会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明申请
    • FIN FIELD EFFECT TRANSISTORS INCLUDING OXIDATION BARRIER LAYERS
    • 包括氧化阻挡层的FIN场效应晶体管
    • US20080029828A1
    • 2008-02-07
    • US11871453
    • 2007-10-12
    • Chang-Woo OhDong-Gun ParkDong-Won KimYong-Kyu Lee
    • Chang-Woo OhDong-Gun ParkDong-Won KimYong-Kyu Lee
    • H01L29/76H01L21/336
    • H01L29/7854B82Y10/00H01L29/66545H01L29/66553H01L29/66795H01L29/78645
    • A method of forming a fin field effect transistor on a semiconductor substrate includes forming a fin-shaped active region vertically protruding from the substrate. An oxide layer is formed on a top surface and opposing sidewalls of the fin-shaped active region. An oxidation barrier layer is formed on the opposing sidewalls of the fin-shaped active region and is planarized to a height no greater than about a height of the oxide layer to form a fin structure. The fin structure is oxidized to form a capping oxide layer on the top surface of the fin-shaped active region and to form at least one curved sidewall portion proximate the top surface of the fin-shaped active region. The oxidation barrier layer has a height sufficient to reduce oxidation on the sidewalls of the fin-shaped active region about halfway between the top surface and a base of the fin-shaped active region. Related devices are also discussed.
    • 在半导体衬底上形成鳍状场效应晶体管的方法包括形成从衬底垂直突出的鳍状有源区。 在鳍状有源区的上表面和相对侧壁上形成氧化物层。 在翅片状有源区域的相对的侧壁上形成氧化阻挡层,并将其平坦化至不大于氧化物层高度的高度以形成翅片结构。 翅片结构被氧化以在翅片形有源区的顶表面上形成封盖氧化层,并且在翅片形有源区的顶表面附近形成至少一个弯曲的侧壁部分。 氧化阻挡层的高度足以减小翅片形有源区的侧壁上的氧化,大约在鳍状有源区的顶表面和基底之间的一半处。 还讨论了相关设备。