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    • 1. 发明申请
    • Image-drawing device and image-drawing method
    • 图像绘图装置和图像绘制方法
    • US20050052708A1
    • 2005-03-10
    • US10895425
    • 2004-07-21
    • Yuji ShimoyamaTakeshi FujiiDaisuke Nakaya
    • Yuji ShimoyamaTakeshi FujiiDaisuke Nakaya
    • B41J2/44B41J2/445B41J2/45B41J2/455B41J2/47G02B27/18G02F1/13G03F7/20H04N1/04H04N1/10H04N1/195
    • H04N1/0408H04N1/0402H04N1/0458H04N1/1008H04N1/19505
    • An image-drawing device, which carries out image-drawing on the basis of image-drawing data, has image-drawing heads which are moved relatively in a predetermined scanning direction along an image-drawing surface. The image-drawing heads have a large number of image-drawing elements lined-up two-dimensionally within a plane which is parallel to the image-drawing surface. The straight lines along which the plural image-drawing elements are lined-up are inclined, with respect to the scanning direction, at a predetermined inclination angle such that an image-drawing magnification has an effective value after a decimal point. A data allocating unit allocates the image-drawing data to the respective image-drawing elements at predetermined timings corresponding to a resolution determined in accordance with the image-drawing magnification. In this way, resolution in the scanning direction can be increased without making a scanning speed of the image-drawing heads slower or making a modulation speed of the image-drawing elements faster.
    • 基于图像数据执行图像的图像绘制装置具有沿着图像绘制表面沿预定的扫描方向相对移动的图像绘制头。 图像绘制头具有在平行于图像绘制表面的平面内二维排列的大量图像绘制元件。 多个图像绘制元件沿其排列的直线相对于扫描方向以预定倾斜角度倾斜,使得图像绘制倍数在小数点后具有有效值。 数据分配单元以与根据图像绘制倍率确定的分辨率对应的预定定时将图像绘制数据分配给各个图像绘制元素。 以这种方式,可以增加扫描方向上的分辨率,而不会使得图像绘制头的扫描速度变慢或使得图像绘制元件的调制速度更快。
    • 3. 发明授权
    • Image-drawing device and image-drawing method
    • 图像绘图装置和图像绘制方法
    • US07339602B2
    • 2008-03-04
    • US10895425
    • 2004-07-21
    • Yuji ShimoyamaTakeshi FujiiDaisuke Nakaya
    • Yuji ShimoyamaTakeshi FujiiDaisuke Nakaya
    • B41J2/45B41J2/455G03B27/10G03G15/04
    • H04N1/0408H04N1/0402H04N1/0458H04N1/1008H04N1/19505
    • An image-drawing device, which carries out image-drawing on the basis of image-drawing data, has image-drawing heads which are moved relatively in a predetermined scanning direction along an image-drawing surface. The image-drawing heads have a large number of image-drawing elements lined-up two-dimensionally within a plane which is parallel to the image-drawing surface. The straight lines along which the plural image-drawing elements are lined-up are inclined, with respect to the scanning direction, at a predetermined inclination angle such that an image-drawing magnification has an effective value after a decimal point. A data allocating unit allocates the image-drawing data to the respective image-drawing elements at predetermined timings corresponding to a resolution determined in accordance with the image-drawing magnification. In this way, resolution in the scanning direction can be increased without making a scanning speed of the image-drawing heads slower or making a modulation speed of the image-drawing elements faster.
    • 基于图像数据执行图像的图像绘制装置具有沿着图像绘制表面沿预定的扫描方向相对移动的图像绘制头。 图像绘制头具有在平行于图像绘制表面的平面内二维排列的大量图像绘制元件。 多个图像绘制元件沿其排列的直线相对于扫描方向以预定倾斜角度倾斜,使得图像绘制倍数在小数点后具有有效值。 数据分配单元以与根据图像绘制倍率确定的分辨率对应的预定定时将图像绘制数据分配给各个图像绘制元素。 以这种方式,可以增加扫描方向上的分辨率,而不会使得图像绘制头的扫描速度变慢或使得图像绘制元件的调制速度更快。
    • 9. 发明申请
    • Pattern Forming Process
    • 图案形成过程
    • US20080113302A1
    • 2008-05-15
    • US11597741
    • 2005-05-25
    • Masanobu TakashimaHiromi IshikawaYuji Shimoyama
    • Masanobu TakashimaHiromi IshikawaYuji Shimoyama
    • G03F7/207
    • G03F7/70291G03F7/70275H05K3/0082
    • The present invention aims to provide a pattern forming process which allows efficiently, highly precisely forming of a permanent pattern such as interconnection patterns and also allows achieving both tent property and resolution at high level. The pattern forming process includes laminating a photosensitive layer on a substrate to be processed in a pattern forming material which comprises at least the photosensitive layer, and exposing two or more arbitrarily selected regions in the photosensitive layer with light of a different amount of energy, wherein a laser beam emitted from a light irradiating unit having ‘n’ imaging portions receiving light from a light irradiating unit and outputting the light is modulated before the photosensitive layer is exposed with the laser beam through a microlens array in which microlenses each having a non-spherical surface capable of compensating the aberration due to distortion of output surfaces of the imaging portions are arrayed.
    • 本发明的目的在于提供一种图案形成方法,其能够高效地,高度精确地形成诸如互连图案的永久性图案,并且还能够实现高水平的帐篷性能和分辨率。 图案形成工艺包括在至少包含感光层的图案形成材料中将感光层层压在待加工的基板上,并且用不同能量的光曝光感光层中两个或多个任意选择的区域,其中 在具有从光照射单元接收光并输出光的具有'n'个成像部分的光照射单元发射的激光束在激光束通过微透镜阵列曝光之前被调制,微透镜阵列中, 排列能够补偿由摄像部的输出面的畸变引起的像差的球面。