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    • 8. 发明授权
    • Long-wavelength infra-red vertical cavity surface-emitting laser on a
gallium arsenide substrate
    • 长波长红外垂直腔表面发射激光器在砷化镓衬底上
    • US5805624A
    • 1998-09-08
    • US688338
    • 1996-07-30
    • Long YangDanny E. Mars
    • Long YangDanny E. Mars
    • H01S5/00H01S5/183H01S5/323H01S5/343H01S3/19H01S3/08
    • B82Y20/00H01S5/18308H01S2302/00H01S5/2063H01S5/3095H01S5/32366H01S5/34306
    • A vertical cavity surface emitting laser (VCSEL) that generates light having a desired wavelength, greater than one micron. The laser comprises a substrate, a lower mirror region, an active region and an upper mirror region. The substrate consists essentially of GaAs. The lower mirror region is adjacent the substrate and is lattice matched to the substrate. The active region is sandwiched between the upper and lower mirror regions, and includes a central quantum well region and a gallium arsenide layer sandwiched between the quantum well region and each of the lower mirror region and the upper mirror region. The central quantum well region includes a quantum well layer consisting essentially of GaN.sub.x As.sub.(1-x). The GaN.sub.x As.sub.(1-x) of the quantum well layer has a lattice constant and a band gap dependent on x. The value of x sets the bandgap of the GaN.sub.x As.sub.(1-x) of the quantum well layer to a value corresponding to light generation at the desired wavelength, greater than one micron. Each gallium arsenide layer is a layer of a material consisting essentially of GaAs or AlGaAs, and is lattice matched to the substrate. The quantum well layer may additionally include a fraction of indium to lattice match the quantum well layer to the substrate.
    • 垂直腔表面发射激光器(VCSEL),其产生具有大于1微米的期望波长的光。 激光器包括基板,下反射镜区域,有源区域和上反射镜区域。 衬底基本上由GaAs组成。 下反射镜区域与衬底相邻并且与衬底晶格匹配。 有源区域夹在上镜面区域和下镜面区域之间,并且包括夹在量子阱区域和下反射镜区域和上镜面区域中的每一个的中心量子阱区域和砷化镓层。 中心量子阱区包括基本上由GaN xAs​​(1-x)组成的量子阱层。 量子阱层的GaN xAs​​(1-x)具有晶格常数和取决于x的带隙。 x的值将量子阱层的GaN xAs​​(1-x)的带隙设置为对应于大于1微米的期望波长的光产生的值。 每个砷化镓层是基本上由GaAs或AlGaAs组成的材料层,并且与衬底晶格匹配。 量子阱层可以另外包括铟的一部分以将量子阱层与衬底进行晶格匹配。