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1. 发明授权

US4969200A Target autoalignment for pattern inspector or writer 失效
标题翻译：模式检查员或作者的目标自动对齐
公开(公告)号：US4969200A
公开(公告)日：1990-11-06
申请号：US173504
申请日：1988-03-25
申请人： William G. Manns , Anthony B. Wood , Michael Gordon , Don J. Weeks , Tom G. Hudiburgh , David A. Norwood
发明人： William G. Manns , Anthony B. Wood , Michael Gordon , Don J. Weeks , Tom G. Hudiburgh , David A. Norwood
IPC分类号： G03F7/20 , G06T7/00 , H01L21/68
CPC分类号： G06K9/3216 , G03F7/704 , G03F7/70633 , G03F7/70641 , G03F7/70725 , G06T7/001 , G06T7/0028 , H01L21/681 , G06T2207/30148
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The data base is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以去放大，以允许查看较大的目标区域。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

2. 发明授权

US5018212A Defect area consolidation for pattern inspector 失效
标题翻译：模式检查员缺陷区域整合
公开(公告)号：US5018212A
公开(公告)日：1991-05-21
申请号：US173395
申请日：1988-03-25
申请人： William G. Manns , Anthony B. Wood , David A. Norwood , Don J. Weeks , Michael Gordon
发明人： William G. Manns , Anthony B. Wood , David A. Norwood , Don J. Weeks , Michael Gordon
IPC分类号： G01N21/956 , G06T7/00
CPC分类号： G06T7/001 , G01N21/95607 , G03F7/70491 , G03F7/7065 , G06T2207/20021 , G06T2207/30141 , G06T2207/30148
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以去放大，以允许查看较大的目标区域。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

3. 发明授权

US5001764A Guardbands for pattern inspector 失效
标题翻译：模式检查员的警卫
公开(公告)号：US5001764A
公开(公告)日：1991-03-19
申请号：US173776
申请日：1988-03-25
申请人： Anthony B. Wood , William G. Manns , David A. Norwood , Don J. Weeks , Chyi N. Sheng
发明人： Anthony B. Wood , William G. Manns , David A. Norwood , Don J. Weeks , Chyi N. Sheng
IPC分类号： G03F1/84 , G03F7/20
CPC分类号： G03F1/84 , G03F7/704 , G03F7/70616 , G03F7/70633 , G03F7/70641 , G03F7/70725
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以去放大，以允许查看较大的目标区域。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

4. 发明授权

US4984282A Parallel processing of reference and guardband data 失效
标题翻译：参考和保护带数据的并行处理
公开(公告)号：US4984282A
公开(公告)日：1991-01-08
申请号：US173708
申请日：1988-03-25
申请人： William G. Manns , David A. Norwood , Don J. Weeks , Chyi N. Sheng , Anthony B. Wood
发明人： William G. Manns , David A. Norwood , Don J. Weeks , Chyi N. Sheng , Anthony B. Wood
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G03F1/76 , G03F7/70491 , G03F7/7065 , G06T7/0002 , G03F1/84 , G06T2207/20021 , G06T2207/30141 , G06T2207/30148
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to alow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以缩小到较大的目标区域以供查看。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

5. 发明授权

US4979223A Data handling system for pattern inspector or writer 失效
标题翻译：模式检查员或作者的数据处理系统
公开(公告)号：US4979223A
公开(公告)日：1990-12-18
申请号：US173523
申请日：1988-03-25
申请人： William G. Manns , Anthony B. Wood , David A. Norwood
发明人： William G. Manns , Anthony B. Wood , David A. Norwood
IPC分类号： G06T7/00 , G06T11/00
CPC分类号： G06T7/001 , G03F1/84 , G03F7/70383 , G03F7/7065 , G06T11/00 , G06T7/0002 , G06T2207/20021 , G06T2207/30141 , G06T2207/30148
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect are a consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，也进行误差滤波，随后在缺陷期间进行合并。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以去放大，以允许查看较大的目标区域。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

6. 发明授权

US4989255A Expansion of compact database for pattern inspector or writer 失效
标题翻译：扩展模式检查员或作者的紧凑型数据库
公开(公告)号：US4989255A
公开(公告)日：1991-01-29
申请号：US173710
申请日：1988-03-25
申请人： William G. Manns , Anthony B. Wood , David A. Norwood , Theodore R. Bambenek
发明人： William G. Manns , Anthony B. Wood , David A. Norwood , Theodore R. Bambenek
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G03F1/84 , G03F7/70383 , G03F7/7065 , G06T2207/20021 , G06T2207/30141 , G06T2207/30148
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representation of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以去放大，以允许查看较大的目标区域。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

7. 发明授权

US4985927A Method of detecting and reviewing pattern defects 失效
标题翻译：检测和检查图案缺陷的方法
公开(公告)号：US4985927A
公开(公告)日：1991-01-15
申请号：US173706
申请日：1988-03-25
申请人： David A. Norwood , Willims G. Manns , Anthony B. Wood
发明人： David A. Norwood , Willims G. Manns , Anthony B. Wood
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G03F7/7065 , G06T2207/20021 , G06T2207/30141 , G06T2207/30148
摘要： A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as one or more polygons. Each polygon's data description is contained within a single data frame. The database is transformed into a turnpoint polygon representation, then a left and right vector representation, then an addressed pixel representation, then a bit-mapped representastion of the entire target. Most of the transformations are carried out in parallel pipelines. Guardbands around polygon sides are used for error filtering during inspection. Guardbands are polygons, and frames containing only guardband information are sent down dedicated pipelines. Error filtering also is done at the time of pixel comparisons of ideal with real patterns, and subsequently during defect area consolidation. Defect areas are viewed as color overlays of ideal and actual target areas, from data generated during real time. Defect areas can be de-zoomed to allow larger target areas to be viewed. An autofocus keeps the scanning laser beam in focus on the target. The inspection system is used to find fiducial marks to orient the target prior to raster scanning. IC bars are provided with alignment marks for locating each IC bar. Interferometers or glass scale encoders allow the stage position to be known.
摘要翻译：激光图案检查和/或写入系统，其通过光栅扫描目标像素来写入或检查在舞台上的目标上的图案。检查也可以通过非激光的分层照明进行。组织成框架和条带的数据库表示作为一个或多个多边形的理想模式。每个多边形的数据描述都包含在单个数据帧中。将数据库转换为转折点多边形表示，然后转换为左和右向量表示，然后转换为寻址像素表示，然后是整个目标的位映射表示。大多数转换是在并行管道中进行的。多边形周围的保护带用于检查过程中的错误过滤。保卫带是多边形，仅包含保护带信息的帧被发送到专用管道。在理想与实际图案的像素比较时，随后在缺陷区域合并期间，也进行误差滤波。缺陷区域被视为理想和实际目标区域的颜色叠加，从实时生成的数据。缺陷区域可以去放大，以允许查看较大的目标区域。自动对焦将扫描激光束保持在目标上。检查系统用于在光栅扫描之前找到基准标记来定向目标。 IC条具有用于定位每个IC条的对准标记。干涉仪或玻璃刻度尺可以让舞台位置知道。

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