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    • 1. 发明授权
    • Method of detecting and reviewing pattern defects
    • 检测和检查图案缺陷的方法
    • US4985927A
    • 1991-01-15
    • US173706
    • 1988-03-25
    • David A. NorwoodWillims G. MannsAnthony B. Wood
    • David A. NorwoodWillims G. MannsAnthony B. Wood
    • G06T7/00
    • G06T7/001G03F7/7065G06T2207/20021G06T2207/30141G06T2207/30148
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representastion of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,随后在缺陷区域合并期间,也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以去放大,以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 2. 发明授权
    • Data handling system for pattern inspector or writer
    • 模式检查员或作者的数据处理系统
    • US4979223A
    • 1990-12-18
    • US173523
    • 1988-03-25
    • William G. MannsAnthony B. WoodDavid A. Norwood
    • William G. MannsAnthony B. WoodDavid A. Norwood
    • G06T7/00G06T11/00
    • G06T7/001G03F1/84G03F7/70383G03F7/7065G06T11/00G06T7/0002G06T2207/20021G06T2207/30141G06T2207/30148
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect are a consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,也进行误差滤波,随后在缺陷期间进行合并。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以去放大,以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 3. 发明授权
    • Defect area consolidation for pattern inspector
    • 模式检查员缺陷区域整合
    • US5018212A
    • 1991-05-21
    • US173395
    • 1988-03-25
    • William G. MannsAnthony B. WoodDavid A. NorwoodDon J. WeeksMichael Gordon
    • William G. MannsAnthony B. WoodDavid A. NorwoodDon J. WeeksMichael Gordon
    • G01N21/956G06T7/00
    • G06T7/001G01N21/95607G03F7/70491G03F7/7065G06T2207/20021G06T2207/30141G06T2207/30148
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,随后在缺陷区域合并期间,也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以去放大,以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 4. 发明授权
    • Guardbands for pattern inspector
    • 模式检查员的警卫
    • US5001764A
    • 1991-03-19
    • US173776
    • 1988-03-25
    • Anthony B. WoodWilliam G. MannsDavid A. NorwoodDon J. WeeksChyi N. Sheng
    • Anthony B. WoodWilliam G. MannsDavid A. NorwoodDon J. WeeksChyi N. Sheng
    • G03F1/84G03F7/20
    • G03F1/84G03F7/704G03F7/70616G03F7/70633G03F7/70641G03F7/70725
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,随后在缺陷区域合并期间,也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以去放大,以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 5. 发明授权
    • Expansion of compact database for pattern inspector or writer
    • 扩展模式检查员或作者的紧凑型数据库
    • US4989255A
    • 1991-01-29
    • US173710
    • 1988-03-25
    • William G. MannsAnthony B. WoodDavid A. NorwoodTheodore R. Bambenek
    • William G. MannsAnthony B. WoodDavid A. NorwoodTheodore R. Bambenek
    • G06T7/00
    • G06T7/001G03F1/84G03F7/70383G03F7/7065G06T2207/20021G06T2207/30141G06T2207/30148
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,随后在缺陷区域合并期间,也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以去放大,以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 6. 发明授权
    • Parallel processing of reference and guardband data
    • 参考和保护带数据的并行处理
    • US4984282A
    • 1991-01-08
    • US173708
    • 1988-03-25
    • William G. MannsDavid A. NorwoodDon J. WeeksChyi N. ShengAnthony B. Wood
    • William G. MannsDavid A. NorwoodDon J. WeeksChyi N. ShengAnthony B. Wood
    • G06T7/00
    • G06T7/001G03F1/76G03F7/70491G03F7/7065G06T7/0002G03F1/84G06T2207/20021G06T2207/30141G06T2207/30148
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to alow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,随后在缺陷区域合并期间,也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以缩小到较大的目标区域以供查看。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 7. 发明授权
    • Target autoalignment for pattern inspector or writer
    • 模式检查员或作者的目标自动对齐
    • US4969200A
    • 1990-11-06
    • US173504
    • 1988-03-25
    • William G. MannsAnthony B. WoodMichael GordonDon J. WeeksTom G. HudiburghDavid A. Norwood
    • William G. MannsAnthony B. WoodMichael GordonDon J. WeeksTom G. HudiburghDavid A. Norwood
    • G03F7/20G06T7/00H01L21/68
    • G06K9/3216G03F7/704G03F7/70633G03F7/70641G03F7/70725G06T7/001G06T7/0028H01L21/681G06T2207/30148
    • A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The data base is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
    • 激光图案检查和/或写入系统,其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。 检查也可以通过非激光的分层照明进行。 组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。 每个多边形的数据描述都包含在单个数据帧中。 将数据库转换为转折点多边形表示,然后转换为左和右向量表示,然后转换为寻址像素表示,然后是整个目标的位映射表示。 大多数转换是在并行管道中进行的。 多边形周围的保护带用于检查过程中的错误过滤。 保卫带是多边形,仅包含保护带信息的帧被发送到专用管道。 在理想与实际图案的像素比较时,随后在缺陷区域合并期间,也进行误差滤波。 缺陷区域被视为理想和实际目标区域的颜色叠加,从实时生成的数据。 缺陷区域可以去放大,以允许查看较大的目标区域。 自动对焦将扫描激光束保持在目标上。 检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。 干涉仪或玻璃刻度尺可以让舞台位置知道。
    • 8. 发明授权
    • Methods of wound care and treatment
    • 伤口护理和治疗方法
    • US08617616B2
    • 2013-12-31
    • US12431704
    • 2009-04-28
    • Gregory J. ArchambeauRichard L. WatsonAnthony B. Wood
    • Gregory J. ArchambeauRichard L. WatsonAnthony B. Wood
    • A01N39/00
    • A61K9/0048A61K9/0014A61K33/00A61K45/06A61L15/44A61L26/0066A61L2300/404A61L2300/412A61L2300/426B01F3/04531B01F3/0807B01F3/0853B01F7/00816B29D11/00038A61K2300/00
    • Provided are electrokinetically-altered fluids (e.g., gas-enriched electrokinetic fluids) comprising an ionic aqueous solution of charge-stabilized oxygen-containing nanostructures in an amount sufficient to provide modulation of at least one of cellular membrane potential and cellular membrane conductivity, and therapeutic compositions and methods for use in treating a wound to a surface tissue or a symptom thereof. The electrokinetically-altered fluids or therapeutic compositions and methods include electrokinetically-altered ionic aqueous fluids optionally in combination with other therapeutic agents. Particular aspects provide for regulating or modulating intracellular signal transduction associated with said inflammatory responses by modulation of at least one of cellular membranes, membrane potential, membrane proteins such as membrane receptors, including but not limited to G-Protein Coupled Receptors (GPCR), and intercellular junctions (e.g., tight junctions, gap junctions, zona adherins and desmasomes). Other embodiments include particular routes of administration or formulations for the electrokinetically-altered fluids (e.g., electrokinetically-altered gas-enriched fluids and solutions) and therapeutic compositions.
    • 提供了电动改变的流体(例如,富含气体的电动液),其包含电荷稳定的含氧纳米结构的离子水溶液,其量足以提供细胞膜电位和细胞膜电导率中的至少一种的调节,以及治疗 用于治疗伤口至表面组织或其症状的组合物和方法。 电动改变的流体或治疗组合物和方法包括任选与其它治疗剂组合的电动改变的离子水性流体。 特定方面提供调节或调节与所述炎症反应相关的细胞内信号转导,通过调节细胞膜,膜电位,膜蛋白如膜受体(包括但不限于G-蛋白偶联受体(GPCR))和 细胞间连接(例如,紧密连接,间隙连接,zona adherins和desmasomes)。 其他实施方案包括用于电动改变的流体(例如,电动改变的富含气体的流体和溶液)和治疗组合物的特定给药途径或制剂。