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1. 发明申请

US20060066843A1 Optical inspection with alternating configurations 有权
标题翻译：具有交替配置的光学检查
公开(公告)号：US20060066843A1
公开(公告)日：2006-03-30
申请号：US11234492
申请日：2005-09-22
申请人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
发明人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/479
摘要： An imaging system for inspection of a sample includes an illumination module, which irradiates a surface of the sample with pulsed optical radiation. A mechanical scanner translates at least one of the sample and part of the imaging system so as to scan an area irradiated by the pulsed optical radiation over the surface in order to irradiate successive, partially overlapping frames on the surface by respective successive pulses of the pulsed radiation. A collection module collects the optical radiation scattered from the surface so as to capture a sequence of images of the irradiated frames. A system controller varies a configuration of the imaging system in alternation between at least first and second different optical configurations in synchronization with the pulsed optical radiation.
摘要翻译：用于检查样品的成像系统包括照射模块，其照射具有脉冲光辐射的样品表面。机械扫描器将成像系统的样本和部分中的至少一个平移以扫描由表面上的脉冲光辐射照射的区域，以便通过相应的连续的脉冲脉冲来照射表面上的连续的部分重叠的帧辐射。收集模块收集从表面散射的光辐射，以捕获被照射的帧的图像序列。系统控制器与脉冲光辐射同步地在至少第一和第二不同光学配置之间交替地改变成像系统的配置。

2. 发明授权

US07397552B2 Optical inspection with alternating configurations 有权
标题翻译：具有交替配置的光学检查
公开(公告)号：US07397552B2
公开(公告)日：2008-07-08
申请号：US11234492
申请日：2005-09-22
申请人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
发明人： Avishay Guetta , Doron Korngut , Doron Shoham , Iddo Pinkas , Ronen Eynat
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/956 , G01N2021/479
摘要： An imaging system for inspection of a sample includes an illumination module, which irradiates a surface of the sample with pulsed optical radiation. A mechanical scanner translates at least one of the sample and part of the imaging system so as to scan an area irradiated by the pulsed optical radiation over the surface in order to irradiate successive, partially overlapping frames on the surface by respective successive pulses of the pulsed radiation. A collection module collects the optical radiation scattered from the surface so as to capture a sequence of images of the irradiated frames. A system controller varies a configuration of the imaging system in alternation between at least first and second different optical configurations in synchronization with the pulsed optical radiation.
摘要翻译：用于检查样品的成像系统包括照射模块，其照射具有脉冲光辐射的样品表面。机械扫描器将成像系统的样本和部分中的至少一个平移以扫描由表面上的脉冲光辐射照射的区域，以便通过相应的连续的脉冲脉冲来照射表面上的连续的部分重叠的帧辐射。收集模块收集从表面散射的光辐射，以捕获被照射的帧的图像序列。系统控制器与脉冲光辐射同步地在至少第一和第二不同光学配置之间交替地改变成像系统的配置。

3. 发明授权

US07504647B2 Method and apparatus for inspecting a sample having a controller for determining an estimated height of the detector from the sample 有权
标题翻译：用于检查具有用于从样品确定检测器的估计高度的控制器的样品的方法和装置
公开(公告)号：US07504647B2
公开(公告)日：2009-03-17
申请号：US11466314
申请日：2006-08-22
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/86
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

4. 发明申请

US20070034773A1 Inspection System with Auto-Focus 有权
标题翻译：自动对焦检测系统
公开(公告)号：US20070034773A1
公开(公告)日：2007-02-15
申请号：US11466314
申请日：2006-08-22
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G02B27/40
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

5. 发明授权

US07115890B2 Method and apparatus for inspecting a sample having a height measurement ahead of a focal area 有权
标题翻译：用于检查在焦点区域之前具有高度测量的样品的方法和装置
公开(公告)号：US07115890B2
公开(公告)日：2006-10-03
申请号：US10877311
申请日：2004-06-25
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/86
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

6. 发明申请

US20050167568A1 Inspection system with auto-focus 有权
标题翻译：自动对焦检测系统
公开(公告)号：US20050167568A1
公开(公告)日：2005-08-04
申请号：US10877311
申请日：2004-06-25
申请人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
发明人： Gal Amar , Avishay Guetta , Doron Shoham , Gilad Schwartz , Ronen Eynat
IPC分类号： G01N21/95 , G02B27/40
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.
摘要翻译：用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，其可操作地将运动传递到检测器组件和样品中的至少一个，使得检测器组件的焦点区域沿着平移路径在样本上翻译。高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于焦点区域之前的样品点沿着平移路径预定距离的高度。控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

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