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    • 9. 发明授权
    • Self-aligned stack formation
    • 自对齐堆叠形成
    • US06562724B1
    • 2003-05-13
    • US09089795
    • 1998-06-03
    • Steve HsiaYin Hu
    • Steve HsiaYin Hu
    • H01L21302
    • H01L29/66583H01L21/28061H01L21/31116H01L21/32136H01L29/4933
    • A method to simplify the polycide gate structure fabrication processes by using a hardmask 240 to define a pattern of siliciding 260 a silicon layer 230, and then using the silicide 260 to mask removal of the unreacted silicon 220 and 230 in locations where the hardmask 240 had been present. The metal silicide 260 formed in the exposed silicon regions 220 and 230 functions as a self-aligned mask against the silicon 220 and 230 etching. By using a selective etching process between the silicon 220 and 230 and the silicide 260, the silicon 220 and 230 can be etched down to the gate oxide 210 to form the polycide (silicide/polysilicon) gate. The polycide gate formed by this method is particularly advantageous in DRAM applications, but can also be used as a MOS gate in a transistor.
    • 一种通过使用硬掩模240来限定硅化层260的图案来硅化硅层230来简化多晶硅栅极结构制造工艺的方法,然后使用硅化物260掩盖在硬掩模240具有的位置处的未反应硅220和230的去除 已经存在 形成在暴露的硅区域220和230中的金属硅化物260用作抵抗硅220和230蚀刻的自对准掩模。 通过在硅220和230与硅化物260之间使用选择性蚀刻工艺,可将硅220和230蚀刻到栅极氧化物210以形成多晶硅化物(硅化物/多晶硅)栅极。 通过该方法形成的多晶硅栅极在DRAM应用中特别有利,但也可以用作晶体管中的MOS栅极。