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1. 发明授权

US06977128B2 Multi-layered semiconductor structure 失效
标题翻译：多层半导体结构
公开(公告)号：US06977128B2
公开(公告)日：2005-12-20
申请号：US10704449
申请日：2003-11-07
申请人： David M. Boulin , Reginald C. Farrow , Isik C. Kizilyalli , Nace Layadi , Masis Mkrtchyan
发明人： David M. Boulin , Reginald C. Farrow , Isik C. Kizilyalli , Nace Layadi , Masis Mkrtchyan
IPC分类号： G03F7/20 , G03F9/00 , H01J37/304 , H01J37/305 , H01L21/027 , H01L23/544 , G03C5/00
CPC分类号： H01J37/3045 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , Y10S430/143 , Y10S438/975 , H01L2924/00
摘要： A multi-layered semiconductor structure having an alignment feature for aligning a lithography mask and that may be used in connection with a SCALPEL tool. The present invention is particularly well-suited for sub-micron CMOS technology devices and circuits, but is not limited thereto. The present invention advantageously permits use of an electron beam source for both alignment and exposure of a lithography mask on a semiconductor wafer. The present invention also advantageously enables the formation of an alignment feature early (i.e., zero-level) in the semiconductor device fabrication process.
摘要翻译：一种多层半导体结构，其具有用于对准光刻掩模并且可以与SCALPEL工具结合使用的对准特征。本发明特别适用于亚微米CMOS工艺器件和电路，但不限于此。本发明有利地允许使用电子束源用于半导体晶片上的光刻掩模的对准和曝光。本发明还有利地使得能够在半导体器件制造工艺中早期（即零电平）形成对准特征。

2. 发明授权

US06706609B2 Method of forming an alignment feature in or on a multi-layered semiconductor structure 有权
标题翻译：在多层半导体结构中或其上形成取向特征的方法
公开(公告)号：US06706609B2
公开(公告)日：2004-03-16
申请号：US09867202
申请日：2001-05-29
申请人： David M. Boulin , Reginald C. Farrow , Isik C. Kizilyalli , Nace Layadi , Masis Mkrtchyan
发明人： David M. Boulin , Reginald C. Farrow , Isik C. Kizilyalli , Nace Layadi , Masis Mkrtchyan
IPC分类号： H01L21308
CPC分类号： H01J37/3045 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , Y10S430/143 , Y10S438/975 , H01L2924/00
摘要： A method of forming a multi-layered semiconductor structure having an alignment feature for aligning a lithography mask and that may be used in connection with a SCALPEL tool. The present invention is particularly well-suited for sub-micron CMOS technology devices and circuits, but is not limited thereto. The present invention advantageously permits use of an electron beam source for both alignment and exposure of a lithography mask on a semiconductor wafer. The present invention also advantageously enables the formation of an alignment feature early (i.e., zero-level) in the semiconductor device fabrication process.
摘要翻译：一种形成具有用于对准光刻掩模并且可以与SCALPEL工具结合使用的对准特征的多层半导体结构的方法。本发明特别适用于亚微米CMOS工艺器件和电路，但不限于此。本发明有利地允许使用电子束源用于半导体晶片上的光刻掩模的对准和曝光。本发明还有利地使得能够在半导体器件制造工艺中早期（即零电平）形成对准特征。

3. 发明授权

US06576529B1 Method of forming an alignment feature in or on a multilayered semiconductor structure 有权
标题翻译：在多层半导体结构中或其上形成取向特征的方法
公开(公告)号：US06576529B1
公开(公告)日：2003-06-10
申请号：US09456224
申请日：1999-12-07
申请人： David M. Boulin , Reginald C. Farrow , Isik C. Kizilyalli , Nace Layadi , Masis Mkrtchyan
发明人： David M. Boulin , Reginald C. Farrow , Isik C. Kizilyalli , Nace Layadi , Masis Mkrtchyan
IPC分类号： H01L23544
CPC分类号： H01J37/3045 , H01L23/544 , H01L2223/54426 , H01L2223/54453 , H01L2924/0002 , Y10S430/143 , Y10S438/975 , H01L2924/00
摘要： A method of forming a multi-layered semiconductor structure having an alignment feature for aligning a lithography mask and that may be used in connection with a SCALPEL tool. The present invention is particularly well-suited for sub-micron CMOS technology devices and circuits, but is not limited thereto. The present invention advantageously permits use of an electron beam source for both alignment and exposure of a lithography mask on a semiconductor wafer. The present invention also advantageously enables the formation of an alignment feature early (i.e., zero-level) in the semiconductor device fabrication process.
摘要翻译：一种形成具有用于对准光刻掩模并且可以与SCALPEL工具结合使用的对准特征的多层半导体结构的方法。本发明特别适用于亚微米CMOS工艺器件和电路，但不限于此。本发明有利地允许使用电子束源用于半导体晶片上的光刻掩模的对准和曝光。本发明还有利地使得能够在半导体器件制造工艺中早期（即零电平）形成对准特征。

4. 发明申请

US20100279179A1 System and Method for Directed Self-Assembly Technique for the Creation of Carbon Nanotube Sensors and Bio-Fuel Cells on Single Plane 有权
标题翻译：用于在单平面上形成碳纳米管传感器和生物燃料电池的定向自组装技术的系统和方法
公开(公告)号：US20100279179A1
公开(公告)日：2010-11-04
申请号：US12722622
申请日：2010-03-12
申请人： Reginald C. Farrow , Zafar Iqbal , Alokik Kanwal
发明人： Reginald C. Farrow , Zafar Iqbal , Alokik Kanwal
IPC分类号： H01M8/16
CPC分类号： B82Y10/00 , B82Y30/00 , H01L51/0048 , H01M8/16 , Y02E60/527
摘要： Improved nanotube devices and systems/methods for fabrication thereof are provided. The present disclosure provides systems/methods for depositing controlled numbers of nanotubes with specific properties at predefined locations for the fabrication of nanotube devices. The nanotube devices may be utilized in a range of applications. A bio-fuel cell system that does not require a proton exchange membrane separator and does not need a mediator to transfer charge is provided. This exemplary bio-fuel cell uses enzyme functionalized SWNTs for the anode/cathode. The absence of a membrane in the bio-fuel cell configuration opens up the possibility of other configurations that would otherwise be unfeasible. This includes a bio-fuel cell where the anode/cathode are on the same substrate. Since the electrodes can share the same substrate, the configuration may be integrated with a circuit device on the same substrate. An IC and its power source may be fabricated on the same silicon wafer.
摘要翻译：提供了改进的纳米管装置及其制造方法。本公开提供了用于在用于制造纳米管装置的预定位置处沉积具有特定性质的受控数量的纳米管的系统/方法。纳米管器件可以在一系列应用中使用。提供了不需要质子交换膜分离器并且不需要介质以转移电荷的生物燃料电池系统。该示例性生物燃料电池使用酶官能化的SWNT用于阳极/阴极。在生物燃料电池配置中不存在膜会打开否则将不可行的其它配置的可能性。这包括生物燃料电池，其中阳极/阴极位于相同的衬底上。由于电极可以共享相同的衬底，所以该配置可以与同一衬底上的电路器件集成。可以在同一硅晶片上制造IC及其电源。

5. 发明申请

US20090045061A1 Nanotube Devices and Vertical Field Effect Transistors 审中-公开
标题翻译：纳米管器件和垂直场效应晶体管
公开(公告)号：US20090045061A1
公开(公告)日：2009-02-19
申请号：US12143132
申请日：2008-06-20
申请人： Reginald C. Farrow , Zafar Iqbal , Amit Goyal , Sheng Liu
发明人： Reginald C. Farrow , Zafar Iqbal , Amit Goyal , Sheng Liu
IPC分类号： C25D13/02
CPC分类号： C25D13/02 , B82Y10/00 , B82Y30/00 , B82Y40/00 , C01B32/174 , C01B2202/02 , H01L29/0665 , H01L29/0673 , H01L29/0676 , H01L29/78642 , H01L51/0002 , H01L51/0048
摘要： A method of depositing nanotubes in a region defined by an aperture is disclosed. The method provides advantageous control over the number of nanotubes to be deposited, as well as the pattern and spacing of nanotubes. Electrophoretic deposition, along with proper configuration of the aperture, allows at least one nanotube to be deposited in a target region with nanometer scale precision. Pre-sorting of nanotubes, e.g., according to their geometries or other properties, may be used in conjunction with embodiments of the invention to facilitate fabrication of devices with specific performance requirements. The method is useful for many applications where it is desirable to deposit more than one nanotube in a defined region. For example, vertical field effect transistor (VFET) designs may benefit from having more than one nanotube forming a channel to allow more current to flow through the device. By controlling the number of nanotubes to be deposited, one can ensure that the VFET output can be designed with sufficient current to meet the parameters of a logic circuit input.
摘要翻译：公开了一种在由孔限定的区域中沉积纳米管的方法。该方法对待沉积的纳米管的数量以及纳米管的图案和间距提供有利的控制。电泳沉积以及孔的适当构型允许至少一个纳米管以纳米级精度沉积在目标区域中。可以结合本发明的实施例使用例如根据它们的几何形状或其他性质对纳米管进行预分选，以促进具有特定性能要求的装置的制造。该方法对于希望在限定区域中沉积多于一个的纳米管的许多应用是有用的。例如，垂直场效应晶体管（VFET）设计可能受益于具有多于一个的纳米管形成通道以允许更多的电流流过器件。通过控制要沉积的纳米管的数量，可以确保VFET输出可以设计成具有足够的电流以满足逻辑电路输入的参数。

6. 发明授权

US08257566B2 Nanotube device and method of fabrication 有权
标题翻译：纳米管装置及其制造方法
公开(公告)号：US08257566B2
公开(公告)日：2012-09-04
申请号：US13162163
申请日：2011-06-16
申请人： Reginald C. Farrow , Zafar Iqbal , Amit Goyal , Sheng Liu
发明人： Reginald C. Farrow , Zafar Iqbal , Amit Goyal , Sheng Liu
IPC分类号： C25B7/00
CPC分类号： C25D13/04 , B82Y15/00 , B82Y30/00 , C25D13/20 , G01N27/4146 , Y10S977/72 , Y10S977/957 , Y10S977/958
摘要： A nanotube device and a method of depositing nanotubes for device fabrication are disclosed. The method relates to electrophoretic deposition of nanotubes, and allows a control of the number of deposited nanotubes and positioning within a defined region.
摘要翻译：公开了一种用于器件制造的纳米管器件和沉积纳米管的方法。该方法涉及纳米管的电泳沉积，并且允许控制沉积的纳米管的数量和在限定区域内的定位。

7. 发明授权

US07581203B2 Method and apparatus for manufacturing multiple circuit patterns using a multiple project mask 失效
标题翻译：使用多个工程掩模制造多个电路图案的方法和装置
公开(公告)号：US07581203B2
公开(公告)日：2009-08-25
申请号：US10610002
申请日：2003-06-30
申请人： Reginald C. Farrow , Warren K. Waskiewicz
发明人： Reginald C. Farrow , Warren K. Waskiewicz
IPC分类号： G06F17/50 , G06K9/00
CPC分类号： G03F1/50 , G03F1/00
摘要： A method and apparatus are disclosed for fabricating a substrate having a plurality of circuit patterns. The substrate is exposed to a primary mask having a plurality of the desired circuit patterns, surrounded by one or more exclusion regions, and a secondary mask having a pattern corresponding to the exclusion regions that satisfies at least one design rule for a subsequent process. The primary and secondary masks are exposed on the substrate in any order before the resist patterns are developed. The pattern on the secondary mask may comprise, for example, an array of fill patterns. The pattern on the secondary mask may satisfy design rules for more than one process level so that a single secondary mask can be utilized for multiple process levels. In addition, the substrate only needs to be exposed to the secondary mask for process levels where the exclusion regions violate a design rule.
摘要翻译：公开了用于制造具有多个电路图案的基板的方法和装置。将衬底暴露于具有多个所需电路图案的主掩模，被一个或多个排除区域包围，以及具有对应于排除区域的图案的二次掩模，其满足后续处理的至少一个设计规则。在抗蚀剂图案显影之前，主掩模和次掩模以任何顺序暴露在基板上。辅助掩模上的图案可以包括例如填充图案的阵列。辅助掩模上的图案可以满足多于一个处理级别的设计规则，从而可以对多个处理级别使用单个次要掩模。另外，衬底仅需要暴露于二次掩模，以使排除区域违反设计规则的过程级别。

8. 发明授权

US08546027B2 System and method for directed self-assembly technique for the creation of carbon nanotube sensors and bio-fuel cells on single plane 有权
标题翻译：用于在单平面上创建碳纳米管传感器和生物燃料电池的定向自组装技术的系统和方法
公开(公告)号：US08546027B2
公开(公告)日：2013-10-01
申请号：US12722622
申请日：2010-03-12
申请人： Reginald C. Farrow , Zafar Iqbal , Alokik Kanwal
发明人： Reginald C. Farrow , Zafar Iqbal , Alokik Kanwal
IPC分类号： H01M8/16
CPC分类号： B82Y10/00 , B82Y30/00 , H01L51/0048 , H01M8/16 , Y02E60/527
摘要： Improved nanotube devices and systems/methods for fabrication thereof are provided. The present disclosure provides systems/methods for depositing controlled numbers of nanotubes with specific properties at predefined locations for the fabrication of nanotube devices. The nanotube devices may be utilized in a range of applications. A bio-fuel cell system that does not require a proton exchange membrane separator and does not need a mediator to transfer charge is provided. This exemplary bio-fuel cell uses enzyme functionalized SWNTs for the anode/cathode. The absence of a membrane in the bio-fuel cell configuration opens up the possibility of other configurations that would otherwise be unfeasible. This includes a bio-fuel cell where the anode/cathode are on the same substrate. Since the electrodes can share the same substrate, the configuration may be integrated with a circuit device on the same substrate. An IC and its power source may be fabricated on the same silicon wafer.
摘要翻译：提供了改进的纳米管装置及其制造方法。本公开提供了用于在用于制造纳米管装置的预定位置处沉积具有特定性质的受控数量的纳米管的系统/方法。纳米管器件可以在一系列应用中使用。提供了不需要质子交换膜分离器并且不需要介质以转移电荷的生物燃料电池系统。该示例性生物燃料电池使用酶官能化的SWNT用于阳极/阴极。在生物燃料电池配置中不存在膜会打开否则将不可行的其它配置的可能性。这包括生物燃料电池，其中阳极/阴极位于相同的衬底上。由于电极可以共享相同的衬底，所以该配置可以与同一衬底上的电路器件集成。可以在同一硅晶片上制造IC及其电源。

9. 发明申请

US20150276649A1 NANOPROBE AND METHODS OF USE 有权
标题翻译： NANOPROBE和使用方法
公开(公告)号：US20150276649A1
公开(公告)日：2015-10-01
申请号：US14206191
申请日：2014-03-12
申请人： Reginald C. Farrow , Camelia Prodan , Alokik Kanwal , Gordon Thomas
发明人： Reginald C. Farrow , Camelia Prodan , Alokik Kanwal , Gordon Thomas
IPC分类号： G01N27/30 , C25D13/02 , G01N33/487
CPC分类号： G01N27/308 , C25D13/02 , G01N27/02 , G01N33/483 , G01N33/48728
摘要： A device for determining the presence of a single cell and/or determining a state of a single cell includes a first nanotube disposed on a first electrode, and a second nanotube disposed on a second electrode, wherein the first and second nanotubes are spaced apart at a length that is smaller than a cell size to be detected. A method for determining the presence of a single biological cell includes sensing impedance between a first nanotube and a second nanotube. A method of manufacturing includes providing a nanotube, providing an electrode coated with an insulating material, wherein an aperture is defined in the insulating material through to the electrode, and using electrophoresis deposition to deposit a nanotube within the aperture and in electrical communication with the electrode.
摘要翻译：用于确定单个单元的存在和/或确定单个单元的状态的装置包括布置在第一电极上的第一纳米管和布置在第二电极上的第二纳米管，其中第一和第二纳米管间隔开小于要检测的单元格大小的长度。用于确定单个生物细胞的存在的方法包括感测第一纳米管和第二纳米管之间的阻抗。一种制造方法包括提供纳米管，提供涂覆有绝缘材料的电极，其中在绝缘材料中通过电极限定孔，并且使用电泳沉积将纳米管沉积在孔内并与电极电连通。

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