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    • 3. 发明授权
    • CMOS device and method for manufacturing the same
    • CMOS器件及其制造方法
    • US6091116A
    • 2000-07-18
    • US443283
    • 1995-05-17
    • Dong-jun KimJeong-hyuk Choi
    • Dong-jun KimJeong-hyuk Choi
    • H01L21/8238H01L27/092H01L29/76
    • H01L21/823892H01L27/0922
    • A CMOS device includes first and second wells formed in first and second regions of a semiconductor substrate, respectively. First and second transistors are formed in the respective wells. A third transistor is formed in a third region of the semiconductor substrate outside of the wells. A first impurity layer is formed in the vicinity of the depletion region of at least one but not more than two of the first, second, and third regions, and a second impurity layer, deeper than the first impurity layer, is formed in the region(s) of the substrate in which the first impurity layer is not formed. A method for manufacturing such a CMOS device enables the punch-through voltage characteristics of the first, second, and third transistors to be optimally different, without requiring any additional, separate mask processing steps.
    • CMOS器件分别包括在半导体衬底的第一和第二区域中形成的第一阱和第二阱。 第一和第二晶体管形成在相应的阱中。 在阱的外部的半导体衬底的第三区域中形成第三晶体管。 在第一,第二和第三区域中的至少一个但不多于两个的耗尽区附近形成第一杂质层,并且在该区域中形成比第一杂质层更深的第二杂质层 其中不形成第一杂质层的衬底的一个或多个。 一种用于制造这种CMOS器件的方法使得第一,第二和第三晶体管的穿通电压特性能够最佳地不同,而不需要任何额外的分开的掩模处理步骤。
    • 5. 发明授权
    • Method for manufacturing CMOS devices having transistors with mutually different punch-through voltage characteristics
    • 制造具有相互不同的穿通电压特性的晶体管的CMOS器件的方法
    • US06406955B1
    • 2002-06-18
    • US09566918
    • 2000-05-09
    • Dong-jun KimJeong-hyuk Choi
    • Dong-jun KimJeong-hyuk Choi
    • H01L218238
    • H01L21/823892H01L27/0922
    • A CMOS device which includes first and second wells formed in first and second regions of a semiconductor substrate, respectively, first and second transistors formed in the respective wells, a third transistor formed in a third region of the semiconductor substrate outside of the wells, a first impurity layer formed in the vicinity of the depletion region of at least one but not more than two of the first, second, and third regions, and a second impurity layer deeper than the first impurity layer and formed in the region(s) of the substrate in which the first impurity layer is not formed. A method for manufacturing such a CMOS device enables the punch-through voltage characteristics of the first, second, and third transistors to be optimally different, without necessitating any additional, separate mask processing steps.
    • 一种CMOS器件,包括分别形成在半导体衬底的第一和第二区域中的第一和第二阱,分别形成在各个阱中的第一和第二晶体管,形成在所述阱外部的半导体衬底的第三区域中的第三晶体管, 形成在第一,第二和第三区域中的至少一个但不多于两个的耗尽区附近的第一杂质层和比第一杂质层更深的第二杂质层,并形成在第一, 不形成第一杂质层的基板。 制造这种CMOS器件的方法使得第一,第二和第三晶体管的穿透电压特性能够最佳地不同,而不需要任何额外的分开的掩模处理步骤。
    • 6. 发明授权
    • Nonvolatile integrated circuit memory devices having ground interconnect
lattices with reduced lateral dimensions
    • 具有具有减小的横向尺寸的接地互连晶格的非易失性集成电路存储器件
    • US5790457A
    • 1998-08-04
    • US989872
    • 1997-12-12
    • Dong-jun KimJeong-hyuk Choi
    • Dong-jun KimJeong-hyuk Choi
    • G11C16/04G11C16/30H01L27/115G11C11/34
    • H01L27/115G11C16/0483G11C16/30
    • Nonvolatile integrated circuit memory devices having ground interconnect lattices are provided to have reduced lateral dimensions because the ground interconnect lines therein occupy less total area. With respect to integrated circuit memory devices containing NAND strings of EEPROM memory cells, the ground select electrodes for respective first and second pluralities of NAND strings (on a first side of a metal ground line) are joined together so that the number of ground select electrodes crossing the metal ground line can be reduced. The area normally occupied by the crossing ground select electrodes can then be used to interconnect the metal ground line to a substrate ground line using an interconnect via. Thus, the area normally reserved exclusively for the ground interconnect vias can be reduced or eliminated altogether by reducing the number of ground select electrodes which actually cross the metal ground line. In addition, to facilitate the connection of the metal ground line to the substrate ground line, depletion-mode transistors are formed in those areas where the ground select electrode(s) crosses the substrate ground line(s). The use of depletion-mode transistors prevents the formation of an electrical "open" between the substrate ground line and the metal ground line when the ground select electrodes are unbiased.
    • 具有接地互连格栅的非易失性集成电路存储器件被提供以具有减小的横向尺寸,因为其中的接地互连线占据较少的总面积。 对于包含EEPROM存储单元的NAND串的集成电路存储器件,用于相应的第一和第二多个NAND串(金属接地线的第一侧)的接地选择电极被连接在一起,使得接地选择电极 穿过金属接地线可以减少。 通常由交叉接地选择电极占据的区域可以用于使用互连通孔将金属接地线与衬底接地线互连。 因此,通过减少实际穿过金属接地线的接地选择电极的数量,通常可以减少或消除通常专用于接地互连通孔的区域。 此外,为了促进金属接地线与衬底接地线的连接,在接地选择电极与衬底接地线交叉的那些区域中形成耗尽型晶体管。 耗尽型晶体管的使用防止了当接地选择电极不偏差时在衬底接地线和金属接地线之间形成电“开路”。