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    • 3. 发明申请
    • POST-LENS STEERING OF A LASER BEAM FOR MICRO-MACHINING APPLICATIONS
    • 用于微加工应用的激光束的镜片后转向
    • WO2010036669A3
    • 2010-07-01
    • PCT/US2009057947
    • 2009-09-23
    • ELECTRO SCIENT IND INCALPAY MEHMET EHOWERTON JEFFREYJOHANSEN BRIAN
    • ALPAY MEHMET EHOWERTON JEFFREYJOHANSEN BRIAN
    • B23K26/04B23K26/08
    • B23K26/02B23K26/035B23K26/082
    • A laser micro-machining system includes a simple focusing lens located between a laser source and a beam steering mechanism along the path of a laser beam pulse. The focusing lens is a simple single-element spherical lens with an optical axis of the focusing lens located in line with a laser beam input from the laser source. The focusing lens is located further away from a work piece than the beam steering mechanism. An active beam path management system moves the simple focusing lens in concert with and relative to the beam steering mechanism to maintain a focal point coincident with a surface of the work piece at all deflection angles affected by the beam steering mechanism. The focusing lens is rapidly moveable in concert with the beam steering mechanism to maintain a constant beam path length from the lens output to the work piece.
    • 激光微加工系统包括沿着激光束脉冲的路径位于激光源和光束控制机构之间的简单聚焦透镜。 聚焦透镜是简单的单元球面透镜,其聚焦透镜的光轴与从激光源输入的激光束一致。 聚焦透镜比光束转向机构更远离工件。 主动光束路径管理系统使简单聚焦透镜与光束转向机构一致并相对于光束转向机构移动,以在由光束转向机构影响的所有偏转角度处保持与工件表面一致的焦点。 聚焦透镜可与光束转向机构一起快速移动以保持从透镜输出到工件的恒定光束路径长度。