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    • 5. 发明授权
    • Hybrid interconnect and system for testing semiconductor dice
    • 混合互连和半导体骰子测试系统
    • US6025731A
    • 2000-02-15
    • US821468
    • 1997-03-21
    • David R. HembreeSalman AkramWarren M. FarnworthAlan G. WoodJames M. WarkDerek Gochnour
    • David R. HembreeSalman AkramWarren M. FarnworthAlan G. WoodJames M. WarkDerek Gochnour
    • G01R1/04G01R1/073G01R1/73
    • G01R1/0466G01R1/0735
    • An interconnect is provided for making electrical connections with a semiconductor die. The interconnect includes a substrate having integrally formed contact members, configured to electrically contact corresponding contact locations on the die. The interconnect also includes a pattern of conductors formed separately from the substrate, and then bonded to the substrate, in electrical communication with the contact members. The conductors can be mounted to a multi layered tape similar to TAB tape, or alternately bonded directly to the substrate. In addition, each conductor can include an opening aligned with a corresponding contact member, and filled with a conductive material, such as a conductive adhesive or solder. The conductive material electrically connects the contact members and conductors, and provides an expansion joint to allow expansion of the conductors without stressing the contact members. Also provided are a system for testing dice that includes the interconnect, and a system for testing wafers wherein the interconnect is formed as a probe card.
    • 提供用于与半导体管芯进行电连接的互连。 互连包括具有整体形成的接触构件的基板,其构造成电接触管芯上相应的接触位置。 互连还包括与衬底分开形成的导体图案,然后与接触构件电气连接到衬底。 导体可以安装到类似于TAB带的多层胶带上,或者可以直接粘合到基底上。 此外,每个导体可以包括与对应的接触构件对准的开口,并且填充有诸如导电粘合剂或焊料的导电材料。 导电材料电连接接触构件和导体,并且提供膨胀接头以允许导体的膨胀而不会压紧接触构件。 还提供了一种用于测试包括互连的骰子的系统,以及用于测试晶片的系统,其中互连形成为探针卡。
    • 8. 发明授权
    • Method for testing semiconductor components
    • 半导体元件测试方法
    • US06208157B1
    • 2001-03-27
    • US09298769
    • 1999-04-23
    • Salman AkramDavid R. HembreeWarren M. FarnworthDerek GochnourAlan G. WoodJohn O. Jacobson
    • Salman AkramDavid R. HembreeWarren M. FarnworthDerek GochnourAlan G. WoodJohn O. Jacobson
    • G01R3102
    • G01R1/0466G01R1/0433G01R1/0483
    • A system and method for testing semiconductor components are provided. The system includes: a test board, sockets mounted to the test board in electrical communication with test circuitry, and carriers mounted to the sockets for housing the components. The carriers include bases, and interconnects mounted thereon, having contact members configured to make temporary electrical connections with contacts on the components. In addition, the contact members on the interconnects can be shaped to perform an alignment function, and to prevent excessive deformation of the contacts on the components. The sockets include camming members and electrical connectors configured to electrically contact the carriers with a zero insertion force. During a test procedure, the bases and interconnects can remain mounted to the sockets on the test board, as the components are aligned and placed in electrical contact with the interconnects. However, different bases and interconnects can be mounted to the sockets for testing different types of components.
    • 提供了一种用于测试半导体部件的系统和方法。 该系统包括:测试板,安装在与测试电路电气通信的测试板上的插座,以及安装在插座上用于容纳组件的载体。 载体包括底座和安装在其上的互连件,其具有被配置为与部件上的触点进行临时电连接的接触构件。 此外,互连上的接触构件可以成形为执行对准功能,并且防止部件上的触点的过度变形。 插座包括凸轮构件和被配置为以零插入力电接触托架的电连接器。 在测试过程中,基板和互连件可以保持安装到测试板上的插座上,因为组件对齐并放置成与互连件电接触。 然而,可以将不同的基座和互连件安装到插座以测试不同类型的部件。