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1. 发明授权

US09123359B1 Magnetic recording transducer with sputtered antiferromagnetic coupling trilayer between plated ferromagnetic shields and method of fabrication 有权
标题翻译：磁记录传感器，具有溅射反铁磁耦合三层电镀铁磁屏蔽和制造方法
公开(公告)号：US09123359B1
公开(公告)日：2015-09-01
申请号：US12976916
申请日：2010-12-22
申请人： Dehua Han , Ming Sun , Feng Liu , Jinqiu Zhang , Shaoping Li , Lieping Zhong , Xiaoqi Liu , Tao Pan
发明人： Dehua Han , Ming Sun , Feng Liu , Jinqiu Zhang , Shaoping Li , Lieping Zhong , Xiaoqi Liu , Tao Pan
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/315 , G11B5/3163
摘要： A magnetic recording transducer for use in a data storage device is described. The transducer has a main writer pole and magnetic shields adjacent to the main writer pole. The magnetic shields include a first plated soft ferromagnetic layer, a second plated soft ferromagnetic layer, and an antiferromagnetic coupling (AFC) trilayer between the first plated soft ferromagnetic layer and the second plated soft ferromagnetic layer. The AFC trilayer includes a first AFC layer of sputtered ferromagnetic material; a second AFC layer of a nonmagnetic antiferromagnetic exchange material, and a third AFC layer of sputtered ferromagnetic material. Shields with AFC trilayers in leading, side, and/or trailing shields, as well as between shields are provided. A method of fabricating is also provided.
摘要翻译：描述了用于数据存储装置的磁记录传感器。传感器有一个主要的写入极和磁屏蔽，靠近主要的写入极。磁屏蔽包括第一镀层软铁磁层，第二电镀软铁磁层和第一镀层软铁磁层与第二电镀软铁磁层之间的反铁磁耦合（AFC）三层。 AFC三层包括溅射铁磁材料的第一AFC层; 非磁性反铁磁交换材料的第二AFC层和溅射的铁磁材料的第三AFC层。提供了前导，侧面和/或尾部屏蔽以及屏蔽之间的AFC三层屏蔽罩。还提供了一种制造方法。

2. 发明授权

US08533937B1 Method of forming a fully wrapped-around shielded PMR writer pole 失效
标题翻译：形成完全缠绕屏蔽PMR写入极的方法
公开(公告)号：US08533937B1
公开(公告)日：2013-09-17
申请号：US13275926
申请日：2011-10-18
申请人： Jinwen Wang , Weimin Si , Jianxin Fang , Ying Hong , Hongzhou Jiang , Ching-Huang Lu , Yan Chen , Donghong Li , Lien-Chang Wang , Lieping Zhong , Tao Pan
发明人： Jinwen Wang , Weimin Si , Jianxin Fang , Ying Hong , Hongzhou Jiang , Ching-Huang Lu , Yan Chen , Donghong Li , Lien-Chang Wang , Lieping Zhong , Tao Pan
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/112 , G11B5/1276 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3153 , G11B5/3163 , H04R31/00 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method or forming a wrapped-around shielded perpendicular magnetic recording writer pole is disclosed. A structure comprising a leading shield layer and an intermediate layer disposed over the leading shield layer is provided, the intermediate layer comprising a pole material and a dielectric material. A trench is formed in the dielectric material. A non-magnetic layer in the trench is removed via an ion beam etching process. A seed layer is deposited in the trench and over the pole material. A magnetic material comprising a side shield layer is deposited on at least a portion of the seed layer.
摘要翻译：公开了一种方法或形成缠绕的屏蔽垂直磁记录写入极。提供了包括引导屏蔽层和设置在引导屏蔽层之上的中间层的结构，所述中间层包括极材料和电介质材料。在电介质材料中形成沟槽。通过离子束蚀刻工艺去除沟槽中的非磁性层。种子层沉积在沟槽中并在极材料上方。包含侧屏蔽层的磁性材料沉积在籽晶层的至少一部分上。

3. 发明授权

US09349392B1 Methods for improving adhesion on dielectric substrates 有权
标题翻译：改善电介质基片上粘附性的方法
公开(公告)号：US09349392B1
公开(公告)日：2016-05-24
申请号：US13480278
申请日：2012-05-24
申请人： Wanxue Zeng , Weimin Si , Ying Hong , Lieping Zhong
发明人： Wanxue Zeng , Weimin Si , Ying Hong , Lieping Zhong
IPC分类号： G11B5/187 , G11B5/31
CPC分类号： G11B5/1272 , G11B5/1278 , G11B5/187 , G11B5/3116 , G11B5/3163
摘要： Various embodiments described herein provide for substrate structures including uniform plating seed layers, and that provide favorable adhesion on dielectric substrate layers. According to some embodiments, a methods for forming a magnetic recording pole is provided comprising: forming an insulator layer; forming a trench in the insulator layer; forming an amorphous seed layer over the insulator layer; forming an adhesion layer over the amorphous seed layer, the adhesion layer comprising a physical vapor deposited (PVD) noble metal; forming a plating seed layer over the adhesion layer, the plating seed layer comprising chemical vapor deposited (CVD) Ru; and forming a magnetic material layer over the plating seed layer.
摘要翻译：本文描述的各种实施例提供了包括均匀电镀种子层的衬底结构，并且在电介质衬底层上提供有利的粘附。根据一些实施例，提供了一种用于形成磁记录极的方法，包括：形成绝缘体层; 在绝缘体层中形成沟槽; 在所述绝缘体层上形成无定形晶种层; 在所述无定形种子层上形成粘合层，所述粘合层包括物理气相沉积（PVD）贵金属; 在粘附层上形成电镀种子层，包括化学气相沉积（CVD）Ru的电镀种子层; 以及在所述电镀种子层上形成磁性材料层。

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