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1. 发明申请

US20090256581A1 SOLAR PARAMETRIC TESTING MODULE AND PROCESSES 失效
标题翻译：太阳能参数测试模块和过程
公开(公告)号：US20090256581A1
公开(公告)日：2009-10-15
申请号：US12409732
申请日：2009-03-24
申请人： Danny Cam Toan Lu , Michael Marriott , Vicky Svidenko , Dapeng Wang , Michel R. Frei
发明人： Danny Cam Toan Lu , Michael Marriott , Vicky Svidenko , Dapeng Wang , Michel R. Frei
IPC分类号： G01R27/08 , B65G47/00 , H01L21/683
CPC分类号： H01L21/681 , H01L21/67253 , H02S50/10
摘要： Embodiments of the present invention generally relate to a module that can test and analyze various regions of a solar cell device in an automated or manual fashion after one or more steps have been completed in the solar cell formation process. The module used to perform the automated testing and analysis processes can also be adapted to test a partially formed solar cell at various stages of the solar cell formation process within an automated solar cell production line. The automated solar cell production line is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明的实施例一般涉及一种可以在太阳能电池形成过程中完成一个或多个步骤之后以自动或手动方式测试和分析太阳能电池装置的各个区域的模块。用于执行自动化测试和分析过程的模块还可以适用于在自动太阳能电池生产线内的太阳能电池形成过程的各个阶段测试部分形成的太阳能电池。自动化太阳能电池生产线通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。

2. 发明授权

US08049521B2 Solar parametric testing module and processes 失效
标题翻译：太阳能参数测试模块和工艺
公开(公告)号：US08049521B2
公开(公告)日：2011-11-01
申请号：US12409732
申请日：2009-03-24
申请人： Danny Cam Toan Lu , Michel Marriott , Vicky Svidenko , Dapeng Wang , Michel R. Frei
发明人： Danny Cam Toan Lu , Michel Marriott , Vicky Svidenko , Dapeng Wang , Michel R. Frei
IPC分类号： G01R27/08 , H01L31/042
CPC分类号： H01L21/681 , H01L21/67253 , H02S50/10
摘要： Embodiments of the present invention generally relate to a module that can test and analyze various regions of a solar cell device in an automated or manual fashion after one or more steps have been completed in the solar cell formation process. The module used to perform the automated testing and analysis processes can also be adapted to test a partially formed solar cell at various stages of the solar cell formation process within an automated solar cell production line. The automated solar cell production line is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明的实施例一般涉及一种可以在太阳能电池形成过程中完成一个或多个步骤之后以自动或手动方式测试和分析太阳能电池装置的各个区域的模块。用于执行自动化测试和分析过程的模块还可以适用于在自动太阳能电池生产线内的太阳能电池形成过程的各个阶段测试部分形成的太阳能电池。自动化太阳能电池生产线通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。

3. 发明申请

US20100197051A1 METROLOGY AND INSPECTION SUITE FOR A SOLAR PRODUCTION LINE 审中-公开
标题翻译：太阳能生产线的计量和检验套件
公开(公告)号：US20100197051A1
公开(公告)日：2010-08-05
申请号：US12698559
申请日：2010-02-02
申请人： Asaf Schlezinger , Michel R. Frei , Dapeng Wang , Tzay-Fa Su , Vicky Svidenko , Kashif Maqsood
发明人： Asaf Schlezinger , Michel R. Frei , Dapeng Wang , Tzay-Fa Su , Vicky Svidenko , Kashif Maqsood
IPC分类号： H01L31/18 , H01L21/66 , G06F17/00
CPC分类号： H01L31/188 , H01L31/022466 , Y02E10/50
摘要： Embodiments of the present invention generally relate to a system used to form solar cell devices using processing modules adapted to perform one or more processes in the formation of the solar cell devices. In one embodiment, the system is adapted to form thin film solar cell devices by accepting a large unprocessed substrate and performing multiple deposition, material removal, cleaning, sectioning, bonding, and various inspection and testing processes to form multiple complete, functional, and tested solar cell devices that can then be shipped to an end user for installation in a desired location to generate electricity. In one embodiment, the system provides inspection of solar cell devices at various levels of formation, while collecting and using metrology data to diagnose, tune, or improve production line processes during the manufacture of solar cell devices.
摘要翻译：本发明的实施例一般涉及使用适于在太阳能电池器件的形成中执行一个或多个工艺的处理模块来形成太阳能电池器件的系统。在一个实施例中，该系统适于通过接受大的未处理衬底并执行多次沉积，材料去除，清洁，切片，结合以及各种检查和测试过程来形成薄膜太阳能电池器件，以形成多个完整，功能和测试然后太阳能电池装置可以运送到最终用户以安装在期望的位置以发电。在一个实施例中，系统提供在各种形成水平的太阳能电池装置的检查，同时收集和使用计量数据来诊断，调整或改进在制造太阳能电池装置期间的生产线工艺。

4. 发明申请

US20090104342A1 PHOTOVOLTAIC FABRICATION PROCESS MONITORING AND CONTROL USING DIAGNOSTIC DEVICES 审中-公开
标题翻译：使用诊断设备的光伏制造过程监控和控制
公开(公告)号：US20090104342A1
公开(公告)日：2009-04-23
申请号：US12212594
申请日：2008-09-17
申请人： Dapeng Wang , Michel R. Frei , Tzay-Fa (Jeff) Su , Vicky Svidenko , Gregg S. Higashi
发明人： Dapeng Wang , Michel R. Frei , Tzay-Fa (Jeff) Su , Vicky Svidenko , Gregg S. Higashi
IPC分类号： B05D5/12 , B05C9/12 , G01R31/26
CPC分类号： H01L31/186 , B23K26/0622 , B23K26/082 , B23K26/36 , B23K26/40 , B23K2101/40 , B23K2103/50 , Y02E10/50 , Y02P70/521
摘要： The formation of diagnostic devices on the same substrate used to fabricate a photovoltaic (PV) cell is described. Such devices, also referred to as process diagnostic vehicles (PDVs), are configured for in-line monitoring of electrical characteristics of PV cell features and are formed on the substrate using the same process steps for PV cell fabrication. The data collected via the PDVs can be used to tune or optimize subsequent PV cell fabrication, i.e., used as feedback for the fabrication process. Alternatively, the data collected via PDVs can be fed forward in the fabrication process, so that later process steps performed on a PV cell substrate can be modified to compensate for issues detected on the PV cell substrate via the PDVs.
摘要翻译：描述了用于制造光伏（PV）电池的同一衬底上的诊断装置的形成。也称为过程诊断车辆（PDV）的这种装置被配置为在线监测PV电池特征的电特性，并且使用与PV电池制造相同的工艺步骤在衬底上形成。通过PDV收集的数据可用于调整或优化随后的PV电池制造，即用作制造工艺的反馈。或者，可以通过PDV收集的数据在制造过程中向前馈送，使得可以修改在PV电池基板上执行的后续处理步骤，以经由PDV来补偿在PV电池基板上检测到的问题。

5. 发明申请

US20090077804A1 PRODUCTION LINE MODULE FOR FORMING MULTIPLE SIZED PHOTOVOLTAIC DEVICES 审中-公开
标题翻译：用于形成多个大小的光伏器件的生产线模块
公开(公告)号：US20090077804A1
公开(公告)日：2009-03-26
申请号：US12201840
申请日：2008-08-29
申请人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G.J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J.B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L31/18 , H01L21/304 , B26F3/00
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.
摘要翻译：本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

6. 发明授权

US08225496B2 Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated 失效
标题翻译：由多个自动模块和工具组成的自动化集成太阳能电池生产线，包括用于固化已层压的太阳能装置的高压釜
公开(公告)号：US08225496B2
公开(公告)日：2012-07-24
申请号：US12202199
申请日：2008-08-29
申请人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G. J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J. B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
发明人： Robert Z. Bachrach , Yong-Kee Chae , Soo Young Choi , Nicholas G. J. De Vries , Yacov Elgar , Eric A. Englhardt , Michel R. Frei , Charles Gay , Parris Hawkins , Choi (Gene) Ho , James Craig Hunter , Penchala N. Kankanala , Liwei Li , Wing Hoo (Hendrick) Lo , Danny Cam Toan Lu , Fang Mei , Stephen P. Murphy , Srujal (Steve) Patel , Matthew J. B. Saunders , Asaf Schlezinger , Shuran Sheng , Tzay-Fa (Jeff) Su , Jeffrey S. Sullivan , David Tanner , Teresa Trowbridge , Brice Walker , John M. White , Tae K. Won
IPC分类号： H01L51/44 , H01L51/48 , H01L21/768 , H01L31/072
CPC分类号： H01L21/67236 , B23K26/364 , B26F3/002 , B26F3/004 , B65G49/064 , B65G2249/02 , B65G2249/04 , C03B33/03 , C03B33/033 , H01L21/67132 , H01L21/67712 , H01L21/67715 , H01L21/67721 , H01L21/67727 , H01L21/6776 , H01L31/022425 , H01L31/03921 , H01L31/0504 , H01L31/075 , H02S50/00 , H02S50/10 , Y02E10/548 , Y02P40/57 , Y10T29/49002 , Y10T29/49355 , Y10T29/5196 , Y10T29/53113 , Y10T29/5313 , Y10T29/5317 , Y10T29/53187 , Y10T29/53365 , Y10T29/53417 , Y10T225/10 , Y10T225/325 , Y10T225/329
摘要： The present invention generally relates to a system that can be used to form a photovoltaic device, or solar cell, using processing modules that are adapted to perform one or more steps in the solar cell formation process. The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.
摘要翻译：本发明一般涉及一种可用于形成光伏器件或太阳能电池的系统，该系统使用适于在太阳能电池形成过程中执行一个或多个步骤的处理模块。自动化太阳能电池制造厂通常是用于形成太阳能电池器件的自动化处理模块和自动化设备的布置。因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成太阳能电池装置。

7. 发明申请

US20090287446A1 PHOTOVOLTAIC CELL REFERENCE MODULE FOR SOLAR TESTING 审中-公开
标题翻译：用于太阳能测试的光电池参考模块
公开(公告)号：US20090287446A1
公开(公告)日：2009-11-19
申请号：US12428195
申请日：2009-04-22
申请人： Dapeng Wang , Michel R. Frei , Tzay-Fa Su , David Tanner
发明人： Dapeng Wang , Michel R. Frei , Tzay-Fa Su , David Tanner
IPC分类号： G06F19/00 , H01L31/18 , G01R31/00
CPC分类号： H01L31/042 , H01L31/02167 , H01L31/048 , H02S50/10 , Y02E10/50
摘要： The present invention generally includes an apparatus and method of forming a reference module device that is able to deliver a repeatable and desirable amount of power that does not degrade or change over time. The reference module can be used to help test and calibrate various testing equipment used in the production of a photovoltaic device that may be formed in a solar cell fab. The solar cell fab is generally an arrangement of processing modules and automation equipment that is used to form solar cell devices.
摘要翻译：本发明通常包括一种形成参考模块装置的装置和方法，所述装置和方法能够递送不会劣化或随时间改变的可重复且期望的功率量。参考模块可用于帮助测试和校准在太阳能电池制造中可能形成的光伏器件生产中使用的各种测试设备。太阳能电池制造厂通常是用于形成太阳能电池装置的处理模块和自动化设备的布置。

8. 发明授权

US5942766A Article and method for in-process testing of RF products 失效
标题翻译： RF产品过程测试的条款和方法
公开(公告)号：US5942766A
公开(公告)日：1999-08-24
申请号：US932001
申请日：1997-09-17
申请人： Michel R. Frei
发明人： Michel R. Frei
IPC分类号： H01L23/544 , H01L23/58
CPC分类号： H01L22/32 , H01L22/34 , H01L2924/3011
摘要： A wafer configured for in-process electrical testing is disclosed. According to the invention, a single RF-device monitor is disposed partially in a first street and partially in a second street orthogonal to the first street, between four adjacent dies present on a wafer. With such an arrangement, streets having a width of 100 microns and less are suitable for accomodating a RF-device monitor having a ground-signal configuration. As a result, less space is sacrificed for device monitors than in prior art wafers, thereby increasing the amount of wafer area available for circuitry.
摘要翻译：公开了一种配置用于在线电气测试的晶圆。根据本发明，单个RF设备监视器部分地设置在第一街道中，部分地设置在与第一街道正交的第二街道中，存在于晶片上的四个相邻裸片之间。通过这样的布置，具有100微米或更小的宽度的街道适合于容纳具有接地信号配置的RF设备监视器。结果，对于设备监视器而言，牺牲了比现有技术的晶片少的空间，从而增加了可用于电路的晶片面积的数量。

9. 发明申请

US20130109133A1 REAR-POINT-CONTACT PROCESS OR PHOTOVOLTAIC CELLS 审中-公开
标题翻译：后点接触过程或光伏电池
公开(公告)号：US20130109133A1
公开(公告)日：2013-05-02
申请号：US13651221
申请日：2012-10-12
申请人： Michel R. Frei , Hemant P. Mungekar , Hari K. Ponnekanti
发明人： Michel R. Frei , Hemant P. Mungekar , Hari K. Ponnekanti
IPC分类号： H01L31/02
CPC分类号： H01L31/02167 , H01L31/022425 , H01L31/068 , H01L31/18 , Y02E10/547
摘要： Embodiments of the invention generally relate to methods for performing rear-point-contact processes on substrates, particularly solar cell substrates. The methods generally include disposing a substrate on a substrate support which functions as a mask during deposition of a passivation layer on a back surface of the substrate. A process gas is introduced to an area between the back surface of the substrate and the substrate support in order to deposit the passivation layer on the back surface of the substrate. The deposited passivation layer has openings therethrough in order to facilitate electrical contact of the substrate with a metallization layer subsequently formed over the passivation layer. The passivation layer is formed without requiring a separate patterning and etching process of the passivation layer.
摘要翻译：本发明的实施例一般涉及在衬底，特别是太阳能电池衬底上执行背点接触工艺的方法。所述方法通常包括在衬底的背面上沉积钝化层的过程中将衬底设置在衬底支撑体上，其用作掩模。将工艺气体引入到衬底的背面和衬底支撑件之间的区域中，以便将钝化层沉积在衬底的背面上。沉积的钝化层具有穿过其的开口，以便于衬底与随后在钝化层上形成的金属化层的电接触。形成钝化层，而不需要钝化层的单独图案化和蚀刻工艺。

10. 发明申请

US20100052706A1 CONSISTANT AND QUANTITATIVE METHOD FOR TCO DELAMINATION EVALUATION 审中-公开
标题翻译： TCO分层评估的一致和量化方法
公开(公告)号：US20100052706A1
公开(公告)日：2010-03-04
申请号：US12548608
申请日：2009-08-27
申请人： LIZHONG SUN , Michel R. Frei
发明人： LIZHONG SUN , Michel R. Frei
IPC分类号： G01R31/26
CPC分类号： H01L31/1884 , H01L31/0392 , Y02E10/50
摘要： A method and apparatus for manufacturing photovoltaic cells is provided. In one embodiment, a method for evaluating transparent conductive oxide (TCO) delamination from a substrate is provided. The method comprises providing a glass substrate with a TCO film laminated on a first surface of the glass substrate, depositing a metal layer on a second surface of the glass substrate opposite the first surface, heating the substrate while applying a bias to the substrate, cooling the substrate in a humidity controlled environment for a fixed time period, dividing the TCO film into a plurality of electrically insulated channels using a laser scribing process, and measuring a resistance of each of the plurality of electrically insulated channels.
摘要翻译：提供了一种用于制造光伏电池的方法和装置。在一个实施例中，提供了一种用于从基板评估透明导电氧化物（TCO）分层的方法。该方法包括：在玻璃基板的第一表面上提供层叠有TCO薄膜的玻璃基板，在与第一表面相对的玻璃基板的第二表面上沉积金属层，在对基板施加偏压的同时加热基板，冷却所述基板在恒湿环境下固定时间段，使用激光划线工艺将所述TCO膜分成多个电绝缘通道，以及测量所述多个电绝缘通道中的每一个的电阻。

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