatial filter, and a scan lens to focus the expanded incident laser beam at a target location on a work surface. A reflected laser beam from the work surface returns through the scan lens to the beam expander, which reduces a diameter of the reflected beam and increases a divergence angle of the reflected laser beam. The spatial filter blocks a portion of the diverging reflected laser beam from passing through the aperture and returning to the laser beam output.
摘要翻译：系统和方法减少或防止激光加工系统中的反射。一种系统包括用于产生入射激光束的激光源，将入射激光束沿着光束路径引向工作表面的激光束输出和空间滤光器。该系统还包括扩束器，以扩大通过空间滤波器接收的入射激光束的直径;以及扫描透镜，以将扩大的入射激光束聚焦在工作表面上的目标位置。来自工作表面的反射激光束通过扫描透镜返回到光束扩展器，这减小了反射光束的直径并增加了反射激光束的发散角。空间滤波器阻挡发散反射激光束的一部分通过孔并返回到激光束输出。

2. 发明申请

WO2012135039A2 LASER DIRECT ABLATION WITH PICOSECOND LASER PULSES AT HIGH PULSE REPETITION FREQUENCIES 审中-公开
标题翻译：激光直接与高脉冲重复频率下的PICOSECOND激光脉冲相关
公开(公告)号：WO2012135039A2
公开(公告)日：2012-10-04
申请号：PCT/US2012/030375
申请日：2012-03-23
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , ALPAY, Mehmet E. , MATSUMOTO, Hisashi , UNRATH, Mark A. , LI, Guangyu
发明人： ALPAY, Mehmet E. , MATSUMOTO, Hisashi , UNRATH, Mark A. , LI, Guangyu
IPC分类号： H01L21/301 , H01L21/28
CPC分类号： B23K26/0648 , B23K26/0622 , B23K26/0652 , B23K26/082 , B23K26/0861 , B23K26/364 , B23K2201/42 , B23K2203/42 , B23K2203/50
摘要： Laser direct ablation (LDA) produces patterns cut into a dielectric layer for the formation of electrically conductive traces with controlled signal propagation characteristics. LDA processing includes selecting a dose fluence for removing a desired depth of material along a scribe line on a surface of a workpiece, selecting a temporal pulsewidth for each laser pulse in a series of laser pulses, and selecting a pulse repetition frequency for the series of laser pulse. The pulse repetition frequency is based at least in part on the selected temporal pulsewidth to maintain the selected dose fluence along the scribe line. The selected pulse repetition frequency provides a predetermined minimum overlap of laser spots along the scribe line. The LDA process further includes generating a laser beam including the series of laser pulses according to the selected dose fluence, temporal pulsewidth, and pulse repetition frequency.
摘要翻译：激光直接消融（LDA）产生切割成电介质层的图案，以形成具有受控信号传播特性的导电迹线。 LDA处理包括选择剂量注量以沿着工件表面上的划线去除期望的材料深度，在一系列激光脉冲中选择每个激光脉冲的时间脉冲宽度，以及选择一系列激光脉冲的脉冲重复频率激光脉冲。脉冲重复频率至少部分地基于所选择的时间脉冲宽度，以维持沿着划线的所选择的剂量注量。所选择的脉冲重复频率提供沿着划线的激光点的预定的最小重叠。 LDA工艺还包括根据所选择的剂量注量，时间脉冲宽度和脉冲重复频率产生包括一系列激光脉冲的激光束。

3. 发明申请

WO2010036503A2 METHOD OF LASER MICRO-MACHINING STAINLESS STEEL WITH HIGH COSMETIC QUALITY 审中-公开
标题翻译：具有高化妆品质量的激光微加工不锈钢的方法
公开(公告)号：WO2010036503A2
公开(公告)日：2010-04-01
申请号：PCT/US2009/056016
申请日：2009-09-04
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , LEI, Weisheng , ALPAY, Mehmet, E. , MATSUMOTO, Hisashi , HOWERTON, Jeffrey , LI, Guangyu , PIROGOVSKY, Peter , LU, Wilson , SIMENSON, Glenn
发明人： LEI, Weisheng , ALPAY, Mehmet, E. , MATSUMOTO, Hisashi , HOWERTON, Jeffrey , LI, Guangyu , PIROGOVSKY, Peter , LU, Wilson , SIMENSON, Glenn
IPC分类号： B23K26/42 , B23K26/00 , B23K103/02 , B23K101/34
CPC分类号： B23K26/18 , B23K26/009 , B23K26/0622 , B23K26/36 , B23K26/382 , B23K26/40 , B23K2201/34 , B23K2203/05 , B23K2203/10
摘要： A process to laser micro-machine a metal part with a high cosmetic quality surface includes applying a protective coating layer to at least one surface of the part before micro-machining the part with a laser. The protective coating applied to the high quality cosmetic surface can have a thickness of between about 5 mil and about 10 mil, inclusive and have sufficient adhesion strength to adhere to the part without delaminating during processing. The protective coating applied to the machining surface of the part can be a metallic material, such as a metallic foil or tape.
摘要翻译：激光微加工具有高化妆品质量表面的金属部件的方法包括在用激光微加工该部件之前在部件的至少一个表面上施加保护涂层。施加到高质量化妆品表面的保护涂层可以具有约5密耳至约10密耳之间的厚度，并且具有足够的粘附强度以在加工期间粘附到部件上而不会分层。施加到部件的加工表面的保护涂层可以是金属材料，例如金属箔或带。

4. 发明申请

WO2010077845A2 METHOD FOR LASER PROCESSING GLASS WITH A CHAMFERED EDGE 审中-公开
标题翻译：激光加工玻璃的方法
公开(公告)号：WO2010077845A2
公开(公告)日：2010-07-08
申请号：PCT/US2009/067988
申请日：2009-12-15
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , LEI, Weisheng , SIMENSON, Glenn , MATSUMOTO, Hisashi , LI, Guangyu , HOWERTON, Jeffrey
发明人： LEI, Weisheng , SIMENSON, Glenn , MATSUMOTO, Hisashi , LI, Guangyu , HOWERTON, Jeffrey
IPC分类号： B23K26/38 , C03B33/09 , B23K26/04
CPC分类号： B23K26/40 , B23K2203/50 , B28D1/22 , C03B33/0222 , C03B33/04 , C03B33/082
摘要： A laser machining process is described for laser 72 machining glass or glass-like materials 62. This process machines articles 60 with chamfered edges 96 in one manufacturing operation. Chamfered edges 96 are desirable in glass and glass-like materials 62 because they resist fracturing or chipping and eliminate sharp edges. Producing chamfered 96 articles 60 in one manufacturing operation is desirable because it can save time and expense by eliminating the need to transfer the article to a separate machine for chamfering 96 after laser 72 machining. Alternatively, it can permit use of less expensive equipment because the same laser 72 used for machining can be used to form the chamfer 96 instead of having a separate process perform the chamfering 96.
摘要翻译：描述激光加工过程用于激光72加工玻璃或玻璃状材料62.该过程在一次制造操作中加工具有倒角边缘96的制品60。倒角边缘96在玻璃和玻璃状材料62中是理想的，因为它们抵抗断裂或碎裂并消除锋利的边缘。在一次制造操作中生产倒角的96个制品60是合乎需要的，因为通过在激光72机械加工之后不需要将制品转移到单独的机器进行倒角96，它可以节省时间和费用。或者，它可以允许使用较便宜的设备，因为用于机械加工的相同激光器72可以用于形成倒角96，而不是使用单独的工艺来执行倒角96.

5. 发明申请

WO2010111609A2 METHOD FOR IMPROVED BRITTLE MATERIALS PROCESSING 审中-公开
标题翻译：改进的脆性材料加工方法
公开(公告)号：WO2010111609A2
公开(公告)日：2010-09-30
申请号：PCT/US2010/028856
申请日：2010-03-26
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , LEI, Weisheng , SIMENSON, Glenn , MATSUMOTO, Hisashi , LI, Guangyu , HOWERTON, Jeffrey
发明人： LEI, Weisheng , SIMENSON, Glenn , MATSUMOTO, Hisashi , LI, Guangyu , HOWERTON, Jeffrey
IPC分类号： B23K26/38 , B23K26/40 , B23K26/00 , H01S3/10
CPC分类号： B23K26/40 , B23K2203/50
摘要： An improved method for laser machining features in brittle materials such as glass 8 is presented, wherein a tool path 10 related to a feature is analyzed to determine how many passes are required to laser machine the feature using non-adjacent laser pulses 12. Laser pulses 12 applied during subsequent passes are located so as to overlap previous laser spot locations by a predetermined overlap amount. In this way no single spot receives excessive laser radiation caused by immediately subsequent laser pulses 12 being applied adjacent to a previous pulse location.
摘要翻译：提出了一种用于诸如玻璃8的脆性材料中的激光加工特征的改进方法，其中分析与特征相关的刀具路径10，以确定使用不相邻的激光脉冲12激光加工特征所需的通过次数。激光脉冲在后续通过期间施加的12被定位成与先前的激光光斑位置重叠预定的重叠量。以这种方式，没有单个点接收由紧邻的先前脉冲位置施加的紧随其后的激光脉冲12引起的过多的激光辐射。

6. 发明申请

WO2018204241A1 MULTI-AXIS MACHINE TOOL, METHODS OF CONTROLLING THE SAME AND RELATED ARRANGEMENTS 审中-公开
公开(公告)号：WO2018204241A1
公开(公告)日：2018-11-08
申请号：PCT/US2018/030152
申请日：2018-04-30
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： LU, Guang , JOHANSEN, Brian , KOSMOWSKI, Mark , LO, Ho, Wai , LI, Guangyu
IPC分类号： B23K26/08 , B23K26/06 , B23K26/70
摘要： Varied embodiments of a laser-based machine tool, and techniques for controlling the same are provided. Some embodiments relate to techniques to facilitate uniform and reproducible processing of workpieces. Other embodiments relate to a zoom lens having a quickly-variable focal length. Still other embodiments relate to various features of a laser-based multi-axis machine tool that can facilitate efficient delivery of laser energy to a scan head, that can address thermomechanical issues that may arise during workpiece processing, etc. Another embodiment relates to techniques for minimizing or preventing undesired accumulation of particulate matter on workpiece surfaces during processing. A number of other embodiments and arrangements are also detailed.

7. 发明申请

WO2017161284A1 LOCATION OF IMAGE PLANE IN A LASER PROCESSING SYSTEM 审中-公开
标题翻译：激光加工系统中图像平面的位置
公开(公告)号：WO2017161284A1
公开(公告)日：2017-09-21
申请号：PCT/US2017/022987
申请日：2017-03-17
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： LIU, Yuan , HU, Honghua , BROOKHYSER, Jim , LI, Guangyu , BILYEN, Brandon , EATON, Kurt
IPC分类号： G01S17/89 , G01S7/481
CPC分类号： B23K26/032 , B23K26/00 , B23K26/0626 , B23K26/073 , B23K26/082 , B23K26/384
摘要： Disclosed is a method and an apparatus to process a workpiece including producing a first beam of laser energy characterized by a first spatial intensity distribution. A first workpiece is processed using the first beam of laser energy to form a plurality of features at a first distance between the scan lens and the first workpiece and forming a second features at a second distance. The method includes determining which of the plurality of features has a shape that most closely resembles the shape of the first spatial intensity distribution and setting a process distance as the distance that produced that feature. Using this process distance, a surface of a second workpiece is processed using second beam of laser energy with a second spatial intensity distribution.
摘要翻译：公开了一种处理工件的方法和装置，包括产生以第一空间强度分布为特征的第一激光能量束。使用第一激光束来处理第一工件以在扫描透镜与第一工件之间的第一距离处形成多个特征并且在第二距离处形成第二特征。该方法包括确定多个特征中的哪一个具有最接近地类似于第一空间强度分布的形状的形状并且将处理距离设置为产生该特征的距离。使用该处理距离，使用具有第二空间强度分布的第二激光能量束来处理第二工件的表面。

8. 发明公开

EP3618997A1 MULTI-AXIS MACHINE TOOL, METHODS OF CONTROLLING THE SAME AND RELATED ARRANGEMENTS 无效转让
公开(公告)号：EP3618997A1
公开(公告)日：2020-03-11
申请号：EP18795204.9
申请日：2018-04-30
申请人： Electro Scientific Industries, Inc.
发明人： LU, Guang , JOHANSEN, Brian , KOSMOWSKI, Mark , LO, Ho, Wai , LI, Guangyu
IPC分类号： B23K26/08 , B23K26/06 , B23K26/70

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