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    • 5. 发明授权
    • Light scanning device
    • 光扫描装置
    • US5535042A
    • 1996-07-09
    • US261945
    • 1994-06-17
    • Norihisa Takada
    • Norihisa Takada
    • G02B26/10G02B26/08
    • G02B26/10
    • Corrective signals for canceling out a dynamic deformation of the reflecting surface of a rotary scanning mirror are applied to X and Z electrodes of an electro-optic lens. Based on the supplied corrective signals, the electro-optic lens controls the refractive index of a light-transmissive element to refract a laser beam in a direction to eliminate an excessively converged or diverged condition of the laser beam due to the dynamic deformation of the reflecting surface of the rotary mirror. The spatial vector of the corrective signals supplied to the electro-optic lens rotates in synchronism with the rotation of the rotary scanning mirror. Therefore, the laser beam which passes through the electro-optic lens and is reflected by the reflecting surface forms a beam spot on a film, which stays focused at all times irrespective of the angular displacement of the rotary scanning mirror.
    • 用于消除旋转扫描反射镜的反射面的动态变形的纠正信号被施加到电光透镜的X和Z电极。 基于提供的校正信号,电光透镜控制透光元件的折射率以折射激光束的方向,以消除由于反射的动态变形引起的激光束的过度收敛或发散的状态 旋转镜面。 提供给电光透镜的校正信号的空间矢量与旋转扫描镜的旋转同步旋转。 因此,穿过电光透镜并被反射表面反射的激光束在膜上形成光斑,所有的光斑都始终聚焦在一起,而与旋转扫描镜的角位移无关。
    • 9. 发明授权
    • Exposure device
    • 曝光装置
    • US07184125B2
    • 2007-02-27
    • US11385694
    • 2006-03-22
    • Norihisa Takada
    • Norihisa Takada
    • G03B27/54
    • G03B27/54G03F7/70258G03F7/70275G03F7/70291
    • A light beam emitted from a light source passes through a spatial light modulation device, at which a plurality of unit elements for respectively modulating incident light beam are two-dimensionally arrayed, and a microlens array, at which a plurality of microlenses corresponding to the unit elements are arrayed, and is focused on an exposure surface. A four-part detector, which is structured by four diodes, is disposed on the exposure surface so as to correspond to four pixels which are present at one corner of the exposure area. Relative mispositioning between the spatial light modulation device and the microlens array generates a difference in respective detection signals of the four diodes. Thus, an offset between the spatial light modulation device and the microlenses can be detected. Positional adjustment of the microlens array is performed on the basis of a detected offset amount.
    • 从光源发射的光束通过空间光调制装置,在该空间光调制装置中,用于分别调制入射光束的多个单位元件被二维排列,并且在该微透镜阵列处,与该单元对应的多个微透镜 元件被排列,并且聚焦在曝光表面上。 由四个二极管构成的四部分检测器设置在曝光表面上,以对应于存在于曝光区域的一个角落处的四个像素。 空间光调制器件和微透镜阵列之间的相对错位产生四个二极管的相应检测信号的差异。 因此,可以检测空间光调制装置和微透镜之间的偏移。 基于检测到的偏移量进行微透镜阵列的位置调整。