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    • 5. 发明授权
    • Method of forming trench isolation without grooving
    • 无沟槽形成沟槽隔离的方法
    • US06787409B2
    • 2004-09-07
    • US10305464
    • 2002-11-26
    • Hua JiDong Jun KimJin-Ho KimChuck Jang
    • Hua JiDong Jun KimJin-Ho KimChuck Jang
    • H01L218238
    • H01L21/76229
    • A method and structure to form shallow trench isolation regions without trench oxide grooving is provided. In particular, a method includes a two-step oxide process in which an oxide liner lines the inside surface of a trench and the trench is filled with a bulk oxide layer, preferably using a high density plasma chemical vapor deposition (HDP-CVD) process. The oxide liner and the bulk oxide layer are formed to have similar etch rates. Thus, when etching the oxide liner and the bulk oxide layer between stack structures, a common dielectric top surface is formed that is substantially planar and without grooves.
    • 提供了一种形成没有沟槽氧化物开槽的浅沟槽隔离区的方法和结构。 特别地,一种方法包括两步氧化法,其中氧化物衬垫在沟槽的内表面上划线,并且沟槽填充有本体氧化物层,优选使用高密度等离子体化学气相沉积(HDP-CVD)工艺 。 氧化物衬垫和本体氧化物层被形成为具有相似的蚀刻速率。 因此,当在堆叠结构之间蚀刻氧化物衬垫和本体氧化物层时,形成基本平坦且没有凹槽的公共电介质顶表面。
    • 8. 发明授权
    • Liquid crystal display having circular shaped protrusions on the common electrode
    • 在公共电极上具有圆形突起的液晶显示器
    • US08441604B2
    • 2013-05-14
    • US13251790
    • 2011-10-03
    • Youn-Seung ChoiJin-Ho Kim
    • Youn-Seung ChoiJin-Ho Kim
    • G02F1/1343G02F1/1337
    • G02F1/1393G02F1/133707G02F1/134309G02F2001/134318
    • A VA mode LCD device is disclosed, to improve the viewing-angle properties by isotropically compensating for a viewing angle, in which the VA mode LCD device includes first and second substrates; a plurality of gate and data lines formed on the first substrate, and formed perpendicularly to define a plurality of pixel regions. A thin film transistor is formed in each pixel region of the first substrate. A pixel electrode and a common electrode are formed in each pixel of the respective first and second substrates, wherein the pixel and common electrodes generate an electric field. At least one first slit of a curved-stripe shape, such as a circular-stripe shape, is formed in the pixel electrode of the first substrate. At least one second slit is formed in the common electrode of the second substrate. A liquid crystal layer formed between the first and second substrates.
    • 公开了VA模式LCD装置,以通过各向同性地补偿视角来改善视角特性,其中VA模式LCD装置包括第一和第二基板; 多个栅极和数据线,形成在第一基板上,并垂直形成以限定多个像素区域。 在第一衬底的每个像素区域中形成薄膜晶体管。 像素电极和公共电极形成在相应的第一和第二基板的每个像素中,其中像素和公共电极产生电场。 在第一基板的像素电极中形成至少一个弯曲条形状的第一狭缝,例如圆形条纹形状。 在第二基板的公共电极中形成至少一个第二狭缝。 形成在第一和第二基板之间的液晶层。